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2018 IEEE 38th International Electronics Manufacturing Technology Conference (IEMT)最新文献

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Wire Bond Qualification Challenges and Development of First Stacked Die on Copper Clip for Multi-Die Controller MOSFET Package 多模控制MOSFET封装铜夹首叠模线键合鉴定挑战与发展
Jeriel Figueroa, Jeramie Pendor, E. Ong, Swee Har Khor
Seremban QFN line has enjoyed continuous growth of production volume for Multi-die Driver/Controller MOSFET (DrMOS) package. Current production DrMOS device integrates a Driver/Controller, high-side MOSFET and low-side MOSFET into a 6 mm × 6 mm 40-pin QFN packaging. To be able to continue our fair share on the market though, new package and new case outline which comes into a 5 mm × 5 mm QFN32 project was recently developed for production. The new package consists of a FET die, Copper Clip and Controller die which are stacked to reduce the overall solution size. This paper elaborates specifically the wire bond challenges and corresponding improvements executed addressing the issues, hence making this package the reference for subsequent DrMOS with Stacked Controller Die on Copper Clip. To be able to define the allowable maximum loop height that can consistently meet the minimum stacked Controller die to Top Package clearance and marking depth requirements, package stack-up worst case analysis and loop height robustness study that can meet up to +6 sigma were evaluated. Since the Controller die is sitting on top of the FET die and Copper Clip, simulation on worst Controller die displacement scenario from different directions was also assessed to guarantee enough bonding wire to Copper Clip edge clearance. Reliability, bondability, wire bonding parameters characterization and cliff experiments were studied as well to ensure critical responses are well within pre-defined specification after implementation of new package design.
Seremban QFN系列多模驱动/控制器MOSFET (DrMOS)封装的产量持续增长。目前生产的DrMOS器件将驱动器/控制器、高侧MOSFET和低侧MOSFET集成到6mm × 6mm 40引脚QFN封装中。为了能够继续我们在市场上的公平份额,新的封装和新的外壳轮廓,进入5毫米× 5毫米QFN32项目,最近开发用于生产。新封装由FET芯片、铜夹和控制器芯片组成,它们堆叠在一起以减小整体解决方案的尺寸。本文详细阐述了线键挑战和相应的改进措施,从而使该封装成为后续铜夹上堆叠控制器芯片的DrMOS的参考。为了能够定义能够始终满足最小堆叠控制器模具到顶部封装间隙和标记深度要求的允许最大环路高度,对封装堆叠最坏情况分析和环路高度稳健性研究进行了评估,可以满足+6西格玛。由于控制器模具位于FET模具和铜夹的顶部,因此还评估了不同方向的最坏控制器模具位移情况的仿真,以保证有足够的键合线与铜夹边缘间隙。研究了可靠性、可粘合性、导线粘合参数表征和悬崖实验,以确保在实施新封装设计后,关键响应完全符合预定义的规格。
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引用次数: 0
Feasibility of Pb Flakes Reduction Post Reflow Cleaning Process 回流清洗后铅片还原工艺的可行性
Pedro Almazan, Chellamuthu Naveendran, Chai Ying Lee
Formation of Pb (Lead) flakes after die attach reflow process is a common concern when soldering packages with high temperature and soldering material with high in Lead components. Pb flakes are visually manifested on the chip bonding pad after the post Reflow cleaning process, general term as “flux cleaning process”. Small Pb solder spheres can leave behind stains on bonding pad and could reduce wire-bonding yields, with the failure mode of non-stick-on-pad. This Pb flakes formation was investigated and the findings from this phenomenon will be discussed in this paper since very few studies found in current literature. Hypothesis for Pb flakes formation could be attributed during solder Reflow process. Rapid temperature excursions caused the flux component within the solder paste to rapidly expand. Some of the ingredients within the flux component will reach their boiling temperature, at which small solder spheres will experience “popcorn effect” and re-deposited themselves to the bond pad. Hence, this paper also described the feasibility studies of different flux cleaning methods on how to effectively remove this Pb flakes. Process/Equipment and Materials were considered on these studies to validate the applicable solutions for Pb flakes removal on bonding pad. Considerations are the following for the flux cleaning evaluations; Equipment: Spray-in-Air (Water-based chemical), Centrifugal type (both Water-based & Solvent-based chemicals) and Ultrasonic (both Water-based & Solvent-based chemicals). Due to implications or risks identified from these feasibility considerations, the current Ultrasonic process + new cleaning Chemistry with better results were selected to precede further evaluation, including Reliability assessment.
在高温封装和高含铅元件的焊接材料的焊接过程中,模贴回流工艺后形成Pb(铅)片是一个常见的问题。经过后回流清洗过程(通称“助焊剂清洗过程”)后,在贴片焊盘上可见铅片。小的铅焊锡球会在焊盘上留下污渍,降低焊盘成品率,其失效模式为不粘焊盘。本文对铅薄片的形成进行了研究,由于目前文献中对这一现象的研究很少,因此本文将对这一现象的研究结果进行讨论。铅片形成的假设可以归结为焊料回流过程。快速的温度漂移导致焊锡膏内的助焊剂成分迅速膨胀。助焊剂组件中的一些成分将达到其沸腾温度,在此温度下,小焊料球将经历“爆米花效应”并重新沉积到粘合垫上。因此,本文还描述了不同助焊剂清洗方法对有效去除铅片的可行性研究。在这些研究中考虑了工艺/设备和材料,以验证在粘合垫上去除铅片的适用解决方案。焊剂清洗评估的考虑因素如下:设备:空气喷雾(水基化学品),离心式(水基和溶剂基化学品)和超声波(水基和溶剂基化学品)。由于这些可行性考虑所确定的影响或风险,我们选择了目前效果更好的超声波工艺+新的清洁化学方法进行进一步的评估,包括可靠性评估。
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引用次数: 0
Top Gate Molding and Wire Sweep Improvement in Full Plastic QFP Packages 全塑料QFP封装的顶浇口成型和线材扫描改进
Chu Wei
A method towards low cost chip assembly is by increase unit density per Leadframe with Top gate molding solution. In top gate molding, leadframe not require to dedicated space for mold runner in transfer process. That space will replace with more units by lower unit column-to-column pitch distance. Typical challenge of top gate molding is wire sweep especially on unit at Leadframe outer row. EMC injected into units on Leadframe outer row experiencing unbalance mold flow that challenging the molding process development. CAE simulation tool used to predict mold flow behavior and improvement runner design to minimize mold flow unbalance at end of transfer filling process. DOE experiment was perform to optimize transfer time range between 7.8s to 10.5s. Wire loop height optimization was perform as continuous improvement to improve wire sweep in QFP top gate molding from 10.47% to 7%.
实现低成本芯片组装的一种方法是增加每个引线框的单元密度,并采用顶栅成型解决方案。在顶浇口成型中,引线框在转移过程中不需要为模具流道预留专用空间。该空间将被更低的列到列间距单位取代。顶浇口成型的典型挑战是钢丝扫线,特别是引线框外排的单元。引线框外排上的电磁兼容注射单元模流不平衡,对成型工艺的发展提出了挑战。CAE仿真工具用于预测模流行为和改进流道设计,以减少转移填充过程结束时的模流不平衡。DOE实验优化了传递时间范围为7.8s ~ 10.5s。通过对线段高度的优化,将QFP顶浇口成型线段扫线率从10.47%提高到7%。
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引用次数: 2
Manufacturability of Ag Wire for Mass Production - Challenges and Robustness 大规模生产用银丝的可制造性——挑战与稳健性
Que Wei, Loo Shei Meng
Ag (Silver) wire is an emerging choice for packaging for its excellent mechanical properties and lower cost. The introduction of Ag alloy wire (~95% purity) in STMicroelectronics has been done to overcome the limitations of Cu (Copper) wire (hardness). A new development approach has been applied to ensure the highest manufacturing robustness. However, this also came with some challenges that were faced at the beginning to stabilize ramp up and manufacturing production. Design of Experiments was done using Robust Development approach: this had improved the process workability. One wire-bonding recipe is able to be used on multiple Front End technologies with this approach. This helped to simplify production management in the assembly lines. A strict quality control approach is used to minimize manufacturing variations and this has strong benefit in improving MTBA (Mean Time between Assist). FMEA (Failure Modes and Effects Analysis) methodology helped identify key risks for studies and analysis, while increasing the workability for wire bond process. Quick and long-term reliability were done on the weekly lots, to not only assess the production, but also protect our customer.
银(银)线以其优异的机械性能和较低的成本成为包装材料的新兴选择。为了克服Cu(铜)线(硬度)的限制,意法半导体引入了银合金线(纯度~95%)。采用了一种新的开发方法来确保最高的制造稳健性。然而,这也带来了一些挑战,这些挑战是在开始稳定增产和生产时面临的。实验设计采用稳健开发方法,提高了工艺的可操作性。通过这种方法,一个线连接配方可以用于多种前端技术。这有助于简化装配线的生产管理。采用严格的质量控制方法来最大限度地减少生产变化,这对提高MTBA(平均辅助间隔时间)有很大的好处。FMEA(失效模式和影响分析)方法有助于确定研究和分析的关键风险,同时提高线键合工艺的可操作性。快速和长期的可靠性做了每周批次,不仅评估生产,也保护我们的客户。
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引用次数: 0
Interfacial TEM Analysis of Sintered Silver in Air and N2-5%H2 Gases Environment 烧结银在空气和N2-5%H2环境中的界面透射电镜分析
K. Siow, S. T. Chua, Z. A. Samah
Sintered silver (Ag) is being used as a Pb-free die-attach material for selected high-temperature application. Reliable sintered Ag joint depends on sintering pressure, time, temperature, paste formulation, bonding area and environment to achieve the desired density and bonding to the substrates. Interfacial region determines the bonding strength as much as the densification of the sintered Ag joint. Air atmosphere sintering of micron-Ag paste oxidized the Cu substrate to prevent any inter-diffusion of Ag atoms which were observable under HR-TEM. Yet, these copper oxides acted as adhesive to produce higher die shear strength than those sintered in the forming gas (N2-5%H2). The N2-5%H2 environment assisted the densification and sintering of micron-Ag to the pristine Cu substrate; increasing the bonding quality and die-shear strength, compared to the total absence of bonding for the micron-Ag paste sintered in N2 environment. This result highlights the importance of using high resolution TEM to understand the strengthening mechanism of micron-Ag joints at Cu substrates in air and forming (N2-5%H2) gases environment.
烧结银(Ag)被用来作为一种无铅的模具材料,用于选定的高温应用。可靠的烧结银接头取决于烧结压力、时间、温度、膏体配方、结合面积和环境,以达到所需的密度和与基材的结合。界面区域不仅决定了烧结银接头的致密性,也决定了结合强度。微米银糊的空气气氛烧结使Cu基体氧化,阻止了银原子的相互扩散。然而,这些氧化铜作为粘合剂,比在成形气体(N2-5%H2)中烧结的铜产生更高的模具剪切强度。N2-5%H2环境有利于微米银向原始Cu基体致密化和烧结;与在N2环境下烧结的微米银浆完全不结合相比,提高了粘接质量和模剪强度。这一结果强调了利用高分辨率透射电镜来了解空气和形成(N2-5%H2)气体环境中Cu衬底上微米ag接头强化机制的重要性。
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引用次数: 2
Understanding Die Breakage During Heavy Al Wedge Bonding for Large/Thin Chip (39mm2/75µm) in J-Alloy-Cu System J-Alloy-Cu系统中大/薄芯片(39mm2/75µm)重Al楔焊过程中的模具断裂
S. Subaramaniym, Guirit Lynn Simporios, Kuek Hsieh Ting, M. A. Rahman, Wong Jia Yi, C. S. Fang
To big package was developed with large and thin chip on Copper (Cu) die pad frame and Lead-free solder in chip by chip (CbC) die attach process. Die breakage during thick Aluminum (Al) wire bond process was encountered. Failure analysis observed high magnitude of void under the wire bond area and also porosity in between the chip backside metallization (BSM) and solder layer. Several studies and analysis were conducted to prove all the contributing factors. The investigation shows Sn element from solder wire, oxide from the Cu lead frame and solder wire tend to dissolve through the molten solder and contribute to a porous mixed layer in between the chip BSM and Copper Tin (CuSn) intermetallic compound (IMC). The porosity of the mixed layer and depletion of the chip backside metallization can be exaggerated when higher thermal budget is supplied towards the bonded units during the die bonding process either due to longer machine idling time or high bonding temperature as experienced by the chip. Besides, high presence of Tin Oxide (SnO) from the solder wire during solder dispensing and spanking process is causing poor wettability towards chip backside as well as on die pad surface. This resulted in high magnitude of solder voids formation. The chip strength became weak with the present of big voids and porosity and thus not able to withstand high force during thick Al wire bonding process resulting to broken die defect. Controlling the thermal budget in die attach process towards the material and increasing the solder volume became essential to eliminate the problem.
采用大而薄的铜(Cu)芯片衬垫框架和无铅焊料(CbC)芯片贴合工艺,开发了大封装。在厚铝丝粘接过程中,遇到了模具断裂的问题。失效分析发现,焊丝键合区存在较大的空洞,芯片背面金属化层(BSM)与焊料层之间也存在孔隙。进行了几项研究和分析,以证明所有的影响因素。结果表明,锡线中的锡元素、铜引线框架和锡线中的氧化物倾向于溶解在熔融焊料中,并在芯片BSM和铜锡金属间化合物(IMC)之间形成多孔混合层。当在模具粘合过程中,由于较长的机器空转时间或芯片所经历的高粘合温度而向粘合单元提供较高的热预算时,混合层的孔隙率和芯片背面金属化的损耗可能会被夸大。此外,在焊锡点焊和打焊过程中,来自焊锡丝的氧化锡(SnO)的高存在导致芯片背面和模垫表面的润湿性差。这导致了大量的焊料空洞形成。由于存在较大的空隙和孔隙,导致芯片强度变弱,无法承受粗铝丝粘接过程中的高力,导致断模缺陷。控制模具贴装过程中对材料的热预算和增加焊料体积是消除这一问题的关键。
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引用次数: 0
‘Collet Auto Clean System’, A Smart Automatic Solution for Die Bonding Pick Up Tool Lifespan & Throughput Enhancement “夹头自动清洁系统”,一种智能的自动解决方案,用于模具粘合拾取工具的使用寿命和产量的提高
Wai Shan Liau, Tek Keong Gan
The common problem vespel collet; the eutectic die bonding process pick up tool; is a short lifespan. The collet tip dimension is similar to shrink chip (size<0.05mm2), which causes an aggressive rubbing effect during die pick and bond cycle. Debris is generated and then accumulated the surrounding of the collet tip surface gradually. Clogged vespel collet tip will result in die pickup issue and accummulated debris will also damage the protruded guard ring design on the chip surface. As such, the vespel collet is then controlled at few ten thousand touchdown. Extending vespel collet lifespan by optimizing die bonding process parameter, changing collet tip dimension and material are not feasible in this situation. The current vespel collet is the hardest material and the smallest tip dimension that can be used in the application. Removing the damaged vespel collet tip by the cleaning process would then be a solution from other perspective. Conventional method is to have manual collet cleaning process offline by human, which lead to high machine idling time and inconsistent collet cleaning quality. An innovative smart manufacturing concept known as “collet auto clean system” is established. It is a programmable fixture that mounted on the die bonding machine to clean vespel collet tip automatically at every predefine touchdown before reaching of the total vespel collet touch down setting. The challenges face are (1) vespel collet tip shape & dimension design to maintain the same tip shape and to withstand the turning force without any broken tip after cleaning, (2) polishing paper grading selection; cleaning parameters definition and cleaned collet tip in-line buyoff for an effective cleaning process. With the implementation of “collet auto clean system”, the vespel collet lifespan is then improved from few ten thousand to few hundred thousand touchdown. Few hundred million parts are delivered without comprising process stability and quality deviation. Vespel collet material consumption has improved from few hundreds pcs to few ten pcs yearly. Also, 3 % collet changing schedule downtime is gained from collet changing interval before every 3 hours to after every 1.2 days.
常见的问题是血管夹紧;共晶模具粘接工艺拾取工具;生命是短暂的。夹头尖端尺寸类似于收缩芯片(尺寸<0.05mm2),在拔模和粘接循环中会产生强烈的摩擦效果。碎片产生后逐渐堆积在夹头尖端表面周围。堵塞的小管夹头会导致取模问题,堆积的碎片也会损坏芯片表面突出的保护环设计。因此,vespel夹筒随后被控制在几万次触地。在这种情况下,通过优化粘接工艺参数、改变夹头尖端尺寸和材料来延长夹头寿命是不可实现的。目前所采用的球形夹头是该应用中最硬的材料和最小的尖端尺寸。从另一个角度来看,通过清洁过程去除受损的小囊夹尖端将是一种解决方案。传统的方法是人工离线进行手动夹头清洗,导致机器空转时间长,夹头清洗质量不一致。建立了一种创新的智能制造概念——“夹头自动清洁系统”。它是一种可编程夹具,安装在模具粘接机上,在每次预定触点时,在到达总触点设置之前,自动清洁容器夹头尖端。面临的挑战是:(1)vespel collet尖端形状和尺寸的设计,以保持相同的尖端形状,并承受旋转力,没有任何破碎的尖端清洗后;(2)抛光纸的分级选择;清洁参数定义和清洁的夹头尖端在线买断,以实现有效的清洁过程。随着“夹头自动清洗系统”的实施,小管夹头的着陆寿命从几万次提高到几十万次。数亿个零件的交付不包含工艺稳定性和质量偏差。Vespel夹头材料消耗量从每年几百件提高到每年几十件。此外,从每3小时更换夹头的间隔时间到每1.2天更换夹头的间隔时间,可获得3%的夹头更换计划停机时间。
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引用次数: 2
Effect of Leadframe Tape Material on Thin Small Non-Leaded Packages (TSNP) Manufacturing Line 引线框架胶带材料对薄型无铅封装生产线的影响
C. Ong, W. Ng, Kian-Pin Queck
In Thin Small Non-Leaded Packages (TSNP) design, heat resistance tape (i.e. RT321 and RT321+CD1) were used as leadframe carrier throughout TSNP assembly manufacturing line. These carrier acts as package backbone during molding process and were removed during detape process as to expose Cu pad (2nd interconnection) before plating process. However, under un-optimized parameter condition in TSNP assembly manufacturing line, the heat resistance tape shows inconsistence performances and contribute high assembly yield losses. The current paper investigates the effect of heat resistance tape on torn tape and excess solder defect in detape and plating process respectively. Torn tape defect occurred during mechanical peeling (remove heat resistance tape as to expose Cu pad). Whereas, excess solder defect were detected after Sn plating process, excess solder defined as x and y pad dimension out of specification based on Infineon Technologies Process Control. The DOE's input factor of Detape (i.e. Temperature and Peeling Method), and Sn Plating (i.e. Current, Loading Method and Conveyor Speed) were established with the help of CEDA software. RT321+CD1 tape resulted to be best fit in TSNP manufacturing line compared to RT321 tape due to tape physical properties compatibility. However, at high detape temperature, low plating current and high conveyor speed, performances of RT321 tape are comparable with RT321+CD1.
在薄型无铅封装(TSNP)设计中,耐热胶带(即RT321和RT321+CD1)在整个TSNP组装生产线上用作引线架载体。这些载体在成型过程中作为包骨架,在剥离过程中被移除,以便在电镀过程之前暴露铜垫(第二次互连)。然而,在TSNP装配线的非优化参数条件下,耐热胶带表现出不一致的性能,导致装配良率损失大。本文分别研究了耐热胶带对脱带和电镀过程中胶带撕裂和焊料过量缺陷的影响。机械剥皮时出现胶带撕裂缺陷(去除耐热胶带,露出铜垫)。而在镀锡过程中发现了多余的焊料缺陷,根据英飞凌工艺控制将多余的焊料定义为x和y焊盘尺寸不符合规格。在CEDA软件的帮助下,建立了DOE的脱带输入因子(即温度和剥离方式)和镀锡输入因子(即电流、加载方式和输送速度)。与RT321磁带相比,由于磁带的物理特性兼容性,RT321+CD1磁带最适合TSNP生产线。但在高剥离温度、低电镀电流和高输送速度下,RT321胶带的性能可与RT321+CD1媲美。
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引用次数: 0
Qualification of Microchip Al Bondpad and Elimination of NSOP 微芯片Al键合板的确认及NSOP的取消
Younan Hua, Yue Shen, J. Goh, Y. Kee, Xiaomin Li
In wafer fab and assembly processes, non-stick on pad (NSOP) problem impacts seriously yields of the products as the electrical communication between the integrated circuit (IC) chips and other components taking place via the bondpad of the chip. NSOP (Non-Stick On pad) is a failure mode of the IC chip that occurs as a result of poor adhesion between the Aluminium (A1) bondpad and either the bond wire or solder contact. Such failures can be observed even for nanoscale chips such as the 65nm, 45nm, 40nm, and 28nm nodes and beyond. In order to eliminate NSOP problem to enhance the yield of products, process engineers from wafer fab and assembly house together with failure analysis engineers have to know what a good quality bondpad is and how to evaluate and qualify. On these common questions and concerns, in this paper, we will study and introduce Al bondpad qualification methodologies (OSAT and OSSD) and eliminate NSOP problem.
在晶圆厂和组装过程中,由于集成电路芯片与其他元件之间的电气通信是通过芯片的键合板进行的,因此NSOP问题严重影响了产品的良率。NSOP(不粘接板)是IC芯片的一种故障模式,由于铝(A1)键合板与键合线或焊点之间的粘附性差而发生。即使在65nm、45nm、40nm和28nm节点等纳米级芯片上也可以观察到这种故障。为了消除NSOP问题,提高产品的良率,晶圆厂和装配厂的工艺工程师和失效分析工程师必须知道什么是好的质量粘合板,以及如何评估和鉴定。针对这些常见的问题和关注,本文将研究和介绍人工智能键控板的鉴定方法(OSAT和OSSD),并消除NSOP问题。
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引用次数: 0
Title: Package Shrinkage on Thin Package 标题:薄包装收缩
Liew Soon Lee, Ruel Aranda, Rasydan Tahir
As technology grows, semiconductor industry is developing towards thinner & smaller packages to meet market demand. Uneven package shrinkage during manufacturing of Molded Matrix Array Package affects the assembly yield and the yield of succeeding processes including test. Thin Small Leadless Package is no exception to this matter and has experienced a high yield loss above 6.58% at test process for one of its packages. This paper discusses and investigates in details some of the factors which might lead to the uneven volumetric shrinkage of the mold across the panel. There are two factors which are investigated thoroughly in this study, namely: the effect of leadframe design; and the effect of assembly processes (molding, post mold cure PMC and reflow process) towards molding compound material characteristics. Thermomechanical simulation is set up to give a better insight on the first factor, meanwhile the latter is addressed via material characterization as well as physical assessment under actual process conditions. After evaluating the results, it is determined that the leadframe geometry gives a more dominant impact on the uneven volumetric shrinkage of the molding compound issue as compared to the process conditions. This brings to a final recommendation to mitigate the shrinkage by balancing the metal content on the vent and gate area of the leadframe.
随着技术的发展,半导体行业正朝着更薄更小的封装发展,以满足市场需求。模制矩阵阵列封装在制造过程中的不均匀封装收缩影响装配成品率和后续工序包括试验的成品率。薄小型无铅封装也不例外,其中一个封装在测试过程中经历了超过6.58%的高良率损失。本文详细地讨论和研究了可能导致模具在面板上的体积收缩不均匀的一些因素。本研究深入探讨了两个因素:引线框架设计的影响;以及装配工艺(成型、模后固化PMC和回流工艺)对成型复合材料特性的影响。建立热机械模拟是为了更好地了解第一个因素,而后者是通过材料表征以及实际工艺条件下的物理评估来解决的。在评估结果后,确定引线框架几何形状对成型化合物的不均匀体积收缩问题的影响比工艺条件更大。这是最后的建议,通过平衡引线框架的通风口和浇口区域的金属含量来减轻收缩。
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引用次数: 0
期刊
2018 IEEE 38th International Electronics Manufacturing Technology Conference (IEMT)
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