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2007 8th International Conference on Electronic Packaging Technology最新文献

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Chip Package Interaction in Ultra Low-k/Copper Interconnect Technology 超低k/铜互连技术中的芯片封装交互
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441569
X. Liu, T. Shaw, E. Liniger, M. Lane, G. Bonilla, J. Doyle, B. Herbst, D. Questad
In this paper a methodology based on fracture mechanics has been used to investigate the chip package interaction of ultra low-k/copper interconnect. When a wafer is diced into chips, defects can be generated at the edge of the chips. Under the thermal stress from the package the defects can propagate into the dielectric and cause the chip failure.
本文采用断裂力学的方法研究了超低k/铜互连的芯片封装相互作用。当晶圆片被切成芯片时,在芯片的边缘会产生缺陷。在封装的热应力作用下,这些缺陷会扩散到介质中,导致芯片失效。
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引用次数: 1
Optimal Design of SnAgCu-CNT Solder Lap-shear Specimen under Thermal Cycles with FEM 热循环条件下SnAgCu-CNT焊料搭剪试件的有限元优化设计
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441461
Yongdian Han, H. Jing, Lianyong Xu, Jun Wei
In this study, multi-walled carbon nanotubes were successfully incorporated into Sn95.5Ag3.8Cu0.7 solder to synthesize novel lead-free composite solders. The paper presents a numerical approach to track the shear stress and creep strain behaviors at the solder joint in lap-shear specimen subject to thermal process. Some notches with different sizes and shapes are designed on the substrate next to the solder. In the investigation, using FEM, the distribution of shear stress and creep strain is simulated and compared under the same conditions but different notch designs. The analytical results show that the distribution of shear stress and creep strain embodies obvious periodicity. The shear stress varies nearly in-phase with the temperature while creep strain does out of phase with temperature. The triangular and round notches are helpful to uniform the range of shear strain. In triangular and round notch designs, notch size does little to affect the distribution of creep strain.
本研究成功地将多壁碳纳米管掺入Sn95.5Ag3.8Cu0.7焊料中,合成了新型无铅复合焊料。本文提出了一种跟踪热作用下搭剪试样焊点处剪切应力和蠕变应变行为的数值方法。在靠近焊料的基板上设计一些不同尺寸和形状的缺口。采用有限元方法,对相同条件下不同缺口设计下的剪切应力和蠕变应变分布进行了模拟和比较。分析结果表明,剪切应力和蠕变应变的分布具有明显的周期性。剪切应力随温度变化接近同相,而蠕变应变随温度变化呈非同相。三角形缺口和圆形缺口有助于均匀剪切应变范围。在三角形和圆形缺口设计中,缺口尺寸对蠕变应变的分布影响不大。
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引用次数: 1
Automatic Focus Algorithm for IC Wafer Image Sampling by Adaptive Lifting Scheme Denoising 基于自适应提升降噪的IC晶圆图像自动聚焦算法
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441522
Deng Yaohua, L. Guixiong, Wu Liming, Zhang Yingmin, W. Guitang
High SNR (signal to noise ratio) image is deeply needed in the precise analysis of IC wafer micro-image; current denoising algorithms cant reach the analytic precision in some level. In tins paper, one image denoising algorithms is putted forward based on adaptive lifting scheme, the construction of Haar wavelet and CDF (2,2) is given, the signal is decomposed by wavelet base Haar or wavelet base CDF (2,2) adaptively along four directions (horizon, verticality, 45 degree and 135 degree) in the step of predicting, the wavelet coefficients are calculated separately at each direction, all the thresholds are gained using wavelet soft-thresholding principle, the optimal thresholds minimize the error of the result as compared to these the signal is decomposed along horizon and verticality. Finally the definition of the image is appraised with gray gradient judging function, the experimental data shows that the focus error is no more 4 um, the display definition of the image is improved.
精确分析IC晶圆微图像需要高信噪比的图像;现有的去噪算法在一定程度上无法达到解析精度。本文提出了一种基于自适应提升方案的图像去噪算法,给出了Haar小波和CDF(2,2)的构造,在预测步骤中对信号进行小波基Haar或小波基CDF(2,2)沿水平、垂直、45度和135度四个方向的自适应分解,在每个方向分别计算小波系数,利用小波软阈值原理获得所有阈值。最佳阈值使结果的误差最小,与此相比,信号沿水平和垂直方向分解。最后利用灰度梯度判断函数对图像的清晰度进行评价,实验数据表明,聚焦误差不超过4 μ m,提高了图像的显示清晰度。
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引用次数: 1
Preparation of Microcones Array Material for Microelectronic Package 微电子封装用微锥阵列材料的制备
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441467
Kailin Liu, Huiqin Ling, Ming Li, D. Mao
Microcones arrays of cobalt were prepared by electrodeposition with special crystallization conditioning agent. The influence of electrodepositing conditions and form factor effect on the morphology of microcones array is reported. X-ray diffraction result indicated that the Co arrays growing with (110) preferred orientation. The Co array had an obvious magnetic anisotropy. The coercive and saturation field perpendicular and parallel to the surface of Co were FE-SEM, XRD and VSM, respectively.
采用特殊的结晶调理剂电沉积法制备了钴微锥阵列。报道了电沉积条件和形状因子效应对微锥阵列形貌的影响。x射线衍射结果表明,Co阵列以(110)择优取向生长。钴阵列具有明显的磁各向异性。FE-SEM、XRD和VSM分别对垂直于Co表面和平行于Co表面的矫顽力场和饱和场进行了表征。
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引用次数: 2
Simulation the Effect of the Defect on the Conductance of Nanowire 缺陷对纳米线电导影响的模拟
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441480
L. Mao, Z.O. Wang
The effects of a vacancy on the electronic conductance in a finite one dimensional imperfect quantum wire represents by a sequence of delta function potential were discussed. The results show that the peak of the maximum electronic conductance in the forbidden band caused by vacancy will be largely affected if the position of the vacancy changes. And the position of vacancy is found to have a little effect on the position of the maximum electronic conductance in the forbidden region. All these results demonstrate that for one vacancy existing in a nanowire, the electronic conductance in the conduction band will be deteriorated due to destructive interference of electronic waves.
讨论了用函数势序列表示的有限一维非完美量子线中空位对电子电导的影响。结果表明,空位位置的改变会对禁带中由空位引起的最大电子电导峰值产生较大影响。空位的位置对禁止区内最大电子电导的位置影响不大。这些结果表明,当纳米线中存在一个空位时,由于电子波的破坏性干扰,导带内的电子电导会变差。
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引用次数: 0
Electromigration Time to Failure Simulation for Solder Bumps of a Chip Scale Package 芯片级封装焊料凸点的电迁移失效时间模拟
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441511
Shinan Wang, L. Liang, Yuanxiang Zhang, Y. Liu, S. Irving, T. Luk
This paper studies the numerical simulation method for electromigration in the solder joint of a chip scale package. The three dimensional electromigration finite element model for solder joint reliability is developed. Numerical experiments are carried out to obtain the electrical, thermal and stress fields with the migration failure under high current density loads. The indirect coupled analysis that includes electrical, thermal and stress fields are investigated and discussed. The viscoplastic and constitutive material model with both SnPb and SnAgCu solder materials is considered in the paper. The sub-model technique is studied with indirect coupled multiple fields. The impacts of geometry parameters, which include ball shape, trace width and UBM diameter for void formation and electromigration time to failure (TTF) are finally investigated.
本文研究了芯片级封装焊点电迁移的数值模拟方法。建立了焊点可靠性的三维电迁移有限元模型。通过数值实验,得到了在大电流密度载荷下迁移破坏后的电场、热场和应力场。对电场、热场和应力场的间接耦合分析进行了研究和讨论。本文考虑了含SnPb和SnAgCu钎料的粘塑性和本构材料模型。研究了间接耦合多场的子模型技术。最后研究了球的形状、迹线宽度和UBM直径等几何参数对孔隙形成和电迁移失效时间(TTF)的影响。
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引用次数: 1
Local Melting and Formation Steps of Solder Bumps via Induction Heating Reflow 感应加热回流焊焊料凸点的局部熔化和形成步骤
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441385
Hongbo Xu, Mingyu Li, Gang Cheng, Jongmyung Kim, Daewon Kim
This work focuses on the nonuniform melting process and its theoretical explanation. After induction heating for 0.8 s, 1.0 s, 1.4 s and 2.0 s, different welding state can be obtained, which gives a proof of the melting process. The experiment results demonstrate that the skin effect of induction heating forms the great temperature gradient in the solder bump. The computation results give a theoretical support of the local melting phenomena. The surface melting of solder ball can affect the height and shape of the solder bumps, which is an important factor of the thermal reliability for BGA.
本文重点研究了非均匀熔化过程及其理论解释。在感应加热0.8 s、1.0 s、1.4 s和2.0 s后,可以得到不同的焊接状态,从而对熔化过程进行验证。实验结果表明,感应加热的趋肤效应在钎料凸起处形成了较大的温度梯度。计算结果为局部熔化现象提供了理论支持。焊锡球的表面熔化影响焊锡凸点的高度和形状,是影响BGA热可靠性的重要因素。
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引用次数: 2
Study on Leak Rate Formula and Criterion for Helium Mass Spectrometer Fine Leak Test 氦质谱仪精细检漏率公式及判据的研究
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441537
Wang Geng-lin, Wang Li-yan, Dong Li-jun, Huang Zheng
In the course of analyzing and deducing leak rate formula of fine leak test measurement of helium mass spectrometer, equivalent standard leak rate L is replaced with standard helium leak rate LHe . Helium gas exchange time constant zetaHe is cited, and the contents of typical gases inside hermetic cavity is calculated. It shows that after properly handling the measured leak rate deviation, a series of formulas of the paper can be used to perform engineering calculation on the process of gas exchange. zetaHes are calculated corresponding to leak rate criterion under various test conditions of current Chinese national military standards and US military standards in fine leak test of helium mass spectrometer, so real LHe is preferable to virtual L. Additionally, it is noted that zetaHe is the characteristic parameter to measure the relative hermeticity, and especially, most leak rate criterions in current military standards cannot guarantee meeting the requirement of internal vapor content, so by analyzing the improvement in the standards and existing hermeticity levels, it is evident that there still exists the necessity for the standards to be further improved.
在分析推导氦质谱仪精细检漏测量漏率公式的过程中,将等效标准漏率L替换为标准氦漏率LHe。引用了氦气交换时间常数ztahe,计算了密闭腔内典型气体的含量。结果表明,在对实测泄漏率偏差进行适当处理后,本文的一系列公式可用于气体交换过程的工程计算。在氦质谱仪精细泄漏试验中,zetah是根据现行中国军用标准和美国军用标准的各种试验条件下的泄漏率判据计算的,因此真实的LHe优于虚拟的L.另外,zetah是测量相对密封性的特征参数,特别是现行军用标准中的大多数泄漏率判据不能保证满足内蒸气含量的要求。因此,通过分析标准的改进和现有的密封性水平,可以看出标准仍有进一步改进的必要性。
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引用次数: 2
Thermodynamic Calculation of Phase Equilibria and Its Applications in the Sn-Ag-Cu-Ni-Au System 相平衡的热力学计算及其在Sn-Ag-Cu-Ni-Au体系中的应用
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441439
Feng Gao, C. P. Wang, X. J. Liu, K. Ishida
Sn-Ag-Cu base solders are the most potential candidates to substitute of Sn-Pb eutectic solder. Gold (Au) coatings are used to protect conductor surface from oxidation and thereby to promote the solderability, and nickel (Ni) is often used as a diffusion barrier layer between lead-free solders and substrates to restrict the growing of intermetallic compound layers. And the gold and nickel also are added to the Pb-free solders to improve their performance. In the present work, the thermodynamic calculations of phase equilibria in the Sn-Ag-Cu-Ni-Au system were carried out using the CALPHAD method. Some examples of application are presented, and it is shown that the CALPHAD method is a good tool to design Pb-free solders and understand the interfacial reaction.
Sn-Ag-Cu基焊料是最有潜力替代Sn-Pb共晶焊料的钎料。金(Au)涂层用于保护导体表面免受氧化,从而提高可焊性,而镍(Ni)通常用作无铅焊料和衬底之间的扩散阻挡层,以限制金属间化合物层的生长。此外,还在无铅焊料中加入了金和镍,以提高其性能。本文采用calphhad方法对Sn-Ag-Cu-Ni-Au体系的相平衡进行了热力学计算。给出了一些应用实例,表明CALPHAD方法是设计无铅焊料和了解界面反应的良好工具。
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引用次数: 1
3-D Large-Scale IC/MEMS Co-Integration Using Liquid Solder for Flip-Chip Assembly 3-D大规模IC/MEMS协同集成倒装组装的液态焊料
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441382
Y. Chapuis, A. Debray, H. Fujita
In this paper, we discuss a flip-chip packaging method using liquid solder for 3D large-scale electronic/MEMS co-integration. This approach has been inspired from self-assembly technique which is emerging as one of the main methods for fabrication of heterogeneous micro-and nano-systems. We proposed to form solder bump by coating liquid solder directly on electrodes of a MEMS chip based on sophisticate microstructures of electrostatic microactuator array. Self-alignment and assembly techniques for electronic receptor chip were also detailed in order to achieve efficient flip-chip of MEMS and Electronic chip without any stiction and contamination problem. Functionality of the system has been validated and perspectives discussed.
在本文中,我们讨论了一种使用液态焊料的倒装芯片封装方法,用于3D大规模电子/MEMS协整。这种方法受到自组装技术的启发,自组装技术正在成为制造非均质微纳米系统的主要方法之一。我们提出了在静电微致动器阵列的复杂微结构的MEMS芯片电极上直接涂敷液态焊料形成凸点的方法。为了实现MEMS和电子芯片的高效倒装,避免粘滞和污染问题,详细介绍了电子受体芯片的自对准和组装技术。对系统的功能进行了验证,并讨论了前景。
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引用次数: 2
期刊
2007 8th International Conference on Electronic Packaging Technology
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