首页 > 最新文献

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)最新文献

英文 中文
Power management system of a MEMS vibrational energy harvesting sensor node under low vibration conditions 低振动条件下MEMS振动能量采集传感器节点的电源管理系统
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984499
Wenjun Zhao, H. Homma, H. Toshiyoshi
This paper presents a power management system of self-supplied wireless sensor node based on MEMS electret vibrational energy harvester. The storage and control policy of the management circuit is optimized for small ambient excitation conditions to reduce power dissipation and avoid failure in wireless data transmissions. Live acceleration data collected from a bridge as well as simulation results were used to confirm the feasibility of the proposed circuit operating in real case low vibration environment.
提出了一种基于MEMS驻极体振动能量采集器的自供电无线传感器节点电源管理系统。管理电路的存储和控制策略针对小环境激励条件进行了优化,以降低功耗,避免无线数据传输故障。通过实测桥梁加速度数据和仿真结果,验证了该电路在实际低振动环境下运行的可行性。
{"title":"Power management system of a MEMS vibrational energy harvesting sensor node under low vibration conditions","authors":"Wenjun Zhao, H. Homma, H. Toshiyoshi","doi":"10.1109/DTIP.2017.7984499","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984499","url":null,"abstract":"This paper presents a power management system of self-supplied wireless sensor node based on MEMS electret vibrational energy harvester. The storage and control policy of the management circuit is optimized for small ambient excitation conditions to reduce power dissipation and avoid failure in wireless data transmissions. Live acceleration data collected from a bridge as well as simulation results were used to confirm the feasibility of the proposed circuit operating in real case low vibration environment.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127856364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators MOEMS角垂直梳状驱动器电容测量技术
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984455
Barnaby Portelli, R. Farrugia, I. Grech, O. Casha, J. Micallef, E. Gatt
This paper presents three novel techniques for the measurement of capacitance variation in high-frequency operation of angular comb-drive structures, with applications including optical projection micro-mirrors. The first technique uses a lock-in amplifier in order to measure the impedance of the comb structure by superimposing a test signal having a frequency that is at least one order of magnitude higher than the micro-mirror resonant frequency. The second measurement setup uses a digitizing oscilloscope to measure the capacitance from the instantaneous voltage and current in the comb structure. The third setup consists of a micro probe controlled by a high-resolution positioner in order to tilt the mirror to a desired angle. This allows for static capacitance measurement at different mirror deflection using a high precision LCR meter. The measurement results from the different setups were found to be in agreement with each other. The results were further verified against analytical and numerical modelling.
本文介绍了三种测量角梳驱动结构高频工作时电容变化的新技术,其应用包括光学投影微镜。第一种技术使用锁相放大器,通过叠加频率至少比微镜谐振频率高一个数量级的测试信号来测量梳状结构的阻抗。第二个测量装置使用数字化示波器从梳状结构中的瞬时电压和电流测量电容。第三个装置包括一个由高分辨率定位器控制的微探头,以便将镜子倾斜到所需的角度。这允许静态电容测量在不同的镜面偏转使用高精度LCR计。不同装置的测量结果是一致的。通过分析和数值模拟进一步验证了结果。
{"title":"Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators","authors":"Barnaby Portelli, R. Farrugia, I. Grech, O. Casha, J. Micallef, E. Gatt","doi":"10.1109/DTIP.2017.7984455","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984455","url":null,"abstract":"This paper presents three novel techniques for the measurement of capacitance variation in high-frequency operation of angular comb-drive structures, with applications including optical projection micro-mirrors. The first technique uses a lock-in amplifier in order to measure the impedance of the comb structure by superimposing a test signal having a frequency that is at least one order of magnitude higher than the micro-mirror resonant frequency. The second measurement setup uses a digitizing oscilloscope to measure the capacitance from the instantaneous voltage and current in the comb structure. The third setup consists of a micro probe controlled by a high-resolution positioner in order to tilt the mirror to a desired angle. This allows for static capacitance measurement at different mirror deflection using a high precision LCR meter. The measurement results from the different setups were found to be in agreement with each other. The results were further verified against analytical and numerical modelling.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127331154","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Fabricate diamond nanowire based on the silver nano-tip grating towards plasmon-enhanced applicaiton 基于银纳米尖端光栅制备等离子体增强应用的金刚石纳米线
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984457
Hao Guo, Wenyao Liu, Jun Tang, Zongmin Ma, Rui Zhao, Jun Liu
This work presents a method to fabricate the diamond nanowire at the tip of silver nano-grating which acted as the Plasmon substrates to enhance the quantum efficient of diamond NV color centers for the quantum sensors applications. Due to the well-organized silver nano-grating, the edges of colloidal diamond drop-casted on the silver nano-grating substrate have been arranged as the straightforward lines. And, the diamond nanowire would be manufactured along this line at the tip of silver nano-grating based on the coffee-ring effect. Because of the tip effect and the surface plasma resonance effect at the tip of silver nano-grating, the fluorescence and the quantum efficient have improved about 10 times. It was the potential methods to improve the sensitivity of spin-based sensors by improving the quantum efficient.
本文提出了一种在银纳米光栅尖端制备金刚石纳米线作为等离子体基板的方法,以提高金刚石NV色心在量子传感器中的量子效率。由于银纳米光栅组织良好,在银纳米光栅衬底上滴铸的胶体金刚石边缘呈直线排列。利用咖啡环效应,沿着这条线在银纳米光栅的尖端制造金刚石纳米线。由于银纳米光栅尖端的尖端效应和表面等离子体共振效应,其荧光和量子效率提高了约10倍。提高量子效率是提高自旋传感器灵敏度的潜在方法。
{"title":"Fabricate diamond nanowire based on the silver nano-tip grating towards plasmon-enhanced applicaiton","authors":"Hao Guo, Wenyao Liu, Jun Tang, Zongmin Ma, Rui Zhao, Jun Liu","doi":"10.1109/DTIP.2017.7984457","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984457","url":null,"abstract":"This work presents a method to fabricate the diamond nanowire at the tip of silver nano-grating which acted as the Plasmon substrates to enhance the quantum efficient of diamond NV color centers for the quantum sensors applications. Due to the well-organized silver nano-grating, the edges of colloidal diamond drop-casted on the silver nano-grating substrate have been arranged as the straightforward lines. And, the diamond nanowire would be manufactured along this line at the tip of silver nano-grating based on the coffee-ring effect. Because of the tip effect and the surface plasma resonance effect at the tip of silver nano-grating, the fluorescence and the quantum efficient have improved about 10 times. It was the potential methods to improve the sensitivity of spin-based sensors by improving the quantum efficient.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126670509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A correct-by-construction design and programming approach for open paper-based digital microfluidics 开放式纸质数字微流体的结构校正设计与编程方法
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984476
Georgi Tanev, J. Madsen
Advances in microfluidic research have allowed digital microfluidic (DMF) chips to be rapid prototyped using inexpensive materials and simple fabrication processes to the extend where the time spend on chip design can be significantly longer than the time required for fabrication. The growing need for application specific DMF chips challenges efficient handling of the increasing chip design and programming complexity. To address this, we propose a correct-by-construction modular chip design approach, which allows chips to be constructed from a component library and verified by simulation before fabrication. After fabrication, the chip is operated from a smartphone by remote instrumentation of a portable DMF chip control device. By combining structured design techniques with custom developed hardware and software tools, we present a full end-to-end solution for fast DMF chip design, simulation and operation.
微流控研究的进步使得数字微流控(DMF)芯片可以使用廉价的材料和简单的制造工艺快速原型化,从而使芯片设计花费的时间大大超过制造所需的时间。对特定应用DMF芯片的需求日益增长,对芯片设计和编程复杂性的有效处理提出了挑战。为了解决这个问题,我们提出了一种结构正确的模块化芯片设计方法,该方法允许芯片从组件库构建并在制造前通过仿真验证。制造完成后,芯片通过便携式DMF芯片控制装置的远程仪器从智能手机上操作。通过将结构化设计技术与定制开发的硬件和软件工具相结合,我们为快速DMF芯片设计,仿真和操作提供了完整的端到端解决方案。
{"title":"A correct-by-construction design and programming approach for open paper-based digital microfluidics","authors":"Georgi Tanev, J. Madsen","doi":"10.1109/DTIP.2017.7984476","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984476","url":null,"abstract":"Advances in microfluidic research have allowed digital microfluidic (DMF) chips to be rapid prototyped using inexpensive materials and simple fabrication processes to the extend where the time spend on chip design can be significantly longer than the time required for fabrication. The growing need for application specific DMF chips challenges efficient handling of the increasing chip design and programming complexity. To address this, we propose a correct-by-construction modular chip design approach, which allows chips to be constructed from a component library and verified by simulation before fabrication. After fabrication, the chip is operated from a smartphone by remote instrumentation of a portable DMF chip control device. By combining structured design techniques with custom developed hardware and software tools, we present a full end-to-end solution for fast DMF chip design, simulation and operation.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129640933","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Modeling of structural-fluidic interactions for the design of digital MEMS speakers in hearing aids 助听器中数字MEMS扬声器的结构-流体相互作用建模
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984506
V. Pedio, G. De Pasquale, A. Somà, L. Rufer, S. Basrour
Micro Electro-Mechanical Systems (MEMS), applied to the field of hearing aids, offer ample possibilities for improving of performance, reliability and functional specifications, and they are also promising in terms of energy saving. In this paper, some of the major design problems relating to the use of MEMS for sound waves generation inside the ear canal are analyzed.
微机电系统(MEMS)应用于助听器领域,为提高助听器的性能、可靠性和功能规格提供了充分的可能性,并且在节能方面也很有前景。本文分析了利用MEMS在耳道内产生声波的一些主要设计问题。
{"title":"Modeling of structural-fluidic interactions for the design of digital MEMS speakers in hearing aids","authors":"V. Pedio, G. De Pasquale, A. Somà, L. Rufer, S. Basrour","doi":"10.1109/DTIP.2017.7984506","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984506","url":null,"abstract":"Micro Electro-Mechanical Systems (MEMS), applied to the field of hearing aids, offer ample possibilities for improving of performance, reliability and functional specifications, and they are also promising in terms of energy saving. In this paper, some of the major design problems relating to the use of MEMS for sound waves generation inside the ear canal are analyzed.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121728596","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1