Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984475
S. Seok, D. Hah
This paper presents a finite element analysis of die attach packaging stress effect on emerging nanomechanical silicon optical filters. The proposed silicon optical filter is composed of Si waveguides and a microring resonator having a few hundred nm in thickness and a few tens of μm in length. Photonic integrated circuit is typically implemented by attaching a new component to a common ceramic interposer with other components. Such an attachment process would be a cause of unwanted performance deviation of MEMS or NEMS devices due to the packaging stress. Therefore, an FEM model has been used to evaluate deflection and stress of NEMS waveguides and microring resonators which are main elements for the proposed optical filter.
{"title":"An FEM study of die attach packaging effect on nanomechanical Si optical filters","authors":"S. Seok, D. Hah","doi":"10.1109/DTIP.2017.7984475","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984475","url":null,"abstract":"This paper presents a finite element analysis of die attach packaging stress effect on emerging nanomechanical silicon optical filters. The proposed silicon optical filter is composed of Si waveguides and a microring resonator having a few hundred nm in thickness and a few tens of μm in length. Photonic integrated circuit is typically implemented by attaching a new component to a common ceramic interposer with other components. Such an attachment process would be a cause of unwanted performance deviation of MEMS or NEMS devices due to the packaging stress. Therefore, an FEM model has been used to evaluate deflection and stress of NEMS waveguides and microring resonators which are main elements for the proposed optical filter.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"830 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132044031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984469
G. Kock, P. Combette, B. Chariot, A. Giani, Markus Schneider, C. Gauthier-Blum
This paper presents the study, manufacturing and characterization of a single-axis jet flow gyrometer. The operating principle of the device is based on the deflection of a laminar gas stream due to the Coriolis effect; it is then a gyrometer with no solid proof mass. A warm gas jet is generated by a micropump through a microfluidic channel opening into a cavity. Two temperature detectors are placed symmetrically with respect to the axis of the flow and their differential temperature is measured. The latter is a function of the rotational velocity applied to the system. The influence of flow velocity on the sensitivity was studied. In addition, the simulation allowed us to determine an optimum detectors geometry in order to find the best sensitivity. The numerical study also made it possible to determine an optimum detectors position (1000 μm) in order to define a compromise between high sensitivity and large measuring range.
{"title":"Study and realization of a fluidic thermal gyrometer","authors":"G. Kock, P. Combette, B. Chariot, A. Giani, Markus Schneider, C. Gauthier-Blum","doi":"10.1109/DTIP.2017.7984469","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984469","url":null,"abstract":"This paper presents the study, manufacturing and characterization of a single-axis jet flow gyrometer. The operating principle of the device is based on the deflection of a laminar gas stream due to the Coriolis effect; it is then a gyrometer with no solid proof mass. A warm gas jet is generated by a micropump through a microfluidic channel opening into a cavity. Two temperature detectors are placed symmetrically with respect to the axis of the flow and their differential temperature is measured. The latter is a function of the rotational velocity applied to the system. The influence of flow velocity on the sensitivity was studied. In addition, the simulation allowed us to determine an optimum detectors geometry in order to find the best sensitivity. The numerical study also made it possible to determine an optimum detectors position (1000 μm) in order to define a compromise between high sensitivity and large measuring range.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125241689","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984466
Charles-Louis Azzopardi, F. Chollet, Nathalie Tarchichi, J. Manceau
This work reports on the design, the modeling, the simulation, the integration strategy and the preliminary test results of a new variable capacitor using large variation of permittivity obtained by tuning the density of oil-in-water droplet produced with a microfluidic circuit.
{"title":"Integration of electrodes with diphasic microfluidics for capacitance tuning","authors":"Charles-Louis Azzopardi, F. Chollet, Nathalie Tarchichi, J. Manceau","doi":"10.1109/DTIP.2017.7984466","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984466","url":null,"abstract":"This work reports on the design, the modeling, the simulation, the integration strategy and the preliminary test results of a new variable capacitor using large variation of permittivity obtained by tuning the density of oil-in-water droplet produced with a microfluidic circuit.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116481604","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984462
T. Perrier, R. Lévy, P. Kayser, B. Verlhac, P. Lavenus, J. Moulin
This paper presents a reduced order model including the resonator and the mechanical moment induced by the thin film on the resonator. The model development is presented as well as its experimental validation with four magnetometer prototypes. This model is then used to investigate the optimization of the thin film position on the resonator as well as the advantages of various shapes of resonators.
{"title":"Reduced order modeling and optimization of the magnetic thin film vibrating beam magnetometer","authors":"T. Perrier, R. Lévy, P. Kayser, B. Verlhac, P. Lavenus, J. Moulin","doi":"10.1109/DTIP.2017.7984462","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984462","url":null,"abstract":"This paper presents a reduced order model including the resonator and the mechanical moment induced by the thin film on the resonator. The model development is presented as well as its experimental validation with four magnetometer prototypes. This model is then used to investigate the optimization of the thin film position on the resonator as well as the advantages of various shapes of resonators.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132237707","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984490
N. Doumit, B. Danoumbé, S. Capraro, J. Chatelon, M. Blanc-Mignon, G. Kermouche, J. Rousseau
This paper presents the temperature influence on the adhesion of a copper thin film deposited on an alumina substrate. 5μm and 20 μm thicknesses of copper films were deposited by RF sputtering and characterized. Simulation and mechanical characterizations were realized. Results obtained by Stoney stresses and by Von Mises Stress show stresses relaxation after first annealing and their stabilization for following annealing cycles (200°C). Stress values obtained are lower than the elastic stress on the copper layer which corroborate SEM analysis where copper films present absence of cracks after an annealing at 200°C during one hour. On the other hand, an experimental critical stress characterization has been performed. Results show that critical stress increase with the increasing temperature and decreasing with the copper thickness.
{"title":"Stresses evolution at high temperature (200°C) in Copper/Alumina (Cu/Al2O3) stack","authors":"N. Doumit, B. Danoumbé, S. Capraro, J. Chatelon, M. Blanc-Mignon, G. Kermouche, J. Rousseau","doi":"10.1109/DTIP.2017.7984490","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984490","url":null,"abstract":"This paper presents the temperature influence on the adhesion of a copper thin film deposited on an alumina substrate. 5μm and 20 μm thicknesses of copper films were deposited by RF sputtering and characterized. Simulation and mechanical characterizations were realized. Results obtained by Stoney stresses and by Von Mises Stress show stresses relaxation after first annealing and their stabilization for following annealing cycles (200°C). Stress values obtained are lower than the elastic stress on the copper layer which corroborate SEM analysis where copper films present absence of cracks after an annealing at 200°C during one hour. On the other hand, an experimental critical stress characterization has been performed. Results show that critical stress increase with the increasing temperature and decreasing with the copper thickness.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"108 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116104693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984472
Ismail Bouhadda, A. M. Ousaid, P. Moal, Gilles Bourbon, Philippe Lutz
This paper focuses on the dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning. Based on U-shape structure, such actuator has been employed in several MEMS applications where fine and repeatable positioning is required. The studied electrothermal actuator here is microfabricated on a doped SOI substrate and its dynamic response, during heating and cooling cycles, is recorded using precise and high-speed camera. To explain its dynamic behavior, FEM simulations, using Comsol multiphysics software facility, are carried out. The result of this numerical analysis shows a strong relationship between the temperature distribution and the displacement provided by the actuator. Finally, the influence of the dynamic behavior on the control of the actuator is discussed using experimental characterizations of its displacements under several voltage pulses with different frequencies.
{"title":"Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning","authors":"Ismail Bouhadda, A. M. Ousaid, P. Moal, Gilles Bourbon, Philippe Lutz","doi":"10.1109/DTIP.2017.7984472","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984472","url":null,"abstract":"This paper focuses on the dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning. Based on U-shape structure, such actuator has been employed in several MEMS applications where fine and repeatable positioning is required. The studied electrothermal actuator here is microfabricated on a doped SOI substrate and its dynamic response, during heating and cooling cycles, is recorded using precise and high-speed camera. To explain its dynamic behavior, FEM simulations, using Comsol multiphysics software facility, are carried out. The result of this numerical analysis shows a strong relationship between the temperature distribution and the displacement provided by the actuator. Finally, the influence of the dynamic behavior on the control of the actuator is discussed using experimental characterizations of its displacements under several voltage pulses with different frequencies.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121417055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984508
Péter Pálovics, F. Ender, M. Rencz
This paper presents a study on the effect of the different geometries on the velocity distributions in flow-through microchambers. The chambers are filled with magnetic nanopar-ticles and continuous flow is applied in them. Our goal was to find a good and simple geometry to ensure that the flow-through times, therefore the reaction times at most of the laminar flow lines are similar in the chamber. The homogeneity of the velocity field is also desired. For the investigations we performed CFD simulations. A simple method for the reaction time calculation is presented. New geometries are simulated and compared with the original chamber shape used in our previous experiments. The results are promising, in the new geometries the reaction time distribution in the middle of the chamber as well as the velocity field is more homogeneous than in the original case. The simulations were done with the help of the open source CFD software OpenFOAM. Based on the simulation results new microfluidic structures were designed for the further experiments with the magnetic nanoparticles.
{"title":"Microfluidic flow-through chambers for higher performance","authors":"Péter Pálovics, F. Ender, M. Rencz","doi":"10.1109/DTIP.2017.7984508","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984508","url":null,"abstract":"This paper presents a study on the effect of the different geometries on the velocity distributions in flow-through microchambers. The chambers are filled with magnetic nanopar-ticles and continuous flow is applied in them. Our goal was to find a good and simple geometry to ensure that the flow-through times, therefore the reaction times at most of the laminar flow lines are similar in the chamber. The homogeneity of the velocity field is also desired. For the investigations we performed CFD simulations. A simple method for the reaction time calculation is presented. New geometries are simulated and compared with the original chamber shape used in our previous experiments. The results are promising, in the new geometries the reaction time distribution in the middle of the chamber as well as the velocity field is more homogeneous than in the original case. The simulations were done with the help of the open source CFD software OpenFOAM. Based on the simulation results new microfluidic structures were designed for the further experiments with the magnetic nanoparticles.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125121758","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984465
A. Lucibello, G. Sardi, E. Proietti, R. Marcelli, Francesco Cursi
In this paper, we present a sensor suitable for performing the spectroscopy on a localized micrometric volume of a generic liquid, in the spectral range comprised between 1 GHz and 20 GHz. The sensor is based on two ungrounded, open-ended coplanar waveguides, acting as Input/Output ports, with a microfluidic channel passing through them to perform also transmission through the liquid analysis. The sensor has been designed and numerically simulated to obtain the electromagnetic response in different conditions: an empty channel for having a zero-reference response and for observing variations as a function of liquids filling the channel.
{"title":"A coplanar waveguide microfluidic sensor for a micrometric local spectroscopy of liquid solutions","authors":"A. Lucibello, G. Sardi, E. Proietti, R. Marcelli, Francesco Cursi","doi":"10.1109/DTIP.2017.7984465","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984465","url":null,"abstract":"In this paper, we present a sensor suitable for performing the spectroscopy on a localized micrometric volume of a generic liquid, in the spectral range comprised between 1 GHz and 20 GHz. The sensor is based on two ungrounded, open-ended coplanar waveguides, acting as Input/Output ports, with a microfluidic channel passing through them to perform also transmission through the liquid analysis. The sensor has been designed and numerically simulated to obtain the electromagnetic response in different conditions: an empty channel for having a zero-reference response and for observing variations as a function of liquids filling the channel.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130183859","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984433
Shi Yuan Tang, Yi-Ta Wang, Ruei-CiJhang Jing, Hsiharng Yang
This paper presents a bionic compound eye using microlens array with multi-focus and long focal length for improving a selected imagery quality. There are seven layers of microlens array designed in the bionic compound eye. These microlens array will focus on the same point composed a visual system. There are two parts in this study. The first part is the calculation of each layer's microlens array focus on the same surfaces, Then the light path can be simulated by the optic simulation software, ZEMAX. The second part is the bionic microlens array compound eye fabrication. The photoresist column array fabricated by lithography and followed by the thermal reflow can form the microlens array. Elastic PDMS was used as a plastic replicate after sputtering. Then the 3D printer was used to print the PDMS model which was concave curved surface as a hemispherical lens mold and attached the replicated microlens array on the openings. The microlens array can be formed the curvature compound eye microlens array because of the negative pressure resulted in the hemisphere. A curvature with microlens array for the bionic compound eye can be fabricated. The ZEMAX software can be used to simulate the light path with a long focal length for the compound eye.
{"title":"Bionic compound eye using microlens array with multi-focus and long focal depth","authors":"Shi Yuan Tang, Yi-Ta Wang, Ruei-CiJhang Jing, Hsiharng Yang","doi":"10.1109/DTIP.2017.7984433","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984433","url":null,"abstract":"This paper presents a bionic compound eye using microlens array with multi-focus and long focal length for improving a selected imagery quality. There are seven layers of microlens array designed in the bionic compound eye. These microlens array will focus on the same point composed a visual system. There are two parts in this study. The first part is the calculation of each layer's microlens array focus on the same surfaces, Then the light path can be simulated by the optic simulation software, ZEMAX. The second part is the bionic microlens array compound eye fabrication. The photoresist column array fabricated by lithography and followed by the thermal reflow can form the microlens array. Elastic PDMS was used as a plastic replicate after sputtering. Then the 3D printer was used to print the PDMS model which was concave curved surface as a hemispherical lens mold and attached the replicated microlens array on the openings. The microlens array can be formed the curvature compound eye microlens array because of the negative pressure resulted in the hemisphere. A curvature with microlens array for the bionic compound eye can be fabricated. The ZEMAX software can be used to simulate the light path with a long focal length for the compound eye.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129527977","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984460
M. Németh, A. Poppe
In this paper we present a new, direct computational method for calculating the complex thermal transfer impedances between two separate locations of a given physical structure aimed at the implementation into a field-solver based on the SUNRED (SUccessive Node REDuction) algorithm. We tested the method with a simple 2D example containing 125 internal nodes. For testing the proposed new calculation method multiple combinations of Dirichlet and Neumann type boundary conditions were applied. Also, different types of thermal loads such as prescribed unit-step change in dissipation or temperature were assumed (for time domain transient analysis). The test case was also studied with the assumption of sinusoidal dissipation. Results obtained by the proposed new calculation method and results obtained by conventional simulations differ less than the uncertainty of the traditional solution method. The good agreement enables us to use the balanced truncation method to reduce the order of the transfer functions with low computational cost.
{"title":"Successive network reduction method for parametric transient results","authors":"M. Németh, A. Poppe","doi":"10.1109/DTIP.2017.7984460","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984460","url":null,"abstract":"In this paper we present a new, direct computational method for calculating the complex thermal transfer impedances between two separate locations of a given physical structure aimed at the implementation into a field-solver based on the SUNRED (SUccessive Node REDuction) algorithm. We tested the method with a simple 2D example containing 125 internal nodes. For testing the proposed new calculation method multiple combinations of Dirichlet and Neumann type boundary conditions were applied. Also, different types of thermal loads such as prescribed unit-step change in dissipation or temperature were assumed (for time domain transient analysis). The test case was also studied with the assumption of sinusoidal dissipation. Results obtained by the proposed new calculation method and results obtained by conventional simulations differ less than the uncertainty of the traditional solution method. The good agreement enables us to use the balanced truncation method to reduce the order of the transfer functions with low computational cost.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"441 ","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120881619","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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