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2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems最新文献

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Simulation of a flip chip bonding technique using reactive foils 利用无功箔的倒装片键合技术的模拟
F. Kraemer, C. Pauly, F. Muecklich, S. Wiese
New bonding techniques are required in order to overcome the problems caused by the necessary interconnection of big and thin silicon chips with organic interposers. A local heat source at the bonding interface would be beneficial in order to reduce the adverse thermal stress on the emerging assemblies. The required local heating can be achieved by reactive foils, which are stacks of thin metal layers that intermix after an ignition and supply thermal energy during this reaction. This paper summarises the results of a thermal transient FEM analysis, which checks the applicability of reactive foils as local heat source for the soldering of flip chip interconnections. This thermal analysis applies an artificial test structure with the interconnection dimensions of a flip chip assembly. The surrounding silicon chip and substrate have much larger dimensions in order to act as a heat sink with a large thermal mass. The interconnections are arranged in such a way that thermal interactions between adjacent interconnections can be analysed. The thermal energy of the reactive foil is induced sequentially to the assembly at the interface between substrate pad and solder joint. The simulation results show a localised influence of the thermal energy to the assembly. The heat distributes over the substrate pads and the adjacent solder volume. Increased temperatures are barely visible in the substrate and the silicon chip. The substrate acts as thermal isolator and the heat conduction through the solder ball is much slower than the reaction speed of the foil. Thus, even the small pitch between the flip chip interconnections causes a sufficient thermal isolation during the rapid process. The temperature increase at the silicon is just less than 10K. However the thermal isolation enables the conversion of the limited thermal energy into high temperatures. The temperatures on top of the copper pad are sufficiently high to melt the adjacent solder. Furthermore the temperatures are high enough to continue the self-propagating reaction of the foil. The major influence on the resulting maximum temperature is the energy input of the foil, which is defined by the type of reactive system and its thickness.
为了克服用有机中间体将又大又薄的硅片互连所带来的问题,需要新的键合技术。在接合界面处放置一个局部热源是有益的,以减少对新兴组件的不利热应力。所需的局部加热可以通过反应箔来实现,反应箔是一堆薄金属层,在点火后混合,并在反应过程中提供热能。本文总结了热瞬态有限元分析的结果,验证了无功箔作为倒装芯片互连焊接局部热源的适用性。这种热分析应用了一个具有倒装芯片组装互连尺寸的人工测试结构。周围的硅片和衬底有更大的尺寸,以作为一个大的热质量的散热器。互连的排列方式使得相邻互连之间的热相互作用可以被分析。反应性箔的热能依次被诱导到衬底衬垫和焊点之间的界面上。仿真结果表明,热能对组件有局部影响。热量分布在衬底焊盘和邻近的焊料体积上。升高的温度在衬底和硅芯片上几乎看不见。衬底作为热隔离器,通过焊料球的热传导比箔的反应速度慢得多。因此,即使倒装芯片互连之间的小间距也会在快速过程中产生足够的热隔离。硅的温升小于10K。然而,热隔离使有限的热能转化为高温。铜衬垫顶部的温度足够高,足以熔化相邻的焊料。此外,温度足够高,以继续箔的自传播反应。对产生的最高温度的主要影响是箔的能量输入,这是由反应系统的类型和它的厚度来定义的。
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引用次数: 0
Characterization and simulation of LTCC/adhesive and alloy 42/adhesive interface strength for automotive applications 汽车用LTCC/粘合剂和alloy 42/粘合剂界面强度的表征和模拟
B. Ozturk, P. Lou, P. Gromala, C. Silber, K. Jansen, L. Ernst
Thermoset-based adhesives are used as thermal and electrical interfaces. In automotive applications, they are required to have excellent adhesion since delamination may precipitate other electrical, thermal or mechanical failure mechanisms. A vast amount of literature is available on the investigation of molding compounds and various material interfaces. However, only very few studies focus on delamination of adhesive interfaces. The reason is that apparently it was not possible to initiate an interface crack in a delamination sample. In various attempts, random cracking in the adhesive was obtained instead. Yet interface cracks are found in real products and really form a reliability issue. But so far the absence of adequate interface strength data makes it hardly possible to design for reliability of products with adhesive interfaces. The present paper solves the above problem. We succeeded to get an interface delamination between the adhesive and two different materials (e.g. Low temperature cofrred ceramic (L TCC) and alloy 42). The specimens are made by identical fabrications processes as during the fabrication of the electronic control unit under study. The interface to be investigated is preconditioned for delamination initiation, by adding a single step to the fabrication process, thus enabling the investigation of different interfaces that have the same processing conditions as the real product. The presented specimen preparation method and the testing methodology can be used for determination of critical adhesion properties of different interfaces (including brittle materials like L TCC) in electronic control units. Specimens are investigated by delamination experiments near Mode-I loading conditions at room temperature. The obtained interface data is interpreted via image processing and finite element modeling of the J-integral method. In particular, cohesive zone modeling is used to validate the critical energy release rates for different interfaces.
热固性粘合剂用作热和电接口。在汽车应用中,它们需要具有优异的附着力,因为分层可能会析出其他电、热或机械故障机制。大量的文献可用于研究成型化合物和各种材料界面。然而,很少有研究关注粘接界面的分层现象。原因很明显,在分层样品中不可能产生界面裂纹。在各种尝试中,胶粘剂出现了随机开裂。然而,在实际产品中也发现了界面裂缝,并真正形成了可靠性问题。但到目前为止,由于缺乏足够的界面强度数据,因此很难设计具有粘合界面的产品的可靠性。本文解决了上述问题。我们成功地获得了粘合剂与两种不同材料(例如低温涂层陶瓷(L TCC)和合金42)之间的界面分层。样品的制造过程与所研究的电子控制单元的制造过程相同。通过在制造过程中添加一个步骤,对要研究的界面进行分层启动的预处理,从而能够研究具有与实际产品相同加工条件的不同界面。所提出的试样制备方法和测试方法可用于确定电子控制单元中不同界面(包括脆性材料如L TCC)的临界粘附性能。在室温下,通过i型加载条件下的分层实验对试件进行了研究。得到的界面数据通过图像处理和j积分法的有限元建模进行解释。特别地,利用内聚区建模来验证不同界面的临界能量释放率。
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引用次数: 2
Temperature profiles along bonding wires, revealed by the bond calculator, a new thermo-electrical simulation tool 利用新型热电模拟工具键合计算器揭示了沿键合导线的温度分布
C. C. Jung, C. Silber, J. Scheible
When a bonding wire becomes too hot, it fuses and fails. The ohmic heat that is generated in the wire can be partially dissipated to a mold package. For this cooling effect the thermal contact between wire and package is an important parameter. Because this parameter can degrade over lifetime, the fusing of a bonding wire can also occur as a long-term effect. Another important factor is the thermal power generated in the vicinity of the bond pads. Nowadays, the reliability of bond wires relies on robust dimensioning based on estimations. Smaller package sizes increase the need for better predictive methods.The Bond Calculator, a new thermo-electrical simulation tool, is able to predict the temperature profiles along bond wires of arbitrary dimensions in dependence on the applied arbitrary transient current profile, the mold surrounding the wire, and the thermal contact between wire and mold. In this paper we closely investigated the spatial temperature profiles along different bond wires in air in order to make a first step towards the experimental verification of the simulation model. We are using infrared microscopy in order to measure the thermal radiation generated along the bond wire. This is easier to perform quantitatively in air than in the mold package, because of the non-negligible absorbance of the mold material in the infrared wavelength region.
当连接线太热时,就会熔断而失效。在导线中产生的欧姆热可以部分散失到模具封装中。对于这种冷却效果,电线和封装之间的热接触是一个重要的参数。由于该参数会随着使用寿命的延长而降低,因此焊线的熔断也会产生长期影响。另一个重要因素是在焊盘附近产生的热功率。目前,键合线的可靠性依赖于基于估计的稳健尺寸。更小的包装尺寸增加了对更好的预测方法的需求。Bond Calculator是一种新型的热电模拟工具,它能够根据施加的任意瞬态电流曲线、金属丝周围的模具以及金属丝与模具之间的热接触来预测任意尺寸金属丝的温度分布。在本文中,我们仔细研究了空气中不同键合线的空间温度分布,以便对模拟模型进行实验验证。我们正在使用红外显微镜来测量沿键合线产生的热辐射。这在空气中比在模具包装中更容易进行定量,因为模具材料在红外波长区域的吸光度不可忽略。
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引用次数: 1
Electro-thermo-mechanical analyses on silver sintered IGBT-module reliability in power cycling 功率循环下银烧结igbt模块可靠性的电-热-机械分析
R. Dudek, R. Doring, S. Rzepka, C. Ehrhardt, M. Gunther, M. Haag
New demands on the thermo-mechanical design of sintered silver interconnections emerge. Development of this inter-connection technology and both experimental and theoretical studies on their reliability were subjects of the project “PROPOWER”. The focus of this paper is on theoretical analysis of thermo-mechanical reliability risks of a project demonstrator, an insulated-gate bipolar transistor (IGBT) module, subjected to power cycling loadings. Coupled electro-thermal-mechanical analyses have been carried out using the finite element method (FEM). Introduction of a new interconnect material means at the same time introduction of a new constitutive behavior and new failure modes. As the material stiffness increases, the decoupling effect of compliant solder layers reduces and intrinsic mechanical stresses increase in the whole power stack. This leads on one hand to less low cycle fatigue in the interconnect, as plastic dissipation is reduced, but on the other hand to higher failure risks like brittle cracking and sub-critical crack growth. However, if early brittle failure can be avoided by appropriate designs, the new interconnection technology allows an increase in fatigue reliability of several hundred percent. Based on the complex theoretical framework simulation results are validated by testing in order to achieve trustworthy thermo-mechanical reliability predictions. Failures like chip metallization damage and the different damage mechanisms of the die bond if either solder or sinter silver is used are related to the different stress situations in the module.
对烧结银互连的热机械设计提出了新的要求。这种互连技术的发展及其可靠性的实验和理论研究是“PROPOWER”项目的主题。本文的重点是一个项目演示器,一个绝缘栅双极晶体管(IGBT)模块,在功率循环负载下的热机械可靠性风险的理论分析。采用有限元法进行了电-热-力耦合分析。引入一种新的互连材料意味着同时引入一种新的本构行为和新的破坏模式。随着材料刚度的增加,柔性焊料层的解耦效应减小,整个电源堆栈的固有机械应力增加。这一方面减少了互连体的塑性耗散,减少了低周疲劳,但另一方面也增加了脆性开裂和亚临界裂纹扩展等失效风险。然而,如果通过适当的设计可以避免早期脆性破坏,新的互连技术可以将疲劳可靠性提高几百倍。基于复杂的理论框架,通过试验验证了仿真结果,从而实现了可靠的热机械可靠性预测。如果使用焊料或烧结银,则芯片金属化损伤和模键的不同损伤机制等故障与模块中不同的应力情况有关。
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引用次数: 19
Constitutive modelling of copper films on silicon substrate 硅衬底上铜薄膜的本构模型
Martin Lederer, J. Zarbakhsh
In order to characterize the material behavior of copper films deposited on silicon substrate, wafer curvature experiments were performed. The samples were exposed to repeated cycles in the range between -50°C to 400°C. The diagrams of film stress versus temperature show linear film behavior followed by plastic flow. In fact, a pronounced Bauschinger effect was observed which is attributed to back-stress arising from the dislocation structure in copper films. For better understanding of the underlying mechanisms, a new statistical dislocation model was developed which can nicely be fitted to experiments. However, the algorithm of the dislocation model appeared to be very time consuming during computation. Therefore, a second model was developed which can refit the experimental data with high accuracy using a fast algorithm. We call this model pressure dependent combined isotropic and kinematic hardening. This model was implemented in ANSYS with user-subroutine usermat.
为了表征沉积在硅衬底上的铜薄膜的材料行为,进行了晶圆曲率实验。样品在-50°C至400°C的范围内反复暴露。薄膜应力随温度变化图显示出线性薄膜行为,其次是塑性流动。事实上,观察到明显的包辛格效应,这是由于铜薄膜中位错结构引起的背应力。为了更好地理解潜在的机制,建立了一个新的统计位错模型,该模型可以很好地拟合实验。然而,在计算过程中,位错模型的算法显得非常耗时。在此基础上,建立了第二种模型,该模型采用快速算法对实验数据进行高精度修正。我们称这种模型为压力相关的各向同性和运动硬化。利用用户子程序usermat在ANSYS中实现了该模型。
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引用次数: 0
Study on thermomechanical reliability of power modules and thermal grease pump-out mechanism 电源模块热力可靠性及热润滑脂泵出机构研究
Jue Li, P. Myllykoski, M. Paulasto-Krockel
This paper focuses on two major thermomechanical reliability topics related to high power devices such as insulated gate bipolar transistor (IGBT) modules. Firstly, the stress-free status and the thermal residual stress of a typical power module are investigated by finite element method (FEM) analysis. After determining the thermal residual stresses at room temperature, thermal cycling (TC) and power cycling (PC) tests are conducted and simulated by FEM. Secondly, the thermal grease pump-out phenomenon is explicitly simulated via a combined FEM and smoothed particle hydrodynamic (SPH) method for the first time. SPH method shows great potential for the thermal grease material selection and engineering, base plate optimization, and thermomechanical reliability optimization of power devices in general. The simulated contact opening results at the interface between copper base plate and heat sink indicates different pumping modes associated with different loading conditions. All modeling approaches presented in this work offer insight into our understanding of deformation, stress status, and thermal grease related failure mechanisms of high power devices.
本文主要讨论了与大功率器件(如绝缘栅双极晶体管(IGBT)模块)相关的两个主要热机械可靠性问题。首先,采用有限元法分析了典型电源模块的无应力状态和热残余应力。在确定了室温下的热残余应力后,进行了热循环(TC)和功率循环(PC)试验,并用有限元法进行了模拟。其次,首次采用有限元法和光滑颗粒流体力学(SPH)相结合的方法对导热润滑脂泵出现象进行了明确的模拟。SPH方法在热润滑脂材料选择与工程、基板优化、动力器件热机械可靠性优化等方面具有广阔的应用前景。铜基板与散热器界面处的模拟接触开度结果表明,不同载荷条件下的泵送方式不同。在这项工作中提出的所有建模方法提供了我们对高功率器件的变形,应力状态和热脂相关失效机制的理解。
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引用次数: 10
Thermo-mechanical analysis of GaAs devices under temperature-humidity-bias testing 温度-湿度偏置测试下GaAs器件的热力学分析
K. Adokanou, K. Inal, P. Montmitonnet, F. Courtade, B. Bonnet
Accelerated life tests on microelectronic devices are needed to estimate their degradation under severe environment. THB (Temperature Humidity Bias) [1] at 85°C and 85%RH (relative humidity) is commonly used for reliability studies. Empirical acceleration laws, used for THB test take into account the temperature change (from 22°C to 85°C), but they do not quantify its impact of the corresponding thermo-elastic stress which it adds to the residual stress in the die and of possible microstructure changes. The aim of this work is to determine the thermo-mechanical stresses induced in the active layer of a Gallium Arsenide (GaAs) chip by the THB test. They are due to the mismatch in Coefficients of Thermal Expansion (CTE) between the stack of thin film materials used as metallurgic interconnection and the intermediate dielectric layers above the active area of the chip. To estimate this stress, fist layers thicknesses measurement have been made with various techniques; second few configurations have been used to simulate heating and finally “complete” 2D Finite Element Analysis (FEA) has been performed. Elastic and thermo-physical materials data come from the literature. The results indicate compression of metal gate (Ti/Al/Au) and tensile stress concentration in the SiNx passivation layer. The outcomes is compared with THB test results from [2] and suggests that stress induced by heating must be considered to explain failure during THB test.
需要对微电子器件进行加速寿命试验,以评估其在恶劣环境下的退化情况。THB(温度湿度偏差)[1]在85°C和85%RH(相对湿度)通常用于可靠性研究。用于THB测试的经验加速度定律考虑了温度变化(从22°C到85°C),但它们没有量化其相应的热弹性应力的影响,它增加了模具中的残余应力和可能的微观结构变化。本工作的目的是通过THB测试确定砷化镓(GaAs)芯片有源层中引起的热机械应力。它们是由于用作冶金互连的薄膜材料堆叠与芯片有源区域上方的中间介电层之间的热膨胀系数(CTE)不匹配造成的。为了估计这种应力,用各种技术进行了第一层厚度测量;第二种构型用于模拟加热,最后进行“完整”的二维有限元分析(FEA)。弹性和热物理材料的数据来自文献。结果表明,SiNx钝化层中出现了金属栅(Ti/Al/Au)的压缩和拉应力的集中。结果与[2]的THB试验结果进行了比较,表明必须考虑加热引起的应力来解释THB试验的失败。
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引用次数: 1
Accelerated reliability test method for optics in LED luminaire applications LED灯具中光学器件的加速可靠性试验方法
M. Yazdan Mehr, W. V. van Driel, G. Zhang
A high accelerated stress testing (HAST) system is introduced to study the photo-thermal stability and reliability of remote phosphor plates, made from Bisphenol-A polycarbonate (BPA-PC) and YAG. Remote phosphor plates, combined with a blue-light LED source, are used to produce white light with a correlated colour temperature (CCT) of 4000 K. In this study, the remote-phosphor BPA-PC samples of 3 mm thickness were photo-thermally aged at temperature range 80 to 120 °C. The blue light is radiated on the sample with light intensity of 13200 W/m2. Thermal quenching of the YAG samples is also studied. It is shown that crystallographic structure of phosphor is stable during thermal ageing.
介绍了一种高加速应力测试(HAST)系统,用于研究双酚A聚碳酸酯(BPA-PC)和YAG制备的远端荧光粉板的光热稳定性和可靠性。远程荧光粉板与蓝光LED光源相结合,用于产生相关色温(CCT)为4000 K的白光。在本研究中,对3 mm厚度的远端荧光粉BPA-PC样品在80 ~ 120℃的温度范围内进行光热老化。蓝光照射在样品上,光强为13200w /m2。对YAG样品的热淬火进行了研究。结果表明,在热老化过程中,荧光粉的晶体结构是稳定的。
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引用次数: 2
Advances in percolated thermal underfill (PTU) simulations for 3D-integration 三维集成的渗流热下填土(PTU)模拟研究进展
Sridhar Kumar, U. Zschenderlein, R. Pantou, T. Brunschwiler, G. Schlottig, F. Schindler-Saefkow, B. Wunderle
To satisfy the increasing need in today's industry for high performance, more complex chips are being designed. These chips, when integrated in 3D packages, have a high energy density and require new and innovative cooling strategies as many of them are designed as flip-chip assemblies, usually requiring back-side cooling. Classical underfills currently used offer poor thermal conductivity. But cooling through the underfill would enable cost-efficient and low complexity cooling solutions. For this purpose, thermal underfills with percolating fillers and necks are currently under development. They are to provide a significant improvement in thermal conductivity to classical capillary underfills and will find applications in, for example, 3D integrated packages to improve heat dissipation. The idea behind the percolating thermal underfill (PTU) comprises a sequential joint forming process ensuring a high fill fraction. Although flip chip technology has been well described, the addition of the neck based percolating underfill could entail several new thermo-mechanical reliability concerns that need to be studied using a physics of failure approach, since the PTU exhibits vastly different thermo-mechanical behavior, giving rise to possible new failure mechanisms and locations. This paper in particular deals with FE simulations carried out to understand different key aspects of the thermal underfill and to study the effects of the increased underfill stiffness at these locations. The simulations are implemented using detailed elastic, plastic, visco-elastic and visco-plastic material data. In case of larger models a complexity reduction is required and implemented by using effective material data to improve computational time.
为了满足当今工业对高性能日益增长的需求,人们正在设计更复杂的芯片。当这些芯片集成在3D封装中时,具有高能量密度,并且需要新的和创新的冷却策略,因为其中许多芯片被设计为倒装芯片组件,通常需要背面冷却。目前使用的经典底填料导热性差。但是,通过下填料进行冷却可以实现低成本、低复杂性的冷却解决方案。为此目的,目前正在开发具有渗透填料和颈的热下填料。它们将显著改善传统毛细管下填料的导热性,并将在3D集成封装中找到应用,例如改善散热。渗透热下填料(PTU)背后的理念包括一个连续的接缝形成过程,确保高填充分数。虽然倒装芯片技术已经得到了很好的描述,但由于PTU表现出非常不同的热机械行为,可能会产生一些新的热机械可靠性问题,需要使用物理失效方法进行研究,从而产生可能的新失效机制和位置。本文特别讨论了有限元模拟,以了解热下填土的不同关键方面,并研究在这些位置增加下填土刚度的影响。模拟采用了详细的弹性、塑性、粘弹性和粘塑性材料数据。在较大模型的情况下,需要降低复杂性,并通过使用有效的材料数据来实现,以提高计算时间。
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引用次数: 1
Analyses on a directly attached airbag sensor packaging system 直贴式安全气囊传感器封装系统分析
H. Kang, Jong Dae Lee, Joon Ki Kim, Yeong-Kook Kim
A side airbag sensor packaging directlly attached to the side frame (center pillar) of automobiles by adhesive is introduced in this study. To assess the feasibility for the packaging, a test instrument was manufactured to examine the impact sensibility by drop tests. The conventional sensor module with plastic housiung and the new sensor packaging were installed to aluminum channel, and the results were compared with each other. Numerical analyses were also performed to investigate the signal characteristics created by the sensors. The prerliminary results showed that the signals from the directly attached sensors represented more distinctive with less noise, presummably due to the absence of the vibration caused by the housing structure of the conventional sensor.
介绍了一种用胶粘剂直接附着在汽车侧架(中柱)上的侧气囊传感器封装。为了评估该包装的可行性,制作了一种测试仪器,通过跌落试验来检测其冲击敏感性。将传统的塑料外壳传感器模块和新型传感器封装模块安装在铝制通道上,并对结果进行了比较。对传感器产生的信号特性进行了数值分析。初步结果表明,直接连接传感器的信号更明显,噪声更小,可能是由于没有传统传感器外壳结构引起的振动。
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引用次数: 2
期刊
2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
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