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2007 8th International Conference on Electronic Packaging Technology最新文献

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Design and Modeling of Micromachined Thermal Convective Gyroscope with Bidirectional Jets 双向射流微机械热对流陀螺仪的设计与建模
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441494
Y. Ai, Xiaobing Luo, Sheng Liu
This paper presents the design and modeling of a micromachined thermal convective gyroscope with bidirectional jets. Unlike earlier reported thermal convective gyroscopes, the proposed gyroscope comprises two chambers for gas jet deflection. Mathematical analysis was applied to investigate the centrifugal acceleration coupling in both single directional jet detection method and bidirectional jets detection method. Analysis results revealed that bidirectional jets detection method can effectively reduce centrifugal acceleration coupling which induces the nonlinearity of the output electric signal. The applicable range of bidirectional jets detection method is twice wider than that of single directional jet detection method. Numerical simulation was applied to investigate the gyroscope performance, which concluded that the temperature difference DeltaT shows good linearity to the angular rate omega, the nonlinearity is 0.6%. The sensitivity of the proposed gyroscope was estimated to be 1.26mV/deg/s with the supply voltage of 15 V.
本文介绍了一种带有双向射流的微机械热对流陀螺仪的设计与建模。不像以前报道的热对流陀螺仪,所提出的陀螺仪包括两个室气体射流偏转。采用数学分析方法研究了单向射流检测方法和双向射流检测方法下的离心加速度耦合。分析结果表明,双向射流检测方法可以有效地减小离心加速度耦合引起的输出电信号非线性。双向射流检测法的适用范围是单向射流检测法的两倍。通过数值模拟对陀螺仪的性能进行了研究,结果表明,陀螺仪的温度差δ tat与角速度ω呈良好的线性关系,非线性为0.6%。在电源电压为15 V时,估计陀螺仪的灵敏度为1.26mV/deg/s。
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引用次数: 3
Reliability Analysis of Lead-free Flip Chip Solder Joint 无铅倒装芯片焊点可靠性分析
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441538
Dong Wang, Xiaosong Ma, Dan Guo
The purpose of this paper is to study effect of thermal cycle condition on the reliability of lead-free flip chip solder joint. Flip chip assembly was subjected to thermal cycle (MIT-STD-883) condition. Two dimensional finite element analysis (FEA) has been carried out using ANSYS commercial software. There are two types of lead-free solder (Sn96.5-Ag3.5 and Sn95.5-Ag3.8-Cu0.7). They used flip chip solder joints have been evaluated. For each lead-free flip chip solder joint, thermal stress and strain have been studied. The plastic strain is mainly effect on thermal fatigue of solder joint, so two types of lead-free solder joint compare with Sn63-Pb37 solder joint in equivalent plastic strain, and thermal fatigue life of these three types of solder joint has been analyzed and assessed.
本文的目的是研究热循环条件对无铅倒装焊点可靠性的影响。倒装芯片组装经受热循环(MIT-STD-883)条件。利用ANSYS商业软件进行了二维有限元分析(FEA)。无铅焊料有两种(Sn96.5-Ag3.5和Sn95.5-Ag3.8-Cu0.7)。他们使用倒装芯片焊点进行了评估。对每个无铅倒装芯片焊点进行了热应力和应变研究。塑性应变是影响焊点热疲劳的主要因素,因此将两种无铅焊点与Sn63-Pb37焊点进行等效塑性应变比较,并对这三种焊点的热疲劳寿命进行了分析和评价。
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引用次数: 2
Packaging and Microelectromechanical Systems (MEMS) 封装与微机电系统(MEMS)
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441562
Y.C. Lee
Packaging is critical to the advancement of microsystems integrating microelectromechanical systems (MEMS) with microelectronic, optoelectronic and microwave devices. This paper discusses microsystems packaging with three cases: a) packaging of MEMS: flip-chip assembly to interconnect MEMS devices with other components; b) packaging for MEMS: novel MEMS devices fabricated using packaging technologies such as flexible circuit; and c) MEMS for packaging: MEMS devices used for active alignment for optoelectronic packaging. With such a close relationship between packaging and MEMS, we expect to see many novel microsystems with packaging and MEMS technologies fully integrated in the future.
封装对于集成微机电系统(MEMS)与微电子、光电和微波器件的微系统的发展至关重要。本文从三种情况讨论微系统封装:a) MEMS封装:将MEMS器件与其他元件互连的倒装芯片组装;b) MEMS封装:采用柔性电路等封装技术制造的新型MEMS器件;c)封装用MEMS:用于光电封装有源对准的MEMS器件。由于封装和MEMS之间的密切关系,我们期望在未来看到许多将封装和MEMS技术完全集成的新型微系统。
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引用次数: 4
Electromigration Study on Micro-vias of Multi-layer Anodic Alumina Substrate with a Thermal Compensated on-line Measurement Scheme 基于热补偿在线测量的多层阳极氧化铝基板微孔电迁移研究
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441386
Dapeng Zhu, Jiuirong Guo, L. Luo
The Kelvin structure was designed on alumina MCM-D substrate to evaluate the substrate electromigration (EM) reliability. The Median Time To Failure (t50) and the resistance shift of the interconnection via of Kelvin structure were measured by applying different current (DC) under different ambient temperatures. A thermal compensation method was adopted which ensured the packaged test structures fail at the same condition. The test results show that the active energy and the current density exponent of anodic alumina substrate are 0.57 eV and 1.03 respectively. The failure of the Kelvin structure during EM test is caused by the void formation at the interconnection of lines and vias where the current bending in 90-degree corner accelerate the EM process.
在氧化铝MCM-D衬底上设计了开尔文结构,以评估衬底电迁移的可靠性。在不同的环境温度下,通过施加不同的电流(DC),测量了开尔文结构互连孔的中位失效时间(t50)和电阻位移。采用热补偿方法,保证了封装测试结构在相同条件下失效。测试结果表明,阳极氧化铝衬底的有功能和电流密度指数分别为0.57 eV和1.03。在电磁测试中,开尔文结构的破坏是由于电流在90度角处弯曲加速了电磁过程,在导线和通孔的连接处形成空洞造成的。
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引用次数: 0
Green Policy in an International Power Management Manufacturing Services Provider in China 中国国际电源管理制造服务供应商的绿色政策
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441473
W. Fang, Hongbo Yang, Ming Zhou, A. Tsui
Nowadays, power management semiconductor suppliers have taken big steps to provide environmentally sound and green product solutions to meet the ever increasing demand of high performance electronics in the global consumer, industrial, computer, communication and automotive markets. The challenges are two fold. Very strict reliability performance and the green requirements have to be met at the same time. These requirements mainly bring three challenges to current electronic device manufacturers: Lead-free plating process, green compound package and Pb-free die attach materials. GEM. as an international power management manufacturing services provider, has already taken action to meet the global new requirement. In tins paper, the research path and process improvement of green package manufacturing in GEM is presented, and the packaging trend of future high power and high thermal capability power management device is also discussed.
如今,电源管理半导体供应商已经迈出了重要的一步,提供环保和绿色的产品解决方案,以满足全球消费,工业,计算机,通信和汽车市场对高性能电子产品不断增长的需求。挑战是双重的。必须同时满足非常严格的可靠性性能和绿色要求。这些要求主要给目前的电子器件制造商带来了三个挑战:无铅电镀工艺、绿色复合封装和无铅贴片材料。宝石。作为一家国际化的电源管理制造服务提供商,我们已经采取行动来满足全球新的需求。本文介绍了GEM绿色封装制造的研究路径和工艺改进,并讨论了未来大功率高热能电源管理器件的封装趋势。
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引用次数: 0
Independent Intellectual Property Product LIP Package of Huatian Technology 华天科技自主知识产权产品LIP包
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441573
Xiao-Feng Guo
This work reviews the LIP packaging application in the company of Huatian Technology.
本文综述了LIP包装在华天科技公司的应用情况。
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引用次数: 0
Die Bonding Process Research for SOI Membrane Pressure Sensor SOI膜压力传感器的模具粘接工艺研究
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441396
R. Guan
Silicon pressure sensors which are based on piezoresistive effect are in use for many fields, because of their high performance and productivity. However, when work environment temperature is over 125degC, silicon piezoresistive pressure sensors have not been used because of worse temperature performance. SOI piezoresistor pressure chip has better temperature performance than silicon pressure sensor and has evidence advantage in aspects of resisting temperature, radiation and corrosion. The SOI pressure sensor of beam-diaphragm packaging structure which can resist high temperature of 250degC has been developed and its packaging process is analyzed in the paper.
基于压阻效应的硅压力传感器以其优异的性能和生产效率得到了广泛的应用。然而,当工作环境温度超过125℃时,硅压阻式压力传感器因温度性能较差而未被使用。SOI压阻压力芯片具有比硅压力传感器更好的温度性能,在耐温度、耐辐射、耐腐蚀等方面具有明显的优势。研制了抗250℃高温的梁-膜片封装结构SOI压力传感器,并对其封装工艺进行了分析。
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引用次数: 1
Electromigration in Lead-Free Sn3.8Ag0.7Cu Solder Reaction Couple 无铅Sn3.8Ag0.7Cu焊料反应偶的电迁移
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441425
Hongwen He, Guangchen Xu, H. Hao, F. Guo
Electromigration is one of the severe reliability problems in IC progress. In this paper, the electromigration of eutectic Sn3.8Ag0.7Cu solder reaction couples were studied under high temperature (150degC) and high current density (5times103 A/cm2) in three days. An original design which could reduce the local Joule heating caused by current crowding was produced. Voltage change was also monitored during this experiment. Hillocks and valleys were found at the anode side and cathode side respectively. Unlike aging test, electromigration could promote the formation of intermetallic compound (IMC) at cathode side and inhibit the formation of IMC at anode side. Cracks also appeared along the cathode side after electromigration in three days, but they were not leading the solder reaction couple to failure.
电迁移是集成电路发展中严重的可靠性问题之一。本文研究了高温(150℃)和高电流密度(5倍103 A/cm2)下共晶Sn3.8Ag0.7Cu焊料反应对在3天内的电迁移过程。提出了一种新颖的减小电流拥挤引起的局部焦耳热的设计方案。实验过程中还监测了电压变化。在阳极侧和阴极侧分别发现了丘陵和山谷。与时效试验不同,电迁移可以促进阴极侧金属间化合物(IMC)的形成,抑制阳极侧金属间化合物(IMC)的形成。电迁移3天后阴极侧也出现了裂纹,但并未导致焊料反应对失效。
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引用次数: 4
Microstructure of Ag-Sn Bonding for MEMS Packaging MEMS封装中Ag-Sn键合的微观结构
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441377
Xiaogang Li, Jian Cai, Y. Sohn, Qian Wang, Woon-Bae Kim, Shuidi Wang
Different metallization systems and bonding designs of Ag-Sn bonding were investigated to achieve good bonding. The bonding strength was evaluated by shear force. The microstructure of bonding interface was inspected by scanning electronic microscopy and ED AX. Shear force test was performed for as-bonded dice. The test results indicate differences among different metallization systems. The bonding pair with Ti/Au as the UBM has a quite low shear strength because of the bad adhesion on the silicon substrate. The bonding pair of Ti/Ni/Sn/Au and Ti/Ni/Au/Ag obviously has higher shear strength than that of Ti/Ni/Sn/Au and Ti/Ni/Au/Ag/Au. The former is 55.17 MPa on average while the later is 36.05 MPa. The shear strength of the pair of Ti/Ni/Sn/Au and Ti/Ni/Au/Ag is similar to that of Ti/Ni/Sn/Au and Ti/Ag which has the shear strength of 55.32 MPa on average. The Ni and Au in the Ag-Sn bonding system have significant effect on the microstructure of the bonding interface. The diffusion of Au into Sn is quicker than both Ag and Ni. The diffusion between Au and Sn would induce the obstacle of the inter-diffusion between Sn and Ag. Ni will also diffuse quickly into Sn and form Ni3Sn4. The existence of Ni in Sn will also influence the diffusion of Ag into Sn and make the bad wettability during bonding. After several metallization systems have been investigated, finally a uniform bonding layer has been achieved by excluding Ni and Au in the bonding system. The bonding interface is Ag3Sn layer dispersed with some pure Ag.
研究了不同的金属化体系和银锡键合设计,以达到良好的键合效果。结合强度用剪切力评价。采用扫描电镜和能谱仪对结合界面的微观结构进行了观察。对粘结后的薄片进行了剪切力试验。试验结果表明,不同金属化体系之间存在差异。以Ti/Au为UBM的键合对由于在硅衬底上粘附不良,剪切强度很低。Ti/Ni/Sn/Au和Ti/Ni/Au/Ag键对的剪切强度明显高于Ti/Ni/Sn/Au和Ti/Ni/Au/Ag/Au键对。前者平均为55.17 MPa,后者为36.05 MPa。Ti/Ni/Sn/Au和Ti/Ni/Au/Ag对的剪切强度与Ti/Ni/Sn/Au和Ti/Ag对的剪切强度相似,平均为55.32 MPa。Ag-Sn键合体系中的Ni和Au对键合界面的微观结构有显著影响。Au向Sn扩散的速度比Ag和Ni都快。Au和Sn之间的扩散会导致Sn和Ag之间相互扩散的障碍。Ni也会迅速扩散到Sn中形成Ni3Sn4。Sn中Ni的存在也会影响Ag向Sn中的扩散,使结合过程中的润湿性变差。在研究了几种金属化体系后,最终通过在结合体系中排除Ni和Au,获得了均匀的结合层。结合界面为分散有一定量纯银的Ag3Sn层。
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引用次数: 1
High Performance Molding FCBGA Packaging Development 高性能成型FCBGA封装开发
Pub Date : 2007-08-01 DOI: 10.1109/ICEPT.2007.4441483
Ho-Yi Tsai, J. Huang, S. Chiu, C. Hsiao
In this paper, new molding underfill structure is proposed. It shows many advantages, including a) good package coplanarity b) lower bump stress c) lower 2nd level ball stress d) provide no limitation component design. Mold compound can hold big die and substrate together to keep good package coplanarity and give a uniform interface condition within big die area. Droping in heat spreader design gives the largest flexibility of die size and passive component size/number. Mold compound properties can be tailored to meet solder bump and low-K requirements. In addition, mold compound properties have high potential to meet Pb-free solder bump and low-K requirements. A high reliability, high thermal performance, and low package stress molding flip chip ball grid arrays structure is named terminator FCBGA. It has many benefits, like better coplanarity. high through put (multi pes per shut in molding process), low bump stress, and high thermal performance. In conventional flip chip structure, underfill dispenses and cure processes are a bottleneck due to low through put (dispensing unit by unit). For the high performance demand (high pin counts are necessary), large package/die size with more integrated functions needs to meet reliability criteria. Low k dielectric material, lead free bump especially and the package coplanarity are also challenges for package development. Besides, thermal performance is also a key concern with high power device. Low-k has become a hot topic as most 90nm devices and all 65nm devices utilize low-k dielectric. But low-k materials have very low mechanical strength compared to the traditional dielectric films due to their porous nature, which results in lower cohesive strength. Additionally, the tight bump pitch and low standoff height of future packages reduce the flow performance of conventional liquid capillary underfill (CUF) that results in low productivity (low unit per hour (UPH)) and low throughput. From simulation and reliability data, this new structure can provide strong bump protection and reach high reliability performance and can be applied for low-K chip and all kind of bump composition such as tin-lead, high lead, and lead free.
本文提出了一种新型模压下填料结构。它显示了许多优点,包括a)良好的封装共平面性b)较低的碰撞应力c)较低的第二级球应力d)提供无限制的组件设计。模具复合材料能使大模具与基板保持良好的共面性,并在大模具区域内提供均匀的界面条件。散热片设计的降低使模具尺寸和无源元件尺寸/数量具有最大的灵活性。模具复合性能可定制,以满足焊料凹凸和低k的要求。此外,模具复合性能具有很高的潜力,可以满足无铅焊点和低k要求。一种高可靠性、高热性能、低封装应力成型的倒装芯片球栅阵列结构被命名为终结者FCBGA。它有很多好处,比如更好的共平面性。高通过率(成型过程中每关多型),低碰撞应力,高热性能。在传统的倒装芯片结构中,下填充点胶和固化过程是一个瓶颈,因为通过量低(按单元点胶)。对于高性能需求(高引脚数是必要的),具有更多集成功能的大封装/模具尺寸需要满足可靠性标准。低k介电材料,特别是无铅凸点和封装共面性也是封装发展的挑战。此外,热性能也是大功率器件的关键问题。随着大多数90nm器件和所有65nm器件采用低k介电,低k已成为热门话题。但是由于低k材料的多孔性,与传统的介电薄膜相比,其机械强度非常低,导致其内聚强度较低。此外,致密的凸距和较低的隔离高度降低了传统液体毛细底充填(CUF)的流动性能,从而导致低产能(低单位小时(UPH))和低吞吐量。仿真和可靠性数据表明,该结构具有较强的碰撞保护能力,达到较高的可靠性性能,可适用于低k芯片和各种碰撞成分,如锡铅、高铅、无铅等。
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引用次数: 4
期刊
2007 8th International Conference on Electronic Packaging Technology
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