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2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems最新文献

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Simulation of the deformation behaviour of large thin silicon wafers and comparison with experimental findings 大型薄硅片变形行为的模拟及与实验结果的比较
J. Schicker, T. Arnold, C. Hirschl, A. Iravani, Martin Kraft
The deformation of large thin uncoated silicon wafers without remaining intrinsic misfit stresses resting on a ring is investigated. We use both, Finite Element simulations and THz tomography mapping. Specific attention is given the scaling of the warping for increasing slenderness of those wafers. We follow the approach of starting with a known solution for a compact wafer and increase the slenderness, i.e. increase the radius and decrease the thickness, using simulation models. Then, we measure the warping by THz mapping for some slender wafers and compare the data to simulation results. We compare the maximum warpage for given loadings and we compare the deflected shapes. Due to the geometric ratio radius/thickness of over 1000;1 and the anisotropic material behaviour, simulations can only be done effectively using shell element modelling of a spatial plate. And due to large warpages in the order of 10 times of the thickness, only incremental update Lagrange nonlinear calculations give reliable results. Simulations using the available shell elements overestimate slightly the values measured by tomography, but still yield acceptable values with errors less than 10% for very slender wafers and below for more compact ones. For invariable loading conditions, a logarithmic scaling function gives an acceptable estimate for the maximum warpage for increasing slenderness. An additional important observation was that the warpage of thin wafers is heavily affected by the size of the contact radius of a weight.
研究了在环上无本征失配应力的大薄硅片的变形。我们两者都用,有限元模拟和太赫兹层析成像。特别注意的是,为了增加这些晶圆片的细度,翘曲的缩放。我们采用的方法是从已知的紧凑晶圆解决方案开始,并使用模拟模型增加长细度,即增加半径并减少厚度。然后,我们用太赫兹映射测量了一些细长晶圆的翘曲,并将数据与仿真结果进行了比较。我们比较了给定载荷下的最大翘曲量,并比较了挠曲形状。由于半径/厚度的几何比大于1000;1以及材料的各向异性,只能使用空间板的壳元建模来进行有效的模拟。由于存在厚度10倍的大翘曲,只有增量更新拉格朗日非线性计算才能得到可靠的结果。使用可用壳单元的模拟稍微高估了层析成像测量的值,但对于非常细长的晶圆,误差仍然小于10%,对于更紧凑的晶圆,误差低于10%。对于不变的加载条件,对数缩放函数给出了增加长细度的最大翘曲量的可接受估计。另一个重要的观察结果是,薄晶圆的翘曲受到重物接触半径大小的严重影响。
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引用次数: 3
Modeling and model-based control of temperature in an SThM probe SThM探针温度的建模和基于模型的控制
M. Lenczner, Bin Yang, M. Abaidi, A. Bontempi, D. Teyssieux, B. Koehler, P. Janus
We present a multi-scale model of a probe for scanning thermal microscopy. The probe is built by microfabrication techniques. In active mode, it is supplied by a source of harmonic and/or continuous current and the tip temperature is measured after a lock-in amplifier. The model distinguishes two time scales and two space scales. Simulation results show the potential of the model in terms of accuracy and computation speed and they are compared to experimental results. Finally, a temperature control law constructed from this model is stated.
我们提出了一种扫描热显微镜探针的多尺度模型。探针是由微加工技术制造的。在有源模式下,它由谐波和/或连续电流源提供,尖端温度在锁相放大器后测量。该模型区分了两个时间尺度和两个空间尺度。仿真结果显示了该模型在精度和计算速度方面的潜力,并与实验结果进行了比较。最后,给出了由该模型构建的温度控制律。
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引用次数: 1
New simulation method for Deep Trench Termination diode (DT2) using mixed-mode TCAD sentaurus 基于混合模式TCAD senaurus的深沟终端二极管(DT2)仿真新方法
F. Baccar, H. Arbess, L. Théolier, S. Azzopardi, E. Woirgard
This work presents a methodology using mixed-mode simulation with TCAD Sentaurus to model, analyze, and optimize the representation of the Deep Trench Termination Diode (DT2) without increasing the number of nodes and the computation time. Moreover, several convergence problems which can be found for many kinds of simulations have been resolved.
本文提出了一种使用TCAD Sentaurus进行混合模式仿真的方法,在不增加节点数量和计算时间的情况下,对深沟终端二极管(DT2)的表示进行建模、分析和优化。此外,还解决了许多模拟中存在的收敛性问题。
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引用次数: 2
Designing efficient computer experiments - The step beyond finite element modelling 设计高效的计算机实验-超越有限元建模的一步
N. Vollert, J. Schicker, C. Hirschl, Martin Kraft, J. Pilz
A common challenge in modern multi-physics simulations like FEM is that the more complex the underlying problems become, the more the simulation depends on a range of not or just poorly understood parameters. At the same time, the increase of FEM computing time with the complexity of the underlying problem makes it impossible to explore the whole parameter space with FE simulations. Gaining as much information as possible from a manageable number of runs clearly requires involving some form of Design of Experiments (DOE), referred to as Design of Computer Experiments (DOCE) for simulation studies. In addition to the decision for which parameter sets simulations should be performed, the results of these simulations are used as data for constructing a statistical “metamodel”. By enabling the calculation of any variable of interest from arbitrary parameter sets without having to run new simulations, these metamodels facilitate an efficient exploration of the entire parameter space with optimal effort. Hence, the DOCE approach is indeed capable of expanding and optimizing the possibilities already achievable by simulation studies alone. For demonstrating the method on a relatively simple example, this work is focused on designing and validating a metamodel for calculating linear, one-directional stresses in rectangular monocrystalline (100) samples. It will be shown that the differences between FEM and the metamodel are always smaller than ≈ 4 MPa for different stress states up to a maximum stress of 215 MPa.
现代多物理场模拟(如FEM)面临的一个共同挑战是,潜在问题变得越复杂,模拟就越依赖于一系列无法理解或难以理解的参数。同时,有限元计算时间随着问题复杂性的增加而增加,使得有限元模拟无法探索整个参数空间。从可管理数量的运行中获得尽可能多的信息显然需要涉及某种形式的实验设计(DOE),称为模拟研究的计算机实验设计(DOCE)。除了决定应该对哪些参数集进行模拟之外,这些模拟的结果还用作构建统计“元模型”的数据。通过允许从任意参数集计算任何感兴趣的变量,而无需运行新的模拟,这些元模型有助于以最佳努力有效地探索整个参数空间。因此,DOCE方法确实能够扩展和优化仅通过模拟研究就可以实现的可能性。为了在一个相对简单的例子上演示该方法,本工作的重点是设计和验证用于计算矩形单晶(100)样品中的线性单向应力的元模型。结果表明,在不同应力状态下,有限元模型与元模型的差异始终小于≈4 MPa,最大应力为215 MPa。
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引用次数: 6
CFD simulations of wave soldering on through-hole printed circuit assemblies 通孔印刷电路组件波峰焊的CFD模拟
A. Yuile, S. Wiese
This paper presents the main observations and results, which have been collected from wave soldering simulations for a lead-free SnAgCu (SAC) solder, in terms of solder shape, penetration and electrical continuity. The simulation models comprise of steady state transitional shear stress transport (SST) melting/solidification models of a single pin-through hole (PTH) configuration on a printed circuit board (PCB). The simulations make use of the commercially available ANSYS Fluent Computational Fluid Dynamics (CFD) solver. The simulation models have been developed to the extent that they are capable of capturing and investigating some of the physically salient features, which dominate wave soldering processes, such that improvements in efficiency/efficacy can potentially be pursued. The simulations also account for the influence of variations in solder material properties, such as viscosity, surface tension and density with respect to temperature. Furthermore, within this paper, areas are highlighted as to how to improve upon and extend the applicability of the models through future development.
本文介绍了从无铅SnAgCu (SAC)焊料的波峰焊模拟中收集的主要观察结果和结果,包括焊料形状、渗透和电连续性。仿真模型包括印刷电路板(PCB)上单针通孔(PTH)结构的稳态过渡剪切应力传递(SST)熔化/凝固模型。仿真使用了市售的ANSYS Fluent计算流体动力学(CFD)求解器。仿真模型已经开发到能够捕获和研究一些物理显著特征的程度,这些特征主导波峰焊工艺,从而可以潜在地追求效率/功效的提高。模拟还考虑了焊料性能变化的影响,如粘度、表面张力和相对于温度的密度。此外,本文还强调了如何通过未来的开发来改进和扩展模型的适用性。
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引用次数: 5
Multi-physics modelling of thin films: Optimization for finite elements simulations tools 薄膜的多物理场建模:有限元模拟工具的优化
T. Youssef, E. Woirgard, S. Azzopardi, D. Martineau, R. Meuret
This paper focuses on the thin Nickel layer thicknesses. Thermal and mechanical behaviors of these thin layers in a power module are investigated. An approach is shown in order to present an improved modeling by considering the effect of these thin layers and by reducing time computation.
本文重点研究了薄镍层的厚度。研究了这些薄层在电源模块中的热性能和力学性能。为了提出一种考虑这些薄层影响并减少计算时间的改进建模方法。
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引用次数: 2
Thermo-mechanical ball bonding simulation with elasto-plastic parameters obtained from nanoindentation and atomic force measurements 基于纳米压痕和原子力测量获得弹塑性参数的热-机械球键合模拟
A. Wright, S. Koffel, S. Kraft, P. Pichler, J. Cambieri, R. Minixhofer, E. Wachmann
A ball bonding process was simulated over a high-voltage isolation structure. The removal of an inter-dielectric metal crack-stop layer was investigated through 3D simulation. Material properties for the bonded gold ball were obtained using nanoindentation and atomic force microscopy with a methodology from the work of Ma et al. This yielded both elastic and plastic material parameters. The methodology was then evaluated by using the parameters in a nanoindentation simulation. Although the topography simulated only roughly agreed with measurement, the simulated and measured indenter curves closely overlapped. The parameters were then used in the bonding simulation. The deformation of the bond ball was also measured so that the equivalent deformation could be simulated. This was achieved following the incorporation of both ultrasonic motion and softening in the simulation. Two bonding process geometries were then set up: one with the crack-stop layer present and the other without. Both were simulated and the output was applied within a failure theory to evaluate the risk to the isolation oxide.
在高压隔离结构上模拟了球键合过程。通过三维模拟研究了介质间金属止裂层的去除。利用纳米压痕和原子力显微镜,采用Ma等人的工作方法获得了键合金球的材料特性。这就得到了材料的弹性和塑性参数。然后在纳米压痕模拟中使用参数对该方法进行了评估。虽然模拟的地形与测量结果大致相符,但模拟的压头曲线与测量的压头曲线紧密重合。然后将这些参数用于键合模拟。同时测量了粘接球的变形,模拟了等效变形。这是在模拟中结合超声波运动和软化后实现的。然后建立了两种粘接工艺几何形状:一种有裂纹止裂层,另一种没有。两者都进行了模拟,并在失效理论中应用输出来评估隔离氧化物的风险。
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引用次数: 1
Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators 用于抵消间隙闭合静电执行器非线性的非线性机械弹簧
B. Rivlin, S. Shmulevich, A. Joffe, D. Elata
We show that nonlinear elastic springs can be used to counteract the nonlinearity of electrostatic forces in gap-closing electrostatic actuators. We demonstrate this in two types of devices. In the first, we use a nonlinear spring to extend the stable range of the parallel-plates actuator, and to ensure that the response in this extended range is linear by design. In the second device, we use a nonlinear spring to ensure that beyond what would have been the pull-in point, voltage remains constant and independent of charge. In effect, this second device is a rechargeable mechanical battery.
我们证明了非线性弹性弹簧可以用来抵消闭隙静电执行器中静电力的非线性。我们在两种类型的设备中演示了这一点。在第一部分中,我们使用非线性弹簧来扩展平行板驱动器的稳定范围,并通过设计确保在这个扩展范围内的响应是线性的。在第二个装置中,我们使用非线性弹簧来确保在拉入点之外,电压保持恒定并且与电荷无关。实际上,第二个装置是一个可充电的机械电池。
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引用次数: 3
Thermo-mechanical simulations of SiC power modules with single and double sided cooling 单面和双面冷却SiC功率模块的热力学模拟
K. Brinkfeldt, Michael Edwards, Jonas Ottosson, K. Neumaier, Olaf Zschieschang, A. Otto, E. Kaulfersch, D. Andersson
Effectively removing dissipated heat from the switching devices enables a higher current carrying capability per chip area ratio, thus leading to smaller or fewer devices for a given power requirement specification. Further, the use of SiC based devices has proven to increase the efficiency of the system thereby reducing the dissipated heat. Thermal models have been used to compare SiC power modules. Single and double sided cooling have been simulated. The simulated maximum temperatures were 141 °C for the single sided version and 119.7 °C for the double sided version. In addition, the reliability of a single sided module and thermally induced plastic strains of a double sided module have been investigated. A local model of the wire bond interface to the transistor metallization shows a 30/00 maximum increase in plastic strain during the power cycle. Simulations of the creep strain rates in the die attach solder layer for a power cycling loads also shows a 30/00 increase in creep strain per cycle.
有效地从开关器件中去除散失的热量,使每个芯片面积比具有更高的载流能力,从而导致给定功率要求规格的更小或更少的器件。此外,使用基于SiC的器件已被证明可以提高系统的效率,从而减少散热量。热模型已经被用来比较SiC功率模块。模拟了单面和双面冷却。模拟最高温度单面为141°C,双面为119.7°C。此外,还研究了单面模组的可靠性和双面模组的热致塑性应变。电晶体金属化线键界面的局部模型显示,在电源循环期间,塑性应变的最大增幅为30/00。模拟的蠕变应变率,在模具附着焊料层的功率循环载荷也显示了蠕变应变每循环增加30/00。
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引用次数: 5
Vapor pressure prediction for stacked-chip packages in reflow by convection-diffusion model 用对流-扩散模型预测叠片封装回流中的蒸汽压
Jeremy J. Adams, Liangbiao Chen, Xuejun Fan
Moisture plays a critical role in the reliability of electronic devices, especially in the desorption process at reflow temperatures (around 270° C) when severe damages may occur due to high-pressure vapor concerted from condensed moisture. Such pressure-driven vapor flow, however, could not be described by conventional Fick's Law. Furthermore, using conventional Fick's Law for multi-materials always encounters interface discontinuity issues. Therefore, this paper adopts a Convection-Diffusion Model that is able to describe complex desorption behavior in a multi-material media without the discontinuity issue. Both pressure gradient-driven (convection) and concentration-gradient driven (diffusion) moisture transports are considered in the model. To achieve this, absorbed moisture is partitioned into vapor phase and liquid phase (condensed water), with the vapor flux governed by Darcy's Law and the water flux by Fick's Law. Henry's Law is also implemented so that the Fickian term is converted to pressure, resulting in a unified vapor pressure model. The model is applied to analyze a stacked-chip package by two numerical cases: desorption under 2 typical reflow temperature profiles. Numerical validations are also performed to show that the Convection-Diffusion Model can be reduced to traditional Fickian Model and Convection-Only Model as special cases. The numerical results show that the concentration desorption rate is much faster than that of the traditional Fickian diffusion, and somewhat faster than the Convection Model, this results in a much lower pressure in the material. However, the desorption profile with time and the pressures at low temperatures of the different models- the Convection-Only, Diffusion-only and the Convection-Diffusion Model are indistinguishable which can be seen in both reflow profiles. The sensitivity of the CD Model to the gas permeability k and the reflow temperature profiles governs the maximum pressure that is predicted as well as the concentration content.
水分在电子设备的可靠性中起着至关重要的作用,特别是在回流温度(约270°C)下的解吸过程中,冷凝水分产生的高压蒸汽可能会造成严重损害。然而,这种压力驱动的蒸汽流动不能用传统的菲克定律来描述。此外,在多材料中使用传统的菲克定律往往会遇到界面不连续问题。因此,本文采用了一种对流-扩散模型,该模型能够描述多材料介质中复杂的解吸行为,而不存在不连续问题。该模型同时考虑了压力梯度驱动(对流)和浓度梯度驱动(扩散)的水汽输送。为了达到这一目的,吸收的水分被分为气相和液相(冷凝水),蒸汽通量由达西定律控制,水通量由菲克定律控制。亨利定律也得以实施,使得菲克项转化为压力,从而得到统一的蒸汽压模型。通过两种典型回流温度分布下的解吸两种数值情况,应用该模型对叠片封装进行了分析。数值验证表明,在特殊情况下,对流扩散模型可以简化为传统的菲克模型和纯对流模型。数值结果表明,浓度解吸速率比传统的菲克扩散模型快得多,比对流模型快得多,这使得物料中的压力大大降低。然而,在不同的回流模型中,仅对流、仅扩散和对流-扩散模型的脱附曲线随时间和低温压力的变化是难以区分的,这在两种回流模型中都可以看到。CD模型对渗透率k和回流温度曲线的敏感性决定了预测的最大压力和浓度含量。
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引用次数: 2
期刊
2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
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