Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114810
R. Moroney, R. White, R. Howe
Fluid motion induced by traveling flexural waves in 4 mu m thick membranes was observed using 2.5 mu m diameter polystyrene spheres in water to make the fluid motion visible. Visual observation of the spheres indicates that they move in the direction of wave propagation with a speed proportional to the square of the acoustic amplitude. The maximum speed is 130 mu m/s for an RF drive voltage of 7.1 Vrms at 3.5 MHz; the wavelength is 100 mu m. Standing Lamb waves, which can be seen visually with a phase-contrast microscope, are found to trap particles, including bacteria located in a drop of water that contacts the membrane. A first order model of Lamb-wave micropumping is presented, based on acoustic streaming theory. Important parameters for device design and operation are discussed, along with options for integrating the device into microflow systems. Possible applications include temperature redistribution in ICs and miniature chemical processing systems.<>
{"title":"Ultrasonically induced microtransport","authors":"R. Moroney, R. White, R. Howe","doi":"10.1109/MEMSYS.1991.114810","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114810","url":null,"abstract":"Fluid motion induced by traveling flexural waves in 4 mu m thick membranes was observed using 2.5 mu m diameter polystyrene spheres in water to make the fluid motion visible. Visual observation of the spheres indicates that they move in the direction of wave propagation with a speed proportional to the square of the acoustic amplitude. The maximum speed is 130 mu m/s for an RF drive voltage of 7.1 Vrms at 3.5 MHz; the wavelength is 100 mu m. Standing Lamb waves, which can be seen visually with a phase-contrast microscope, are found to trap particles, including bacteria located in a drop of water that contacts the membrane. A first order model of Lamb-wave micropumping is presented, based on acoustic streaming theory. Important parameters for device design and operation are discussed, along with options for integrating the device into microflow systems. Possible applications include temperature redistribution in ICs and miniature chemical processing systems.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129672269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114798
T. Fukuda, H. Hosokai, H. Ohyama, H. Hashimoto, F. Arai
The authors describe an in-pipe micro mobile robot with a new actuator called the giant magnetostrictive alloy (GMA), which requires no power supply cables. The cableless micro mobile robots can be controlled by the magnetic fields supplied by the outer side. The mechanism of the motions is based on an inch-worm-type mobile mechanism. Two mechanisms are discussed here: (1) the reversible motion and (2) the one-way motion mechanisms. The sizes of the robots are 21 mm in diameter for the reversible motion of the macro model and 6 mm in diameter for the one-way motion of the micro model. The motion is controlled by the regulated motion of the outer electromagnetic coil, so that the in-pipe micro mobile can follow the outer coil. These micro cableless mobile robots may be suitable for small pipe inspections and for application in the biomedical field.<>
{"title":"Giant magnetostrictive alloy (GMA) applications to micro mobile robot as a micro actuator without power supply cables","authors":"T. Fukuda, H. Hosokai, H. Ohyama, H. Hashimoto, F. Arai","doi":"10.1109/MEMSYS.1991.114798","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114798","url":null,"abstract":"The authors describe an in-pipe micro mobile robot with a new actuator called the giant magnetostrictive alloy (GMA), which requires no power supply cables. The cableless micro mobile robots can be controlled by the magnetic fields supplied by the outer side. The mechanism of the motions is based on an inch-worm-type mobile mechanism. Two mechanisms are discussed here: (1) the reversible motion and (2) the one-way motion mechanisms. The sizes of the robots are 21 mm in diameter for the reversible motion of the macro model and 6 mm in diameter for the one-way motion of the micro model. The motion is controlled by the regulated motion of the outer electromagnetic coil, so that the in-pipe micro mobile can follow the outer coil. These micro cableless mobile robots may be suitable for small pipe inspections and for application in the biomedical field.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133354093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114801
M. Kimura, N. Miyakoshi, M. Daibou
A miniature opto-electric transformer (MOET), which consists of a monolithically fabricated p-n junction photocell and a miniaturized multilayer transformer with spiral coils on a Si chip, is proposed and demonstrated. The photocell is directly illuminated by a laser diode (LD) of 83 nm wavelength driven by an on-off signal of frequency up to 10 MHz, and the corresponding output voltage of the transformer with a turns ratio of 1:1 (the primary and the secondary coil each have 19 turns) is measured. A simplified model for the inductance L of the double layer spiral coil with an outer core is proposed and found to compare well with the experimental value. The stray capacitance and the coil resistance are also evaluated. The equivalence circuit of the MOET is shown and circuit simulations performed by the PSpice simulator are presented. Good agreement between experimental results and simulations is found.<>
{"title":"A miniature opto-electric transformer","authors":"M. Kimura, N. Miyakoshi, M. Daibou","doi":"10.1109/MEMSYS.1991.114801","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114801","url":null,"abstract":"A miniature opto-electric transformer (MOET), which consists of a monolithically fabricated p-n junction photocell and a miniaturized multilayer transformer with spiral coils on a Si chip, is proposed and demonstrated. The photocell is directly illuminated by a laser diode (LD) of 83 nm wavelength driven by an on-off signal of frequency up to 10 MHz, and the corresponding output voltage of the transformer with a turns ratio of 1:1 (the primary and the secondary coil each have 19 turns) is measured. A simplified model for the inductance L of the double layer spiral coil with an outer core is proposed and found to compare well with the experimental value. The stray capacitance and the coil resistance are also evaluated. The equivalence circuit of the MOET is shown and circuit simulations performed by the PSpice simulator are presented. Good agreement between experimental results and simulations is found.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130200914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114760
R. Kaneko
Novel micro-tribological techniques for the evaluation of surfaces have been developed. A point contact microscope having high resolution and using an ultralight load was developed to measure topographies, adhesive forces, hardnesses, and wear of surfaces. A controlled frictional force microscope was also developed to measure frictional force distributions without stick-slip motion. A scanning tunneling microscopy technique is used to evaluate lubricant monolayers. Micropatterning, micromachining, and point recording techniques are progressing with the technology of microtribology. It is concluded that microtribology is closely connected with the technology of micro-electromechanical systems (MEMS), and both technologies will progress with cooperative work.<>
{"title":"Microtribology related to MEMS-Concept, measurements, applications","authors":"R. Kaneko","doi":"10.1109/MEMSYS.1991.114760","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114760","url":null,"abstract":"Novel micro-tribological techniques for the evaluation of surfaces have been developed. A point contact microscope having high resolution and using an ultralight load was developed to measure topographies, adhesive forces, hardnesses, and wear of surfaces. A controlled frictional force microscope was also developed to measure frictional force distributions without stick-slip motion. A scanning tunneling microscopy technique is used to evaluate lubricant monolayers. Micropatterning, micromachining, and point recording techniques are progressing with the technology of microtribology. It is concluded that microtribology is closely connected with the technology of micro-electromechanical systems (MEMS), and both technologies will progress with cooperative work.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"93 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115312876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114783
K. Ikuta, A. Kawahara, S. Yamazumi
A new type of miniature actuator, the so-called cybernetic actuator, for medical application has been proposed and developed. The cybernetic actuator has four driving states: free, increasing, decreasing and locked. A rotary-type cybernetic actuator and a linear-type cybernetic actuator driven by piezoelectric devices have been constructed. The feasibility of both actuators was verified by driving experiments.<>
{"title":"Miniature cybernetic actuators using piezoelectric device","authors":"K. Ikuta, A. Kawahara, S. Yamazumi","doi":"10.1109/MEMSYS.1991.114783","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114783","url":null,"abstract":"A new type of miniature actuator, the so-called cybernetic actuator, for medical application has been proposed and developed. The cybernetic actuator has four driving states: free, increasing, decreasing and locked. A rotary-type cybernetic actuator and a linear-type cybernetic actuator driven by piezoelectric devices have been constructed. The feasibility of both actuators was verified by driving experiments.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125425499","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114763
A.P. Lee, A. Pisano, L. Lin
Micro-electromechanical structures made of polycrystalline silicon (poly-Si) have been fabricated, analyzed, and tested for repetitive impact at frequencies of up to 14 kHz and for durations of 46 continuous hours in order to characterize both normal and tangential impact on the microscale. Nonlinear dynamic models of the impact bumper and target impact wall have been formulated using coefficients of restitution for both normal and tangential impact. It was estimated that the coefficient of restitution can be very small (0-0.25), which indicates that the impact of poly-Si microstructures can, under certain circumstances, dissipate substantial kinetic energy. An analytic model assuming Coulomb friction and no sliding during oblique impact has been formulated, and it is believed that slipping indeed exists, requiring a more complicated model. A wear test has been carried out with a design of a microstructure to generate large surface contact stress (approximately 2 GPa) resulting from impact. After 12 hours of testing, a surface defect in the impacting surface is observable.<>
{"title":"Normal and tangential impact in micro electromechanical structures","authors":"A.P. Lee, A. Pisano, L. Lin","doi":"10.1109/MEMSYS.1991.114763","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114763","url":null,"abstract":"Micro-electromechanical structures made of polycrystalline silicon (poly-Si) have been fabricated, analyzed, and tested for repetitive impact at frequencies of up to 14 kHz and for durations of 46 continuous hours in order to characterize both normal and tangential impact on the microscale. Nonlinear dynamic models of the impact bumper and target impact wall have been formulated using coefficients of restitution for both normal and tangential impact. It was estimated that the coefficient of restitution can be very small (0-0.25), which indicates that the impact of poly-Si microstructures can, under certain circumstances, dissipate substantial kinetic energy. An analytic model assuming Coulomb friction and no sliding during oblique impact has been formulated, and it is believed that slipping indeed exists, requiring a more complicated model. A wear test has been carried out with a design of a microstructure to generate large surface contact stress (approximately 2 GPa) resulting from impact. After 12 hours of testing, a surface defect in the impacting surface is observable.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"114 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123360017","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114768
Michael W. Judy, Young-Ho Cho, Roger T. Howe, A. Pisano
Composite LPCVD polysilicon/silicon nitride flexures have been fabricated on the sidewalls of previously patterned polysilicon mesas by anisotropic reactive-ion etching. Cantilever beams 450 nm thick (150 nm of silicon nitride and 300 nm of polysilicon) and 2.5 mu m wide (the mesa height) were fabricated. Upon release from the sidewall, the cantilever deflects laterally away from the mesa due to a large built-in bending moment arising from the compressive residual stress in the polysilicon layer and the tensile residual stress in the silicon nitride layer. End deflections of about 20 mu m are observed for 70 mu m-long cantilevers. This self-adjusting microstructure (SAMS) makes use of residual stresses in thin films to reduce intercomponent clearances or to apply preloads in micromechanical systems. The authors present a design theory for SAMS, describe the fabrication process in detail, and discuss the results of initial experiments.<>
{"title":"Self-adjusting microstructures (SAMS)","authors":"Michael W. Judy, Young-Ho Cho, Roger T. Howe, A. Pisano","doi":"10.1109/MEMSYS.1991.114768","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114768","url":null,"abstract":"Composite LPCVD polysilicon/silicon nitride flexures have been fabricated on the sidewalls of previously patterned polysilicon mesas by anisotropic reactive-ion etching. Cantilever beams 450 nm thick (150 nm of silicon nitride and 300 nm of polysilicon) and 2.5 mu m wide (the mesa height) were fabricated. Upon release from the sidewall, the cantilever deflects laterally away from the mesa due to a large built-in bending moment arising from the compressive residual stress in the polysilicon layer and the tensile residual stress in the silicon nitride layer. End deflections of about 20 mu m are observed for 70 mu m-long cantilevers. This self-adjusting microstructure (SAMS) makes use of residual stresses in thin films to reduce intercomponent clearances or to apply preloads in micromechanical systems. The authors present a design theory for SAMS, describe the fabrication process in detail, and discuss the results of initial experiments.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"2008 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127313763","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114791
K. Ishihara, J. Tanouchi, A. Kitabatake, T. Kamada, S. Kishimoto
To detect the very precise motion of a micromachine in a human body noninvasively, the authors have developed a high-speed digital subtraction echocardiography system. The principle of this system is real-time digital subtraction of high-speed (high frame-rate) B-mode echograms. Serial image subtraction of successive frames of B-mode echograms (with a subtraction interval of less than 10 msec) enables one to detect fine differences in the mechanical motion of a micromachine between a mask image and the consecutive live image. The potential of this system in the area of medical micromachines is demonstrated with particular reference to the two-dimensional tracking of microparticles in a cardiac cavity and the visualization of fine tissue motion caused by an artificial actuator.<>
{"title":"Noninvasive and precise motion detection for micromachines using high-speed digital subtraction echography (high-speed DSE)","authors":"K. Ishihara, J. Tanouchi, A. Kitabatake, T. Kamada, S. Kishimoto","doi":"10.1109/MEMSYS.1991.114791","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114791","url":null,"abstract":"To detect the very precise motion of a micromachine in a human body noninvasively, the authors have developed a high-speed digital subtraction echocardiography system. The principle of this system is real-time digital subtraction of high-speed (high frame-rate) B-mode echograms. Serial image subtraction of successive frames of B-mode echograms (with a subtraction interval of less than 10 msec) enables one to detect fine differences in the mechanical motion of a micromachine between a mask image and the consecutive live image. The potential of this system in the area of medical micromachines is demonstrated with particular reference to the two-dimensional tracking of microparticles in a cardiac cavity and the visualization of fine tissue motion caused by an artificial actuator.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133814835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114786
K. Noguchi, H. Fujita, M. Suzuki, N. Yoshimura
The coefficient of maximum static friction was measured and evaluated for various thin films deposited by plasma CVD (chemical vapor deposition), the sol-gel method, and vacuum evaporation on a glass substrate and a silicon wafer. Millimeter-size movers driven electrostatically slide on these films to measure friction coefficients. From the experimental results, it was found that the friction coefficients are dependent on the type of specimen and the preparation method. When the glass plate was used as the mover's bottom, the coefficients of maximum static friction for a ZrO/sub 2/ (sol-gel) film, an Al (evaporation) film, a Si (evaporation) film, a glass substrate, a silicon wafer, and a SiN/sub x/ (CVD) were found to be small. Against the silicon wafer, an SiO/sub 2/ (evaporation) film, a glass substrate, and a ZrO/sub 2/ (sol-gel) film give small coefficients of maximum static friction.<>
{"title":"The measurements of friction on micromechatronics elements","authors":"K. Noguchi, H. Fujita, M. Suzuki, N. Yoshimura","doi":"10.1109/MEMSYS.1991.114786","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114786","url":null,"abstract":"The coefficient of maximum static friction was measured and evaluated for various thin films deposited by plasma CVD (chemical vapor deposition), the sol-gel method, and vacuum evaporation on a glass substrate and a silicon wafer. Millimeter-size movers driven electrostatically slide on these films to measure friction coefficients. From the experimental results, it was found that the friction coefficients are dependent on the type of specimen and the preparation method. When the glass plate was used as the mover's bottom, the coefficients of maximum static friction for a ZrO/sub 2/ (sol-gel) film, an Al (evaporation) film, a Si (evaporation) film, a glass substrate, a silicon wafer, and a SiN/sub x/ (CVD) were found to be small. Against the silicon wafer, an SiO/sub 2/ (evaporation) film, a glass substrate, and a ZrO/sub 2/ (sol-gel) film give small coefficients of maximum static friction.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126756960","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114762
K. Suzuki, H. Tanigawa
Three types of rotational micromotors, stepping, harmonic, and gyro-like side-drives, are presented. The rotors, poles, and stators are made of a thick single crystal silicon layer by using boron-diffused silicon etch stop to define the thickness and using anisotropic dry etching to form narrow and deep separation gaps. The rotor stoppers are fabricated by polysilicon trench filling and sacrificial layer etching processes. The silicon chips are electrostatically bonded onto glass chips, followed by unmasked wafer dissolution, freeing the rotors so that they can move. The novel process successfully provided micromotors with a 50 mu m diameter rotor.<>
{"title":"Single crystal silicon rotational micromotors","authors":"K. Suzuki, H. Tanigawa","doi":"10.1109/MEMSYS.1991.114762","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114762","url":null,"abstract":"Three types of rotational micromotors, stepping, harmonic, and gyro-like side-drives, are presented. The rotors, poles, and stators are made of a thick single crystal silicon layer by using boron-diffused silicon etch stop to define the thickness and using anisotropic dry etching to form narrow and deep separation gaps. The rotor stoppers are fabricated by polysilicon trench filling and sacrificial layer etching processes. The silicon chips are electrostatically bonded onto glass chips, followed by unmasked wafer dissolution, freeing the rotors so that they can move. The novel process successfully provided micromotors with a 50 mu m diameter rotor.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125402429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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