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Beam quality active control of a slab MOPA solid state laser with combined deformable mirrors 组合式变形镜平板MOPA固体激光器光束质量的主动控制
Pub Date : 2017-01-13 DOI: 10.1117/12.2256843
Rujian Xiang, Honglai Xu, Guohui Li, Jing Wu, Yinglei Du, Kai Zhang
A novel phase aberration correcting method based on combined deformable mirrors (DMs) in a slab MOPA (master oscillator and power amplifier) solid state laser system is proposed and validated experimentally. The adaptive optics(AO) system with combined deformable mirrors composed of a one-dimension (1D) DM with 11 actuators and a two-dimension (2D) DM with 67 valid actuators, has been designed to correct the phase aberrations, which doesn’t need the high voltage drivers and has an excellent correcting efficiency of the high order phase aberrations. The experimental results show that the wave front of the slab laser beam is compensated well and the residual wave front is less than 0.08 λ rms. The beam quality of the slab laser in the far field is improved to1.67x DL.
提出了一种在平板型主振和功率放大器固体激光系统中基于组合变形镜的相位像差校正方法,并进行了实验验证。设计了一种由具有11个作动器的一维DM和具有67个有效作动器的二维DM组成的组合变形镜自适应光学系统,用于相位像差的校正,该系统不需要高压驱动,具有良好的高阶相位像差校正效率。实验结果表明,平板激光束的波前得到了很好的补偿,残余波前小于0.08 λ rms。板状激光器远场光束质量提高到1.67x DL。
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引用次数: 1
LPP-EUV light source for HVM lithography 用于HVM光刻的LPP-EUV光源
Pub Date : 2017-01-13 DOI: 10.1117/12.2257464
T. Saito, Y. Ueno, T. Yabu, A. Kurosawa, S. Nagai, T. Yanagida, T. Hori, Y. Kawasuji, T. Abe, T. Kodama, H. Nakarai, T. Yamazaki, H. Mizoguchi
We have been developing a laser produced plasma extremely ultra violet (LPP-EUV) light source for a high volume manufacturing (HVM) semiconductor lithography. It has several unique technologies such as the high power short pulse carbon dioxide (CO2) laser, the short wavelength solid-state pre-pulse laser and the debris mitigation technology with the magnetic field. This paper presents the key technologies for a high power LPP-EUV light source. We also show the latest performance data which is 188W EUV power at intermediate focus (IF) point with 3.7% conversion efficiency (CE) at 100 kHz.
我们一直在开发一种用于大批量制造(HVM)半导体光刻的激光产生等离子体极紫外光(LPP-EUV)光源。它具有高功率短脉冲二氧化碳(CO2)激光器、短波固体预脉冲激光器和磁场碎片缓减技术等独特技术。本文介绍了高功率超低极紫外光源的关键技术。我们还展示了中间焦点(IF)点188W的EUV功率和100 kHz时3.7%的转换效率的最新性能数据。
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引用次数: 1
Results of experiments on iodine dissociation in active medium of oxygen-iodine laser 氧碘激光活性介质中碘解离实验结果
Pub Date : 2017-01-13 DOI: 10.1117/12.2257789
M. Zagidullin, N. A. Khvatov, M. Malyshev
Results of experiments on dissociation of iodine molecules in the presence of singlet oxygen molecules are presented for wide range of oxygen-iodine media composition. Rate constants values have been obtained: 4.3⋅10-17cm3/s for the reaction O2(1Δ)+O2(1Δ)→O2(1Σ) +О2(3Σ) − (1), 2.8⋅10-13 cm3/s for the reactionO2(1Δ)+I(2P1/2)→O2(1Σ)+I(2P3/2) − (4) and 8.3⋅10-11 cm3/s for the reaction O2(1Σ) +I2→О2(3Σ)+2I − (2). Analysis of experiments shows that for the wide range of oxygen-iodine medium composition the dissociation occurs via the chain of reactions (1), (2), O2(1Δ)+I(2P3/2)→О2(3Σ)+I(2P1/2), (4) and via cascade process I2+I(2P1/2)→I2(v)+I(2P3/2), I2(v)+O2(1Δ)→2I+О2(3Σ). Contributions of each mechanism in the dissociation of the iodine are comparable for the typical composition of the active medium of the supersonic chemical oxygen-iodine laser. The experiments did not reveal the contribution of vibrationally excited oxygen molecules in the dissociation of iodine. Thus, the experiments and the following conclusions are fully confirmed iodine dissociation mechanism previously proposed by Heidner et al. (J. Phys. Chem., 87, 2348 (1983)).
本文介绍了各种氧碘介质组成中碘分子在单线态氧分子存在下解离的实验结果。得到速率常数值:4.3⋅10-17cm3 / s的反应O2(1Δ)+ O2(1Δ)→O2(1Σ)+О2(3Σ)−(1),2.8⋅10 - 13立方厘米/秒reactionO2(1Δ)+ I (2 p1/2)→O2(1Σ)+ I (2 p3/2)−⋅- 11(4)和8.3立方厘米/秒的反应O2(1Σ)+ I2→О我−2(3Σ)+ 2(2)。实验分析表明,oxygen-iodine广泛的介质成分发生离解通过连锁反应(1)、(2)、O2(1Δ)+ I (2 p3/2)→О2(3Σ)+ (2 p1/2),(4),通过级联过程I2 + I (2 p1/2)→I2 (v) + I (2 p3/2), I2 (v) + O2(1Δ)→2 I +О2(3Σ)。每种机制对碘解离的贡献与超声化学氧碘激光器活性介质的典型组成相当。实验没有揭示振动激发的氧分子在碘解离中的作用。因此,实验和以下结论充分证实了Heidner等人先前提出的碘解离机制(J. Phys。化学。, 87, 2348(1983))。
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引用次数: 0
V-T relaxation of vibrationally excited singlet oxygen molecule in the EOIL systems EOIL系统中振动激发单线态氧分子的V-T弛豫
Pub Date : 2017-01-13 DOI: 10.1117/12.2257050
A. P. Torbin, M. Heaven, V. N. Azyazov
Kinetics of vibrationally-excited singlet oxygen O2(a1Δ,v) molecule have been examined using pulsed laser technique.O2(a1Δ,v) molecules were produced by the pulsed 266 nm laser photolysis of ozone. The kinetics of O2(a1Δ) quenching were followed by observing the 1268 nm fluorescence of the O2 a1Δ-X3Σ transition. It has been found that the loss of O2(a1Δ,v) in the O(3P)/O3/N2 mixture is carried out both in chemical and in V-T process. We observed that the vibrational excitation of singlet oxygen molecule enhances the rate of reaction between O2(a1Δ,v) and O3 molecules. The rate constant of this process was estimated to be in the range 10-12-10-11 cm3/s. Rate constant of O2(a,v=1) quenching by CO2 was found to be (1.03±0.07)×10-14 cm3/s.
用脉冲激光技术研究了振动激发单线态O2(a1Δ,v)分子的动力学,用266 nm脉冲激光光解臭氧产生O2(a1Δ,v)分子。通过观察O2 a1Δ-X3Σ跃迁的1268 nm荧光来跟踪O2(a1Δ)猝灭动力学。研究发现,O(3P)/O3/N2混合物中O2(a1Δ,v)的损失在化学过程和v - t过程中均有发生。我们观察到单重态氧分子的振动激发提高了O2(a1Δ,v)和O3分子之间的反应速率。该过程的速率常数估计在10-12-10-11 cm3/s范围内。O2(a,v=1)被CO2淬火的速率常数为(1.03±0.07)×10-14 cm3/s。
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引用次数: 0
Wavelength diversity in optically pumped alkali vapor lasers 光抽运碱蒸汽激光器的波长分异
Pub Date : 2017-01-13 DOI: 10.1117/12.2256256
G. Perram
Alternative wavelengths for optically pumped alkali vapor lasers have been developed using single photon excitation of higher lying P-states, stimulated Raman processes, two-photon excitation of S and D states, and electric quadruple excitation on S-D transitions. Two photon excitation of Cs 72D leads to competing and cascade lasing producing red and infrared lasers operating on the D-P transitions, followed by ultraviolet, blue, the standard near infrared DPAL transitions operating on P-S transitions. The S-D pump transitions are fully bleached at pump intensities exceeding 1 MW/cm2, allowing for lasing transitions that terminate on the ground state. The kinetics of these systems are complex due to competition for population inversion among the many optical transitions. An optically pumped mid-infrared rubidium pulsed, mirrorless laser has also been demonstrated in a heat pipe along both the 62P3/2 - 62S1/2 transition at 2.73 μm and the 62P1/2 - 62S1/2 transition at 2.79 μm with a maximum energy of ~100 nJ. Performance improves dramatically as the rubidium vapor density is increased, in direct contradiction with the prior work. No scaling limitations associated with energy pooling or ionization kinetics have been observed. Practical application for infrared counter measures depends on the further development of blue diode pump sources. Finally, stimulated electronic Raman scattering and hyper-Raman processes in potassium vapor near the D1 and D2 lines have been observed using a stable resonator and pulsed laser excitation. First and second order Stokes and anti-Stokes lines were observed simultaneously and independently for a pump laser tuning range exceeding 70 cm-1. When the pump is tuned between the K D1 and D2 lines, an efficient hyper-Raman process dominates with a slope efficiency that exceeds 10%. Raman shifted laser may be useful as a target illuminator or atmospheric compensation beacon for a high power diode pumped alkali laser.
利用高p态的单光子激发、受激拉曼过程、S态和D态的双光子激发以及S-D跃迁的电四重激发,开发了光抽运碱蒸汽激光器的备选波长。Cs 72D的两个光子激发导致竞争和级联激光产生工作在D-P跃迁的红色和红外激光器,其次是工作在P-S跃迁的紫外、蓝色和标准近红外DPAL跃迁。当泵浦强度超过1 MW/cm2时,S-D泵浦跃迁被完全漂白,允许在基态终止激光跃迁。这些系统的动力学是复杂的,由于许多光学跃迁之间的人口反转竞争。光抽运中红外铷脉冲无反光镜激光器在热管中沿2.73 μm的62P1/2 - 62S1/2跃迁和2.79 μm的62P1/2 - 62S1/2跃迁,最大能量约为100 nJ。随着铷蒸气密度的增加,性能显著提高,这与先前的工作直接矛盾。没有观察到与能量池或电离动力学相关的结垢限制。红外对抗的实际应用取决于蓝色二极管泵浦源的进一步发展。最后,利用稳定谐振器和脉冲激光激发,观察了钾蒸气在D1和D2线附近的受激电子拉曼散射和超拉曼过程。在超过70 cm-1的泵浦激光调谐范围内,可以同时独立地观察到一阶、二阶斯托克斯线和反斯托克斯线。当泵浦在kd1和D2线之间调谐时,高效的超拉曼过程占主导地位,斜率效率超过10%。拉曼位移激光器可作为高功率二极管抽运碱激光器的目标照明器或大气补偿信标。
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引用次数: 2
Simulation and experiment of pump distribution in LD end-pumped Nd:YAG single crystal fiber LD端泵浦Nd:YAG单晶光纤中泵浦分布的仿真与实验
Pub Date : 2017-01-13 DOI: 10.1117/12.2256803
Xiaotian Cai, Xiao Li, Guo-min Zhao
The spread of the pump model, established based on MATLAB, simulates the distribution of the pump in End-Pumped single crystal fiber. Simulation results show that the pump in the rod single crystal fiber will converge again. By changing the crystal absorption coefficient, it can be found that smaller the absorption coefficient is, more uniform the pump distribution is; when it is greater, the pump will concentrate to the pump end more seriously. Establish End- Pumped Experimental platform in the experiment, the crystal is 1 mm in diameter and length of 30 mm, Nd3+ doping concentration is 1%. Change the position of the pump light's focus in the crystal, we can see different distribution of the pump light by different focus location in the crystal and find that the pump light has the most homogeneous distribution when the focus is on the crystal axis and has 1mm distance to the pump end face. At this time, the second convergence of the pump is clearly visible. By changing the pump wavelength, crystal absorption coefficient changes. It is found that under the same pump power, absorption coefficient is greater, the pump will concentrate to the pump end more seriously. And the temperature of crystal pump end rises, which is identical with the simulation results. The results indicate that for the single crystal fiber, the higher absorption coefficient is not better, low absorption coefficient leads to the uniform distribution of the pump, there will be a better absorption in a relatively long length of single crystal fiber. And due to the lower end face temperature, end pump power upper limit will also increase.
基于MATLAB建立了泵浦分布模型,模拟了泵浦在端泵浦单晶光纤中的分布。仿真结果表明,杆状单晶光纤中的泵浦会再次收敛。通过改变晶体吸收系数可以发现,吸收系数越小,泵浦分布越均匀;当它较大时,泵将更严重地向泵端集中。在实验中建立端泵实验平台,晶体直径为1mm,长度为30mm, Nd3+掺杂浓度为1%。改变泵浦光聚焦在晶体中的位置,我们可以通过聚焦在晶体中的不同位置看到泵浦光的不同分布,发现当聚焦在晶体轴上且距离泵浦端面1mm时,泵浦光的分布最均匀。此时,泵的第二次收敛清晰可见。通过改变泵浦波长,晶体吸收系数发生变化。研究发现,在相同的泵功率下,吸光系数越大,泵向泵端集中的现象就越严重。晶体泵端温度升高,与仿真结果一致。结果表明,对于单晶光纤来说,吸收系数越高并不是越好,低的吸收系数导致泵浦分布均匀,在较长的单晶光纤中会有较好的吸收。而由于端面温度较低,端泵功率上限也会增大。
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引用次数: 0
High-brightness and narrow-linewidth diamond Raman lasers 高亮度窄线宽金刚石拉曼激光器
Pub Date : 2017-01-13 DOI: 10.1117/12.2261684
O. Lux, R. J. Williams, S. Sarang, H. Jasbeer, A. Mckay, O. Kitzler, R. Mildren
We present our recent advances in the field of Raman frequency conversion using high-optical quality CVD-diamond. Different diamond Raman lasers were developed for efficiently generating multi-Watt output at specific wavelengths from the visible to the eye-safe spectral range, while single-frequency operation was accomplished by exploiting an intrinsic mode stability mechanism.
本文介绍了高光学质量cvd金刚石在拉曼频率转换领域的最新进展。开发了不同的金刚石拉曼激光器,以在可见光到人眼安全光谱范围内的特定波长有效地产生多瓦输出,而单频工作则通过利用固有模式稳定机制来完成。
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引用次数: 1
TEA HF laser with a high specific radiation energy 具有高比辐射能量的TEA HF激光器
Pub Date : 2017-01-13 DOI: 10.1117/12.2256353
A. Puchikin, M. Andreev, V. Losev, Y. Panchenko
Results of experimental studies of the chemical HF laser with a non-chain reaction are presented. The possibility of the total laser efficiency of 5 % is shown when a traditional C-to-C pumping circuit with the charging voltage of 20-24 kV is used. It is experimentally shown that the specific radiation output energy of 21 J/l is reached at the specific pump energy of 350 J/l in SF6/H2 = 14/1 mixture at the total pressure of 0.27 bar.
介绍了非链式化学HF激光器的实验研究结果。在充电电压为20 ~ 24 kV的传统c - c泵浦电路中,激光总效率可达5%。实验表明,在总压为0.27 bar的SF6/H2 = 14/1混合物中,当比泵能为350 J/l时,比辐射输出能量达到21 J/l。
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引用次数: 0
Pressure broadening coefficients for the 811.5nm Ar line and 811.3nm Kr line in rare gases 稀有气体中811.5nm Ar线和811.3nm Kr线的压力展宽系数
Pub Date : 2017-01-13 DOI: 10.1117/12.2256708
A. R. Ghildina, P. A. Mikheyev, A. Chernyshov, N. I. Ufimtsev, V. N. Azyazov, M. Heaven
This paper describes systematic measurements of pressure broadening coefficients for argon and krypton lines in an RF (radio-frequency) discharge plasma sustained in a mixture of inert gases. Using tunable diode laser spectroscopy we obtained experimental data for pressure broadening of argon and krypton lines. Pressure broadening coefficients were determined for Ar+Ne and Kr+Ne and Kr+Ar. For krypton, the isotopic structure of the line was taken into account and an appropriate fitting function was used to determine pressure broadening coefficients for the natural mixture of isotopes. These data may be used for diagnostics of the active medium of optically pumped all-rare-gas lasers.
本文描述了在惰性气体混合物中持续的射频放电等离子体中氩和氪线压力展宽系数的系统测量。利用可调谐二极管激光光谱技术,获得了氩、氪谱线压力展宽的实验数据。测定了Ar+Ne、Kr+Ne和Kr+Ar的压力展宽系数。对于氪,考虑了谱线的同位素结构,并采用合适的拟合函数来确定天然同位素混合物的压力展宽系数。这些数据可用于光抽运全稀有气体激光器的有效介质诊断。
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引用次数: 1
Theoretical research of beam combination between hollow beam and Gaussian beam 空心光束与高斯光束组合的理论研究
Pub Date : 2017-01-13 DOI: 10.1117/12.2256552
Peng Wang, Xiao Li, Yaping Shang, Xiaojun Xu
The near and far field intensity distribution as well as the beam quality of the combination between the hollow beam generated by double axicons and the Gaussian beam were simulated in this paper. The simulation results revealed that several parameters like the interval between two axicons and the phase difference between the two beams would influence the intensity distribution of the combined beam, especially the phase difference between the hollow beam and Gaussian beam which could transforms the far-field intensity distribution into quasi-hollow distribution or peak shaped distribution and was of great potentiality in the industry application.
本文模拟了双轴空心光束与高斯光束组合后的远、近场强分布和光束质量。仿真结果表明,两轴间距、两束相位差等参数会影响组合光束的强度分布,特别是空心光束与高斯光束之间的相位差可以将远场强度分布转变为准空心分布或峰形分布,具有很大的工业应用潜力。
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引用次数: 1
期刊
International Symposium on High Power Laser Systems and Applications
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