Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114802
R. Sawada, H. Tanaka, O. Ohguchi, J. Shimada, S. Hara
A novel integrated optical micro-encoder based on diffraction is presented, which can measure the relative distance traveled against a grating (scale) in the grating vector direction. A measurement resolution of less than 0.01 mu m is possible. The encoder is extremely small, only 500- mu m square, which is 1/100 the size of conventional encoders. Therefore, the encoder can be incorporated into a micro-machine and can be moved at high speed, since its inertia is extremely low. This encoder can be used even when the gap between the encoder and the grating is a few hundred micrometers.<>
{"title":"Fabrication of active integrated optical micro-encoder","authors":"R. Sawada, H. Tanaka, O. Ohguchi, J. Shimada, S. Hara","doi":"10.1109/MEMSYS.1991.114802","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114802","url":null,"abstract":"A novel integrated optical micro-encoder based on diffraction is presented, which can measure the relative distance traveled against a grating (scale) in the grating vector direction. A measurement resolution of less than 0.01 mu m is possible. The encoder is extremely small, only 500- mu m square, which is 1/100 the size of conventional encoders. Therefore, the encoder can be incorporated into a micro-machine and can be moved at high speed, since its inertia is extremely low. This encoder can be used even when the gap between the encoder and the grating is a few hundred micrometers.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"91 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133320455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114779
K. Udayakumar, S. Bart, A. Flynn, J. Chen, L. Tavrow, L. Cross, R. A. Brooks, D. Ehrlich
Ferroelectric thin films of lead zirconate titanate (PZT) of morphotropic phase-boundary composition have been fabricated by a sol-gel spin-on technique for application to a new family of flexure-wave piezoelectric micromotors characterized by low speed and high torque. The high relative dielectric constant (1300) and breakdown strength (1 MV/cm) of the films lead to high stored energy densities. The piezoelectric coefficients d/sub 33/ and d/sub 31/ were measured to be 220 pC/N and -88 pC/N, respectively; the electromechanical coupling factors calculated from these data were k/sub 33/=0.49, k/sub 31/=0.22, and k/sub p/=0.32. The development of the piezoelectric ultrasonic micromotors from the PZT thin films and the architecture of the stator structure are described. Nonoptimized prototype micromotors show rotational velocities of 100-300 rpm and net normalized torques in the pN-m/V/sup 2/ range.<>
{"title":"Ferroelectric thin film ultrasonic micromotors","authors":"K. Udayakumar, S. Bart, A. Flynn, J. Chen, L. Tavrow, L. Cross, R. A. Brooks, D. Ehrlich","doi":"10.1109/MEMSYS.1991.114779","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114779","url":null,"abstract":"Ferroelectric thin films of lead zirconate titanate (PZT) of morphotropic phase-boundary composition have been fabricated by a sol-gel spin-on technique for application to a new family of flexure-wave piezoelectric micromotors characterized by low speed and high torque. The high relative dielectric constant (1300) and breakdown strength (1 MV/cm) of the films lead to high stored energy densities. The piezoelectric coefficients d/sub 33/ and d/sub 31/ were measured to be 220 pC/N and -88 pC/N, respectively; the electromechanical coupling factors calculated from these data were k/sub 33/=0.49, k/sub 31/=0.22, and k/sub p/=0.32. The development of the piezoelectric ultrasonic micromotors from the PZT thin films and the architecture of the stator structure are described. Nonoptimized prototype micromotors show rotational velocities of 100-300 rpm and net normalized torques in the pN-m/V/sup 2/ range.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"139 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132365244","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114787
R. Mullen, M. Mehregany, M. P. Omar, W. Ko
The authors report detailed modeling of step-up boundary conditions in surface micromachined beams and investigate their effects on the onset of buckling in doubly supported beams. Both cantilever and doubly supported beams are considered. Finite element analysis is used to accurately model the mechanical behavior of the step-up boundary conditions. An extended beam model which uses equivalent torsional and axial stiffnesses in conjunction with a simply supported boundary condition is developed to account for the finite stiffness of a step-up boundary condition. The finite element results are used to calculate the values of the equivalent stiffnesses of the extended beam model for practical geometries of step-up boundary conditions. The extended beam model is used to calculate buckling loads for doubly supported beams. Equivalent stiffness values for torsional and axial springs are for geometries of practical importance to microelectromechanical systems.<>
{"title":"Theoretical modeling of boundary conditions in microfabricated beams","authors":"R. Mullen, M. Mehregany, M. P. Omar, W. Ko","doi":"10.1109/MEMSYS.1991.114787","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114787","url":null,"abstract":"The authors report detailed modeling of step-up boundary conditions in surface micromachined beams and investigate their effects on the onset of buckling in doubly supported beams. Both cantilever and doubly supported beams are considered. Finite element analysis is used to accurately model the mechanical behavior of the step-up boundary conditions. An extended beam model which uses equivalent torsional and axial stiffnesses in conjunction with a simply supported boundary condition is developed to account for the finite stiffness of a step-up boundary condition. The finite element results are used to calculate the values of the equivalent stiffnesses of the extended beam model for practical geometries of step-up boundary conditions. The extended beam model is used to calculate buckling loads for doubly supported beams. Equivalent stiffness values for torsional and axial springs are for geometries of practical importance to microelectromechanical systems.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134375827","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114797
Koichi Suzumori, S. Iikura, H. Tanaka
A new type of flexible microactuator (FMA) has been developed for use in miniature robots. They are constructed using fiber-reinforced rubber and are actuated by an electropneumatic or electrohydraulic system. These microactuators have many degrees of freedom (including pitch, yaw, and stretch), making them suitable for robotic mechanisms such as arms, legs, or fingers. Pliant miniature robots can be created by combining FMAs. One example is a robot arm a few millimeters in diameter with seven degrees of freedom. The basic characteristics of the FMAs have been analyzed theoretically and experimentally. It is noted that, since the statistics and dynamics are predicted easily, FMAs can be designed efficiently.<>
{"title":"Flexible microactuator for miniature robots","authors":"Koichi Suzumori, S. Iikura, H. Tanaka","doi":"10.1109/MEMSYS.1991.114797","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114797","url":null,"abstract":"A new type of flexible microactuator (FMA) has been developed for use in miniature robots. They are constructed using fiber-reinforced rubber and are actuated by an electropneumatic or electrohydraulic system. These microactuators have many degrees of freedom (including pitch, yaw, and stretch), making them suitable for robotic mechanisms such as arms, legs, or fingers. Pliant miniature robots can be created by combining FMAs. One example is a robot arm a few millimeters in diameter with seven degrees of freedom. The basic characteristics of the FMAs have been analyzed theoretically and experimentally. It is noted that, since the statistics and dynamics are predicted easily, FMAs can be designed efficiently.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"61 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123250093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114778
K. Ikuta, M. Tsukamoto, S. Hirose
An advanced mathematical model of a shape memory alloy (SMA) useful for designing SMA micro-devices is proposed and applied to coil spring theory to analyze the appropriate mechanical and electrical characteristics. This model can handle three phases of the SMA: the parent phase, the martensitic phase, and the R-phase. of three steps. First, the mechanical properties of the three phases are modeled at the solid mechanics level. Second, a model of thermoelectric transformation is obtained at the thermodynamic level. Finally, the first and second steps are combined. The model was applied to coil spring theory and was verified successfully by experiments under general conditions.<>
{"title":"Mathematical model and experimental verification of shape memory alloy for designing micro actuator","authors":"K. Ikuta, M. Tsukamoto, S. Hirose","doi":"10.1109/MEMSYS.1991.114778","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114778","url":null,"abstract":"An advanced mathematical model of a shape memory alloy (SMA) useful for designing SMA micro-devices is proposed and applied to coil spring theory to analyze the appropriate mechanical and electrical characteristics. This model can handle three phases of the SMA: the parent phase, the martensitic phase, and the R-phase. of three steps. First, the mechanical properties of the three phases are modeled at the solid mechanics level. Second, a model of thermoelectric transformation is obtained at the thermodynamic level. Finally, the first and second steps are combined. The model was applied to coil spring theory and was verified successfully by experiments under general conditions.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117017591","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114773
C. Kuo, T. Masuzawa, M. Fujino
A novel process for fabricating a micropipe has been developed. This process is based on electrochemical deposition of metal onto a core or a microelectrode which is prepared by WEDG (wire electrodischarge grinding). This procedure is simple and the entire process can be carried out automatically. Using this method, one can produce a high-accuracy micropipe with a length 100 times its inner diameter. A 3-mm-long micropipe of 23- mu m I.D. and 186- mu m O.D. with extremely high precision of straightness, roundness, and concentricity was successfully manufactured. Owing to the advantages of WEDG, the inner and outer shapes of the micropipe can be controlled independently, and produceable shapes include various irregular sections, such as triangular, rectangular, and polygonal sections.<>
{"title":"A micropipe fabrication process","authors":"C. Kuo, T. Masuzawa, M. Fujino","doi":"10.1109/MEMSYS.1991.114773","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114773","url":null,"abstract":"A novel process for fabricating a micropipe has been developed. This process is based on electrochemical deposition of metal onto a core or a microelectrode which is prepared by WEDG (wire electrodischarge grinding). This procedure is simple and the entire process can be carried out automatically. Using this method, one can produce a high-accuracy micropipe with a length 100 times its inner diameter. A 3-mm-long micropipe of 23- mu m I.D. and 186- mu m O.D. with extremely high precision of straightness, roundness, and concentricity was successfully manufactured. Owing to the advantages of WEDG, the inner and outer shapes of the micropipe can be controlled independently, and produceable shapes include various irregular sections, such as triangular, rectangular, and polygonal sections.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129425310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1991-01-30DOI: 10.1109/MEMSYS.1991.114774
S. Nagaoka
The author describes a novel technique for switching and splicing single-mode fibers that uses micromagnetic alloy tubes. A micro-magnetic alloy tube, with an inner diameter a few microns larger than that of a standard single-mode fiber and a thickness of several tens of microns, has been successfully fabricated by a combination of the metallization and etching of a glass fiber. The tube can easily be inserted into the fiber and fixed by adhesive to construct an optical switch or to splice fibers. The developed mechanically actuated single-mode fiber switch has a latching-type switching mechanism and exhibits a low insertion loss of 0.9 dB and a low driving power of 9 mW with a relatively short switching response time of <6 ms. It exhibits high stable operation throughout endurance, vibration, and shock tests. The microtube has also been applied to single-mode fiber splicing. In the tube, facing fibers can be aligned with a lateral misalignment of less than 2 mu m. Transparent adhesive is used to bond the fibers to the tube. The adhesive also serves as an index matching fluid to reduce the Fresnel reflection loss at the fiber ends. The measured splicing losses are 0.3-0.5 dB.<>
{"title":"Micro-magnetic alloy tubes for switching and splicing single-mode fibers","authors":"S. Nagaoka","doi":"10.1109/MEMSYS.1991.114774","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114774","url":null,"abstract":"The author describes a novel technique for switching and splicing single-mode fibers that uses micromagnetic alloy tubes. A micro-magnetic alloy tube, with an inner diameter a few microns larger than that of a standard single-mode fiber and a thickness of several tens of microns, has been successfully fabricated by a combination of the metallization and etching of a glass fiber. The tube can easily be inserted into the fiber and fixed by adhesive to construct an optical switch or to splice fibers. The developed mechanically actuated single-mode fiber switch has a latching-type switching mechanism and exhibits a low insertion loss of 0.9 dB and a low driving power of 9 mW with a relatively short switching response time of <6 ms. It exhibits high stable operation throughout endurance, vibration, and shock tests. The microtube has also been applied to single-mode fiber splicing. In the tube, facing fibers can be aligned with a lateral misalignment of less than 2 mu m. Transparent adhesive is used to bond the fibers to the tube. The adhesive also serves as an index matching fluid to reduce the Fresnel reflection loss at the fiber ends. The measured splicing losses are 0.3-0.5 dB.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116885905","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1109/MEMSYS.1991.114765
K. Wise
The author examines the opportunities and challenges facing the development of integrated microelectromechanical systems (MEMS). It has now been established that micromachined sensors can be produced with high yield and merged with integrated electronics, both in monolithic chips and in hybrid multichip assemblies. For some types of sensors, accuracy is approaching 16 bits, and VLSI interface circuits are being defined to allow features such as self-testing and digital compensation to be used. Continuing technical challenges for full MEMS include the development of processes capable of three-dimensional microstructures, improved drive technologies for microactuators, better approaches to packaging and microassembly, and the creation of workstation-based simulators, operating from rich databases of materials and structural information. Formidable challenges in non-technical areas are also posed, including the definition of appropriate applications for MEMS and the accomplishment of the needed changes in established host systems to take advantage of their features. These issues are illustrated by several devices currently being developed, including integrated neuroelectronic interfaces, pressure and flow sensors, microvalves, and scan tips for near-field microscopy.<>
{"title":"Integrated microelectromechanical systems: A perspective on MEMS in the 90s","authors":"K. Wise","doi":"10.1109/MEMSYS.1991.114765","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114765","url":null,"abstract":"The author examines the opportunities and challenges facing the development of integrated microelectromechanical systems (MEMS). It has now been established that micromachined sensors can be produced with high yield and merged with integrated electronics, both in monolithic chips and in hybrid multichip assemblies. For some types of sensors, accuracy is approaching 16 bits, and VLSI interface circuits are being defined to allow features such as self-testing and digital compensation to be used. Continuing technical challenges for full MEMS include the development of processes capable of three-dimensional microstructures, improved drive technologies for microactuators, better approaches to packaging and microassembly, and the creation of workstation-based simulators, operating from rich databases of materials and structural information. Formidable challenges in non-technical areas are also posed, including the definition of appropriate applications for MEMS and the accomplishment of the needed changes in established host systems to take advantage of their features. These issues are illustrated by several devices currently being developed, including integrated neuroelectronic interfaces, pressure and flow sensors, microvalves, and scan tips for near-field microscopy.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"97 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114580970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1109/MEMSYS.1991.114766
M. Esashi, K. Minami, S. Shoji
New optical exposure systems for patterning on nonplanar surfaces were developed. One of them is the photoresist exposure system; the other is the Parylene laser ablation system with KrF excimer laser. Microprobe multielectrodes for recording neuron impulses were fabricated with the photoresist exposure system. However, this method has the disadvantage that it is difficult to coat a nonplanar surface with photoresist uniformly. It is demonstrated that Parylene can be coated uniformly on a nonplanar surface and be patterned by a Parylene laser ablation system. A Cr line with a 10 mu m width on a glass plate was patterned by Parylene laser ablation and the subsequent lift-off technique. This process is useful for patterning thin film on nonplanar surfaces.<>
{"title":"Optical exposure systems for three-dimensional fabrication of microprobe","authors":"M. Esashi, K. Minami, S. Shoji","doi":"10.1109/MEMSYS.1991.114766","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114766","url":null,"abstract":"New optical exposure systems for patterning on nonplanar surfaces were developed. One of them is the photoresist exposure system; the other is the Parylene laser ablation system with KrF excimer laser. Microprobe multielectrodes for recording neuron impulses were fabricated with the photoresist exposure system. However, this method has the disadvantage that it is difficult to coat a nonplanar surface with photoresist uniformly. It is demonstrated that Parylene can be coated uniformly on a nonplanar surface and be patterned by a Parylene laser ablation system. A Cr line with a 10 mu m width on a glass plate was patterned by Parylene laser ablation and the subsequent lift-off technique. This process is useful for patterning thin film on nonplanar surfaces.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127003640","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1109/MEMSYS.1991.114793
M. M. Farooqui, A. Evans
The sacrificial etch technology for fabricating free-standing three-dimensional microstructures in polysilicon has been successfully implemented. A variety of techniques for reducing the intrinsic compressive stress have been employed in fabricating low stress structures. Low-temperature-deposited microcrystalline polysilicon and polysilicon deposited over doped oxide were found to have low intrinsic stress, without additional annealing. A simple technique for obtaining additional compliance in diaphragms is described. Anisotropically etched submicron fibers and plastically deformed polysilicon shells are some of the unusual devices that have been obtained.<>
{"title":"Polysilicon microstructures","authors":"M. M. Farooqui, A. Evans","doi":"10.1109/MEMSYS.1991.114793","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114793","url":null,"abstract":"The sacrificial etch technology for fabricating free-standing three-dimensional microstructures in polysilicon has been successfully implemented. A variety of techniques for reducing the intrinsic compressive stress have been employed in fabricating low stress structures. Low-temperature-deposited microcrystalline polysilicon and polysilicon deposited over doped oxide were found to have low intrinsic stress, without additional annealing. A simple technique for obtaining additional compliance in diaphragms is described. Anisotropically etched submicron fibers and plastically deformed polysilicon shells are some of the unusual devices that have been obtained.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121552318","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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