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Case Study: Design and Construction of the Draper Laboratory Microfabrication Center 案例研究:德雷柏实验室微细加工中心的设计与建造
Q4 Engineering Pub Date : 2013-03-05 DOI: 10.17764/JIET.56.1.T755M81670245652
R. Morrison, L. Racz, D. J. Carter
For 25 years, Draper Laboratory has been active in the areas of microelectromechanical systems (MEMS) and multichip modules (MCM), using two separate laboratories. When these laboratories were constructed, cleanroom technology was in its mid-life cycle. To meet evolving R&D needs, the cleanroom facilities recently underwent a major renovation as described in this article.
25年来,德雷珀实验室一直活跃在微机电系统(MEMS)和多芯片模块(MCM)领域,使用两个独立的实验室。当这些实验室建成时,洁净室技术正处于其生命周期的中期。为了满足不断发展的研发需求,洁净室设施最近进行了一次重大改造,如本文所述。
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引用次数: 2
Relationship between Strain and Velocity for Ground Vehicle Vibration 地面车辆振动应变与速度的关系
Q4 Engineering Pub Date : 2012-10-29 DOI: 10.17764/JIET.55.1.2N44576W61240722
G. White
This paper uses experimental vibration data to evaluate the relationship between strain and velocity on a ground vehicle platform. The data also are used to compare the acceleration and the strain. Comparisons are made in the time, frequency, and damage domains. The results clearly show the strain data are more closely related to the vibratory velocity than to the acceleration, but the analysis is complicated somewhat by characteristics of the experimental data set.
本文利用试验振动数据对地面车辆平台的应变与速度关系进行了研究。这些数据也被用来比较加速度和应变。在时间、频率和损伤域进行比较。结果清楚地表明,应变数据与振动速度的关系比与加速度的关系更密切,但由于实验数据集的特点,分析有些复杂。
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引用次数: 1
Validation Techniques for 6-DOF Vibration Data Acquisition 六自由度振动数据采集验证技术
Q4 Engineering Pub Date : 2012-10-29 DOI: 10.17764/JIET.55.1.27662M34H12V32P6
M. Hale, J. Porter
Multiple Degree of Freedom (MDOF) excitation systems and MDOF vibration control systems continue to improve, and are now standard equipment in many dynamic test laboratories. Determination of an input specification for such MDOF systems is critically dependent on properly acquired field data. Validation of field data will be discussed and demonstrated employing the same transformation tools used in both transformation-based 6-degree-of-freedom (6-DOF) vibration control and generalized MDOF vibration specification development (VSD).
多自由度(MDOF)激励系统和MDOF振动控制系统不断改进,现在是许多动态测试实验室的标准设备。这种多自由度系统的输入规格的确定主要依赖于正确获取的现场数据。现场数据的验证将采用基于变换的6自由度(6-DOF)振动控制和广义MDOF振动规范开发(VSD)中使用的相同转换工具进行讨论和演示。
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引用次数: 8
Prediction Model for Particle Fallout in Cleanrooms 洁净室粒子沉降预测模型
Q4 Engineering Pub Date : 2012-10-29 DOI: 10.17764/JIET.55.1.2441H544M128474K
Dinesh Kumar Parasuraman, A. Arnoldus, Maria Kemps
Particle fallout in cleanrooms is a primary concern for industries manufacturing super critical products with surfaces highly susceptible to particulate contamination. Limited research has been conducted to predict the contribution of particulate contamination by production activities in cleanrooms. This paper describes a prediction model that utilizes the relationship between airborne particulate contamination and particle fallout, and the relationship between particle fallout and spatial variations, to predict the level of particle fallout on product surfaces in the cleanroom. Experimental modeling and statistical process control techniques were employed in establishing the above relationships and validation was performed by comparing the predictions from the model with actual observations at production cleanrooms.
对于制造表面极易受到颗粒污染的超临界产品的工业来说,洁净室中的粒子沉降是一个主要问题。已经进行了有限的研究来预测洁净室中生产活动对颗粒物污染的贡献。本文描述了一个利用空气中颗粒污染与颗粒沉降的关系以及颗粒沉降与空间变化的关系来预测洁净室产品表面颗粒沉降水平的预测模型。采用实验建模和统计过程控制技术建立上述关系,并将模型预测结果与生产洁净室实际观察结果进行对比验证。
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引用次数: 7
Do You Know that Your Accelerated Vibration Test Requirement Is Correct 你知道你的加速振动试验要求是正确的吗
Q4 Engineering Pub Date : 2012-10-29 DOI: 10.17764/JIET.55.1.2678772445383675
D. Aldridge
Vibration test time-compression methods have existed for decades and are well-documented. However, not all practitioners are aware of how these methods were developed and the proper utilization of the developed theory. While many sources have attempted to clarify the methodology, there is confusion on many points. The objective of this paper is to help new vibration test engineers understand accelerated testing theory and practice. The lab is a valuable training ground, but sometimes the subtleties are not communicated. A more complete understanding of the theory and practice of vibration test time-compression methods is needed when translating contract requirements into test procedures used in product development and validation.
振动测试时间压缩方法已经存在了几十年,并且有充分的文件证明。然而,并不是所有的从业者都知道这些方法是如何发展起来的,以及如何正确地利用这些发展起来的理论。虽然许多来源试图澄清方法,但在许多方面存在混淆。本文的目的是帮助新的振动测试工程师了解加速测试的理论和实践。实验室是一个很有价值的训练场所,但有时微妙之处并没有得到沟通。在将合同要求转化为产品开发和验证中使用的测试程序时,需要对振动测试时间压缩方法的理论和实践有更全面的了解。
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引用次数: 0
Validation of Pyroshock Data 热震数据的验证
Q4 Engineering Pub Date : 2012-10-29 DOI: 10.17764/JIET.55.1.2Q4650XQT7J0K506
V. Bateman, Ronald Merritt
This paper presents a comprehensive description of pyroshock, the interpretation of pyroshock data, and the validation of pyroshock data. Recent events in the pyroshock testing community show that corrupted pyroshock data are still being acquired at government agencies and private companies. A large part of this paper is devoted to acquisition and analysis of pyroshock data because proper time-history data acquisition and, consequently, test specification development are common industry problems. To avoid corrupted pyroshock data and thus corrupted pyroshock specifications, recommended practices for instrumentation and data acquisition systems as well as data analyses are provided. Causes of corrupted pyroshock data are explored and recommendations for avoiding corrupted pyroshock data are presented.
本文介绍了热震的综合描述、热震数据的解释以及热震数据的验证。最近在热震测试社区发生的事件表明,政府机构和私人公司仍在获取损坏的热震数据。本文的很大一部分致力于热震数据的采集和分析,因为适当的时程数据采集以及测试规范的制定是常见的工业问题。为了避免损坏热震数据,从而损坏热震规范,提供了仪器和数据采集系统以及数据分析的推荐做法。探讨了热震数据损坏的原因,并提出了避免热震数据损坏的建议。
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引用次数: 22
Validation of Measured Dynamic Data Using Rigid Body Response 利用刚体响应验证实测动态数据
Q4 Engineering Pub Date : 2012-10-01 DOI: 10.17764/JIET.55.1.2171387035102W27
D. Smallwood
As multiple axis vibration testing has become more widespread, it has become increasingly important to ensure the instrumentation is accurately portrayed in the instrumentation table. However, errors do occur. The method used in this paper to help uncover these errors is based on the condition that at low frequencies (below any resonant frequencies of the object being studied) the response is essentially rigid body. The spectral density matrix (SDM) at a low frequency, of many more than six response measurements, is decomposed using singular value decomposition (SVD). Under the assumption of rigid body response, it is assumed that the first six singular vectors are linear combinations of the six rigid body modes. The best linear fit is then calculated for this fit. The measurements are then removed one at a time, and the reduction in the fit error is calculated. It is assumed that if the removal of a measurement reduces the error significantly, that measurement is likely in error.
随着多轴振动测试的日益普及,确保仪器仪表在仪表表中被准确地描绘出来变得越来越重要。然而,错误确实会发生。本文中用于帮助揭示这些错误的方法是基于在低频(低于所研究对象的任何谐振频率)下响应本质上是刚体的条件。采用奇异值分解(SVD)方法,对6次以上响应测量的低频谱密度矩阵(SDM)进行分解。在刚体响应假设下,假定前6个奇异向量是6个刚体模态的线性组合。然后计算该拟合的最佳线性拟合。然后每次删除一个测量值,并计算拟合误差的减小。假设如果去除一个测量值显著地减少了误差,那么该测量值很可能是错误的。
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引用次数: 0
Consistency as the True Measure of Cleanroom Wiper Quality 一致性是无尘室雨刷质量的真正衡量标准
Q4 Engineering Pub Date : 2011-10-24 DOI: 10.17764/JIET.54.2.J6367818507386L7
S. Kalelkar, J. Postlewaite
Cleanroom wipers have long played an indispensable role in managing contamination in controlled environments. From wiping residues on hard surfaces to applying cleaning solutions, wipers perform a variety of tasks that help maintain the cleanliness levels desired in a given cleanroom environment. This makes the selection of cleanroom wipers a critical decision in any controlled environment. One common way to distinguish between cleanroom wipers of similar structural design is to compare test results across a variety of criteria, according to recommended practices by organizations such as the IEST. However, these results are typically listed as single data points for a given test and are meant to indicate either “typical values,” or even target specifications, in some instances. This approach is inherently limited and ineffective in assessing the true levels of cleanliness of a given wiper product. In this study, we review the test methods that are used to evaluate cleanroom wipers and present a new and improved approach by which users can evaluate their cleanliness. We provide a framework by which the consistency of the cleanliness of cleanroom wipers can be assessed in a statistically relevant manner. Finally, we demonstrate the value of using consistency of test results rather than a singular test result as the true measure of wiper quality.
洁净室雨刷长期以来在受控环境的污染管理中发挥着不可或缺的作用。从擦拭坚硬表面上的残留物到应用清洁溶液,雨刷执行各种任务,有助于在给定的洁净室环境中保持所需的清洁度水平。这使得洁净室雨刷器的选择在任何受控环境中都是一个关键的决定。区分结构设计相似的洁净室雨刷的一种常用方法是根据诸如est等组织推荐的实践,比较各种标准的测试结果。然而,这些结果通常作为给定测试的单个数据点列出,并且在某些情况下意味着指示“典型值”,甚至是目标规范。这种方法在评估给定雨刷产品的真实清洁水平方面具有固有的局限性和有效性。在本研究中,我们回顾了用于评估洁净室雨刷的测试方法,并提出了一种新的改进方法,用户可以通过该方法评估其清洁度。我们提供了一个框架,通过该框架,洁净室雨刷的清洁度一致性可以以统计相关的方式进行评估。最后,我们证明了使用测试结果的一致性而不是单一测试结果作为雨刷质量的真实度量的价值。
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引用次数: 1
Limitations of the Power Spectral Density as an Indicator of Test Severity 功率谱密度作为测试严重性指标的局限性
Q4 Engineering Pub Date : 2011-10-24 DOI: 10.17764/JIET.54.2.J3761476322338W1
M. Paulus
This paper presents a set of experimental data comparing repetitive shock (RS) vibration, single-axis electrodynamic (ED) vibration, and multi-axis ED vibration. It was found that multi-axis testing is more severe than single-axis testing at the same level. In addition, weaknesses were found in the RS system at low frequency. Smoothing of the data or poor line resolution was also shown to change the overall severity of a test. A poor correlation was shown between the power spectral density (PSD) and the rate of natural frequency change (RFC) over a wide frequency shift. The change in natural frequency caused the initial PSD to be an ineffective indicator of test severity. Quantification of the severity of the test profile can be accomplished through characterization of the RFC.
本文比较了重复冲击振动、单轴电动力振动和多轴电动力振动的实验数据。研究发现,在同一水平下,多轴检测比单轴检测更为严重。此外,在低频处发现了RS系统的弱点。数据平滑或较差的线分辨率也显示改变测试的总体严重性。功率谱密度(PSD)和固有频率变化率(RFC)之间的相关性较差。固有频率的变化导致初始PSD成为测试严重程度的无效指标。可以通过对RFC的描述来完成测试概要严重性的量化。
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引用次数: 5
Spatial Variability Caused by Acoustic Wave Interference in Single-Drive Direct Field Acoustic Testing 单驱动直接场声学测试中声波干扰引起的空间变异性
Q4 Engineering Pub Date : 2011-10-24 DOI: 10.17764/JIET.54.2.J7502N53R4305HJ7
M. Dyke, Portia Peters
A significant amount of acoustic spatial variability is characteristic of direct field acoustic testing using a single random signal to drive the loudspeaker sources. This has raised concerns about the potential for under- and over-testing of hardware, particularly because of the consequential high sensitivity of the test environment upon the configuration of the test equipment and test hardware. Meanwhile, little is known about the specific spatial characteristics of the test acoustic field. A recent demonstration single-drive direct field acoustic test afforded the opportunity to map various planes of the acoustic field with a 36 microphone grid, offering unprecedented physical insight into the field characteristics. Analysis of the data reveals that the field is predominantly characterized by wave interference patterns at any given frequency. These data correlate well with 3-dimensional numerical models. The presence of wave interference patterns created by the fully correlated array of sources also ex...
使用单个随机信号驱动扬声器源的直接场声学测试具有显著的声学空间变异性。这引起了对硬件测试不足和过度的潜在关注,特别是因为测试环境对测试设备和测试硬件的配置具有相应的高灵敏度。同时,对测试声场的具体空间特性知之甚少。最近的一次单驱动直接场声学测试演示,利用36个麦克风网格绘制了声场的各个平面,提供了对场特性的前所未有的物理洞察。对数据的分析表明,在任何给定频率下,该场的主要特征是波干涉模式。这些数据与三维数值模型相吻合。由完全相关的源阵列产生的波干涉图案的存在也表明……
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引用次数: 2
期刊
Journal of the IEST
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