Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995562
Moises Oviedo Mendoza, Erika Padilla Ortega, O. Arias de Fuentes, Y. Prokhorov, J. Gabriel Luna Barcenas
The scope of this work is to obtain and characterize a nanobiocomposite as Ion Selective Electrodes (ISE) for nitrate ion determination in water. This nanocomposite is based upon the intercalation of chitosan, a cationic biopolymer, in bentonite. Chitosan (CS)/bentonite nanocomposites were prepared by ionic exchange. The amino groups in the CS can be protonated in acidic solution and they can replace the interlayer cation on the clay surface. Nitrate (II) was added at the end of the preparation process for blocking the cationic exchange sites and enhance the potentiometric response to nitrate. Chitosan/bentonite films were obtained by solvent cast method. X-Ray Diffraction (XRD), X-Ray Photoelectron Spectroscopy (XPS) and Fourier-Transformed-Infrared Spectroscopy (FTIR) were used to characterize the nanocomposites. These studies confirm that the chitosan was intercalated into the bentonite interlayer spacing due to the electrostatic attraction between NH3+ groups and the negatively charge bentonite surface. These measurements confirm that there exist possibilities to reverse the ion exchange of this nanocomposite. Potentiometric measurements were performed using an Ag/AgCl reference electrode and an ISE with chitosan/bentonite membranes deposited on a graphite-epoxy electrode as a working electrode. A linear fitting was performed between 2×10-4M and 8×10-1M of concentration with a near Nernstian slope of -54.6 mV/dec. The selectivity towards some interfering ions was calculated according to the Separate Solution Method (SSM).
{"title":"Chitosan/bentonite nanocomposite: Preliminary studies of its potentiometric response to nitrate ions in water","authors":"Moises Oviedo Mendoza, Erika Padilla Ortega, O. Arias de Fuentes, Y. Prokhorov, J. Gabriel Luna Barcenas","doi":"10.1109/IBERSENSOR.2014.6995562","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995562","url":null,"abstract":"The scope of this work is to obtain and characterize a nanobiocomposite as Ion Selective Electrodes (ISE) for nitrate ion determination in water. This nanocomposite is based upon the intercalation of chitosan, a cationic biopolymer, in bentonite. Chitosan (CS)/bentonite nanocomposites were prepared by ionic exchange. The amino groups in the CS can be protonated in acidic solution and they can replace the interlayer cation on the clay surface. Nitrate (II) was added at the end of the preparation process for blocking the cationic exchange sites and enhance the potentiometric response to nitrate. Chitosan/bentonite films were obtained by solvent cast method. X-Ray Diffraction (XRD), X-Ray Photoelectron Spectroscopy (XPS) and Fourier-Transformed-Infrared Spectroscopy (FTIR) were used to characterize the nanocomposites. These studies confirm that the chitosan was intercalated into the bentonite interlayer spacing due to the electrostatic attraction between NH3+ groups and the negatively charge bentonite surface. These measurements confirm that there exist possibilities to reverse the ion exchange of this nanocomposite. Potentiometric measurements were performed using an Ag/AgCl reference electrode and an ISE with chitosan/bentonite membranes deposited on a graphite-epoxy electrode as a working electrode. A linear fitting was performed between 2×10-4M and 8×10-1M of concentration with a near Nernstian slope of -54.6 mV/dec. The selectivity towards some interfering ions was calculated according to the Separate Solution Method (SSM).","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"os-30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127864521","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995547
M. Gomes, J. A. Oliveira, E. M. Gaspar
This work intends to give a brief overview of sensors application for cheese. Besides discussing the main achievements on the field, it will show the main difficulties that still need to be overcome. Single sensors to follow milk coagulation and detection of specific target compounds are discussed, as well as how complex problems where more than one compound need to be followed, as during rancidity development, can be adequately followed by a single non-specific sensor. Electronic noses formed by a variety of non-specific sensors can be employed in the quality control and examples of well succeeded applications as well as others still under development are discussed.
{"title":"Use of sensors in cheese manufacture and quality control","authors":"M. Gomes, J. A. Oliveira, E. M. Gaspar","doi":"10.1109/IBERSENSOR.2014.6995547","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995547","url":null,"abstract":"This work intends to give a brief overview of sensors application for cheese. Besides discussing the main achievements on the field, it will show the main difficulties that still need to be overcome. Single sensors to follow milk coagulation and detection of specific target compounds are discussed, as well as how complex problems where more than one compound need to be followed, as during rancidity development, can be adequately followed by a single non-specific sensor. Electronic noses formed by a variety of non-specific sensors can be employed in the quality control and examples of well succeeded applications as well as others still under development are discussed.","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134624523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995523
P. Marques, G. Z. Monteiro, I. Pereyra, K. F. Albertin
pH sensor fabricated with TiO2 nanotube arrays with diameter and length controlled by the anodization voltage and time were obtained and characterized. The TiO2 nanotube arrays were obtained by Ti foil anodization in a NH4F organic solution with 20 and 40 V for 5, 15 and 25 min. pH sensors based on Ti2 NTs electrodes presented linear response respect to the pH value in the 4-10 pH range. The pH sensor with nanotubes obtained with 20V / 25 min presents a reproducible response and the best sensitivity value, 45.8 mV/pH. This TiO2 NTs pH sensor irradiated by UV shows a very stable response and a sensitivity value of 50.9 mV/pH close to Nernst equation (59 mV/pH).
{"title":"pH sensors based in TiO2 NTs arrays","authors":"P. Marques, G. Z. Monteiro, I. Pereyra, K. F. Albertin","doi":"10.1109/IBERSENSOR.2014.6995523","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995523","url":null,"abstract":"pH sensor fabricated with TiO2 nanotube arrays with diameter and length controlled by the anodization voltage and time were obtained and characterized. The TiO2 nanotube arrays were obtained by Ti foil anodization in a NH4F organic solution with 20 and 40 V for 5, 15 and 25 min. pH sensors based on Ti2 NTs electrodes presented linear response respect to the pH value in the 4-10 pH range. The pH sensor with nanotubes obtained with 20V / 25 min presents a reproducible response and the best sensitivity value, 45.8 mV/pH. This TiO2 NTs pH sensor irradiated by UV shows a very stable response and a sensitivity value of 50.9 mV/pH close to Nernst equation (59 mV/pH).","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129492303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995514
A. L. Paredes-Doig, Maria del Rosario Sun-Kou, G. Comina
In this paper a series of sensors based on SnO2 doped by impregnation with Pd, with a ratio of 1% to 5% were prepared. These sensors have shown good sensitivity for different alcohols (ethanol, n-butanol and 1-octanol). The characterization of the doped SnO2 was performed using N2 adsorption-desorption by the Brunauer-Emmett-Teller (SBET) surface area analysis, and Scanning Electron Microscopy (SEM). The gas sensor's behaviour for different alcohol-vapours and different working temperature were analyzed. Although the fabrication technique does not give us a uniform and well shaped film, it was observed that the response signal of the sensor changes proportionally with the sensing temperature. The higher voltage response to ethanol was obtained with the sensor 5% Pd-SnO2 film, and also it has been obtained good signal reproducibility when alcohols (ethanol, n-butanol and 1-octanol) were measured under the same conditions.
{"title":"Alcohols detection based on Pd-doped SnO2 sensors","authors":"A. L. Paredes-Doig, Maria del Rosario Sun-Kou, G. Comina","doi":"10.1109/IBERSENSOR.2014.6995514","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995514","url":null,"abstract":"In this paper a series of sensors based on SnO2 doped by impregnation with Pd, with a ratio of 1% to 5% were prepared. These sensors have shown good sensitivity for different alcohols (ethanol, n-butanol and 1-octanol). The characterization of the doped SnO2 was performed using N2 adsorption-desorption by the Brunauer-Emmett-Teller (SBET) surface area analysis, and Scanning Electron Microscopy (SEM). The gas sensor's behaviour for different alcohol-vapours and different working temperature were analyzed. Although the fabrication technique does not give us a uniform and well shaped film, it was observed that the response signal of the sensor changes proportionally with the sensing temperature. The higher voltage response to ethanol was obtained with the sensor 5% Pd-SnO2 film, and also it has been obtained good signal reproducibility when alcohols (ethanol, n-butanol and 1-octanol) were measured under the same conditions.","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128370811","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995561
N. M. Cerón-Hurtado, Jordi Aguiló Llobet
Power consumption, flexibility, cost effectiveness and dimension reductions are the most important parameters to consider in many applications of the biomedical field and particularly implant devices. Echoing this trend, we present a passive, flexible and low cost wireless microsensor based on a LC tank circuit whose capacity varies with the deformation as a result of the area change shared between the interdigitated parallel plates capacitor. As a result, two types of micro-sensor are defined, simulated, fabricated and tested. The capacitors constitute a set of interdigitated gold plates laid on a COP (Cyclo Olefin Polymer) substrate and the planar microcoils are designed to take into account the spacing between the turns, the width and the number of turns over the COP substrate. The system is completed by an inductive reading subsystem and testing results show the scalability of the system. Using the fabricated demonstrator, we detect displacements in the range of tens of micrometers and resonance frequency variations 200 to 350MHz.
{"title":"Wireless zero-power small displacement sensors","authors":"N. M. Cerón-Hurtado, Jordi Aguiló Llobet","doi":"10.1109/IBERSENSOR.2014.6995561","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995561","url":null,"abstract":"Power consumption, flexibility, cost effectiveness and dimension reductions are the most important parameters to consider in many applications of the biomedical field and particularly implant devices. Echoing this trend, we present a passive, flexible and low cost wireless microsensor based on a LC tank circuit whose capacity varies with the deformation as a result of the area change shared between the interdigitated parallel plates capacitor. As a result, two types of micro-sensor are defined, simulated, fabricated and tested. The capacitors constitute a set of interdigitated gold plates laid on a COP (Cyclo Olefin Polymer) substrate and the planar microcoils are designed to take into account the spacing between the turns, the width and the number of turns over the COP substrate. The system is completed by an inductive reading subsystem and testing results show the scalability of the system. Using the fabricated demonstrator, we detect displacements in the range of tens of micrometers and resonance frequency variations 200 to 350MHz.","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132879428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995519
Albert Saavedra, E. Cortón
In the bio-mining industry there are various compounds which need to be frequently monitored, one of which is iron, since its concentration can seriously affect the industrial process. This study describes the development of an electrochemical method of speciation and rapid quantification of iron in bio-mining processes conditions. Speciation and quantification was carried out in a flow injection system using techniques of cyclic voltammetry and chronoamperometry. The proposed and a standard method were used to compare the results obtained from simulated and real mixed (ferric/ferrous) samples. Cyclic voltammograms presented two peaks corresponding to the ferric ion reduction of and ferrous ion oxidation. Chronoamperometry allow the construction of calibration curves for both ions. Quantification of real and simulated samples showed acceptable levels of error compared to a standard method. The electrochemical method allowed in a simple and rapid way the speciation and quantification of iron in mixed samples, including real samples from acid mine drainage, which established the basis for the development of an automated process monitoring device.
{"title":"Flow-injection amperometric sensor for quantification and speciation of iron","authors":"Albert Saavedra, E. Cortón","doi":"10.1109/IBERSENSOR.2014.6995519","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995519","url":null,"abstract":"In the bio-mining industry there are various compounds which need to be frequently monitored, one of which is iron, since its concentration can seriously affect the industrial process. This study describes the development of an electrochemical method of speciation and rapid quantification of iron in bio-mining processes conditions. Speciation and quantification was carried out in a flow injection system using techniques of cyclic voltammetry and chronoamperometry. The proposed and a standard method were used to compare the results obtained from simulated and real mixed (ferric/ferrous) samples. Cyclic voltammograms presented two peaks corresponding to the ferric ion reduction of and ferrous ion oxidation. Chronoamperometry allow the construction of calibration curves for both ions. Quantification of real and simulated samples showed acceptable levels of error compared to a standard method. The electrochemical method allowed in a simple and rapid way the speciation and quantification of iron in mixed samples, including real samples from acid mine drainage, which established the basis for the development of an automated process monitoring device.","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115840236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995507
Jose Mauricio Nava Auza, A. Branco, J.R. Boisson de Marca
The main source of power supply for Wireless Sensor Networks are batteries, which are limited in life-cycle, thus limiting the sensors lifetime. Due this fact, the energy efficiency network is becoming the main concern to be addressed by researchers. This work aims to implement two theoretical energy-saving algorithms for WSN, DTNBOR and DTRNG. These algorithms choose their transmissions powers dynamically. Results obtained from simulations and necessary adjustments, for proper operation in a real implementation will be showed.
{"title":"Experimental evaluation of energy efficient algorithms for WSN using variable transmission powers","authors":"Jose Mauricio Nava Auza, A. Branco, J.R. Boisson de Marca","doi":"10.1109/IBERSENSOR.2014.6995507","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995507","url":null,"abstract":"The main source of power supply for Wireless Sensor Networks are batteries, which are limited in life-cycle, thus limiting the sensors lifetime. Due this fact, the energy efficiency network is becoming the main concern to be addressed by researchers. This work aims to implement two theoretical energy-saving algorithms for WSN, DTNBOR and DTRNG. These algorithms choose their transmissions powers dynamically. Results obtained from simulations and necessary adjustments, for proper operation in a real implementation will be showed.","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"105 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124800238","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995546
J. N. Schianti, M. Gongora-Rubio, Thais Aragão Horoiwa, N. N. Cerize, A. M. Oliveira
In this work we present the first results related to production of water nanoemulsion in diesel oil using microfluidic reactors as tool. We tested two different microreactors, a vortex and 3D serpentine geometry, varying parameters such as total flow rate, surfactant concentration and ratio between phases. It was observed water droplets sizes from 100 to 700 nm, and the stability was dependent of surfactant concentration. Higher flow rates offer smaller droplets sizes obtained in vortex device. However, with 3D serpentine we observed nanoemulsion with better stability.
{"title":"Water-in-diesel nanoemulsion by LTCC microfluidic devices","authors":"J. N. Schianti, M. Gongora-Rubio, Thais Aragão Horoiwa, N. N. Cerize, A. M. Oliveira","doi":"10.1109/IBERSENSOR.2014.6995546","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995546","url":null,"abstract":"In this work we present the first results related to production of water nanoemulsion in diesel oil using microfluidic reactors as tool. We tested two different microreactors, a vortex and 3D serpentine geometry, varying parameters such as total flow rate, surfactant concentration and ratio between phases. It was observed water droplets sizes from 100 to 700 nm, and the stability was dependent of surfactant concentration. Higher flow rates offer smaller droplets sizes obtained in vortex device. However, with 3D serpentine we observed nanoemulsion with better stability.","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"145 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132671146","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995510
L. Hernandez, M. L. P. Da Silva, R. R. Lima, F. L. Almeida, S. G. Santos Fo
TEOS and/or TEOS/HFE plasma polymerized thin films, exposed or non-exposed to ultraviolet (UVC) radiation, were obtained on gold electrodes and tested for electrochemical measurements. All films presented good performance on electrochemical measurements. The electronic signal does not change significantly after 24h on physiologic serum but thin TEOS films allow ion permeation. Thus, these films are useful as membranes to reference and measuring electrodes.
{"title":"TEOS and TEOS/HFE plasma thin films used in electrochemical measurements","authors":"L. Hernandez, M. L. P. Da Silva, R. R. Lima, F. L. Almeida, S. G. Santos Fo","doi":"10.1109/IBERSENSOR.2014.6995510","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995510","url":null,"abstract":"TEOS and/or TEOS/HFE plasma polymerized thin films, exposed or non-exposed to ultraviolet (UVC) radiation, were obtained on gold electrodes and tested for electrochemical measurements. All films presented good performance on electrochemical measurements. The electronic signal does not change significantly after 24h on physiologic serum but thin TEOS films allow ion permeation. Thus, these films are useful as membranes to reference and measuring electrodes.","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128023234","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-12-29DOI: 10.1109/IBERSENSOR.2014.6995536
E. Unigarro, Alvaro U. Achury, J. Bohórquez, Jordi Sacristan Riquelme, F. Segura-Quijano
In this paper we present the implementation of a capacitive pressure sensor using interdigitated electrodes and a polymer cavity, the sensor functionality is based on the compression of a sealed cavity which changes the dielectric properties on top of two planar interdigitated electrodes (IDE). COMSOL was used to perform multiphysics simulations of the mechanical and electrical behavior of the sensor. The fabrication process of the sensor was made in tree steps: the interdigitated electrodes were fabricated using copper on a FR4 substrate, a sealed cavity of polydimethylsiloxane (PDMS) was built using FR4 molds, and finally the cavity and IDE were assembled with a thin layer of PDMS. The IDE electrodes are composed of 21 fingers and had a squared area of 11×11 mm, the PDMS cavity had an area of 11×11 mm with a height of 900 μm. A precision LCR meter (Agilent 4248A) was used to measure the capacitance variations caused by the pressure changes, the sensor was tested in the range of 0 to 40 psi and has a sensitivity of 3.35 fF/psi. Simulations were used to study the possibility of using functionalized polymers to increase the sensor sensitivity; the aim of this work is to present the design and fabrication process for a planar capacitive sensor, this design requires less fabrication steps than common micro-electromechanicals systems (MEMS) pressure sensors reducing the production costs of the pressure sensors, also allowing new types of integrations.
在本文中，我们提出了一种使用交错电极和聚合物腔的电容式压力传感器的实现，传感器的功能是基于压缩密封腔，从而改变两个平面交错电极(IDE)顶部的介电特性。使用COMSOL对传感器的机械和电气行为进行多物理场模拟。该传感器的制造过程分为三个步骤:在FR4衬底上使用铜制作交叉电极，使用FR4模具构建聚二甲基硅氧烷(PDMS)密封腔，最后用PDMS薄层组装腔和IDE。IDE电极由21指组成，平方面积为11×11 mm, PDMS腔面积为11×11 mm，高度为900 μm。采用精密LCR仪表(Agilent 4248A)测量压力变化引起的电容变化，该传感器的测试范围为0 ~ 40 psi，灵敏度为3.35 fF/psi。通过仿真研究了利用功能化聚合物提高传感器灵敏度的可能性;这项工作的目的是展示平面电容式传感器的设计和制造过程，这种设计比普通的微机电系统(MEMS)压力传感器需要更少的制造步骤，降低了压力传感器的生产成本，也允许新型集成。
{"title":"Design and implementation of a planar capacitive pressure sensor","authors":"E. Unigarro, Alvaro U. Achury, J. Bohórquez, Jordi Sacristan Riquelme, F. Segura-Quijano","doi":"10.1109/IBERSENSOR.2014.6995536","DOIUrl":"https://doi.org/10.1109/IBERSENSOR.2014.6995536","url":null,"abstract":"In this paper we present the implementation of a capacitive pressure sensor using interdigitated electrodes and a polymer cavity, the sensor functionality is based on the compression of a sealed cavity which changes the dielectric properties on top of two planar interdigitated electrodes (IDE). COMSOL was used to perform multiphysics simulations of the mechanical and electrical behavior of the sensor. The fabrication process of the sensor was made in tree steps: the interdigitated electrodes were fabricated using copper on a FR4 substrate, a sealed cavity of polydimethylsiloxane (PDMS) was built using FR4 molds, and finally the cavity and IDE were assembled with a thin layer of PDMS. The IDE electrodes are composed of 21 fingers and had a squared area of 11×11 mm, the PDMS cavity had an area of 11×11 mm with a height of 900 μm. A precision LCR meter (Agilent 4248A) was used to measure the capacitance variations caused by the pressure changes, the sensor was tested in the range of 0 to 40 psi and has a sensitivity of 3.35 fF/psi. Simulations were used to study the possibility of using functionalized polymers to increase the sensor sensitivity; the aim of this work is to present the design and fabrication process for a planar capacitive sensor, this design requires less fabrication steps than common micro-electromechanicals systems (MEMS) pressure sensors reducing the production costs of the pressure sensors, also allowing new types of integrations.","PeriodicalId":296271,"journal":{"name":"2014 IEEE 9th IberoAmerican Congress on Sensors","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114526673","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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