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2018 IEEE 38th International Electronics Manufacturing Technology Conference (IEMT)最新文献

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An Introduction of Strip Chopping Cut Method to Establish a Robust Strip Based Dicing Process on Tape Dicing Concept 介绍了基于带切概念的带切法建立鲁棒带切工艺的方法
Ibn'Asyura Zainuddin
Tape dicing concept is most commonly used in miniature QFN package singulation process due to its low operating cost and high throughput [1]. Processing with strip based material, starting from saw singulation to unit transfer into reel tape, while sawn unit still intact on dicing tape, robust process is needed as well as short cycle time for productivity. Currently, there are 2 common tape dicing methods. Firstly, strip cutting method, and secondly, strip to panel cutting method [2]. Both methods have pros & cons respectively. Nevertheless, in order to improve cycle time, extreme processing method is needed without jeopardizing the processing quality. Introducing this strip chopping cut method enables singulation process of maximum unit density per 12 inches wafer ring and processing abnormal lead frame design with thick metal side rail and moulded-only layer on panel. This method needs dicing blade to directly touch down on top of moulded package during cutting without fully cut metal side rail. In this paper, will further discuss in details how it works and what are the pros and cons, as well as its benefits.
胶带切割概念由于其低运行成本和高吞吐量,最常用于微型QFN封装模拟工艺中[1]。以条状材料为基础的加工,从锯模拟到单元转移到卷筒带,而锯单元仍然完好无损地放在切割带上,需要稳健的工艺和较短的生产周期时间。目前,有两种常见的胶带切割方法。一是带材切割法,二是带材到面板切割法[2]。这两种方法各有利弊。然而,为了提高循环时间,需要在不影响加工质量的前提下采用极端的加工方法。引入这种条带切割方法,可以实现每12英寸晶圆环最大单位密度的模拟工艺,并可以处理带有厚金属侧轨和面板上仅模制层的异常引线框架设计。这种方法在切割过程中需要切割刀片直接触碰到成型包的顶部,而不需要完全切割金属侧轨。在本文中,将进一步详细讨论它是如何工作的,优缺点是什么,以及它的好处。
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引用次数: 6
Assessment Methodology on Mold Void Defect by Scanning Acoustic Microscopy (SAM) Non-Destructive Technique 基于扫描声显微镜(SAM)无损技术的模具空洞缺陷评价方法
Eric Wong Soon Kiong, C. Y. Lai
Scanning acoustic microcopy (SAM) method with inverted inspection direction has been successfully develop and evaluate the quality of flip chip underfill and interconnect bonds in manufacturing of microelectronic components. Acoustic microscopes utilize high frequency ultrasound transmitting through the silicon chip backside in one scan to access and examine the internal structures in optically opaque materials. These non-destructive methods relatively enable the defect localization which leads microstructural examinations involving destructive analysis sample preparation. For the justification of accuracy of SAM method analysis, a destructive cross-sectioned and mechanical lapping physical analysis were performed for preparing the samples and examine by optical microscope and Scanning Electron Microscope (SEM) for defect verification. Cases studies have been demonstrated that the capabilities of conventional SAM inspection and advantages over other analysis method.
在微电子元件制造中,成功地开发了一种反向检测方向的扫描声学显微复制(SAM)方法,并对倒装芯片衬底和互连键的质量进行了评价。声学显微镜利用高频超声通过硅片背面进行一次扫描,以进入和检查光学不透明材料的内部结构。这些非破坏性的方法相对地使缺陷定位,从而导致涉及破坏性分析样品制备的微观结构检查。为了验证SAM方法分析的准确性,对样品的制备进行了破坏截面和机械研磨物理分析,并通过光学显微镜和扫描电镜(SEM)进行了缺陷验证。实例研究表明了传统的SAM检测方法的能力和优于其他分析方法的优点。
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引用次数: 3
Design of a Compact PIFA Tag Antenna for Wearable Electronics 用于可穿戴电子产品的紧凑型PIFA标签天线设计
Wai-Hau Ng, Yang-Hong Lee, E. Lim, B. Chung
A UHF RFID wristband tag is designed using a planar inverted-F antenna (PIFA). With the use of the folding technique and the PP-2 soft foam substrate, the tag can be made compact, light-weight, and flexible for electronic package. The tag's footprint is only 900 mm2 with almost 100% power transmission. From simulation, the wristband tag has a theoretical read range of 8.3 m at 923 MHz when placed on a rectangular phantom. With a 3.28 W EIRP, it is also experimentally demonstrated that the wristband tag can be read from 5.1 m when it is tested on minced meat.
采用平面倒f天线(PIFA)设计了超高频RFID腕带标签。采用折叠技术和PP-2软泡基板,可以使标签体积小、重量轻、便于电子封装。该标签的占地面积只有900平方毫米,几乎100%的电力传输。从模拟来看,当放置在矩形模体上时,腕带标签在923 MHz下的理论读取范围为8.3 m。在3.28 W的EIRP下,实验还证明了腕带标签在肉末上测试时可以从5.1 m读取。
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引用次数: 1
Die Pad Delamination on QFN Package QFN封装的模垫分层
C. Chiew, Paing Samsun, L. Vigneswaran, A. Ang
There are many QFN packaged ICs with different die pad design widely used in semiconductor industry. With minimum delta on die pad size and chip size ratio, this will continue maximize the package functionality in same package size, yet attractive cost packaged ICs. However, a different die pad size to chip ratio lead to different stress level to building part which resulted different delamination level in package. Not to miss out the stress created by manufacturing process with its tool construction which cause delamination to package in addition. In general, there are 2 types of stress; tensile stress and shear stress. It is easy to tackle the stress related delamination to mechanical faulty compare to thermal induced stress. The root cause of thermal induced stress may involve more than one heat treatment's processes imposed on ICs manufacturing line. A change of package design or bill of material (BOM) may be incurred to overcome the delamination due to thermal resulted stress. In this paper, a thermal simulation was carried out firstly on affected package design impacted with die pad delamination. The result confirms that high thermal stress was localised on affected die pad area with addition high warpage observed. This was lead to improvement activities on warpage, which was caused by different heat treatment process. A statistical study on warpage behaviour was conducted to different heat treatment process (die bonded, wire bonded and mold process). Result showed that die pad delamination was related to high heat treatment process at die attached process. To prove the failure mechanism, different heat treatment temperature on die attached was statistically studied. Data was proven that die pad delamination eliminated by low heat temperature in die attached process. To make a success on die pad delamination elimination, a replacement from solder paste to glue material (same CTE as solder paste) is required during die attached process with low heat treatment temperature. After building part, glue designed into package with die attached process characterization, no die pad delamination found. With the big scale production confirmation, low heat temperature at die attached process is a proven solution on die pad delamination in success for affected package.
在半导体工业中有许多采用不同晶片设计的QFN封装ic。由于晶片尺寸和芯片尺寸比的最小差异,这将继续在相同的封装尺寸下最大化封装功能,但具有吸引力的成本封装ic。然而,不同的晶片尺寸与晶片比导致不同的应力水平,从而导致不同的封装分层程度。不要错过制造过程及其工具结构所产生的应力,这些应力会导致包装分层。一般来说,有两种类型的压力;拉应力和剪切应力。与热致应力相比,机械故障引起的应力相关分层更容易解决。热诱发应力的根本原因可能涉及到集成电路生产线上的多个热处理工艺。为了克服由于热应力造成的分层,可能需要改变包装设计或物料清单(BOM)。本文首先对受模垫分层影响的封装设计进行了热模拟。结果证实,在受影响的模垫区域存在高热应力,并观察到高翘曲。这导致了翘曲的改进活动,翘曲是由不同的热处理工艺引起的。对不同热处理工艺(模焊、丝焊和模具工艺)的翘曲行为进行了统计研究。结果表明,模垫层脱层与贴模过程中的高热处理工艺有关。为了证明其失效机理,对不同热处理温度下的模具进行了统计研究。数据证明,在贴模过程中采用低温法消除了模垫分层现象。为了成功地消除模垫分层,在贴模过程中需要在低热处理温度下将锡膏替换为胶料(与锡膏相同的CTE)。组装零件后,用胶水设计成贴合模具的封装工艺表征,没有发现模具垫分层现象。随着大规模生产的确认,贴模工艺的低热温度是解决受影响封装的模垫分层的成功方法。
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引用次数: 1
An Alternative Packaging Solution in Achieving Moisture Sensitivity Level One (1) for Small Outline Integrated Circuit (SOIC) Automotive Packages 实现小轮廓集成电路(SOIC)汽车封装的1级湿气敏感性的替代封装解决方案
A. Denoyo, Rod J. Delos Santos, T. Pinili, Darwin J. De Lazo, Ivan T. Gil Costa, Allen M. Menor
In response to the need in the semiconductor industry to have a higher moisture sensitivity level (MSL) satisfying the no delamination criteria in all interfaces for automotive devices with a reasonable cost are the main objectives in this study. To attain these tasks, knowledge of the material components and a system in the evaluation process are the key to the success of this program. Different evaluation stages were initially defined and executed depending on bill-of-material (BOM) combination and complexities. Activities will also include process refinement, material selection, leadframe design improvement and surface enhancements. Initially, all existing critical process parameter conditions were identified and optimized to ensure a delamination-free package at time zero or after assembly after which moisture soaking is done at different conditions to identify and verify MSL capability. Once found incapable for no-delamination criteria, the change in mold compound material, leadframe design enhancement, and surface roughening will be introduced. For an SOIC package with the biggest silicon die and paddle size identified as the initial qualification test vehicle using a bare copper with spot silver type of leadframe, it was found out that with the optimized process parameter conditions and with the right mold compound can already achieve MSL 1 and even after 500 temperature cycles without any form of delamination in all regions - no need for further leadframe design enhancements, surface roughening treatments and additional process for surface activation. With this result on this specific package type, additional cost adders were avoided. Likewise, this solution will be extended to other package types with different surface finish for Pre-Plated Frames (PPFs) or Nickel-Palladium-Gold (NiPdAu) to check for process consistency and material compatibility.
为了响应半导体行业对具有更高的湿度敏感性水平(MSL)的需求,以合理的成本满足汽车设备所有接口的无分层标准,这是本研究的主要目标。为了完成这些任务,材料成分的知识和评估过程中的系统是这个项目成功的关键。最初根据物料清单(BOM)组合和复杂性定义和执行不同的评估阶段。活动还将包括工艺改进、材料选择、引线框架设计改进和表面增强。最初,确定并优化了所有现有的关键工艺参数条件,以确保在零时间或组装后的无分层封装,之后在不同条件下进行水分浸泡,以确定和验证MSL能力。一旦发现无法达到无分层标准,将引入模具复合材料的改变,引线框架设计的增强和表面粗化。对于使用裸铜带点银型引线框架的最大硅模和叶片尺寸的SOIC封装,我们发现,通过优化的工艺参数条件和正确的模具化合物,即使在500个温度循环之后,所有区域都不会出现任何形式的分层,也可以达到MSL 1,无需进一步改进引线框架设计。表面粗化处理和表面活化的附加工艺。有了这个特定包类型的结果,就避免了额外的成本增加。同样,该解决方案将扩展到其他具有不同表面光面的包装类型,用于预镀框架(ppf)或镍钯金(NiPdAu),以检查工艺一致性和材料兼容性。
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引用次数: 1
Vacuum Reflow Process Characterization for Void-Less Soldering Process in Semiconductor Package 半导体封装中无空洞焊接工艺的真空回流工艺表征
Siang Miang Yeo, Azman Mahmood, Shahrul Haizal Ishak
Semiconductor packaging's solder void criteria is getting tighter overtime due to involvement of high usage in automotive industry. Semiconductor packaging component maker starts to strengthen the solder joint quality and electrical power conductivity by tighten the solder void requirement through seeking a solution in controlling the maximum solder void size reduction from 10-15% original fraction to 5% or below over die size. Vacuum reflow is introduced to overcome this challenge. Critical process parameters in vacuum reflow process including temperature and pressure were characterized for void reduction and compared to that of conventional reflow process. Promising results show that high temperature, fast depressurize rate and long pressure dwell time in low pressurized environment as well as solder paste volume increment are critical factors in providing minimum solder void sizes that successfully meet the new industry criteria.
由于半导体封装在汽车行业的高使用率,其焊点空洞标准越来越严格。半导体封装元件制造商开始通过收紧焊点空隙要求来加强焊点质量和电导率,寻求将最大焊点空隙尺寸从原来的10-15%减小到比晶片尺寸小5%或更小的解决方案。为了克服这一挑战,引入了真空回流。对真空回流工艺的温度和压力等关键工艺参数进行了表征,并与常规回流工艺进行了比较。有希望的结果表明,高温、快速的减压速率、低压力环境下的长压力停留时间以及锡膏体积的增加是提供成功满足新行业标准的最小焊点空洞尺寸的关键因素。
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引用次数: 10
A study on a stretchable conductive polymer of thermoplastic automotive device 热塑性汽车器件可拉伸导电聚合物的研究
M. Sharif, A. Saad, M. K. Abdullah, N. A. Aziz, N. A. Ismail
Advance of knowledge in material engineering has introduced stretchable electronic materials which can be stretched, bended or twisted and it is beneficial for consumer product manufacturing. This paper aims to study the effect of process combination of standard printing process in surface mount technology and thermoforming process on a stretchable conductive polymer to form a 3-dimensional electronic device. The polymer comprised of silver particles as fillers was prepared to produce a conductive and stretchable behavior which can withstand high temperature deformation. It was printed on a flat substrate using a screen printing technique and then being thermoformed to produce 3-dimensional shape of automotive rear lighting. Mechanical and electrical performances of the thermoformed product were characterized before and after thermoforming process to study the reliability of LEDs assembly with stretchable circuits. Four point probes instrument was used to measure resistivity of the printed circuit which was elongated due to thermoforming process. The elongation of circuit varied throughout the lighting prototype depending on complex geometry of mould. Conductivity of the circuit was also tested by LEDs illumination. Results of microscopy investigation, x-ray imaging and thermal cycling show good performances of LEDs joints. This new manufacturing process of printed circuit offers a promising future alternative method in manufacturing of 3dimensional electronic device. Keywords— Conductive polymer; printed electronics; thermoforming
随着材料工程知识的进步,可拉伸电子材料的出现,这种可拉伸、可弯曲或可扭曲的电子材料有利于消费品的制造。本文旨在研究表面贴装技术中的标准印刷工艺与热成型工艺相结合对可拉伸导电聚合物形成三维电子器件的影响。制备了以银粒子为填料的聚合物,使其具有耐高温变形的导电和可拉伸性能。它是用丝网印刷技术印刷在一个平坦的基板上,然后被热成型,以产生三维形状的汽车尾灯。对热成型前后产品的机械和电气性能进行了表征,以研究可拉伸电路led组件的可靠性。采用四点探头仪测量因热成型而拉长的印刷电路的电阻率。在整个照明原型中,电路的延伸率随模具复杂的几何形状而变化。通过led照明测试了电路的导电性。显微观察、x射线成像和热循环结果表明,led接头具有良好的性能。这种新的印刷电路制造工艺为三维电子器件的制造提供了一种有前途的替代方法。关键词:导电聚合物;印刷电子产品;热成型
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引用次数: 4
Warpage Studies of Printed Circuit Boards with Shadow Moiré and Simulations 印刷电路板的阴影变形研究与仿真
Sim Jui Oon, K. S. Tan, T. Tou, S. Yap, C. Lau, Y. T. Chin
The demand for lightweight and high functionality devices is always a driving force in development of smaller, lighter and compact electronics circuit. Printed circuit board (PCB) is the most important structure that provides interconnection and supports the components; hence its flatness is always the main concern in SMT manufacturing. In order to ensure product reliability, the monitoring of thermally induced warpage of PCB during high temperature reflow is essential. PCB deformation occurs when there is mismatch of coefficients of thermal expansion between the materials. Thermally induced warpage in PCB can be obtained from the Shadow Moiré measurement, which is a non-contact full-field optical method integrated with a high temperature oven. In this study, a single-sided, small PCB (105 mm X 100 mm X 1.5 mm) and a large, multi-layer PCB (300 mm X 180 mm X 1.6 mm) are measured and analyzed. To reduce the temperature difference between the top and bottom of the PCBs, a heating profile is designed with the use of multiple thermocouples at various positions on the PCB. In addition, finite element analysis is carried out to determine the z-axis deformation of the PCBs. The finite-element simulation is setup to mimic the heating profile in the experiment. The results of simulation are compared to the experimental measurement.
对轻量化和高功能器件的需求一直是推动更小、更轻、更紧凑电子电路发展的动力。印刷电路板(PCB)是提供互连和支持组件的最重要的结构;因此,其平面度一直是SMT制造的主要关注点。为了保证产品的可靠性,对PCB在高温回流过程中的热致翘曲进行监测是十分必要的。当材料之间的热膨胀系数不匹配时,PCB板就会发生变形。阴影莫尔测量是一种与高温烘箱相结合的非接触式全场光学测量方法,可以获得PCB中的热致翘曲。在本研究中,测量和分析了单面小型PCB (105 mm X 100 mm X 1.5 mm)和大型多层PCB (300 mm X 180 mm X 1.6 mm)。为了减少PCB顶部和底部之间的温差,在PCB上的不同位置使用多个热电偶设计了加热剖面。此外,还进行了有限元分析,确定了pcb板的z轴变形。建立了模拟实验中加热剖面的有限元模拟。仿真结果与实验测量结果进行了比较。
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引用次数: 3
Mechanical Dicing Challenges and Development on 50um Saw Street with Wafer Backside Coating (WBC) 50um背面涂层锯街机械切割的挑战与发展
Y. Chiew, J. Liong, F. Tan
The continuing package miniaturized on semiconductor industry had driven toward smaller feature sizes and higher density which will raise the hurdle of dicing. This has become a trend to increase the number of potential die per wafer (PDPW) by shrinking the saw street width to have a competitive product cost and strategically maintain the product margin that affected by yearly Average Selling Price (ASP) erosion. Producing a wafer is a fixed cost thus the more die per wafer equates to lower cost per die. Each die is separated from its neighbors by narrow saw street, which are the cut lines for singulating the die. The narrower saw street width, the more dies per wafer and the more challenging the dicing. Generally, the width of the saw streets has been reduced from former industry standard of 85um to 60um and now to latest 50um. The dicing challenges and quality issue become more crucial with the requirement of wafer backside coating (WBC), smaller die size, thinner wafer with passivation stacks on the saw street and existing of process control monitor (PCM) areas which contains the massive test structures. Key dicing quality characteristics focused in this paper are including top side chipping, passivation peeling and die side wall damage. This is most severe issue in dicing process and has induced the quality risk of customer return due to not easy or impossible to screen out at final test for those minor chipped/cracked die. Qualitative analysis will be carried out and high power microscope will be used to check for chipping condition or other defects. This paper reports the challenges faced and the successful development of 50um narrow saw street with conductive and nonconductive wafer backside coating on various thickness of wafers with six sigma process capability dicing performance and passed all the reliability stress test requirements. A comprehensive study was performed in optimizing critical dicing parameter such as blade height, suitable dicing blade and dicing tape.
半导体产业持续的封装小型化,推动著元件的特征尺寸愈来愈小、密度愈来愈高,这也增加了切片的难度。这已经成为一种趋势,通过缩小锯街宽度来增加每片晶圆(PDPW)的潜在芯片数量,以具有竞争力的产品成本,并战略性地保持受年度平均销售价格(ASP)侵蚀影响的产品利润率。生产晶圆片的成本是固定的,因此每片晶圆片的成本越高,每片晶圆片的成本就越低。每个骰子与它的邻居被狭窄的锯街分开,这些锯街是用来分隔骰子的切线。锯街宽度越窄,每片晶片的模数越多,切粒越具有挑战性。一般来说,锯街的宽度已经从以前的85um的行业标准减少到60um,现在到最新的50um。随着晶圆背面涂层的要求、更小的晶圆尺寸、更薄的晶圆和在锯路上的钝化堆以及包含大量测试结构的过程控制监视器(PCM)区域的存在,切割挑战和质量问题变得更加重要。本文重点研究了切削质量的主要特征,包括刃口脱落、钝化剥落和模具侧壁损伤。这是切割过程中最严重的问题,并且由于在最终测试中不容易或不可能筛选出那些轻微的切屑/裂纹模具,导致客户退货的质量风险。将进行定性分析,并使用高倍显微镜检查是否有碎裂或其他缺陷。本文报道了50um窄锯街所面临的挑战和成功开发的导电和不导电的硅片背面涂层,在不同厚度的硅片上具有六西格玛工艺能力,切割性能良好,并通过了所有可靠性应力测试要求。对切刀高度、合适的切刀、切刀胶带等关键切刀参数进行了优化研究。
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引用次数: 2
Investigation on Solder Void Formation Mechanism After High Temperatures Stress by 3D CT Scan and EDX Analysis 高温应力后焊料空洞形成机理的三维CT扫描和EDX分析
Lai Chin Yung, Ho Ing Hong, Eric Wong Soon Kiong, C. C. Fei
In recent years, flip chip packaging by application of a copper pillar bump as an interconnector within the packages has successfully shrunk the package size to a minimum level, by maintaining or maximizing the chip application functionality. Nevertheless, some weaknesses have been observed during the formation of solder joint connection between the copper pillars to die pad substrates. The most common defect, which is solder void formation at the solder joint area, will reduce the interconnection strength or robustness of the solder joint. To understand the solder void formation mechanism, a simulation experiment has been carried out by using copper and silver plated lead pad substrate for pillar solder joint formation process at different stress time interval. An analytical analysis by using 3D CT-scan has been carried out to detect the submicron size solder void defect, especially during high-temperature stress process. An elemental analysis by energy dispersive X-ray also has been carrying out to prove the substrate pad material dissolution mechanism during solder joint formation. With the experiment finding and deeply understanding the material dissolution behavior in packaging concept, this can ensure more robust pillar joint die bond process and guarantee quality packages built.
近年来,通过在封装内应用铜柱凸点作为互连器的倒装芯片封装,通过保持或最大化芯片应用功能,成功地将封装尺寸缩小到最小水平。然而,在铜柱与衬底之间的焊点连接形成过程中,观察到一些弱点。最常见的缺陷是在焊点区域形成焊料空洞,这将降低焊点的互连强度或坚固性。为了解焊点空洞形成机理,采用镀铜和镀银铅垫衬底进行了不同应力时间间隔下柱状焊点形成过程的模拟实验。利用三维ct扫描技术对亚微米尺寸的钎料空洞缺陷进行了分析分析,特别是在高温应力过程中。利用能量色散x射线进行元素分析,证明了衬底衬垫材料在焊点形成过程中的溶解机理。通过实验发现并深入了解材料在封装概念中的溶解行为,可以保证柱接模结合工艺更加坚固,保证封装质量。
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引用次数: 0
期刊
2018 IEEE 38th International Electronics Manufacturing Technology Conference (IEMT)
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