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2007 8th International Conference on Electronic Packaging Technology最新文献

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Chip Package Interaction in Ultra Low-k/Copper Interconnect Technology 超低k/铜互连技术中的芯片封装交互
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441569
X. Liu, T. Shaw, E. Liniger, M. Lane, G. Bonilla, J. Doyle, B. Herbst, D. Questad
In this paper a methodology based on fracture mechanics has been used to investigate the chip package interaction of ultra low-k/copper interconnect. When a wafer is diced into chips, defects can be generated at the edge of the chips. Under the thermal stress from the package the defects can propagate into the dielectric and cause the chip failure.
本文采用断裂力学的方法研究了超低k/铜互连的芯片封装相互作用。当晶圆片被切成芯片时,在芯片的边缘会产生缺陷。在封装的热应力作用下,这些缺陷会扩散到介质中,导致芯片失效。
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引用次数: 1
Optimal Design of SnAgCu-CNT Solder Lap-shear Specimen under Thermal Cycles with FEM 热循环条件下SnAgCu-CNT焊料搭剪试件的有限元优化设计
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441461
Yongdian Han, H. Jing, Lianyong Xu, Jun Wei
In this study, multi-walled carbon nanotubes were successfully incorporated into Sn95.5Ag3.8Cu0.7 solder to synthesize novel lead-free composite solders. The paper presents a numerical approach to track the shear stress and creep strain behaviors at the solder joint in lap-shear specimen subject to thermal process. Some notches with different sizes and shapes are designed on the substrate next to the solder. In the investigation, using FEM, the distribution of shear stress and creep strain is simulated and compared under the same conditions but different notch designs. The analytical results show that the distribution of shear stress and creep strain embodies obvious periodicity. The shear stress varies nearly in-phase with the temperature while creep strain does out of phase with temperature. The triangular and round notches are helpful to uniform the range of shear strain. In triangular and round notch designs, notch size does little to affect the distribution of creep strain.
本研究成功地将多壁碳纳米管掺入Sn95.5Ag3.8Cu0.7焊料中,合成了新型无铅复合焊料。本文提出了一种跟踪热作用下搭剪试样焊点处剪切应力和蠕变应变行为的数值方法。在靠近焊料的基板上设计一些不同尺寸和形状的缺口。采用有限元方法,对相同条件下不同缺口设计下的剪切应力和蠕变应变分布进行了模拟和比较。分析结果表明,剪切应力和蠕变应变的分布具有明显的周期性。剪切应力随温度变化接近同相,而蠕变应变随温度变化呈非同相。三角形缺口和圆形缺口有助于均匀剪切应变范围。在三角形和圆形缺口设计中,缺口尺寸对蠕变应变的分布影响不大。
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引用次数: 1
Automatic Focus Algorithm for IC Wafer Image Sampling by Adaptive Lifting Scheme Denoising 基于自适应提升降噪的IC晶圆图像自动聚焦算法
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441522
Deng Yaohua, L. Guixiong, Wu Liming, Zhang Yingmin, W. Guitang
High SNR (signal to noise ratio) image is deeply needed in the precise analysis of IC wafer micro-image; current denoising algorithms cant reach the analytic precision in some level. In tins paper, one image denoising algorithms is putted forward based on adaptive lifting scheme, the construction of Haar wavelet and CDF (2,2) is given, the signal is decomposed by wavelet base Haar or wavelet base CDF (2,2) adaptively along four directions (horizon, verticality, 45 degree and 135 degree) in the step of predicting, the wavelet coefficients are calculated separately at each direction, all the thresholds are gained using wavelet soft-thresholding principle, the optimal thresholds minimize the error of the result as compared to these the signal is decomposed along horizon and verticality. Finally the definition of the image is appraised with gray gradient judging function, the experimental data shows that the focus error is no more 4 um, the display definition of the image is improved.
精确分析IC晶圆微图像需要高信噪比的图像;现有的去噪算法在一定程度上无法达到解析精度。本文提出了一种基于自适应提升方案的图像去噪算法,给出了Haar小波和CDF(2,2)的构造,在预测步骤中对信号进行小波基Haar或小波基CDF(2,2)沿水平、垂直、45度和135度四个方向的自适应分解,在每个方向分别计算小波系数,利用小波软阈值原理获得所有阈值。最佳阈值使结果的误差最小,与此相比,信号沿水平和垂直方向分解。最后利用灰度梯度判断函数对图像的清晰度进行评价,实验数据表明,聚焦误差不超过4 μ m,提高了图像的显示清晰度。
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引用次数: 1
Preparation of Microcones Array Material for Microelectronic Package 微电子封装用微锥阵列材料的制备
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441467
Kailin Liu, Huiqin Ling, Ming Li, D. Mao
Microcones arrays of cobalt were prepared by electrodeposition with special crystallization conditioning agent. The influence of electrodepositing conditions and form factor effect on the morphology of microcones array is reported. X-ray diffraction result indicated that the Co arrays growing with (110) preferred orientation. The Co array had an obvious magnetic anisotropy. The coercive and saturation field perpendicular and parallel to the surface of Co were FE-SEM, XRD and VSM, respectively.
采用特殊的结晶调理剂电沉积法制备了钴微锥阵列。报道了电沉积条件和形状因子效应对微锥阵列形貌的影响。x射线衍射结果表明,Co阵列以(110)择优取向生长。钴阵列具有明显的磁各向异性。FE-SEM、XRD和VSM分别对垂直于Co表面和平行于Co表面的矫顽力场和饱和场进行了表征。
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引用次数: 2
Microstructure of Ag-Sn Bonding for MEMS Packaging MEMS封装中Ag-Sn键合的微观结构
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441377
Xiaogang Li, Jian Cai, Y. Sohn, Qian Wang, Woon-Bae Kim, Shuidi Wang
Different metallization systems and bonding designs of Ag-Sn bonding were investigated to achieve good bonding. The bonding strength was evaluated by shear force. The microstructure of bonding interface was inspected by scanning electronic microscopy and ED AX. Shear force test was performed for as-bonded dice. The test results indicate differences among different metallization systems. The bonding pair with Ti/Au as the UBM has a quite low shear strength because of the bad adhesion on the silicon substrate. The bonding pair of Ti/Ni/Sn/Au and Ti/Ni/Au/Ag obviously has higher shear strength than that of Ti/Ni/Sn/Au and Ti/Ni/Au/Ag/Au. The former is 55.17 MPa on average while the later is 36.05 MPa. The shear strength of the pair of Ti/Ni/Sn/Au and Ti/Ni/Au/Ag is similar to that of Ti/Ni/Sn/Au and Ti/Ag which has the shear strength of 55.32 MPa on average. The Ni and Au in the Ag-Sn bonding system have significant effect on the microstructure of the bonding interface. The diffusion of Au into Sn is quicker than both Ag and Ni. The diffusion between Au and Sn would induce the obstacle of the inter-diffusion between Sn and Ag. Ni will also diffuse quickly into Sn and form Ni3Sn4. The existence of Ni in Sn will also influence the diffusion of Ag into Sn and make the bad wettability during bonding. After several metallization systems have been investigated, finally a uniform bonding layer has been achieved by excluding Ni and Au in the bonding system. The bonding interface is Ag3Sn layer dispersed with some pure Ag.
研究了不同的金属化体系和银锡键合设计,以达到良好的键合效果。结合强度用剪切力评价。采用扫描电镜和能谱仪对结合界面的微观结构进行了观察。对粘结后的薄片进行了剪切力试验。试验结果表明,不同金属化体系之间存在差异。以Ti/Au为UBM的键合对由于在硅衬底上粘附不良,剪切强度很低。Ti/Ni/Sn/Au和Ti/Ni/Au/Ag键对的剪切强度明显高于Ti/Ni/Sn/Au和Ti/Ni/Au/Ag/Au键对。前者平均为55.17 MPa,后者为36.05 MPa。Ti/Ni/Sn/Au和Ti/Ni/Au/Ag对的剪切强度与Ti/Ni/Sn/Au和Ti/Ag对的剪切强度相似,平均为55.32 MPa。Ag-Sn键合体系中的Ni和Au对键合界面的微观结构有显著影响。Au向Sn扩散的速度比Ag和Ni都快。Au和Sn之间的扩散会导致Sn和Ag之间相互扩散的障碍。Ni也会迅速扩散到Sn中形成Ni3Sn4。Sn中Ni的存在也会影响Ag向Sn中的扩散,使结合过程中的润湿性变差。在研究了几种金属化体系后,最终通过在结合体系中排除Ni和Au,获得了均匀的结合层。结合界面为分散有一定量纯银的Ag3Sn层。
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引用次数: 1
High Performance Molding FCBGA Packaging Development 高性能成型FCBGA封装开发
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441483
Ho-Yi Tsai, J. Huang, S. Chiu, C. Hsiao
In this paper, new molding underfill structure is proposed. It shows many advantages, including a) good package coplanarity b) lower bump stress c) lower 2nd level ball stress d) provide no limitation component design. Mold compound can hold big die and substrate together to keep good package coplanarity and give a uniform interface condition within big die area. Droping in heat spreader design gives the largest flexibility of die size and passive component size/number. Mold compound properties can be tailored to meet solder bump and low-K requirements. In addition, mold compound properties have high potential to meet Pb-free solder bump and low-K requirements. A high reliability, high thermal performance, and low package stress molding flip chip ball grid arrays structure is named terminator FCBGA. It has many benefits, like better coplanarity. high through put (multi pes per shut in molding process), low bump stress, and high thermal performance. In conventional flip chip structure, underfill dispenses and cure processes are a bottleneck due to low through put (dispensing unit by unit). For the high performance demand (high pin counts are necessary), large package/die size with more integrated functions needs to meet reliability criteria. Low k dielectric material, lead free bump especially and the package coplanarity are also challenges for package development. Besides, thermal performance is also a key concern with high power device. Low-k has become a hot topic as most 90nm devices and all 65nm devices utilize low-k dielectric. But low-k materials have very low mechanical strength compared to the traditional dielectric films due to their porous nature, which results in lower cohesive strength. Additionally, the tight bump pitch and low standoff height of future packages reduce the flow performance of conventional liquid capillary underfill (CUF) that results in low productivity (low unit per hour (UPH)) and low throughput. From simulation and reliability data, this new structure can provide strong bump protection and reach high reliability performance and can be applied for low-K chip and all kind of bump composition such as tin-lead, high lead, and lead free.
本文提出了一种新型模压下填料结构。它显示了许多优点,包括a)良好的封装共平面性b)较低的碰撞应力c)较低的第二级球应力d)提供无限制的组件设计。模具复合材料能使大模具与基板保持良好的共面性,并在大模具区域内提供均匀的界面条件。散热片设计的降低使模具尺寸和无源元件尺寸/数量具有最大的灵活性。模具复合性能可定制,以满足焊料凹凸和低k的要求。此外,模具复合性能具有很高的潜力,可以满足无铅焊点和低k要求。一种高可靠性、高热性能、低封装应力成型的倒装芯片球栅阵列结构被命名为终结者FCBGA。它有很多好处,比如更好的共平面性。高通过率(成型过程中每关多型),低碰撞应力,高热性能。在传统的倒装芯片结构中,下填充点胶和固化过程是一个瓶颈,因为通过量低(按单元点胶)。对于高性能需求(高引脚数是必要的),具有更多集成功能的大封装/模具尺寸需要满足可靠性标准。低k介电材料,特别是无铅凸点和封装共面性也是封装发展的挑战。此外,热性能也是大功率器件的关键问题。随着大多数90nm器件和所有65nm器件采用低k介电,低k已成为热门话题。但是由于低k材料的多孔性,与传统的介电薄膜相比,其机械强度非常低,导致其内聚强度较低。此外,致密的凸距和较低的隔离高度降低了传统液体毛细底充填(CUF)的流动性能,从而导致低产能(低单位小时(UPH))和低吞吐量。仿真和可靠性数据表明,该结构具有较强的碰撞保护能力,达到较高的可靠性性能,可适用于低k芯片和各种碰撞成分,如锡铅、高铅、无铅等。
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引用次数: 4
Die Bonding Process Research for SOI Membrane Pressure Sensor SOI膜压力传感器的模具粘接工艺研究
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441396
R. Guan
Silicon pressure sensors which are based on piezoresistive effect are in use for many fields, because of their high performance and productivity. However, when work environment temperature is over 125degC, silicon piezoresistive pressure sensors have not been used because of worse temperature performance. SOI piezoresistor pressure chip has better temperature performance than silicon pressure sensor and has evidence advantage in aspects of resisting temperature, radiation and corrosion. The SOI pressure sensor of beam-diaphragm packaging structure which can resist high temperature of 250degC has been developed and its packaging process is analyzed in the paper.
基于压阻效应的硅压力传感器以其优异的性能和生产效率得到了广泛的应用。然而,当工作环境温度超过125℃时,硅压阻式压力传感器因温度性能较差而未被使用。SOI压阻压力芯片具有比硅压力传感器更好的温度性能,在耐温度、耐辐射、耐腐蚀等方面具有明显的优势。研制了抗250℃高温的梁-膜片封装结构SOI压力传感器,并对其封装工艺进行了分析。
{"title":"Die Bonding Process Research for SOI Membrane Pressure Sensor","authors":"R. Guan","doi":"10.1109/ICEPT.2007.4441396","DOIUrl":"https://doi.org/10.1109/ICEPT.2007.4441396","url":null,"abstract":"Silicon pressure sensors which are based on piezoresistive effect are in use for many fields, because of their high performance and productivity. However, when work environment temperature is over 125degC, silicon piezoresistive pressure sensors have not been used because of worse temperature performance. SOI piezoresistor pressure chip has better temperature performance than silicon pressure sensor and has evidence advantage in aspects of resisting temperature, radiation and corrosion. The SOI pressure sensor of beam-diaphragm packaging structure which can resist high temperature of 250degC has been developed and its packaging process is analyzed in the paper.","PeriodicalId":325619,"journal":{"name":"2007 8th International Conference on Electronic Packaging Technology","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132589049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Independent Intellectual Property Product LIP Package of Huatian Technology 华天科技自主知识产权产品LIP包
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441573
Xiao-Feng Guo
This work reviews the LIP packaging application in the company of Huatian Technology.
本文综述了LIP包装在华天科技公司的应用情况。
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引用次数: 0
Electromigration Time to Failure Simulation for Solder Bumps of a Chip Scale Package 芯片级封装焊料凸点的电迁移失效时间模拟
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441511
Shinan Wang, L. Liang, Yuanxiang Zhang, Y. Liu, S. Irving, T. Luk
This paper studies the numerical simulation method for electromigration in the solder joint of a chip scale package. The three dimensional electromigration finite element model for solder joint reliability is developed. Numerical experiments are carried out to obtain the electrical, thermal and stress fields with the migration failure under high current density loads. The indirect coupled analysis that includes electrical, thermal and stress fields are investigated and discussed. The viscoplastic and constitutive material model with both SnPb and SnAgCu solder materials is considered in the paper. The sub-model technique is studied with indirect coupled multiple fields. The impacts of geometry parameters, which include ball shape, trace width and UBM diameter for void formation and electromigration time to failure (TTF) are finally investigated.
本文研究了芯片级封装焊点电迁移的数值模拟方法。建立了焊点可靠性的三维电迁移有限元模型。通过数值实验,得到了在大电流密度载荷下迁移破坏后的电场、热场和应力场。对电场、热场和应力场的间接耦合分析进行了研究和讨论。本文考虑了含SnPb和SnAgCu钎料的粘塑性和本构材料模型。研究了间接耦合多场的子模型技术。最后研究了球的形状、迹线宽度和UBM直径等几何参数对孔隙形成和电迁移失效时间(TTF)的影响。
{"title":"Electromigration Time to Failure Simulation for Solder Bumps of a Chip Scale Package","authors":"Shinan Wang, L. Liang, Yuanxiang Zhang, Y. Liu, S. Irving, T. Luk","doi":"10.1109/ICEPT.2007.4441511","DOIUrl":"https://doi.org/10.1109/ICEPT.2007.4441511","url":null,"abstract":"This paper studies the numerical simulation method for electromigration in the solder joint of a chip scale package. The three dimensional electromigration finite element model for solder joint reliability is developed. Numerical experiments are carried out to obtain the electrical, thermal and stress fields with the migration failure under high current density loads. The indirect coupled analysis that includes electrical, thermal and stress fields are investigated and discussed. The viscoplastic and constitutive material model with both SnPb and SnAgCu solder materials is considered in the paper. The sub-model technique is studied with indirect coupled multiple fields. The impacts of geometry parameters, which include ball shape, trace width and UBM diameter for void formation and electromigration time to failure (TTF) are finally investigated.","PeriodicalId":325619,"journal":{"name":"2007 8th International Conference on Electronic Packaging Technology","volume":"290 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123271898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Local Melting and Formation Steps of Solder Bumps via Induction Heating Reflow 感应加热回流焊焊料凸点的局部熔化和形成步骤
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441385
Hongbo Xu, Mingyu Li, Gang Cheng, Jongmyung Kim, Daewon Kim
This work focuses on the nonuniform melting process and its theoretical explanation. After induction heating for 0.8 s, 1.0 s, 1.4 s and 2.0 s, different welding state can be obtained, which gives a proof of the melting process. The experiment results demonstrate that the skin effect of induction heating forms the great temperature gradient in the solder bump. The computation results give a theoretical support of the local melting phenomena. The surface melting of solder ball can affect the height and shape of the solder bumps, which is an important factor of the thermal reliability for BGA.
本文重点研究了非均匀熔化过程及其理论解释。在感应加热0.8 s、1.0 s、1.4 s和2.0 s后,可以得到不同的焊接状态,从而对熔化过程进行验证。实验结果表明,感应加热的趋肤效应在钎料凸起处形成了较大的温度梯度。计算结果为局部熔化现象提供了理论支持。焊锡球的表面熔化影响焊锡凸点的高度和形状,是影响BGA热可靠性的重要因素。
{"title":"Local Melting and Formation Steps of Solder Bumps via Induction Heating Reflow","authors":"Hongbo Xu, Mingyu Li, Gang Cheng, Jongmyung Kim, Daewon Kim","doi":"10.1109/ICEPT.2007.4441385","DOIUrl":"https://doi.org/10.1109/ICEPT.2007.4441385","url":null,"abstract":"This work focuses on the nonuniform melting process and its theoretical explanation. After induction heating for 0.8 s, 1.0 s, 1.4 s and 2.0 s, different welding state can be obtained, which gives a proof of the melting process. The experiment results demonstrate that the skin effect of induction heating forms the great temperature gradient in the solder bump. The computation results give a theoretical support of the local melting phenomena. The surface melting of solder ball can affect the height and shape of the solder bumps, which is an important factor of the thermal reliability for BGA.","PeriodicalId":325619,"journal":{"name":"2007 8th International Conference on Electronic Packaging Technology","volume":"352 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123404642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
期刊
2007 8th International Conference on Electronic Packaging Technology
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