Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984463
Xun Yang, Shixing Chen, Yi Wang, Yuelin Wang, Tie Li
This paper presents a low-cost and high-precision pH sensor using silicon nanowire (SiNW) array. With the help of traditional microfabrication technology, low-cost as well as highly controllable SiNW array was fabricated. After functionalized with APTES solution, SiNW array shows rapid and reliable response to pH value. With excellent linearity and repeatability, accuracy of the sensor can be achieved at ± 0.1pH. Further unknown pH value solutions are used to confirm the accuracy of the meter.
{"title":"High performance pH sensor by using silicon nanowire array","authors":"Xun Yang, Shixing Chen, Yi Wang, Yuelin Wang, Tie Li","doi":"10.1109/DTIP.2017.7984463","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984463","url":null,"abstract":"This paper presents a low-cost and high-precision pH sensor using silicon nanowire (SiNW) array. With the help of traditional microfabrication technology, low-cost as well as highly controllable SiNW array was fabricated. After functionalized with APTES solution, SiNW array shows rapid and reliable response to pH value. With excellent linearity and repeatability, accuracy of the sensor can be achieved at ± 0.1pH. Further unknown pH value solutions are used to confirm the accuracy of the meter.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128999350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984461
L. Delahaye, J. Guerard, F. Parrain
Coriolis vibrating gyroscopes can be modeled by a planar resonator, using masses, springs and damping. In this paper, the corresponding equations are studied in order to characterize real vibrating cells. It is shown how to present the problem to allow efficient numerical simulations and analytic developments. In particular, the use of the method of Averaging is fundamental, simplifying most of the calculations. All aspects of the oscillations are described and synthesized into a set of either geometrical parameters or canonical quantities, such as the energy of the trajectory. Thus, the properties of vibrating cells can be evaluated, and different operating modes as open-loop or closed-loop are exploited. Computer tools are developed to identify the flaws of real cells. Among them, a MODELICA simulator computes the time series of the gyroscope outputs for any stimulus, including transients, and a MAXIMA Taylor expansion code generates the analytical expressions of steady state and transients for start/stop. Both methods agree within 0.5%.
{"title":"Coriolis vibrating gyroscope modelling for parametric identification and optimal design","authors":"L. Delahaye, J. Guerard, F. Parrain","doi":"10.1109/DTIP.2017.7984461","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984461","url":null,"abstract":"Coriolis vibrating gyroscopes can be modeled by a planar resonator, using masses, springs and damping. In this paper, the corresponding equations are studied in order to characterize real vibrating cells. It is shown how to present the problem to allow efficient numerical simulations and analytic developments. In particular, the use of the method of Averaging is fundamental, simplifying most of the calculations. All aspects of the oscillations are described and synthesized into a set of either geometrical parameters or canonical quantities, such as the energy of the trajectory. Thus, the properties of vibrating cells can be evaluated, and different operating modes as open-loop or closed-loop are exploited. Computer tools are developed to identify the flaws of real cells. Among them, a MODELICA simulator computes the time series of the gyroscope outputs for any stimulus, including transients, and a MAXIMA Taylor expansion code generates the analytical expressions of steady state and transients for start/stop. Both methods agree within 0.5%.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"159 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122963259","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984491
W. Chuang, Ben Tsai, Wei-Long Chen, J. Su
This study established a simulation model for reliability of Ball Grid Array (BGA) IC package subjected to temperature cycling. COMSOL Multiphysics software was used to established a simulation model and this study used Garofalo-Arrheniuss Law creep equation and Modified Coffin-Manson equation to estimate fatigue life of chip subjected to temperature cycling test (TCT). Since the thermal expansion coefficients between the materials are mismatch, chip would occur warpage. The solder ball of peripheral edge was cracked firstly, and the estimated error of solder ball life is 15.7% compared with experimental value. This study could find out the position where the solder ball first cracked which was not the position of maximum stress but was the position of the maximum strain range.
{"title":"Reliability of ball grid array subjected to temperature cycling","authors":"W. Chuang, Ben Tsai, Wei-Long Chen, J. Su","doi":"10.1109/DTIP.2017.7984491","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984491","url":null,"abstract":"This study established a simulation model for reliability of Ball Grid Array (BGA) IC package subjected to temperature cycling. COMSOL Multiphysics software was used to established a simulation model and this study used Garofalo-Arrheniuss Law creep equation and Modified Coffin-Manson equation to estimate fatigue life of chip subjected to temperature cycling test (TCT). Since the thermal expansion coefficients between the materials are mismatch, chip would occur warpage. The solder ball of peripheral edge was cracked firstly, and the estimated error of solder ball life is 15.7% compared with experimental value. This study could find out the position where the solder ball first cracked which was not the position of maximum stress but was the position of the maximum strain range.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125126490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984504
T. Yamashita, R. Maeda, T. Itoh
This paper reports a novel thin film based flexible clamp-on type current sensor with 250 turns micropatterned Cu coil (line / space = 50 μm / 105 μm) formed by through-holes and flexible printed circuits (FPC) technologies for wireless sensor networks. Using flexible electronics techniques, microvias and fine stripe Cu patterns could be formed around 60-mm-long and 14.5-mm-wide permalloy film sandwiched between 40-mm-lomg and 20-mm-wide polyimide films with a high precision. Since the sensor has high flexibility, it can be used by winding the cable and drastically reduce the installation space. Furthermore, it can construct wireless sensor networks without external power supply because wireless nodes can drive by utilizing the secondary current generated in the coil of the sensor by the behavior of current transformer. Coil resistance between contact pads was about 241 Ω. The output voltage (V„) changed linearly with variation of the value of primary current (Cp) in the 0 to 20 A range. Cp-F„ sensitivity was about 39.4 mV/A. The sensor can be fabricated by roll-to-roll FPC mass production facility because it is developed using only FPC technology.
{"title":"Thin film based flexible current sensor using a micropatterned Cu coil","authors":"T. Yamashita, R. Maeda, T. Itoh","doi":"10.1109/DTIP.2017.7984504","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984504","url":null,"abstract":"This paper reports a novel thin film based flexible clamp-on type current sensor with 250 turns micropatterned Cu coil (line / space = 50 μm / 105 μm) formed by through-holes and flexible printed circuits (FPC) technologies for wireless sensor networks. Using flexible electronics techniques, microvias and fine stripe Cu patterns could be formed around 60-mm-long and 14.5-mm-wide permalloy film sandwiched between 40-mm-lomg and 20-mm-wide polyimide films with a high precision. Since the sensor has high flexibility, it can be used by winding the cable and drastically reduce the installation space. Furthermore, it can construct wireless sensor networks without external power supply because wireless nodes can drive by utilizing the secondary current generated in the coil of the sensor by the behavior of current transformer. Coil resistance between contact pads was about 241 Ω. The output voltage (V„) changed linearly with variation of the value of primary current (Cp) in the 0 to 20 A range. Cp-F„ sensitivity was about 39.4 mV/A. The sensor can be fabricated by roll-to-roll FPC mass production facility because it is developed using only FPC technology.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115244776","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984497
R. Hahn, M. Ferch, K. Hoeppner, M. Queisser, K. Marquardt, G. Elia
A cost effective and reliable technology allowing extreme miniaturization of batteries into silicon, glass chips and electronic packages has been developed, employing a dispense-print process for battery electrodes and liquid electrolyte. Lithium-ion micro batteries (active area 6×8 mm2, 0.2–0.4 mAh) with interdigitated electrodes and glass housing were fabricated, tested and finally compared with the traditional battery architecture of stacked electrodes. All processes for micro battery fabrication were established; in particular a micro fluidic electrolyte filling process that allows simultaneous electrolyte supply of all cells on a planar substrate. Electrode mass reproducibility was sufficient for adequate electrode balancing. Current capability similar to the conventional face-to-face electrode configuration was achieved with interdigital electrodes. The cells were successfully cycled; several 100 cycles can be achieved.
{"title":"Development of micro batteries based on micro fluidic MEMS packaging","authors":"R. Hahn, M. Ferch, K. Hoeppner, M. Queisser, K. Marquardt, G. Elia","doi":"10.1109/DTIP.2017.7984497","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984497","url":null,"abstract":"A cost effective and reliable technology allowing extreme miniaturization of batteries into silicon, glass chips and electronic packages has been developed, employing a dispense-print process for battery electrodes and liquid electrolyte. Lithium-ion micro batteries (active area 6×8 mm2, 0.2–0.4 mAh) with interdigitated electrodes and glass housing were fabricated, tested and finally compared with the traditional battery architecture of stacked electrodes. All processes for micro battery fabrication were established; in particular a micro fluidic electrolyte filling process that allows simultaneous electrolyte supply of all cells on a planar substrate. Electrode mass reproducibility was sufficient for adequate electrode balancing. Current capability similar to the conventional face-to-face electrode configuration was achieved with interdigital electrodes. The cells were successfully cycled; several 100 cycles can be achieved.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126461220","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984496
Jian Zhu, S. Wang
Silicon-based MEMS microthruster matrix has gained great attention as a micro-impulsion system in recent years, especially in application of attitude control of the nanosatellites. Although silicon serves well as the structural material for microthruster matrix in several aspects, its ability to resist ablation is rather weak. In this paper, SiC membrane is introduced to the surface of micro-chambers in order to enhance the ablation resistance of silicon-based MEMS microthrusters. A time-efficient four-step deposition process was carried out to prepare high-quality cavity-free SiC membrane. Microthrusters with SiC membrane coverage were tested under high-energy propellant experiment. The result shows that the SiC membrane can perfectly resist the ablation of microthrusters from nano-Al/CuO propellant.
{"title":"An investigation into the SiC anti-ablation membrane of MEMS microthrusters","authors":"Jian Zhu, S. Wang","doi":"10.1109/DTIP.2017.7984496","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984496","url":null,"abstract":"Silicon-based MEMS microthruster matrix has gained great attention as a micro-impulsion system in recent years, especially in application of attitude control of the nanosatellites. Although silicon serves well as the structural material for microthruster matrix in several aspects, its ability to resist ablation is rather weak. In this paper, SiC membrane is introduced to the surface of micro-chambers in order to enhance the ablation resistance of silicon-based MEMS microthrusters. A time-efficient four-step deposition process was carried out to prepare high-quality cavity-free SiC membrane. Microthrusters with SiC membrane coverage were tested under high-energy propellant experiment. The result shows that the SiC membrane can perfectly resist the ablation of microthrusters from nano-Al/CuO propellant.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131987867","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984467
R. Farrugia, I. Grech, D. Camilleri, O. Casha, J. Micallef, E. Gatt
One of the main design limitations of resonant micro-mirrors intended for visual projection display applications is inertia-driven dynamic deformation. Micro-mirrors used for high frequency (20–30 kHz) laser beam scanning are typically operated at resonance in the region of their torsional modal frequency in order to achieve high scan angles. Although the optical resolution of the projected image is defined by the micro-mirror frequency, maximum scan angle and dimensions, significant dynamic deformation (> 1/10 of the incident wavelength) results in a loss in contrast between adjacent projected spots. This paper presents a structural design optimization scheme for a one directional resonant micro-mirror intended for laser projection with XGA optical resolution. The minimization of dynamic deformation is considered as one of the partial objectives together with other micro-mirror performance and reliability characteristics. The optimization scheme is performed using the response surface method and multi-objective genetic algorithms. This design process demonstrates the technical feasibility of including features, such as a gimbal structure, that improve the dynamic mirror flatness without compromising on the target scanning frequency, mode separation and maximum shear stress.
{"title":"Design optimization of a high frequency resonating micro-mirror with low dynamic deformation","authors":"R. Farrugia, I. Grech, D. Camilleri, O. Casha, J. Micallef, E. Gatt","doi":"10.1109/DTIP.2017.7984467","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984467","url":null,"abstract":"One of the main design limitations of resonant micro-mirrors intended for visual projection display applications is inertia-driven dynamic deformation. Micro-mirrors used for high frequency (20–30 kHz) laser beam scanning are typically operated at resonance in the region of their torsional modal frequency in order to achieve high scan angles. Although the optical resolution of the projected image is defined by the micro-mirror frequency, maximum scan angle and dimensions, significant dynamic deformation (> 1/10 of the incident wavelength) results in a loss in contrast between adjacent projected spots. This paper presents a structural design optimization scheme for a one directional resonant micro-mirror intended for laser projection with XGA optical resolution. The minimization of dynamic deformation is considered as one of the partial objectives together with other micro-mirror performance and reliability characteristics. The optimization scheme is performed using the response surface method and multi-objective genetic algorithms. This design process demonstrates the technical feasibility of including features, such as a gimbal structure, that improve the dynamic mirror flatness without compromising on the target scanning frequency, mode separation and maximum shear stress.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130997329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984486
C. Szopa, D. Coscia, M. Cabane, A. Buch
Since the beginning of the in situ exploration of alien worlds in the solar system, the characterization of the chemical composition in volatile materials and organic molecules is among the top priorities. Indeed, these compounds learn us about the origin and history of these world, their potential for habitability, and somehow the nature of resources they could provide, especially for future inhabited exploration. Among the chemical analytical techniques existing, gas chromatography was preferentially used as it is a robust instrumentation that can be used in many environments. Obviously, as the constraints of spacecraft accommodation require for light and small instruments, gas chromatographs have to meet these constraints and to be miniaturized compared to the laboratory set-up. This article tells the story of gas chromatography for space exploration and give information about its miniaturization.
{"title":"Miniaturized gas chromatography for space exploration: A 50 years history","authors":"C. Szopa, D. Coscia, M. Cabane, A. Buch","doi":"10.1109/DTIP.2017.7984486","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984486","url":null,"abstract":"Since the beginning of the in situ exploration of alien worlds in the solar system, the characterization of the chemical composition in volatile materials and organic molecules is among the top priorities. Indeed, these compounds learn us about the origin and history of these world, their potential for habitability, and somehow the nature of resources they could provide, especially for future inhabited exploration. Among the chemical analytical techniques existing, gas chromatography was preferentially used as it is a robust instrumentation that can be used in many environments. Obviously, as the constraints of spacecraft accommodation require for light and small instruments, gas chromatographs have to meet these constraints and to be miniaturized compared to the laboratory set-up. This article tells the story of gas chromatography for space exploration and give information about its miniaturization.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133910428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984458
Yilei Hua, Changqing Xie, Nan Gao, Xiaoli Zhu, Hailiang Li
In this work, we present the fabrication process of a large (100mmx40mm) and thick (30mm) single order diffraction grating with a very flat reflecting surface. This grating is designed for a soft X-ray monochromator. Three single order diffraction gratings with different line densities were integrated on one silicon plate. The gratings are patterned on a 6.35mm thick substrate using direct e-beam writing and etched using high density plasma. Then the grating is glued on to a 23.7mm thick bulk silicon. The flatness of the surface of the gratings was well controlled and tested with an interferometer, the test results show that the peak-to-valley value of the surface is less than 60nm, which meet the requirement for a soft X-ray monochromator.
{"title":"Fabrication of ultralarge single order diffraction grating with high surface flatness","authors":"Yilei Hua, Changqing Xie, Nan Gao, Xiaoli Zhu, Hailiang Li","doi":"10.1109/DTIP.2017.7984458","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984458","url":null,"abstract":"In this work, we present the fabrication process of a large (100mmx40mm) and thick (30mm) single order diffraction grating with a very flat reflecting surface. This grating is designed for a soft X-ray monochromator. Three single order diffraction gratings with different line densities were integrated on one silicon plate. The gratings are patterned on a 6.35mm thick substrate using direct e-beam writing and etched using high density plasma. Then the grating is glued on to a 23.7mm thick bulk silicon. The flatness of the surface of the gratings was well controlled and tested with an interferometer, the test results show that the peak-to-valley value of the surface is less than 60nm, which meet the requirement for a soft X-ray monochromator.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"244 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125563657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/DTIP.2017.7984485
I. Azzouz, F. Marty, T. Bourouina
This paper reviews the last two decades design, fabrication and characterization advances on high performance MEMS-based gas chromatography systems, the related architectures and their constitutive building blocks, which include preconcentrators, microvalves and related sample injection devices, micro-columns, and detectors. Micro-GCs hold potential for rapid analysis of volatile organic compounds (VOCs) within extremely compact and low-power platforms. This work presents portable GC analyzers both commercial and under development in research labs, with emphasis on their applications in various fields including air monitoring, industrial processes, and public health.
{"title":"Recent advances in micro-gas chromatography — The opportunities and the challenges","authors":"I. Azzouz, F. Marty, T. Bourouina","doi":"10.1109/DTIP.2017.7984485","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984485","url":null,"abstract":"This paper reviews the last two decades design, fabrication and characterization advances on high performance MEMS-based gas chromatography systems, the related architectures and their constitutive building blocks, which include preconcentrators, microvalves and related sample injection devices, micro-columns, and detectors. Micro-GCs hold potential for rapid analysis of volatile organic compounds (VOCs) within extremely compact and low-power platforms. This work presents portable GC analyzers both commercial and under development in research labs, with emphasis on their applications in various fields including air monitoring, industrial processes, and public health.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126857559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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