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2018 IEEE 38th International Electronics Manufacturing Technology Conference (IEMT)最新文献

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A Novel Electromagnetic Field Guided Interconnect for High-Performance Applications 一种用于高性能应用的新型电磁场引导互连
J. Kong, B. E. Cheah, K. Yong
A novel and high-performance interconnect structure is the core of this work. This patent-pending [1] structure is termed Guided Interconnect (GI), as its basic principle is to “guide” the electromagnetic (EM) wave of highspeed signaling in a tightly-coupled manner. It is shown that, from the research work, up to 20% higher I/O density and 40% Z-height reduction can be achieved without jeopardizing signal integrity performance. The application is not limited to semiconductor packaging, but also for printed circuit board (PCB) and flexible printed circuit (FPC).
一种新颖的高性能互连结构是这项工作的核心。这种正在申请专利的[1]结构被称为导引互连(GI),因为它的基本原理是以紧密耦合的方式“引导”高速信号的电磁波。研究表明,在不损害信号完整性性能的情况下,可以实现高达20%的I/O密度和40%的z -高度降低。其应用不仅限于半导体封装,还适用于印刷电路板(PCB)和柔性印刷电路(FPC)。
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引用次数: 0
Challenges to Improve Packages Robustness and Elimination of Mold Compound Sticking on Power Leaded Package 提高封装稳健性和消除电源引线封装上模具粘接物的挑战
M. Tay, Yun Zhao, Ming Siong Lim, Raymond Kim Swee Goh
Striving next level of better package robustness reliability level, mold compound plays vital role of the overall package quality. Together with ADEGO specific requirement, formulation optimization on releasing agent, carbon black, flame retardant and ion trapper were introduced in the first phase of improvement. Second phase improvement started where facing challenge of mold releasing performance. This paper explained the extensive research bringing better effective solution. First was the implementation of releasing agent, polyethylene wax to eliminate package crack. Secondly, the study of fine carbon particle size of 90um to overcome particle short between lead and die pad as well as to reduce hard short risk. Third implementation was introduction of ion trapper hydrotalcite type “D”, purpose is to maintain pH level of 5–7 fulfilled ADEGO requirement of C1- content <20ppm. Fourth introduction is flame retardant from metal hydroxide to organic phosphorous in order to minimize leakage issue due to the product has poor ion barrier related to chip design. With these 4 types of composition changed, random runner stick and rough surface were observed during accumulative mold shot. By switching the flame retardant to inorganic material, the mold sticking issue was eliminated during continuous molding. Further research indicates that metal hydroxide contained OH- which act as free ion and easily move around within the compound compositions. In addition, organic phosphorus is soluble in resin and obstructed the cross linking of resin and catalyst. This shows that metal hydroxide will help to improve curability and prolong continuous molding duration.
为了达到更高的封装鲁棒性可靠性水平,模具配比对整体封装质量起着至关重要的作用。结合ADEGO的具体要求,介绍了脱模剂、炭黑、阻燃剂和离子捕集剂的配方优化。针对脱模性能的挑战,开始了第二阶段的改进。本文阐述了广泛的研究带来了更好的有效解决方案。首先是实施脱模剂,聚乙烯蜡,以消除包装裂缝。其次,研究90um的细碳粒度,克服铅与模垫之间的颗粒短,降低硬短风险。第三个实施是引入“D”型水滑石离子捕集剂,目的是维持pH值在5-7之间,满足C1-含量<20ppm的ADEGO要求。第四是阻燃剂从金属氢氧化物到有机磷,以尽量减少泄漏问题,由于产品有较差的离子屏障相关的芯片设计。随着这4种成分的变化,累积结晶过程中出现了随机的流道粘条和粗糙表面。通过将阻燃剂转换为无机材料,消除了连续成型过程中的粘模问题。进一步的研究表明,金属氢氧化物中含有OH-,它作为自由离子,在化合物组成物中很容易移动。此外,有机磷易溶于树脂,阻碍了树脂与催化剂的交联。这表明氢氧化物有助于提高固化性,延长连续成型时间。
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引用次数: 0
Process Improvement for CF4/02 Microwave Plasma Decapsulation on Cu-Ag Bonding Metallurgy System Cu-Ag键合冶金系统CF4/02微波等离子体解封工艺改进
K. Julianous, P.Y. Chan, M. W. Chong
CF4/O2 microwave plasma widely used as an alternative method for mold compound decapsulation on copper wire technology devices as it has the capability to preserve wire surface and wire mechanical strength. However, some drawbacks with copper-silver bonding metallurgy system where plasma byproducts (F and O) react with copper (Cu), silver (Ag) and silicon (Si) when exposed to moist air producing undesired compound (AgCuF3, Cu2O, and SiO2) which accumulated at wedge surface that disrupted the inspection process. This reaction occurred right after taking out from microwave plasma chamber. These undesired compound formations led to wire strength degradation and resulting low wedge pull force. Therefore, prevention methods are introduced by using Ultra-High Vacuum (UHV) that able to prevent chemical reaction between plasma by-products with moist air. In addition, laser ablation able to permanently stop all the reactions. SEM inspection on wire surface after the decapped sample treatment in UHV chamber confirmed the absence of undesired compound formation and mechanical wire test shows consistent and repeatable wedge pull force results. This method is proven to provide genuine results in wire inspection analysis as well as mechanical wire test data without any influence by artifact from sample preparation process.
CF4/O2微波等离子体由于具有保持线材表面和机械强度的优点,被广泛应用于铜线技术设备上的模具化合物脱封。然而,铜银结合冶金系统的一些缺点是,当等离子体副产物(F和O)与铜(Cu)、银(Ag)和硅(Si)发生反应时,暴露在潮湿的空气中会产生不需要的化合物(AgCuF3、Cu2O和SiO2),这些化合物会积聚在楔形表面,从而破坏检测过程。从微波等离子体室中取出后立即发生了这种反应。这些不希望出现的复合地层导致钢丝强度下降,从而导致楔拔力降低。因此,介绍了利用超高真空(UHV)防止等离子体副产物与潮湿空气发生化学反应的预防方法。此外,激光烧蚀能够永久停止所有的反应。在超高压室中对试样进行脱盖处理后,对线材表面进行扫描电镜检查,证实没有出现不希望出现的复合层,机械线材测试显示出一致且可重复的楔形拉力结果。该方法已被证明在线材检测分析和机械线材测试数据中提供真实的结果,而不受样品制备过程中的工件的影响。
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引用次数: 0
Manufacturability of Ag Wire for Mass Production - Challenges and Robustness 大规模生产用银丝的可制造性——挑战与稳健性
Que Wei, Loo Shei Meng
Ag (Silver) wire is an emerging choice for packaging for its excellent mechanical properties and lower cost. The introduction of Ag alloy wire (~95% purity) in STMicroelectronics has been done to overcome the limitations of Cu (Copper) wire (hardness). A new development approach has been applied to ensure the highest manufacturing robustness. However, this also came with some challenges that were faced at the beginning to stabilize ramp up and manufacturing production. Design of Experiments was done using Robust Development approach: this had improved the process workability. One wire-bonding recipe is able to be used on multiple Front End technologies with this approach. This helped to simplify production management in the assembly lines. A strict quality control approach is used to minimize manufacturing variations and this has strong benefit in improving MTBA (Mean Time between Assist). FMEA (Failure Modes and Effects Analysis) methodology helped identify key risks for studies and analysis, while increasing the workability for wire bond process. Quick and long-term reliability were done on the weekly lots, to not only assess the production, but also protect our customer.
银(银)线以其优异的机械性能和较低的成本成为包装材料的新兴选择。为了克服Cu(铜)线(硬度)的限制,意法半导体引入了银合金线(纯度~95%)。采用了一种新的开发方法来确保最高的制造稳健性。然而,这也带来了一些挑战,这些挑战是在开始稳定增产和生产时面临的。实验设计采用稳健开发方法,提高了工艺的可操作性。通过这种方法,一个线连接配方可以用于多种前端技术。这有助于简化装配线的生产管理。采用严格的质量控制方法来最大限度地减少生产变化,这对提高MTBA(平均辅助间隔时间)有很大的好处。FMEA(失效模式和影响分析)方法有助于确定研究和分析的关键风险,同时提高线键合工艺的可操作性。快速和长期的可靠性做了每周批次,不仅评估生产,也保护我们的客户。
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引用次数: 0
Feasibility of Pb Flakes Reduction Post Reflow Cleaning Process 回流清洗后铅片还原工艺的可行性
Pedro Almazan, Chellamuthu Naveendran, Chai Ying Lee
Formation of Pb (Lead) flakes after die attach reflow process is a common concern when soldering packages with high temperature and soldering material with high in Lead components. Pb flakes are visually manifested on the chip bonding pad after the post Reflow cleaning process, general term as “flux cleaning process”. Small Pb solder spheres can leave behind stains on bonding pad and could reduce wire-bonding yields, with the failure mode of non-stick-on-pad. This Pb flakes formation was investigated and the findings from this phenomenon will be discussed in this paper since very few studies found in current literature. Hypothesis for Pb flakes formation could be attributed during solder Reflow process. Rapid temperature excursions caused the flux component within the solder paste to rapidly expand. Some of the ingredients within the flux component will reach their boiling temperature, at which small solder spheres will experience “popcorn effect” and re-deposited themselves to the bond pad. Hence, this paper also described the feasibility studies of different flux cleaning methods on how to effectively remove this Pb flakes. Process/Equipment and Materials were considered on these studies to validate the applicable solutions for Pb flakes removal on bonding pad. Considerations are the following for the flux cleaning evaluations; Equipment: Spray-in-Air (Water-based chemical), Centrifugal type (both Water-based & Solvent-based chemicals) and Ultrasonic (both Water-based & Solvent-based chemicals). Due to implications or risks identified from these feasibility considerations, the current Ultrasonic process + new cleaning Chemistry with better results were selected to precede further evaluation, including Reliability assessment.
在高温封装和高含铅元件的焊接材料的焊接过程中,模贴回流工艺后形成Pb(铅)片是一个常见的问题。经过后回流清洗过程(通称“助焊剂清洗过程”)后,在贴片焊盘上可见铅片。小的铅焊锡球会在焊盘上留下污渍,降低焊盘成品率,其失效模式为不粘焊盘。本文对铅薄片的形成进行了研究,由于目前文献中对这一现象的研究很少,因此本文将对这一现象的研究结果进行讨论。铅片形成的假设可以归结为焊料回流过程。快速的温度漂移导致焊锡膏内的助焊剂成分迅速膨胀。助焊剂组件中的一些成分将达到其沸腾温度,在此温度下,小焊料球将经历“爆米花效应”并重新沉积到粘合垫上。因此,本文还描述了不同助焊剂清洗方法对有效去除铅片的可行性研究。在这些研究中考虑了工艺/设备和材料,以验证在粘合垫上去除铅片的适用解决方案。焊剂清洗评估的考虑因素如下:设备:空气喷雾(水基化学品),离心式(水基和溶剂基化学品)和超声波(水基和溶剂基化学品)。由于这些可行性考虑所确定的影响或风险,我们选择了目前效果更好的超声波工艺+新的清洁化学方法进行进一步的评估,包括可靠性评估。
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引用次数: 0
Top Gate Molding and Wire Sweep Improvement in Full Plastic QFP Packages 全塑料QFP封装的顶浇口成型和线材扫描改进
Chu Wei
A method towards low cost chip assembly is by increase unit density per Leadframe with Top gate molding solution. In top gate molding, leadframe not require to dedicated space for mold runner in transfer process. That space will replace with more units by lower unit column-to-column pitch distance. Typical challenge of top gate molding is wire sweep especially on unit at Leadframe outer row. EMC injected into units on Leadframe outer row experiencing unbalance mold flow that challenging the molding process development. CAE simulation tool used to predict mold flow behavior and improvement runner design to minimize mold flow unbalance at end of transfer filling process. DOE experiment was perform to optimize transfer time range between 7.8s to 10.5s. Wire loop height optimization was perform as continuous improvement to improve wire sweep in QFP top gate molding from 10.47% to 7%.
实现低成本芯片组装的一种方法是增加每个引线框的单元密度,并采用顶栅成型解决方案。在顶浇口成型中,引线框在转移过程中不需要为模具流道预留专用空间。该空间将被更低的列到列间距单位取代。顶浇口成型的典型挑战是钢丝扫线,特别是引线框外排的单元。引线框外排上的电磁兼容注射单元模流不平衡,对成型工艺的发展提出了挑战。CAE仿真工具用于预测模流行为和改进流道设计,以减少转移填充过程结束时的模流不平衡。DOE实验优化了传递时间范围为7.8s ~ 10.5s。通过对线段高度的优化,将QFP顶浇口成型线段扫线率从10.47%提高到7%。
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引用次数: 2
Qualification of Microchip Al Bondpad and Elimination of NSOP 微芯片Al键合板的确认及NSOP的取消
Younan Hua, Yue Shen, J. Goh, Y. Kee, Xiaomin Li
In wafer fab and assembly processes, non-stick on pad (NSOP) problem impacts seriously yields of the products as the electrical communication between the integrated circuit (IC) chips and other components taking place via the bondpad of the chip. NSOP (Non-Stick On pad) is a failure mode of the IC chip that occurs as a result of poor adhesion between the Aluminium (A1) bondpad and either the bond wire or solder contact. Such failures can be observed even for nanoscale chips such as the 65nm, 45nm, 40nm, and 28nm nodes and beyond. In order to eliminate NSOP problem to enhance the yield of products, process engineers from wafer fab and assembly house together with failure analysis engineers have to know what a good quality bondpad is and how to evaluate and qualify. On these common questions and concerns, in this paper, we will study and introduce Al bondpad qualification methodologies (OSAT and OSSD) and eliminate NSOP problem.
在晶圆厂和组装过程中,由于集成电路芯片与其他元件之间的电气通信是通过芯片的键合板进行的,因此NSOP问题严重影响了产品的良率。NSOP(不粘接板)是IC芯片的一种故障模式,由于铝(A1)键合板与键合线或焊点之间的粘附性差而发生。即使在65nm、45nm、40nm和28nm节点等纳米级芯片上也可以观察到这种故障。为了消除NSOP问题,提高产品的良率,晶圆厂和装配厂的工艺工程师和失效分析工程师必须知道什么是好的质量粘合板,以及如何评估和鉴定。针对这些常见的问题和关注,本文将研究和介绍人工智能键控板的鉴定方法(OSAT和OSSD),并消除NSOP问题。
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引用次数: 0
Title: Package Shrinkage on Thin Package 标题:薄包装收缩
Liew Soon Lee, Ruel Aranda, Rasydan Tahir
As technology grows, semiconductor industry is developing towards thinner & smaller packages to meet market demand. Uneven package shrinkage during manufacturing of Molded Matrix Array Package affects the assembly yield and the yield of succeeding processes including test. Thin Small Leadless Package is no exception to this matter and has experienced a high yield loss above 6.58% at test process for one of its packages. This paper discusses and investigates in details some of the factors which might lead to the uneven volumetric shrinkage of the mold across the panel. There are two factors which are investigated thoroughly in this study, namely: the effect of leadframe design; and the effect of assembly processes (molding, post mold cure PMC and reflow process) towards molding compound material characteristics. Thermomechanical simulation is set up to give a better insight on the first factor, meanwhile the latter is addressed via material characterization as well as physical assessment under actual process conditions. After evaluating the results, it is determined that the leadframe geometry gives a more dominant impact on the uneven volumetric shrinkage of the molding compound issue as compared to the process conditions. This brings to a final recommendation to mitigate the shrinkage by balancing the metal content on the vent and gate area of the leadframe.
随着技术的发展,半导体行业正朝着更薄更小的封装发展,以满足市场需求。模制矩阵阵列封装在制造过程中的不均匀封装收缩影响装配成品率和后续工序包括试验的成品率。薄小型无铅封装也不例外,其中一个封装在测试过程中经历了超过6.58%的高良率损失。本文详细地讨论和研究了可能导致模具在面板上的体积收缩不均匀的一些因素。本研究深入探讨了两个因素:引线框架设计的影响;以及装配工艺(成型、模后固化PMC和回流工艺)对成型复合材料特性的影响。建立热机械模拟是为了更好地了解第一个因素,而后者是通过材料表征以及实际工艺条件下的物理评估来解决的。在评估结果后,确定引线框架几何形状对成型化合物的不均匀体积收缩问题的影响比工艺条件更大。这是最后的建议,通过平衡引线框架的通风口和浇口区域的金属含量来减轻收缩。
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引用次数: 0
‘Collet Auto Clean System’, A Smart Automatic Solution for Die Bonding Pick Up Tool Lifespan & Throughput Enhancement “夹头自动清洁系统”,一种智能的自动解决方案,用于模具粘合拾取工具的使用寿命和产量的提高
Wai Shan Liau, Tek Keong Gan
The common problem vespel collet; the eutectic die bonding process pick up tool; is a short lifespan. The collet tip dimension is similar to shrink chip (size<0.05mm2), which causes an aggressive rubbing effect during die pick and bond cycle. Debris is generated and then accumulated the surrounding of the collet tip surface gradually. Clogged vespel collet tip will result in die pickup issue and accummulated debris will also damage the protruded guard ring design on the chip surface. As such, the vespel collet is then controlled at few ten thousand touchdown. Extending vespel collet lifespan by optimizing die bonding process parameter, changing collet tip dimension and material are not feasible in this situation. The current vespel collet is the hardest material and the smallest tip dimension that can be used in the application. Removing the damaged vespel collet tip by the cleaning process would then be a solution from other perspective. Conventional method is to have manual collet cleaning process offline by human, which lead to high machine idling time and inconsistent collet cleaning quality. An innovative smart manufacturing concept known as “collet auto clean system” is established. It is a programmable fixture that mounted on the die bonding machine to clean vespel collet tip automatically at every predefine touchdown before reaching of the total vespel collet touch down setting. The challenges face are (1) vespel collet tip shape & dimension design to maintain the same tip shape and to withstand the turning force without any broken tip after cleaning, (2) polishing paper grading selection; cleaning parameters definition and cleaned collet tip in-line buyoff for an effective cleaning process. With the implementation of “collet auto clean system”, the vespel collet lifespan is then improved from few ten thousand to few hundred thousand touchdown. Few hundred million parts are delivered without comprising process stability and quality deviation. Vespel collet material consumption has improved from few hundreds pcs to few ten pcs yearly. Also, 3 % collet changing schedule downtime is gained from collet changing interval before every 3 hours to after every 1.2 days.
常见的问题是血管夹紧;共晶模具粘接工艺拾取工具;生命是短暂的。夹头尖端尺寸类似于收缩芯片(尺寸<0.05mm2),在拔模和粘接循环中会产生强烈的摩擦效果。碎片产生后逐渐堆积在夹头尖端表面周围。堵塞的小管夹头会导致取模问题,堆积的碎片也会损坏芯片表面突出的保护环设计。因此,vespel夹筒随后被控制在几万次触地。在这种情况下,通过优化粘接工艺参数、改变夹头尖端尺寸和材料来延长夹头寿命是不可实现的。目前所采用的球形夹头是该应用中最硬的材料和最小的尖端尺寸。从另一个角度来看,通过清洁过程去除受损的小囊夹尖端将是一种解决方案。传统的方法是人工离线进行手动夹头清洗,导致机器空转时间长,夹头清洗质量不一致。建立了一种创新的智能制造概念——“夹头自动清洁系统”。它是一种可编程夹具,安装在模具粘接机上,在每次预定触点时,在到达总触点设置之前,自动清洁容器夹头尖端。面临的挑战是:(1)vespel collet尖端形状和尺寸的设计,以保持相同的尖端形状,并承受旋转力,没有任何破碎的尖端清洗后;(2)抛光纸的分级选择;清洁参数定义和清洁的夹头尖端在线买断,以实现有效的清洁过程。随着“夹头自动清洗系统”的实施,小管夹头的着陆寿命从几万次提高到几十万次。数亿个零件的交付不包含工艺稳定性和质量偏差。Vespel夹头材料消耗量从每年几百件提高到每年几十件。此外,从每3小时更换夹头的间隔时间到每1.2天更换夹头的间隔时间,可获得3%的夹头更换计划停机时间。
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引用次数: 2
Cu-Al Intermetallic Growth Behaviour Study Under High Temperature Thermal Aging 高温热时效下Cu-Al金属间化合物生长行为研究
C.L Cha, H.J Chong, HG Yaw, M. Chong, C. Tea
Copper (Cu) wire always gains the population in semiconductor industry for its superior thermal and electrical performance with increase of gold wire price in the market. The expanding use of electronics components in automotive electronics and rising in high reliability requirement are stimulating vigorous research and development on intermetallic (IMC) growth at the interface between Cu wire bonded ball and Aluminum (Al) bond pad metallization. In microelectronics packaging, IMC is an essential for interconnect formation between bonding wire and bond pad metallization. It grows during other assembly processes. Cu-Al intermetallic grows slowly and perceived higher reliability performance compare to Au-Al system especially during high temperature storage stress test. However, Cu wire with Al pad metallization formed type of IMC with no or very narrow range of solubility and this type of compound is very strong but very brittle. This study evaluates bare Cu wire bonding on Al pad metallization. As Cu wire IMC is known hardly observed at T0 after wire bonded, evaluation samples were subject to thermal aging to promote the IMC growth in un-molded strip form. Preliminary responses e.g wire pull, ball shear strength were collected. IMC coverage were analyzed and its growth thickness were examined from cross section sample by scanning electron microscopy (SEM) method. The stability of Cu-Al IMC in molded package form was studied under different high temperature storage stress test condition include both 150°C@2000hrs and 175°C@1000hrs. SEM based analysis technique - energy dispersive x-ray spectroscopy (EDX) is used to identify the IMC phases. Aside, transmission electron microscopy (TEM) analysis is adopted to understand IMC growth behavior and phase in depth. IMC thermal driven degradation mechanism was analyzed and discussed. (literature study, bench mark other study)
随着铜线市场价格的不断上涨,铜线以其优越的热学性能和电学性能一直受到半导体行业的青睐。随着电子元件在汽车电子领域应用的不断扩大和对可靠性要求的不断提高,对铜丝键合球与铝键合垫金属化界面金属间化合物(IMC)的研究和发展具有重要意义。在微电子封装中,IMC对于键合线和键合垫金属化之间的互连形成是必不可少的。它在其他组装过程中生长。与Au-Al体系相比,Cu-Al金属间化合物生长缓慢,具有更高的可靠性性能,特别是在高温储存应力测试中。然而,铜丝与Al垫金属化形成的IMC类型没有溶解度或溶解度范围很窄,这种类型的化合物很强但很脆。本研究评价了裸铜线在Al焊盘金属化上的结合。由于铜丝粘结后在T0时几乎观察不到IMC,因此对评价样品进行热时效以促进IMC以非模压带状形式生长。收集了初步响应如拉丝强度、球抗剪强度等。采用扫描电子显微镜(SEM)对样品的横截面进行了IMC覆盖分析和生长厚度测定。研究了Cu-Al IMC在150°C@2000hrs和175°C@1000hrs高温贮存应力条件下的模制封装稳定性。利用基于扫描电子显微镜的分析技术-能量色散x射线光谱(EDX)来鉴定IMC相。此外,采用透射电镜(TEM)分析,深入了解IMC的生长行为和相。分析并讨论了IMC热驱动降解机理。(文献研究,基准其他研究)
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引用次数: 1
期刊
2018 IEEE 38th International Electronics Manufacturing Technology Conference (IEMT)
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