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ZnIn2S4 was prepared by urea-thermal synthesis method for photocatalytic hydrogen evolution 采用尿素-热合成法制备了ZnIn2S4光催化析氢
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-24 DOI: 10.1016/j.vacuum.2025.115046
Guanjun Chen , Dong Yang , Jin Zhang , Qinchuan Zhu , Guoyu Ren , Hao Tian , Ji Lei , Xianzhu Zhuang , Jianfeng Huang , Lixiong Yin , Xingang Kong
In this study, we developed a urea-thermal synthesis method featuring simple operation, and successfully prepared pure-phase ZnIn2S4 materials by regulating different holding durations. The experimental results showed that at a reaction temperature of 180 °C, only 2 h of heat preservation is required to obtain ZnIn2S4 particles that completely match the standard card. All samples prepared with different reaction durations exhibited excellent photocatalytic activity. Beyond developing a simplified synthetic route for ZnIn2S4 photocatalysts, this work offers new research approach to the synthesis and application of photocatalytic materials.
在本研究中,我们开发了一种操作简单的脲热合成方法,并通过调节不同的保温时间成功制备了纯相ZnIn2S4材料。实验结果表明,在180℃的反应温度下,仅需保温2 h即可获得完全符合标准卡的ZnIn2S4颗粒。不同反应时间制备的样品均表现出优异的光催化活性。除了开发了一种简化的ZnIn2S4光催化剂合成路线外,本工作还为光催化材料的合成和应用提供了新的研究途径。
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引用次数: 0
Investigation of small-angle SiC ICP etching assisted by optical emission spectroscopy diagnostics 发射光谱诊断辅助下小角度SiC ICP刻蚀的研究
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-24 DOI: 10.1016/j.vacuum.2025.115050
Dengwen Yuan , Yu Zhong , Chuibang Jia , Zedong Liu , Yaxin Li , Jingjing Cai , Rui Zhang , Mingsheng Xu , Xiangang Xu , Jisheng Han
Small-angle etching of SiC is widely applied in the fabrication of advanced power and optoelectronic devices. Therefore, this paper presents a method for forming small-angle trenches with high surface quality on 4H-SiC by inductively coupled plasma (ICP) etching. By combining optical emission spectroscopy (OES) technique, the effects of ICP power, RF power and the O2 ratio in the SF6/O2 gas mixture on the SiC etch angle and surface roughness were investigated. Our results suggest that the O2 ratio plays the dominant role among the three factors. Based on the analysis of characteristic peaks in OES, a model parameter K was established for the first time which exhibits a strong nonlinear exponential correlation with the SiC etch angle. This enables in-situ estimation of the etch angle without requiring additional complex measurements. Finally, the SiC avalanche photodiode (APD) was fabricated under the optimal etching condition. The device achieves a dark current on the order of pA and a maximum gain exceeding 106. This study provides key insights for the development and fabrication of small-angle beveled SiC devices with simplified processes.
SiC的小角度蚀刻技术在先进的功率和光电器件制造中有着广泛的应用。因此,本文提出了一种在4H-SiC上采用电感耦合等离子体(ICP)刻蚀形成高表面质量小角沟槽的方法。结合发射光谱(OES)技术,研究了ICP功率、RF功率和SF6/O2混合气体中O2比对SiC刻蚀角和表面粗糙度的影响。我们的研究结果表明,在这三个因素中,氧比起主导作用。通过对OES特征峰的分析,首次建立了与SiC蚀刻角呈强非线性指数相关的模型参数K。这使蚀刻角的原位估计,而不需要额外的复杂的测量。最后,在最佳蚀刻条件下制备了SiC雪崩光电二极管(APD)。该器件实现了pA数量级的暗电流和超过106的最大增益。该研究为小角度斜面SiC器件的开发和制造提供了关键的见解。
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引用次数: 0
Prestrike characteristics and mechanism of double-break vacuum circuit breakers under high-frequency capacitive inrush current 高频电容涌流下双断真空断路器的预击特性及机理
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-23 DOI: 10.1016/j.vacuum.2025.115048
Jing Yan , Yun Geng , Hannan Shan , Yiwen Chen , Yingsan Geng , Zhiyuan Liu
This paper presents a systematic experimental investigation into the prestrike phenomena and underlying mechanisms in double-break vacuum circuit breakers during capacitive switching operations. The study focuses on the prestrike characteristics under high-frequency inrush currents of 5 kA and 20 kA. It innovatively elucidates the influence of inrush current amplitude on key parameters, including the prestrike gap length, electric field strength, inrush current chopping behavior, arcing time, and field emission properties of the contacts. Experimental results demonstrate that a high-amplitude inrush current (20 kA) significantly increases the prestrike gap length (with the d90 value increasing by approximately 2 mm) and reduces its dispersion (by up to 40 %) compared to the 5 kA condition. Furthermore, this condition reduces the frequency of inrush current chopping but prolongs the arcing time. Additionally, the high-energy inrush current leads to a notable increase in the field enhancement factor of the contact surfaces, indicating more severe surface degradation. This research provides crucial experimental evidence and theoretical support for the optimized design and engineering application of double-break vacuum circuit breakers in phase-controlled switching.
本文对双开真空断路器电容开关过程中的预击现象及其机理进行了系统的实验研究。重点研究了5 kA和20 kA高频涌流下的预击特性。创新性地阐述了冲击电流幅值对触点预击间隙长度、电场强度、冲击电流斩波行为、电弧时间和场发射特性等关键参数的影响。实验结果表明,与5 kA条件相比,高振幅浪涌电流(20 kA)显著增加了预击间隙长度(d90值增加了约2 mm),并降低了其色散(高达40%)。此外,该条件降低了浪涌斩波频率,但延长了起弧时间。此外,高能涌流导致接触面的场增强因子显著增加,表明接触面劣化更加严重。该研究为相控开关双开真空断路器的优化设计和工程应用提供了重要的实验依据和理论支持。
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引用次数: 0
Enhanced electrical transport and thermoelectric performance of nanostructured Al-doped ZnO thin films grown by pulsed laser deposition 脉冲激光沉积制备掺杂al纳米ZnO薄膜的电输运和热电性能
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-23 DOI: 10.1016/j.vacuum.2025.115033
Vasudevan Jayaseelan , Navaneethan Mani , Senthil Kumar Eswaran
Development of highly efficient transparent oxide thermoelectric thin films is key to next-generation eco-friendly, portable, and sustainable electronic devices. In this work, we report enhanced electrical transport and thermoelectric performance in ZnO and Al-doped ZnO thin films grown by pulsed laser deposition (PLD). Al doping resulted a 3-fold enhancement in electrical conductivity from 397 S cm−1 (undoped ZnO) to 1250 S cm−1 (Zn0.97Al0.03O). A maximum thermoelectric power factor of ∼1.2 mW m−1 K−2 for undoped ZnO and ∼0.77 mW m−1 K−2 for Zn0.97Al0.03O thin films was achieved at 750 K. The large power factor is attributed to a synergistic effect of improved electrical conductivity, arising from native oxygen vacancy defects and substitutional Al3+ donors, together with higher Seebeck coefficients associated with dominant acoustic phonon scattering. These findings demonstrate the potential of Al-doped ZnO thin films as promising candidates for high-performance, transparent solid-state thermoelectric devices.
高效透明氧化物热电薄膜的开发是下一代环保、便携和可持续电子设备的关键。在这项工作中,我们报道了通过脉冲激光沉积(PLD)生长的ZnO和al掺杂ZnO薄膜的电输运和热电性能的增强。Al掺杂导致导电率从397 S cm−1(未掺杂ZnO)提高到1250 S cm−1 (zn0.97 al0.030),提高了3倍。在750 K时,未掺杂ZnO薄膜的最大热电功率因子为~ 1.2 mW m−1 K−2,zn0.97 al0.030薄膜的最大热电功率因子为~ 0.77 mW m−1 K−2。较大的功率因数归因于由天然氧空位缺陷和取代的Al3+供体引起的电导率改善的协同效应,以及与主要声子散射相关的较高塞贝克系数。这些发现证明了al掺杂ZnO薄膜作为高性能,透明固态热电器件的有希望的候选者的潜力。
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引用次数: 0
Flow field dynamics and efficiency-energy response of aviation double-acting liquid ring vacuum pump under variable altitude conditions 变海拔条件下航空双作用液环真空泵流场动力学及效率-能量响应
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-23 DOI: 10.1016/j.vacuum.2025.115047
Xin Li , Wenqiang Li , Yinhui Kan , Lingfei Xiao , Zhifeng Ye
Liquid ring vacuum pumps show potential for aircraft fuel systems to enhance the self-priming capability of main impeller pumps but research on characteristics of double-acting liquid ring vacuum pumps and their aviation applications remain extremely limited. To investigate the internal flow field and external characteristics of an aviation double-acting high-speed fuel liquid ring vacuum pump at different flight altitudes, a combined approach of experiment and multiphase flow simulation was adopted. Results indicate that numerical simulations of flow rate and power consumption under various operating conditions generally align with experimental trends. Hydraulic losses arising from complex unsteady gas-liquid two-phase flow are identified as a significant factor affecting its energy consumption and efficiency. The gas-liquid two-phase flow field within the double-acting liquid ring vacuum pump exhibits central symmetry with the vorticity intensity of gas phase exceeding that of liquid phase. Pressure within the pump fluctuates periodically, revealing strong rotor-stator interaction effects and frequency domain characteristics of pressure pulsations vary significantly across different sections. Flow field feature and performance metrics are closely linked and the hydraulic efficiency is related to compression work state and energy dissipation. As altitude increases, the outlet initial region state gradually transitions from over-compression to under-compression with additional efficiency losses caused by over-compression, outlet backflow, and clearance leakage. Total entropy generation exhibits a continuous increase, while both flow rate and efficiency demonstrate a trend of initially rising slowly followed by a rapid decline, with the peak efficiency from both experiment and simulation occurs at the 5 km altitude condition.
液环真空泵在飞机燃油系统中具有提高主叶轮泵自吸能力的潜力,但对双作用液环真空泵特性及其航空应用的研究仍然非常有限。为了研究航空双作用高速燃油液环真空泵在不同飞行高度下的内流场和外流特性,采用实验与多相流仿真相结合的方法。结果表明,不同工况下的流量和功耗的数值模拟与实验结果基本一致。复杂非定常气液两相流产生的水力损失是影响其能耗和效率的重要因素。双作用液环真空泵内气液两相流场呈现中心对称性,气相涡度强度大于液相涡度强度。泵内压力周期性波动,显示出强烈的动静相互作用效应,压力脉动的频域特征在不同截面上变化显著。流场特征与性能指标密切相关,水力效率与压缩工作状态和耗能有关。随着海拔高度的升高,出口初始区域状态逐渐由过压缩过渡到欠压缩,同时由于过压缩、出口回流和间隙泄漏造成额外的效率损失。总熵产持续增加,流量和效率均呈现先缓慢上升后快速下降的趋势,实验和模拟的效率峰值均出现在海拔5 km的条件下。
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引用次数: 0
Effects of Nb and Nb-H Co-doping on the Electrical Properties of β-Ga2O3 Nb和Nb- h共掺杂对β-Ga2O3电性能的影响
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-23 DOI: 10.1016/j.vacuum.2025.115043
Rui Wu , Lingjia Meng , Jinxiang Deng , Yiming Shi , Xue Meng , Jiawei Xu , Weiman Liu , Weijian Zhai , Junhua Meng , Le Kong , Xiaolei Yang
Nb and H co-doped Ga2O3 thin films were deposited on silicon (Si) and quartz substrates by RF magnetron sputtering, followed by a post-deposition annealing process. The study elucidated the synergistic effects of Nb and H doping on β-Ga2O3 formation. Nb doping promoted nucleation and growth, reduced grain boundary defects, suppressed non-radiative recombination, stabilized Ga3+, and inhibited oxygen vacancy (OV) formation. Concurrently, H passivated intrinsic OV by forming neutral complexes, thereby lowering active OV concentration. This dual doping strategy significantly enhanced electrical properties: carrier mobility increased from 1.6 to 18.9 cm2 V−1 s−1. Consequently, the Si/Nb-H-Ga2O3/Au MSM photodetector exhibited dramatically improved performance, with a photo-to-dark current ratio of 18.85 and a responsivity of 0.812 A/W at 20 V-representing 54-fold and 10-fold enhancements over the pristine Ga2O3 device, respectively. This work demonstrates the potential of Ga2O3 for developing high-power and high-efficiency electronic devices.
采用射频磁控溅射技术在硅(Si)和石英衬底上沉积Nb和H共掺杂Ga2O3薄膜,并进行沉积后退火处理。研究阐明了Nb和H掺杂对β-Ga2O3生成的协同作用。Nb掺杂促进晶核生长,减少晶界缺陷,抑制非辐射复合,稳定Ga3+,抑制氧空位(OV)形成。同时,H通过形成中性配合物钝化固有OV,从而降低活性OV浓度。这种双掺杂策略显著提高了电学性能:载流子迁移率从1.6 cm2 V−1 s−1增加到18.9 cm2 V−1 s−1。因此,Si/Nb-H-Ga2O3/Au MSM光电探测器表现出显著改善的性能,在20 v时光暗电流比为18.85,响应率为0.812 a /W,分别比原始Ga2O3器件提高了54倍和10倍。这项工作证明了Ga2O3在开发高功率和高效率电子器件方面的潜力。
{"title":"Effects of Nb and Nb-H Co-doping on the Electrical Properties of β-Ga2O3","authors":"Rui Wu ,&nbsp;Lingjia Meng ,&nbsp;Jinxiang Deng ,&nbsp;Yiming Shi ,&nbsp;Xue Meng ,&nbsp;Jiawei Xu ,&nbsp;Weiman Liu ,&nbsp;Weijian Zhai ,&nbsp;Junhua Meng ,&nbsp;Le Kong ,&nbsp;Xiaolei Yang","doi":"10.1016/j.vacuum.2025.115043","DOIUrl":"10.1016/j.vacuum.2025.115043","url":null,"abstract":"<div><div>Nb and H co-doped Ga<sub>2</sub>O<sub>3</sub> thin films were deposited on silicon (Si) and quartz substrates by RF magnetron sputtering, followed by a post-deposition annealing process. The study elucidated the synergistic effects of Nb and H doping on β-Ga<sub>2</sub>O<sub>3</sub> formation. Nb doping promoted nucleation and growth, reduced grain boundary defects, suppressed non-radiative recombination, stabilized Ga<sup>3+</sup>, and inhibited oxygen vacancy (O<sub>V</sub>) formation. Concurrently, H passivated intrinsic O<sub>V</sub> by forming neutral complexes, thereby lowering active O<sub>V</sub> concentration. This dual doping strategy significantly enhanced electrical properties: carrier mobility increased from 1.6 to 18.9 cm<sup>2</sup> V<sup>−1</sup> s<sup>−1</sup>. Consequently, the Si/Nb-H-Ga<sub>2</sub>O<sub>3</sub>/Au MSM photodetector exhibited dramatically improved performance, with a photo-to-dark current ratio of 18.85 and a responsivity of 0.812 A/W at 20 V-representing 54-fold and 10-fold enhancements over the pristine Ga<sub>2</sub>O<sub>3</sub> device, respectively. This work demonstrates the potential of Ga<sub>2</sub>O<sub>3</sub> for developing high-power and high-efficiency electronic devices.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"246 ","pages":"Article 115043"},"PeriodicalIF":3.9,"publicationDate":"2025-12-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145842094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Surface engineering on P-substrate Ge MOS device with in-situ low temperature H2 pre-trimming treatment 原位低温H2预切边处理p基Ge MOS器件的表面工程
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-23 DOI: 10.1016/j.vacuum.2025.115041
Dun-Bao Ruan , Kuei-Shu Chang-Liao , Hsin-I Yeh , Bo-Syun Syu , Chia-Chien Liu , Guan-Ting Liu , Chih-Wei Liu , Jia-Long Xiang , Ze-Fu Zhao , Kai-Jhih Gan
In order to suppress the interface and border trap generation, an in-situ low-temperature hydrogen (H2) pre-trimming treatment was applied on the germanium (Ge) substrate before an alloy-like hafnium nitride interfacial layer formation during the Ge MOS device fabrication. By systematically modulating H2 cycles, the influence of hydrogenation on surface roughness, oxygen vacancy, interface and border trap were investigated in details. Besides, the internal reaction mechanism and physical model were well studied by material analysis and electrical characterization. As a result, the Ge MOS device after 5 cycle H2 treatment exhibits the lowest surface roughness, oxygen vacancy, equivalent oxide thickness, interface trap density, border trap numbers, and best reliability characteristics. This work could provide a promising pathway for interface engineering in Ge MOS devices.
为了抑制界面和边界陷阱的产生,在锗(Ge)基板上进行了原位低温氢(H2)预处理,然后在锗(Ge)基板上形成类似合金的氮化铪界面层。通过系统调节H2循环,详细研究了加氢对表面粗糙度、氧空位、界面和边界陷阱的影响。此外,通过材料分析和电学表征对其内部反应机理和物理模型进行了深入研究。结果表明,经过5次循环H2处理后的Ge MOS器件具有最低的表面粗糙度、氧空位、等效氧化物厚度、界面陷阱密度、边界陷阱数和最佳的可靠性特性。这项工作为Ge MOS器件的界面工程提供了一条有前途的途径。
{"title":"Surface engineering on P-substrate Ge MOS device with in-situ low temperature H2 pre-trimming treatment","authors":"Dun-Bao Ruan ,&nbsp;Kuei-Shu Chang-Liao ,&nbsp;Hsin-I Yeh ,&nbsp;Bo-Syun Syu ,&nbsp;Chia-Chien Liu ,&nbsp;Guan-Ting Liu ,&nbsp;Chih-Wei Liu ,&nbsp;Jia-Long Xiang ,&nbsp;Ze-Fu Zhao ,&nbsp;Kai-Jhih Gan","doi":"10.1016/j.vacuum.2025.115041","DOIUrl":"10.1016/j.vacuum.2025.115041","url":null,"abstract":"<div><div>In order to suppress the interface and border trap generation, an in-situ low-temperature hydrogen (H<sub>2</sub>) pre-trimming treatment was applied on the germanium (Ge) substrate before an alloy-like hafnium nitride interfacial layer formation during the Ge MOS device fabrication. By systematically modulating H<sub>2</sub> cycles, the influence of hydrogenation on surface roughness, oxygen vacancy, interface and border trap were investigated in details. Besides, the internal reaction mechanism and physical model were well studied by material analysis and electrical characterization. As a result, the Ge MOS device after 5 cycle H<sub>2</sub> treatment exhibits the lowest surface roughness, oxygen vacancy, equivalent oxide thickness, interface trap density, border trap numbers, and best reliability characteristics. This work could provide a promising pathway for interface engineering in Ge MOS devices.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"246 ","pages":"Article 115041"},"PeriodicalIF":3.9,"publicationDate":"2025-12-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145842095","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of rare-earth (Er-La) composite addition on the microstructure and properties of a highly alloyed Al-Zn-Mg-Cu-Zr-Ti aluminum alloy 稀土(Er-La)复合添加剂对高合金化Al-Zn-Mg-Cu-Zr-Ti铝合金组织和性能的影响
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-23 DOI: 10.1016/j.vacuum.2025.115042
Qingshan Zhou, Deli Kong, Xiaojing Xu, Siyuan Yin
Rare earth multi-element microalloying is a crucial technique for enhancing the overall performance of Al-Zn-Mg-Cu-Zr-Ti alloys. This study proposes a technical approach involving the composite addition of low diffusion rate rare earth elements La and Er. This method has successfully reduced the size of nanograins and lattice mismatch, thereby significantly improving the comprehensive performance of the alloy. The results reveal that the combined addition of La and Er can induce the formation of Al3(Zr,Er,La) nanoparticles, whose average size and lattice misfit degree are significantly lower than those of Al3Zr nanoparticles in the base alloy. These Al3(Zr,Er,La) nanoparticles can effectively inhibit the recrystallization behavior during heat treatments, reducing the alloy's recrystallization fraction from 53.5 % to 42.8 % and refining the average grain size from 4.67 μm to 3.62 μm. Meanwhile, the Al3(Zr,Er,La) nanoparticles impede dislocation motion and increase the alloy's dislocation density; additionally, they enhance the nucleation rate of aging precipitates through the lattice misfit effect with the aluminum matrix, achieving the refinement and volume fraction increase of aging precipitates. Thus, the yield strength of the alloy has enhanced. Furthermore, the combined addition reduces the continuity of grain boundary precipitates (GBPs), enhancing the alloy's intergranular corrosion (IGC) resistance.
稀土多元素微合金化是提高Al-Zn-Mg-Cu-Zr-Ti合金综合性能的关键技术。本研究提出了一种低扩散率稀土元素La和Er的复合添加技术方法。该方法成功地减小了纳米颗粒的尺寸和晶格失配,从而显著提高了合金的综合性能。结果表明:La和Er的复合添加可诱导形成Al3(Zr,Er,La)纳米粒子,其平均尺寸和晶格失配度明显低于基体合金中的Al3Zr纳米粒子;在热处理过程中,Al3(Zr,Er,La)纳米颗粒能有效抑制合金的再结晶行为,使合金的再结晶率从53.5%降低到42.8%,平均晶粒尺寸从4.67 μm细化到3.62 μm。同时,Al3(Zr,Er,La)纳米颗粒阻碍了位错运动,增加了合金的位错密度;通过与铝基体的晶格错配效应,提高时效析出相的形核速率,实现时效析出相的细化和体积分数的提高。从而提高了合金的屈服强度。此外,复合添加降低了晶界相(GBPs)的连续性,提高了合金的抗晶间腐蚀能力。
{"title":"Effect of rare-earth (Er-La) composite addition on the microstructure and properties of a highly alloyed Al-Zn-Mg-Cu-Zr-Ti aluminum alloy","authors":"Qingshan Zhou,&nbsp;Deli Kong,&nbsp;Xiaojing Xu,&nbsp;Siyuan Yin","doi":"10.1016/j.vacuum.2025.115042","DOIUrl":"10.1016/j.vacuum.2025.115042","url":null,"abstract":"<div><div>Rare earth multi-element microalloying is a crucial technique for enhancing the overall performance of Al-Zn-Mg-Cu-Zr-Ti alloys. This study proposes a technical approach involving the composite addition of low diffusion rate rare earth elements La and Er. This method has successfully reduced the size of nanograins and lattice mismatch, thereby significantly improving the comprehensive performance of the alloy. The results reveal that the combined addition of La and Er can induce the formation of Al<sub>3</sub>(Zr,Er,La) nanoparticles, whose average size and lattice misfit degree are significantly lower than those of Al<sub>3</sub>Zr nanoparticles in the base alloy. These Al<sub>3</sub>(Zr,Er,La) nanoparticles can effectively inhibit the recrystallization behavior during heat treatments, reducing the alloy's recrystallization fraction from 53.5 % to 42.8 % and refining the average grain size from 4.67 μm to 3.62 μm. Meanwhile, the Al<sub>3</sub>(Zr,Er,La) nanoparticles impede dislocation motion and increase the alloy's dislocation density; additionally, they enhance the nucleation rate of aging precipitates through the lattice misfit effect with the aluminum matrix, achieving the refinement and volume fraction increase of aging precipitates. Thus, the yield strength of the alloy has enhanced. Furthermore, the combined addition reduces the continuity of grain boundary precipitates (GBPs), enhancing the alloy's intergranular corrosion (IGC) resistance.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"246 ","pages":"Article 115042"},"PeriodicalIF":3.9,"publicationDate":"2025-12-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145842102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Unraveling the role of DC pulsed bias in diamond nucleation on iridium: A coupled study of plasma diagnostics and interface engineering 揭示直流脉冲偏置在铱上金刚石成核中的作用:等离子体诊断和界面工程的耦合研究
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-22 DOI: 10.1016/j.vacuum.2025.115044
Junfeng Li, Bing Zhou, Jie Gao, Ang Li, Shengwang Yu
This study investigates the synergistic effects of electric fields, plasma dynamics, and interfacial processes in the hetero-nucleation of diamond through a specially designed DC pulsed forward bias-enhanced nucleation (DCP-BEN) approach. The nucleation process was monitored in real time using in-situ optical emission spectroscopy (OES), complemented by multi-scale ex-situ characterization to elucidate the underlying mechanisms. Through systematic modulation of the nucleation time, this work establishes its significant influence on both the plasma chemical environment and the morphological development of the Ir-diamond interface. An optimal nucleation window at 45 min was identified, facilitating the formation of self-organized nanogrooves (2–7 nm) and a low-mismatch Ir-diamond interface with an experimentally measured mismatch of approximately 4.7 %. This engineered interface exhibits a substantially reduced mismatch compared to the theoretical prediction (∼7.8 %) based on bulk lattice parameters, effectively suppressing interfacial dislocations and twin boundaries during subsequent epitaxy, and yielding a high diamond nucleus density of 109∼1010 cm−2. The ideal bias conditions were determined to be a field strength of ∼1.5 × 105 V/m and a plasma sheath thickness of ∼4 mm. A nucleation mechanism involving carbon enrichment, ion bombardment, and surface reconstruction is proposed, based on the synergistic interplay among the electric field, plasma, and interface. These findings provide crucial insights into the controlled synthesis of high-density diamond films on Ir substrates.
本研究通过一种特殊设计的直流脉冲正向偏置增强成核(DCP-BEN)方法,研究了电场、等离子体动力学和界面过程在金刚石异质成核中的协同效应。利用原位发射光谱(OES)实时监测成核过程,并辅以多尺度非原位表征来阐明潜在的机制。通过系统地调节成核时间,本工作确定了成核时间对等离子体化学环境和ir -金刚石界面形态发展的显著影响。确定了45 min的最佳成核窗口,有利于形成自组织的纳米沟槽(2-7 nm)和低失配的ir -金刚石界面,实验测量的失配率约为4.7%。与基于体晶格参数的理论预测(~ 7.8%)相比,该工程界面显示出大大减少的错配,在随后的外延过程中有效地抑制了界面位错和孪晶界,并产生了109 ~ 1010 cm−2的高金刚石核密度。确定理想的偏压条件为场强为~ 1.5 × 105 V/m,等离子体鞘层厚度为~ 4 mm。提出了一种基于电场、等离子体和界面协同作用的碳富集、离子轰击和表面重构的成核机制。这些发现为在Ir衬底上控制合成高密度金刚石薄膜提供了重要的见解。
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引用次数: 0
Growth dynamics and surface scaling of air-oxidized NiO thin films from sputtered Ni 溅射镍空气氧化NiO薄膜的生长动力学和表面结垢
IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-22 DOI: 10.1016/j.vacuum.2025.115039
Chandra Kumar , Monika Shrivastav , Jiten Yadav , Vikas Kashyap , Amit Kumar Gangawar , Arjun Kumawat , Harpreet Kaur , Kamlesh Yadav , Juan Luis Palma , Ram Pratap Yadav , Fernando Guzman , Kapil Saxena
Nickel oxide (NiO) thin films have emerged as pivotal materials for next-generation optoelectronic applications. In this work, we present a comprehensive investigation of the correlation between surface fractality, optical, electrical properties in NiO thin films, deposited by the magnetron sputtering at varying deposition times (50, 70, and 90 min). The evolution of surface morphology, quantified through power spectral density (PSD) based fractal analysis, revealed a progressive enhancement in surface complexity with deposition time, characterized by the fractal dimension (Df), ranges from 2.06 ± 0.02 to 2.24 ± 0.03. This trend reflects a transition from a kinetically limited to a diffusion-dominated growth regime. Concurrently, the roughness exponent (α) decreased from 0.94 to 0.76, whereas the growth exponent (β ≈ 0.27) remained nearly invariant, suggesting a self-affine surface evolution governed by competitive aggregation and relaxation mechanisms. Optical spectroscopy confirmed a strong interplay between the fractal scaling parameters and the optical properties. The optical band gap (Eg) exhibited a systematic redshift from 3.79 eV to 3.68 eV as Df increased, indicating that enhanced surface irregularity and nanoscale disorder facilitate localized states within the band structure. Electrical measurements further revealed a monotonic reduction in conductivity from 9 × 10−4 S cm−1 to 4 × 10−4 S cm−1 with increasing deposition time, consistent with charge carrier scattering induced by increased morphological irregularities. The relationship between fractal scaling parameters and electrical conductivity was validated using the Fal'ko–Efetov relation. The integrated structural, optical, and electrical analysis provides a mechanistic understanding of how fractal morphology governs the functional performance of NiO films. These findings highlight that controlled fractal growth in sputtered NiO enables the rational tuning of band gap and conductivity, offering a robust pathway to optimize p-type transparent electrodes and hole transport layers for high-performance optoelectronic, photovoltaic, and photoelectrochemical applications.
氧化镍(NiO)薄膜已成为下一代光电应用的关键材料。在这项工作中,我们全面研究了在不同沉积时间(50,70和90min)下磁控溅射沉积的NiO薄膜的表面分形,光学,电学性质之间的关系。基于功率谱密度(PSD)的分形分析表明,随着沉积时间的延长,表面复杂性逐渐增强,其分形维数(Df)范围为2.06±0.02 ~ 2.24±0.03。这一趋势反映了从动力限制型向扩散主导型增长体制的转变。同时,粗糙度指数(α)从0.94下降到0.76,而生长指数(β≈0.27)几乎保持不变,表明表面的自仿射演化受竞争聚集和弛豫机制的支配。光谱学证实了分形标度参数与光学性质之间有很强的相互作用。随着Df的增加,光学带隙(Eg)呈现出从3.79 eV到3.68 eV的系统红移,表明表面不规则性和纳米级无序性的增强促进了带结构内的局域化状态。电学测量进一步显示,随着沉积时间的增加,电导率从9 × 10−4 S cm−1单调降低到4 × 10−4 S cm−1,这与形貌不规则性增加引起的载流子散射一致。利用Fal 'ko-Efetov关系验证了分形标度参数与电导率之间的关系。综合结构,光学和电学分析提供了分形形态如何控制NiO薄膜功能性能的机制理解。这些发现强调了溅射NiO中可控的分形生长可以合理调节带隙和电导率,为优化高性能光电、光伏和光电化学应用的p型透明电极和空穴传输层提供了坚实的途径。
{"title":"Growth dynamics and surface scaling of air-oxidized NiO thin films from sputtered Ni","authors":"Chandra Kumar ,&nbsp;Monika Shrivastav ,&nbsp;Jiten Yadav ,&nbsp;Vikas Kashyap ,&nbsp;Amit Kumar Gangawar ,&nbsp;Arjun Kumawat ,&nbsp;Harpreet Kaur ,&nbsp;Kamlesh Yadav ,&nbsp;Juan Luis Palma ,&nbsp;Ram Pratap Yadav ,&nbsp;Fernando Guzman ,&nbsp;Kapil Saxena","doi":"10.1016/j.vacuum.2025.115039","DOIUrl":"10.1016/j.vacuum.2025.115039","url":null,"abstract":"<div><div>Nickel oxide (NiO) thin films have emerged as pivotal materials for next-generation optoelectronic applications. In this work, we present a comprehensive investigation of the correlation between surface fractality, optical, electrical properties in NiO thin films, deposited by the magnetron sputtering at varying deposition times (50, 70, and 90 min). The evolution of surface morphology, quantified through power spectral density (PSD) based fractal analysis, revealed a progressive enhancement in surface complexity with deposition time, characterized by the fractal dimension (D<sub>f</sub>), ranges from 2.06 ± 0.02 to 2.24 ± 0.03. This trend reflects a transition from a kinetically limited to a diffusion-dominated growth regime. Concurrently, the roughness exponent (α) decreased from 0.94 to 0.76, whereas the growth exponent (β ≈ 0.27) remained nearly invariant, suggesting a self-affine surface evolution governed by competitive aggregation and relaxation mechanisms. Optical spectroscopy confirmed a strong interplay between the fractal scaling parameters and the optical properties. The optical band gap (E<sub>g</sub>) exhibited a systematic redshift from 3.79 eV to 3.68 eV as D<sub>f</sub> increased, indicating that enhanced surface irregularity and nanoscale disorder facilitate localized states within the band structure. Electrical measurements further revealed a monotonic reduction in conductivity from 9 × 10<sup>−4</sup> S cm<sup>−1</sup> to 4 × 10<sup>−4</sup> S cm<sup>−1</sup> with increasing deposition time, consistent with charge carrier scattering induced by increased morphological irregularities. The relationship between fractal scaling parameters and electrical conductivity was validated using the Fal'ko–Efetov relation. The integrated structural, optical, and electrical analysis provides a mechanistic understanding of how fractal morphology governs the functional performance of NiO films. These findings highlight that controlled fractal growth in sputtered NiO enables the rational tuning of band gap and conductivity, offering a robust pathway to optimize p-type transparent electrodes and hole transport layers for high-performance optoelectronic, photovoltaic, and photoelectrochemical applications.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"246 ","pages":"Article 115039"},"PeriodicalIF":3.9,"publicationDate":"2025-12-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145885211","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Vacuum
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