Vacuum最新文献

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Numerical and experimental investigation on iron contamination of 200 mm semiconductor-grade CZ-Si by bubble-free layer of quartz crucible 石英坩埚无气泡层对 200 毫米半导体级 CZ-Si 铁污染的数值和实验研究

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-24 DOI: 10.1016/j.vacuum.2024.113668

The thickness of bubble-free (BF) layer of the quartz crucible is crucial for heat transfer during the crystal growth process of 200 mm semiconductor-grade CZ silicon. The effect of the BF layer thickness on the contamination of impurity Fe in the wafer was investigated through experimental and numerical simulations. The experimental results demonstrated that a crucible with a 3 mm BF layer (S1) exhibited a lower thermal conductivity (1.37 W/(K• m)) in comparison to a 6 mm BF layer (S2) with a thermal conductivity of 1.72 W/(K• m). Despite the S2 crucible requiring an additional 0.40 kW for thermal compensation, it resulted in a lower concentration of Fe impurities. Compared to S1, S2 crucible offered superior performance in stabilizing the distribution of O and C impurities, resulting in more uniform distribution and improved crystal quality. Simulations indicated that the utilization of S2 quartz crucibles had minimal effect on the velocity field of Ar gas but elevated the melt temperature, strengthened the Taylor-Proudman vortex beneath the crystal-melt interface and altered the flow direction of the secondary vortex. This study highlights the importance of crucible design in controlling the contamination of Fe impurities for the production of high-quality Si wafers.

在 200 毫米半导体级 CZ 硅的晶体生长过程中，石英坩埚无气泡（BF）层的厚度对传热至关重要。通过实验和数值模拟研究了无气泡层厚度对硅片中杂质铁污染的影响。实验结果表明，与热导率为 1.72 W/(K- m) 的 6 毫米 BF 层（S2）相比，3 毫米 BF 层（S1）坩埚的热导率较低（1.37 W/(K- m)）。尽管 S2 坩埚需要额外 0.40 kW 的热补偿，但其铁杂质浓度较低。与 S1 坩埚相比，S2 坩埚在稳定 O 和 C 杂质分布方面性能更优，因此分布更均匀，晶体质量更高。模拟结果表明，使用 S2 石英坩埚对氩气的速度场影响很小，但会提高熔体温度，加强晶体-熔体界面下的泰勒-普鲁曼涡流，并改变次级涡流的流动方向。这项研究强调了坩埚设计在控制铁杂质污染以生产高质量硅晶片方面的重要性。

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引用次数: 0

New insights into the influence mechanism of carbides on the localized corrosion of N80 carbon steel: Experiments and first-principles study 碳化物对 N80 碳钢局部腐蚀影响机制的新见解：实验和第一原理研究

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-24 DOI: 10.1016/j.vacuum.2024.113682

Carbides significantly influenced the corrosion behavior of N80 carbon steel. The specific types of carbides and their adsorption behavior at the interface with the steel matrix were particularly complex. This study comprehensively evaluated the impact of carbides on the localized corrosion of N80 steel using both computational and experimental techniques. The findings revealed that the predominant carbides in the steel were Fe₃C, with a potential difference of approximately 65.3 mV greater than that of the steel matrix, leading to preferential dissolution of the steel matrix. The corrosion film that formed on the steel surface was loose and porous, enriched with Cl-, and insufficient to effectively prevent the penetration of corrosive media. The work function relationship between Fe₃C and the steel matrix was Fe < Fe₃C, and O exhibited a higher adsorption energy on the Fe surface than on the Fe₃C surface. This resulted in a strong galvanic coupling corrosion effect between Fe₃C and the steel matrix. Fe₃C, acting as the cathodic phase in the galvanic corrosion process, accelerated the adsorption of O₂ on the steel surface, which in turn led to significant dissolution of the steel matrix. This process facilitated the nucleation of pits, ultimately resulting in the formation of stable pits on the surface.

碳化物对 N80 碳钢的腐蚀行为有很大影响。碳化物的具体类型及其在钢基体界面上的吸附行为尤为复杂。本研究利用计算和实验技术全面评估了碳化物对 N80 钢局部腐蚀的影响。研究结果表明，钢中最主要的碳化物是 Fe3C，其电位差比钢基体的电位差大约 65.3 mV，导致钢基体优先溶解。钢表面形成的腐蚀膜疏松多孔，富含 Cl-，不足以有效阻止腐蚀介质的渗透。Fe3C 与钢基体之间的功函数关系为 Fe < Fe3C，O 在 Fe 表面的吸附能高于在 Fe3C 表面的吸附能。这导致了 Fe3C 和钢基体之间强烈的电偶腐蚀效应。Fe3C 作为电化学腐蚀过程中的阴极相，加速了钢表面对 O2 的吸附，进而导致钢基体的大量溶解。这一过程促进了凹坑的成核，最终在表面形成稳定的凹坑。

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引用次数: 0

Performance and discharge characteristics of Applied–Field MPD thruster in accordance with ring magnet position 根据环形磁铁位置确定应用场 MPD 推进器的性能和放电特性

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-23 DOI: 10.1016/j.vacuum.2024.113674

The magnetic field has a significant impact on the performance and discharge characteristics of magnetoplasmadynamic (MPD) thrusters. A low-power MPD thruster with an operating power of 10 kW was developed, and its performance characteristics were examined by altering the applied magnetic field. The thrust increased from 92 mN to 310 mN, and specific impulse from 479 s to 1264 s, respectively, within the input power range of 4–10 kW. Spectral analysis of the plume revealed that the increase in performance was significantly affected by the ion current density rather than by the ion energy. Furthermore, the shape and flux density of the magnetic fields inside the discharge channel were altered by adjusting the position of the permanent magnets from z = 0 to −4 cm at 1 cm intervals relative to the alumina insulator inside the discharge channel. Consequently, the thrust increased by approximately 14–40 % at the specific magnetic field configuration with a ratio of B_r/B_z = 0.3, despite not being at the maximum magnetic field strength. The ratio of the radial to axial magnetic fields is strongly correlated with thruster performance and should be considered in optimizing design.

磁场对磁质动力（MPD）推进器的性能和放电特性有重大影响。我们开发了一种工作功率为 10 kW 的低功率 MPD 推进器，并通过改变外加磁场对其性能特征进行了研究。在 4-10 kW 的输入功率范围内，推力从 92 mN 增加到 310 mN，比冲从 479 秒增加到 1264 秒。羽流的频谱分析表明，性能的提高主要受离子电流密度而非离子能量的影响。此外，通过调整永久磁铁相对于放电通道内氧化铝绝缘体的位置，从 z = 0 厘米到 -4 厘米，每隔 1 厘米调整一次，放电通道内磁场的形状和磁通密度都发生了变化。因此，在 Br/Bz = 0.3 的特定磁场配置下，尽管没有达到最大磁场强度，推力却增加了约 14-40%。径向磁场与轴向磁场的比率与推进器的性能密切相关，在优化设计时应加以考虑。

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引用次数: 0

Bias voltage modulated electric transport properties in Fe65Co35/Hf0.5Zr0.5O2 films Fe65Co35/Hf0.5Zr0.5O2 薄膜中的偏置电压调制电输运特性

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-23 DOI: 10.1016/j.vacuum.2024.113675

We demonstrate the bias voltage modulated electric transport properties in Fe₆₅Co₃₅ (FeCo) films deposited on Hf_0.5Zr_0.5O₂ (HZO) films. Intrinsic multiferroicity have been characterized for the FeCo/HZO heterostructures by analyzing the ferroelectric polarizations and imaging the magnetic domains. We show that, upon the application of bias voltages on the FeCo/HZO heterostructures, the current-voltage (I-V) curves of FeCo films can be regulated, giving rise to different resistance states, enabled partly by strain-mediated magnetoelectric coupling effect. The strain coupling effect between HZO and FeCo films is elucidated by simulating the volumetric strain of the FeCo/HZO films under the action of applied voltages. Through additional analysis, the bias voltage modulated electric transport properties could also be linked with charge-mediated magnetoelectric coupling effect. We anticipate that our work will inspire further studies on low-power consumption and high-density electronic devices.

我们展示了沉积在 Hf0.5Zr0.5O2 (HZO) 薄膜上的 Fe65Co35 (FeCo) 薄膜的偏压调制电输运特性。通过分析铁电极化和磁畴成像，对 FeCo/HZO 异质结构的内在多铁性进行了表征。我们的研究表明，当在铁钴/HZO 异质结构上施加偏置电压时，铁钴薄膜的电流-电压（I-V）曲线可以调节，从而产生不同的电阻状态，这部分是通过应变介导的磁电耦合效应实现的。通过模拟外加电压作用下 FeCo/HZO 薄膜的体积应变，阐明了 HZO 和 FeCo 薄膜之间的应变耦合效应。通过进一步分析，偏置电压调制的电传输特性还可能与电荷介导的磁电耦合效应有关。我们预计，我们的工作将激励人们进一步研究低功耗和高密度电子器件。

引用次数: 0

The dynamics of the electron temperature and density in short-pulse HiPIMS discharge 短脉冲 HiPIMS 放电中电子温度和密度的动态变化

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-20 DOI: 10.1016/j.vacuum.2024.113672

This work studies the change in electron density and temperature in short-pulse high power impulse magnetron sputtering (HiPIMS) discharge. A planar magnetron with a copper target of 100 mm in diameter was used in the experiments. Plasma measurements were made using a Langmuir probe placed 85 mm from the target. The discharge current pulse durations were 8, 15, and 100 μs, with a fixed amplitude of 100 A and an average discharge power of 1 kW. To maintain the average discharge power at a constant level, a decrease in the pulse duration was accompanied by an increase in the frequency. When the discharge current pulses started, the electron temperature exceeded 10 eV and then decreased to a few eV. The main time of plasma existence in short-pulse HiPIMS is the afterglow phase, during which the electron density reaches a maximum of 1.9–3.2 × 10¹² cm⁻³ and the electron temperature is less than 1 eV. Because the duration of the afterglow phase in short-pulse HiPIMS is longer than the duration of the discharge current pulse, the average integral electron temperature is lower than that in DC and middle-frequency magnetron sputtering. The average integral electron temperature in HiPIMS decreases with decreasing pulse duration.

这项工作研究了短脉冲高功率脉冲磁控溅射（HiPIMS）放电中电子密度和温度的变化。实验中使用了一个直径为 100 毫米的铜靶平面磁控管。等离子体测量使用的是距离靶85毫米的朗缪尔探针。放电电流脉冲持续时间分别为 8、15 和 100 μs，固定振幅为 100 A，平均放电功率为 1 kW。为了将平均放电功率保持在恒定水平，在缩短脉冲持续时间的同时增加了频率。放电电流脉冲开始时，电子温度超过 10 eV，然后降至几 eV。短脉冲 HiPIMS 中等离子体存在的主要时间是余辉阶段，在此期间电子密度达到最大值 1.9-3.2 × 1012 cm-3，电子温度低于 1 eV。由于短脉冲 HiPIMS 的余辉阶段持续时间长于放电电流脉冲持续时间，因此平均积分电子温度低于直流和中频磁控溅射。HiPIMS 的平均积分电子温度随脉冲持续时间的缩短而降低。

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引用次数: 0

Adsorption-enhanced friction reduction in TiN-Ag/polyalphaolefin (PAO) solid-liquid systems: Catalytic induction of amorphous carbon formation TiN-Ag/聚α烯烃（PAO）固液体系中的吸附增强减摩作用：催化诱导无定形碳的形成

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-20 DOI: 10.1016/j.vacuum.2024.113671

The construction of green and friendly solid-liquid lubrication system, especially the composite system without harmful elements such as phosphorus and sulfur, has been a hot research topic in tribology. In this paper, through the friction and wear performance of the prepared TiN-Ag/polyalphaolefin (PAO) composite system, various factors affecting the lubrication behavior of the solid-liquid composite system were deeply explored, including the surface energy of the film, the lubrication state of the composite system, the adsorption energy of the TiN-Ag/PAO system, tribochemical products, etc. The friction reduction mechanism of TiN-Ag/PAO solid-liquid composite system was revealed. In particular, through the characterization of tribochemical products accumulated at the contacting interface, the internal mechanism of PAO degradation to form amorphous carbon was revealed, and the catalytic induction mechanism of Ag and AgO₂ in the process of PAO degradation was clarified.

构建绿色友好的固液润滑体系，尤其是不含磷、硫等有害元素的复合体系，一直是摩擦学领域的研究热点。本文通过制备的TiN-Ag/聚α烯烃（PAO）复合体系的摩擦磨损性能，深入探讨了影响固液复合体系润滑行为的各种因素，包括膜的表面能、复合体系的润滑状态、TiN-Ag/PAO体系的吸附能、摩擦生化产物等。研究揭示了 TiN-Ag/PAO 固液复合体系的减摩机理。特别是通过对接触界面积累的摩擦化学产物的表征，揭示了 PAO 降解形成无定形碳的内部机理，阐明了 Ag 和 AgO2 在 PAO 降解过程中的催化诱导机理。

引用次数: 0

Improved thermoelectric performance in wide temperature range of flexible moderately Ag-doped Bi0.5Sb1.5Te3 films 提高柔性适度掺银 Bi0.5Sb1.5Te3 薄膜在宽温度范围内的热电性能

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-20 DOI: 10.1016/j.vacuum.2024.113673

Motivated by previous investigations on Ag-doped Bi_0.5Sb_1.5Te₃ films deposited on various kinds of substrates, we introduced the Ag doping of moderate content into flexible Bi_0.5Sb_1.5Te₃ films through magnetron co-sputtering. The Ag doping level was found to have significant influence on the film microstructure and orientation. The remarkedly increased carrier concentration suppresses the bipolar conduction, contributing to superior thermoelectric performance in a wide temperature range from 300 K to 580 K. As a result, the 3.5 % Ag-doped Bi_0.5Sb_1.5Te₃ film reveals the highest PF value of 1373 μWm^-1 K⁻² at 480 K, as well as the best average PF of 1290 μWm^-1 K⁻² within 300–580 K, which are competitive among the flexible BiSbTe-based thin films.

受先前对沉积在各种基底上的掺银 Bi0.5Sb1.5Te3 薄膜研究的启发，我们通过磁控共溅射将适量掺银引入柔性 Bi0.5Sb1.5Te3 薄膜中。研究发现，银掺杂水平对薄膜的微观结构和取向有显著影响。结果表明，掺杂 3.5 % Ag 的 Bi0.5Sb1.5Te3 薄膜在 480 K 时的 PF 值最高，达到 1373 μWm-1 K-2，在 300-580 K 范围内的平均 PF 值最好，达到 1290 μWm-1 K-2，在柔性 BiSbTe 基薄膜中具有竞争力。

引用次数: 0

Construction of SnO2/Cu2O heterojunctions for enhanced photocatalytic degradation of moxifloxacin 构建二氧化锡/氧化铜异质结以增强莫西沙星的光催化降解能力

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-19 DOI: 10.1016/j.vacuum.2024.113669

Herein, SnO₂/Cu₂O heterojunction composites were prepared using a hydrothermal method for moxifloxacin removal from water. Cu₂O and SnO₂ were detected in the composite samples, which exhibited between the two semiconductors. The introduction of SnO₂ into pure Cu₂O, forming a heterojunction structure, can enhance device charge conversion, improve photocurrent intensity and photogenerated electron-hole separation efficiency, and greatly improve photocatalytic performance. Moxifloxacin degradation by SnO₂/Cu₂O composites reached 86.4 %. The proposed catalytic mechanism was based on radical scavenging, with •

O_{2}^{‐}

identified as the main active species. In addition, the moxifloxacin degradation intermediates were analyzed, with possible degradation pathways suggested.

本文采用水热法制备了 SnO2/Cu2O 异质结复合材料，用于去除水中的莫西沙星。在复合材料样品中检测到了 Cu2O 和 SnO2，它们介于两种半导体之间。在纯 Cu2O 中引入 SnO2，形成异质结结构，可以增强器件的电荷转换，提高光电流强度和光生电子-空穴分离效率，大大提高光催化性能。SnO2/Cu2O复合材料对莫西沙星的降解率达到86.4%。所提出的催化机理基于自由基清除作用，其中 - O2- 是主要的活性物种。此外，还分析了莫西沙星降解的中间产物，并提出了可能的降解途径。

引用次数: 0

Unveiling the vibration effect on microstructure and tribological characteristics of AZ80 Mg/AlCrFeMoNb surface composite developed by friction stir processing 揭示搅拌摩擦加工对 AZ80 Mg/AlCrFeMoNb 表面复合材料微观结构和摩擦学特性的振动影响

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-19 DOI: 10.1016/j.vacuum.2024.113667

This study examines the effects of vibration and AlCrFeMoNb HEA particles on the structure and wear properties of a novel AlCrFeMoNb/AZ80 composite, utilizing friction stir processing (FSP). The findings demonstrated that in comparison to the FSPed sample, the gains in the stir zone of the FSVPed sample demonstrated not only more refining of grains, but also homogeneous dispersion of AlCrFeMoNb particles in the matrix. The effectiveness of FSVP was evident in the enhanced fragmentation of reinforcing particles dispersed in the matrix, which led to a decrease in the mean grain size and significantly improved the shear punch strength. This phenomenon is associated with the elimination of flaws as well as proper scattering of AlCrFeMoNb particles across the matrix.

本研究利用摩擦搅拌加工（FSP）技术研究了振动和 AlCrFeMoNb HEA 粒子对新型 AlCrFeMoNb/AZ80 复合材料的结构和磨损性能的影响。研究结果表明，与 FSP 样品相比，FSVP 样品的搅拌区不仅晶粒更加细化，而且 AlCrFeMoNb 颗粒在基体中的分散也更加均匀。FSVP 的效果明显体现在增强了分散在基体中的强化颗粒的破碎，从而导致平均晶粒尺寸减小，并显著提高了剪切冲压强度。这种现象与缺陷的消除以及 AlCrFeMoNb 颗粒在基体中的适当散射有关。

引用次数: 0

Statistical modeling and optimization of clad geometry in laser cladding of Amdry 365 on Hastelloy X superalloy with response surface methodology 利用响应面方法对哈氏合金 X 超合金上的 Amdry 365 激光熔覆几何形状进行统计建模和优化

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum

Pub Date : 2024-09-19 DOI: 10.1016/j.vacuum.2024.113665

The aim of this study is to statistically investigate and optimize the laser cladding process of Hastelloy X superalloy using NiCoCrAlY powder (Amdry 365). In this study, response surface methodology was used to investigate the influence of laser input variables such as scanning velocity, laser power, and duty cycle on the clad geometry (including height, width, and angle) and dilution ratio. The results indicate that with increasing duty cycle and laser power, the clad width increases significantly, while the clad height increases slowly. However, increasing the scanning velocity leads to a decrease in the width and height of the clad. Furthermore, the clad angle and dilution ratio increase with increasing input parameters. The results of variance analysis shows that laser scanning velocity had the most significant impact on clad height, angle and dilution ratio, while laser power had the greatest influence on clad width. The laser power of 321.3 W, the scanning velocity of 6.3 mm/s and the duty cycle of 76 % proved to be the optimal input parameters. An experimental test was carried out to validate the optimal conditions based on the optimization responses. The validation results show that the developed models are able to describe the responses with an accuracy of less than 9 % error. The EDS analysis performed in the cladding zone of the optimum specimen showed the presence of the β phase in the dendritic region and the γ phase in the interdendritic region.

本研究旨在对使用 NiCoCrAlY 粉末（Amdry 365）的哈氏合金 X 超合金激光熔覆工艺进行统计研究和优化。本研究采用响应面方法研究激光输入变量（如扫描速度、激光功率和占空比）对熔覆几何形状（包括高度、宽度和角度）和稀释率的影响。结果表明，随着占空比和激光功率的增加，熔覆宽度显著增加，而熔覆高度增加缓慢。然而，提高扫描速度会导致熔覆层的宽度和高度减小。此外，熔覆角和稀释率随着输入参数的增加而增加。方差分析结果表明，激光扫描速度对熔覆高度、角度和稀释率的影响最大，而激光功率对熔覆宽度的影响最大。事实证明，321.3 W 的激光功率、6.3 mm/s 的扫描速度和 76 % 的占空比是最佳的输入参数。根据优化响应进行了实验测试，以验证最佳条件。验证结果表明，所开发的模型能够准确描述响应，误差小于 9%。在最佳试样包层区进行的 EDS 分析表明，树枝状区域存在 β 相，树枝状间区域存在 γ 相。

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