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2018 IEEE 38th International Electronics Manufacturing Technology Conference (IEMT)最新文献

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An Introduction of Strip Chopping Cut Method to Establish a Robust Strip Based Dicing Process on Tape Dicing Concept 介绍了基于带切概念的带切法建立鲁棒带切工艺的方法
Ibn'Asyura Zainuddin
Tape dicing concept is most commonly used in miniature QFN package singulation process due to its low operating cost and high throughput [1]. Processing with strip based material, starting from saw singulation to unit transfer into reel tape, while sawn unit still intact on dicing tape, robust process is needed as well as short cycle time for productivity. Currently, there are 2 common tape dicing methods. Firstly, strip cutting method, and secondly, strip to panel cutting method [2]. Both methods have pros & cons respectively. Nevertheless, in order to improve cycle time, extreme processing method is needed without jeopardizing the processing quality. Introducing this strip chopping cut method enables singulation process of maximum unit density per 12 inches wafer ring and processing abnormal lead frame design with thick metal side rail and moulded-only layer on panel. This method needs dicing blade to directly touch down on top of moulded package during cutting without fully cut metal side rail. In this paper, will further discuss in details how it works and what are the pros and cons, as well as its benefits.
胶带切割概念由于其低运行成本和高吞吐量,最常用于微型QFN封装模拟工艺中[1]。以条状材料为基础的加工,从锯模拟到单元转移到卷筒带,而锯单元仍然完好无损地放在切割带上,需要稳健的工艺和较短的生产周期时间。目前,有两种常见的胶带切割方法。一是带材切割法,二是带材到面板切割法[2]。这两种方法各有利弊。然而,为了提高循环时间,需要在不影响加工质量的前提下采用极端的加工方法。引入这种条带切割方法,可以实现每12英寸晶圆环最大单位密度的模拟工艺,并可以处理带有厚金属侧轨和面板上仅模制层的异常引线框架设计。这种方法在切割过程中需要切割刀片直接触碰到成型包的顶部,而不需要完全切割金属侧轨。在本文中,将进一步详细讨论它是如何工作的,优缺点是什么,以及它的好处。
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引用次数: 6
Assessment Methodology on Mold Void Defect by Scanning Acoustic Microscopy (SAM) Non-Destructive Technique 基于扫描声显微镜(SAM)无损技术的模具空洞缺陷评价方法
Eric Wong Soon Kiong, C. Y. Lai
Scanning acoustic microcopy (SAM) method with inverted inspection direction has been successfully develop and evaluate the quality of flip chip underfill and interconnect bonds in manufacturing of microelectronic components. Acoustic microscopes utilize high frequency ultrasound transmitting through the silicon chip backside in one scan to access and examine the internal structures in optically opaque materials. These non-destructive methods relatively enable the defect localization which leads microstructural examinations involving destructive analysis sample preparation. For the justification of accuracy of SAM method analysis, a destructive cross-sectioned and mechanical lapping physical analysis were performed for preparing the samples and examine by optical microscope and Scanning Electron Microscope (SEM) for defect verification. Cases studies have been demonstrated that the capabilities of conventional SAM inspection and advantages over other analysis method.
在微电子元件制造中,成功地开发了一种反向检测方向的扫描声学显微复制(SAM)方法,并对倒装芯片衬底和互连键的质量进行了评价。声学显微镜利用高频超声通过硅片背面进行一次扫描,以进入和检查光学不透明材料的内部结构。这些非破坏性的方法相对地使缺陷定位,从而导致涉及破坏性分析样品制备的微观结构检查。为了验证SAM方法分析的准确性,对样品的制备进行了破坏截面和机械研磨物理分析,并通过光学显微镜和扫描电镜(SEM)进行了缺陷验证。实例研究表明了传统的SAM检测方法的能力和优于其他分析方法的优点。
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引用次数: 3
Design of a Compact PIFA Tag Antenna for Wearable Electronics 用于可穿戴电子产品的紧凑型PIFA标签天线设计
Wai-Hau Ng, Yang-Hong Lee, E. Lim, B. Chung
A UHF RFID wristband tag is designed using a planar inverted-F antenna (PIFA). With the use of the folding technique and the PP-2 soft foam substrate, the tag can be made compact, light-weight, and flexible for electronic package. The tag's footprint is only 900 mm2 with almost 100% power transmission. From simulation, the wristband tag has a theoretical read range of 8.3 m at 923 MHz when placed on a rectangular phantom. With a 3.28 W EIRP, it is also experimentally demonstrated that the wristband tag can be read from 5.1 m when it is tested on minced meat.
采用平面倒f天线(PIFA)设计了超高频RFID腕带标签。采用折叠技术和PP-2软泡基板,可以使标签体积小、重量轻、便于电子封装。该标签的占地面积只有900平方毫米,几乎100%的电力传输。从模拟来看,当放置在矩形模体上时,腕带标签在923 MHz下的理论读取范围为8.3 m。在3.28 W的EIRP下,实验还证明了腕带标签在肉末上测试时可以从5.1 m读取。
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引用次数: 1
Die Pad Delamination on QFN Package QFN封装的模垫分层
C. Chiew, Paing Samsun, L. Vigneswaran, A. Ang
There are many QFN packaged ICs with different die pad design widely used in semiconductor industry. With minimum delta on die pad size and chip size ratio, this will continue maximize the package functionality in same package size, yet attractive cost packaged ICs. However, a different die pad size to chip ratio lead to different stress level to building part which resulted different delamination level in package. Not to miss out the stress created by manufacturing process with its tool construction which cause delamination to package in addition. In general, there are 2 types of stress; tensile stress and shear stress. It is easy to tackle the stress related delamination to mechanical faulty compare to thermal induced stress. The root cause of thermal induced stress may involve more than one heat treatment's processes imposed on ICs manufacturing line. A change of package design or bill of material (BOM) may be incurred to overcome the delamination due to thermal resulted stress. In this paper, a thermal simulation was carried out firstly on affected package design impacted with die pad delamination. The result confirms that high thermal stress was localised on affected die pad area with addition high warpage observed. This was lead to improvement activities on warpage, which was caused by different heat treatment process. A statistical study on warpage behaviour was conducted to different heat treatment process (die bonded, wire bonded and mold process). Result showed that die pad delamination was related to high heat treatment process at die attached process. To prove the failure mechanism, different heat treatment temperature on die attached was statistically studied. Data was proven that die pad delamination eliminated by low heat temperature in die attached process. To make a success on die pad delamination elimination, a replacement from solder paste to glue material (same CTE as solder paste) is required during die attached process with low heat treatment temperature. After building part, glue designed into package with die attached process characterization, no die pad delamination found. With the big scale production confirmation, low heat temperature at die attached process is a proven solution on die pad delamination in success for affected package.
在半导体工业中有许多采用不同晶片设计的QFN封装ic。由于晶片尺寸和芯片尺寸比的最小差异,这将继续在相同的封装尺寸下最大化封装功能,但具有吸引力的成本封装ic。然而,不同的晶片尺寸与晶片比导致不同的应力水平,从而导致不同的封装分层程度。不要错过制造过程及其工具结构所产生的应力,这些应力会导致包装分层。一般来说,有两种类型的压力;拉应力和剪切应力。与热致应力相比,机械故障引起的应力相关分层更容易解决。热诱发应力的根本原因可能涉及到集成电路生产线上的多个热处理工艺。为了克服由于热应力造成的分层,可能需要改变包装设计或物料清单(BOM)。本文首先对受模垫分层影响的封装设计进行了热模拟。结果证实,在受影响的模垫区域存在高热应力,并观察到高翘曲。这导致了翘曲的改进活动,翘曲是由不同的热处理工艺引起的。对不同热处理工艺(模焊、丝焊和模具工艺)的翘曲行为进行了统计研究。结果表明,模垫层脱层与贴模过程中的高热处理工艺有关。为了证明其失效机理,对不同热处理温度下的模具进行了统计研究。数据证明,在贴模过程中采用低温法消除了模垫分层现象。为了成功地消除模垫分层,在贴模过程中需要在低热处理温度下将锡膏替换为胶料(与锡膏相同的CTE)。组装零件后,用胶水设计成贴合模具的封装工艺表征,没有发现模具垫分层现象。随着大规模生产的确认,贴模工艺的低热温度是解决受影响封装的模垫分层的成功方法。
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引用次数: 1
An Alternative Packaging Solution in Achieving Moisture Sensitivity Level One (1) for Small Outline Integrated Circuit (SOIC) Automotive Packages 实现小轮廓集成电路(SOIC)汽车封装的1级湿气敏感性的替代封装解决方案
A. Denoyo, Rod J. Delos Santos, T. Pinili, Darwin J. De Lazo, Ivan T. Gil Costa, Allen M. Menor
In response to the need in the semiconductor industry to have a higher moisture sensitivity level (MSL) satisfying the no delamination criteria in all interfaces for automotive devices with a reasonable cost are the main objectives in this study. To attain these tasks, knowledge of the material components and a system in the evaluation process are the key to the success of this program. Different evaluation stages were initially defined and executed depending on bill-of-material (BOM) combination and complexities. Activities will also include process refinement, material selection, leadframe design improvement and surface enhancements. Initially, all existing critical process parameter conditions were identified and optimized to ensure a delamination-free package at time zero or after assembly after which moisture soaking is done at different conditions to identify and verify MSL capability. Once found incapable for no-delamination criteria, the change in mold compound material, leadframe design enhancement, and surface roughening will be introduced. For an SOIC package with the biggest silicon die and paddle size identified as the initial qualification test vehicle using a bare copper with spot silver type of leadframe, it was found out that with the optimized process parameter conditions and with the right mold compound can already achieve MSL 1 and even after 500 temperature cycles without any form of delamination in all regions - no need for further leadframe design enhancements, surface roughening treatments and additional process for surface activation. With this result on this specific package type, additional cost adders were avoided. Likewise, this solution will be extended to other package types with different surface finish for Pre-Plated Frames (PPFs) or Nickel-Palladium-Gold (NiPdAu) to check for process consistency and material compatibility.
为了响应半导体行业对具有更高的湿度敏感性水平(MSL)的需求,以合理的成本满足汽车设备所有接口的无分层标准,这是本研究的主要目标。为了完成这些任务,材料成分的知识和评估过程中的系统是这个项目成功的关键。最初根据物料清单(BOM)组合和复杂性定义和执行不同的评估阶段。活动还将包括工艺改进、材料选择、引线框架设计改进和表面增强。最初,确定并优化了所有现有的关键工艺参数条件,以确保在零时间或组装后的无分层封装,之后在不同条件下进行水分浸泡,以确定和验证MSL能力。一旦发现无法达到无分层标准,将引入模具复合材料的改变,引线框架设计的增强和表面粗化。对于使用裸铜带点银型引线框架的最大硅模和叶片尺寸的SOIC封装,我们发现,通过优化的工艺参数条件和正确的模具化合物,即使在500个温度循环之后,所有区域都不会出现任何形式的分层,也可以达到MSL 1,无需进一步改进引线框架设计。表面粗化处理和表面活化的附加工艺。有了这个特定包类型的结果,就避免了额外的成本增加。同样,该解决方案将扩展到其他具有不同表面光面的包装类型,用于预镀框架(ppf)或镍钯金(NiPdAu),以检查工艺一致性和材料兼容性。
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引用次数: 1
Vacuum Reflow Process Characterization for Void-Less Soldering Process in Semiconductor Package 半导体封装中无空洞焊接工艺的真空回流工艺表征
Siang Miang Yeo, Azman Mahmood, Shahrul Haizal Ishak
Semiconductor packaging's solder void criteria is getting tighter overtime due to involvement of high usage in automotive industry. Semiconductor packaging component maker starts to strengthen the solder joint quality and electrical power conductivity by tighten the solder void requirement through seeking a solution in controlling the maximum solder void size reduction from 10-15% original fraction to 5% or below over die size. Vacuum reflow is introduced to overcome this challenge. Critical process parameters in vacuum reflow process including temperature and pressure were characterized for void reduction and compared to that of conventional reflow process. Promising results show that high temperature, fast depressurize rate and long pressure dwell time in low pressurized environment as well as solder paste volume increment are critical factors in providing minimum solder void sizes that successfully meet the new industry criteria.
由于半导体封装在汽车行业的高使用率,其焊点空洞标准越来越严格。半导体封装元件制造商开始通过收紧焊点空隙要求来加强焊点质量和电导率,寻求将最大焊点空隙尺寸从原来的10-15%减小到比晶片尺寸小5%或更小的解决方案。为了克服这一挑战,引入了真空回流。对真空回流工艺的温度和压力等关键工艺参数进行了表征,并与常规回流工艺进行了比较。有希望的结果表明,高温、快速的减压速率、低压力环境下的长压力停留时间以及锡膏体积的增加是提供成功满足新行业标准的最小焊点空洞尺寸的关键因素。
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引用次数: 10
A study on a stretchable conductive polymer of thermoplastic automotive device 热塑性汽车器件可拉伸导电聚合物的研究
M. Sharif, A. Saad, M. K. Abdullah, N. A. Aziz, N. A. Ismail
Advance of knowledge in material engineering has introduced stretchable electronic materials which can be stretched, bended or twisted and it is beneficial for consumer product manufacturing. This paper aims to study the effect of process combination of standard printing process in surface mount technology and thermoforming process on a stretchable conductive polymer to form a 3-dimensional electronic device. The polymer comprised of silver particles as fillers was prepared to produce a conductive and stretchable behavior which can withstand high temperature deformation. It was printed on a flat substrate using a screen printing technique and then being thermoformed to produce 3-dimensional shape of automotive rear lighting. Mechanical and electrical performances of the thermoformed product were characterized before and after thermoforming process to study the reliability of LEDs assembly with stretchable circuits. Four point probes instrument was used to measure resistivity of the printed circuit which was elongated due to thermoforming process. The elongation of circuit varied throughout the lighting prototype depending on complex geometry of mould. Conductivity of the circuit was also tested by LEDs illumination. Results of microscopy investigation, x-ray imaging and thermal cycling show good performances of LEDs joints. This new manufacturing process of printed circuit offers a promising future alternative method in manufacturing of 3dimensional electronic device. Keywords— Conductive polymer; printed electronics; thermoforming
随着材料工程知识的进步,可拉伸电子材料的出现,这种可拉伸、可弯曲或可扭曲的电子材料有利于消费品的制造。本文旨在研究表面贴装技术中的标准印刷工艺与热成型工艺相结合对可拉伸导电聚合物形成三维电子器件的影响。制备了以银粒子为填料的聚合物,使其具有耐高温变形的导电和可拉伸性能。它是用丝网印刷技术印刷在一个平坦的基板上,然后被热成型,以产生三维形状的汽车尾灯。对热成型前后产品的机械和电气性能进行了表征,以研究可拉伸电路led组件的可靠性。采用四点探头仪测量因热成型而拉长的印刷电路的电阻率。在整个照明原型中,电路的延伸率随模具复杂的几何形状而变化。通过led照明测试了电路的导电性。显微观察、x射线成像和热循环结果表明,led接头具有良好的性能。这种新的印刷电路制造工艺为三维电子器件的制造提供了一种有前途的替代方法。关键词:导电聚合物;印刷电子产品;热成型
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引用次数: 4
Implementation of PhotoMOS Relay for ATE Application 用于ATE应用的PhotoMOS中继的实现
Cheok Yong Seng, Baptist Bernhard, T. Chi
Globalization is the increasing interaction of people, states, or countries through the growth of the international flow of money, ideas, and culture. Thus, is create competition between semiconductor manufacturer to achieve low cost, high productivity, fast delivery and time to market are the vital factors to the success. Therefore, encouragement from manufacturer to looking for creative ideas with cost down reduction and high productivity [1]. Cost reduction covers a wide range such as package design optimization, process flow improvement and also testing which is the final gate before ship out the good and quality parts to customers. This paper provides the implementation of PhotoMOS relay to enhance the stability, sustainability and fastens the measurement in semiconductor automatic test equipment (ATE) testing application. Relays are an essential part in semiconductor testing application and responsible as a switch to turn on and turn off the supply voltages or currents from tester instrument through test program control during testing to ensure functionality of electronic component meeting the specification before delivering to the consumer application. The relay functionality is sensitive especially in timing, resistances and frequency because it would influence the testing measurement results, induce instability of test program and result in unnecessary yield loss and capacity loss. However, this can be resolving through optimization test program. Nevertheless, there is a limitation of the mechanical relay which could not further or resolve through the test program. In this paper, an introduction of the PhotoMOS relays and differences as compared to mechanical relays (Pickering), experimental verification results in term of switching time, resistances of the relay and hot switch in Teradyne uFLEX tester platform for speed sensor devices.
全球化是指人们、国家或国家之间通过资金、思想和文化的国际流动而日益增加的互动。因此,是创造半导体制造商之间的竞争,以实现低成本,高生产率,快速交货和市场时间是成功的关键因素。因此,制造商鼓励寻找具有降低成本和高生产率的创意[1]。降低成本的范围很广,如包装设计优化、工艺流程改进和测试,这是向客户交付优质零件之前的最后一关。本文提出了在半导体自动测试设备(ATE)测试应用中实现PhotoMOS继电器以提高测量的稳定性、可持续性和稳定性。继电器是半导体测试应用中的重要组成部分,在测试期间通过测试程序控制,负责打开和关闭测试仪器的电源电压或电流,以确保电子元件的功能在交付给消费者应用之前符合规格。继电器的功能是敏感的,特别是在时序、电阻和频率方面,因为它会影响测试测量结果,引起测试程序的不稳定,造成不必要的产量损失和容量损失。然而,这可以通过优化测试程序来解决。然而,机械继电器存在着无法通过测试程序进一步解决的局限性。本文介绍了PhotoMOS继电器及其与机械继电器(Pickering)的区别,并在Teradyne uFLEX测试平台上对速度传感器器件的开关时间、继电器电阻和热开关进行了实验验证。
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引用次数: 3
Investigation on Solder Void Formation Mechanism After High Temperatures Stress by 3D CT Scan and EDX Analysis 高温应力后焊料空洞形成机理的三维CT扫描和EDX分析
Lai Chin Yung, Ho Ing Hong, Eric Wong Soon Kiong, C. C. Fei
In recent years, flip chip packaging by application of a copper pillar bump as an interconnector within the packages has successfully shrunk the package size to a minimum level, by maintaining or maximizing the chip application functionality. Nevertheless, some weaknesses have been observed during the formation of solder joint connection between the copper pillars to die pad substrates. The most common defect, which is solder void formation at the solder joint area, will reduce the interconnection strength or robustness of the solder joint. To understand the solder void formation mechanism, a simulation experiment has been carried out by using copper and silver plated lead pad substrate for pillar solder joint formation process at different stress time interval. An analytical analysis by using 3D CT-scan has been carried out to detect the submicron size solder void defect, especially during high-temperature stress process. An elemental analysis by energy dispersive X-ray also has been carrying out to prove the substrate pad material dissolution mechanism during solder joint formation. With the experiment finding and deeply understanding the material dissolution behavior in packaging concept, this can ensure more robust pillar joint die bond process and guarantee quality packages built.
近年来,通过在封装内应用铜柱凸点作为互连器的倒装芯片封装,通过保持或最大化芯片应用功能,成功地将封装尺寸缩小到最小水平。然而,在铜柱与衬底之间的焊点连接形成过程中,观察到一些弱点。最常见的缺陷是在焊点区域形成焊料空洞,这将降低焊点的互连强度或坚固性。为了解焊点空洞形成机理,采用镀铜和镀银铅垫衬底进行了不同应力时间间隔下柱状焊点形成过程的模拟实验。利用三维ct扫描技术对亚微米尺寸的钎料空洞缺陷进行了分析分析,特别是在高温应力过程中。利用能量色散x射线进行元素分析,证明了衬底衬垫材料在焊点形成过程中的溶解机理。通过实验发现并深入了解材料在封装概念中的溶解行为,可以保证柱接模结合工艺更加坚固,保证封装质量。
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引用次数: 0
Laser Pre-cut and Its Effect on the Leadframe Warpage 激光预切割及其对引线架翘曲的影响
C.H. Wang, P. Pok, Y. S. Ng, K. Chung
ATSLP, a package in QFN type family, was introduced by Infineon using Molded Interconnect Substrate (MIS) leadframe. The MIS leadframe contain materials such as, copper, pre-mold, solder mask, and etc. With combination of MIS leadframe and high temperature flip chip die bond cause high CTE mismatch, thus, effect in higher warpage. The higher warpage affects the processability along the assembly processes which has direct relation with productivity performance and quality concerns. Stress relieve concept is introduced to improve productivity and quality, whereby warpage was reduced by separating the pre-mold and copper materials. By doing this, shrinkage of the materials was separated from each other along the change of assembly process temperature. Laser is selected as the source to perform cutting of pre-mold array. Polyimide tape is attached to the leadframe to hold the separated pre-mold array. Laser with non-contact cutting method, low thermal influence as well as having clean cut edges without burr or dust formation is ideal solution for this separation method. Through the laser precut on array method, productivity, material consumption, and output quality were improved as the warpage is significantly reduced. This paper further describe the selection of laser type, reaction of laser to polyimide tape, cutting process methods, and as well as the challenges faced along the assembly process.
ATSLP是QFN型系列的封装,由英飞凌推出,采用模制互连基板(MIS)引线框架。MIS引线框架包含铜、预模、阻焊等材料。由于MIS引线框架与高温倒装芯片模键的结合,导致CTE失配高,从而导致较高翘曲。高翘曲影响装配过程的可加工性,直接关系到生产性能和质量问题。应力释放的概念,以提高生产率和质量,从而减少翘曲通过分离的预模具和铜材料。通过这样做,材料的收缩率将随着装配过程温度的变化而相互分离。选择激光作为源,对模前阵列进行切割。聚酰亚胺胶带连接到引线框架,以保持分离的预模阵列。激光具有非接触式切割方法,热影响小,切割边缘干净,无毛刺或灰尘形成,是这种分离方法的理想解决方案。通过激光阵列预切割方法,在显著减少翘曲的同时,提高了生产效率、材料消耗和输出质量。本文进一步阐述了激光类型的选择、激光对聚酰亚胺胶带的反应、切割工艺方法以及装配过程中面临的挑战。
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引用次数: 0
期刊
2018 IEEE 38th International Electronics Manufacturing Technology Conference (IEMT)
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