Pub Date : 2009-11-10DOI: 10.1109/ISOT.2009.5326092
P. Sandoz, July A. Galeano Zea
This paper reports on visual position measurement based on space-frequency analysis of a pseudo-periodic pattern. This approach can be seen as a two-dimensional extension of the Vernier principle as used in the Vernier caliper. The pseudoperiodic pattern fixed on the target is seen as a secondary scale that is compared to the reference scale formed by the image pixel frame. By performing space-frequency analysis and phase computations, the center of the pseudo-periodic pattern is retrieved with a subpixel accuracy and the in-plane orientation is determined as well. Several configurations allow different kinds of measurement. A single camera vision system leads to in-plane pose estimation. Stroboscopic illumination can be used to quantify vibration amplitudes down to the nanometer range. A two camera setup can be used for displacement measurements along the three spatial directions while the choice of an interference objective, sensitive to out-of-plane direction, can complement the measurement to address the six degrees of freedom. An extended pseudo-periodic pattern was also designed to locate any field of observation within a wide dimension surface.
{"title":"Space-frequency analysis of pseudo-periodic patterns for subpixel position control","authors":"P. Sandoz, July A. Galeano Zea","doi":"10.1109/ISOT.2009.5326092","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326092","url":null,"abstract":"This paper reports on visual position measurement based on space-frequency analysis of a pseudo-periodic pattern. This approach can be seen as a two-dimensional extension of the Vernier principle as used in the Vernier caliper. The pseudoperiodic pattern fixed on the target is seen as a secondary scale that is compared to the reference scale formed by the image pixel frame. By performing space-frequency analysis and phase computations, the center of the pseudo-periodic pattern is retrieved with a subpixel accuracy and the in-plane orientation is determined as well. Several configurations allow different kinds of measurement. A single camera vision system leads to in-plane pose estimation. Stroboscopic illumination can be used to quantify vibration amplitudes down to the nanometer range. A two camera setup can be used for displacement measurements along the three spatial directions while the choice of an interference objective, sensitive to out-of-plane direction, can complement the measurement to address the six degrees of freedom. An extended pseudo-periodic pattern was also designed to locate any field of observation within a wide dimension surface.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"262 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133600113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-11-10DOI: 10.1109/ISOT.2009.5326109
A. Tortschanoff, M. Lenzhofer, A. Frank, A. Kenda, T. Sandner, H. Schenk
We discuss recent improvements of our MEMS-based FT-IR spectrometer. A novel MEMS actuator design of the translational mirrors features an increased mirror surface of 7 mm2 and enables larger translation amplitudes (up to ±250 µm), leading to improved performance of the spectrometer. Furthermore we present a new method for accurate position detection of the MEMS device, thus enabling the implementation of closed-loop control. A dedicated circuit demodulates the reference signal and generates a highly accurate control signal returning the zero-crossing position of the mirror. The implementation of a closed-loop control ensures optimally stable MEMS mirror movement and maximal mechanical amplitude, even under varying environmental conditions allowing building robust MEMS-based Fourier-transform infrared (FT-IR) spectrometers with large mechanical amplitudes and thus good spectral resolutions.
{"title":"Improved MEMS based FT-IR spectrometer","authors":"A. Tortschanoff, M. Lenzhofer, A. Frank, A. Kenda, T. Sandner, H. Schenk","doi":"10.1109/ISOT.2009.5326109","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326109","url":null,"abstract":"We discuss recent improvements of our MEMS-based FT-IR spectrometer. A novel MEMS actuator design of the translational mirrors features an increased mirror surface of 7 mm2 and enables larger translation amplitudes (up to ±250 µm), leading to improved performance of the spectrometer. Furthermore we present a new method for accurate position detection of the MEMS device, thus enabling the implementation of closed-loop control. A dedicated circuit demodulates the reference signal and generates a highly accurate control signal returning the zero-crossing position of the mirror. The implementation of a closed-loop control ensures optimally stable MEMS mirror movement and maximal mechanical amplitude, even under varying environmental conditions allowing building robust MEMS-based Fourier-transform infrared (FT-IR) spectrometers with large mechanical amplitudes and thus good spectral resolutions.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129990912","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-11-10DOI: 10.1109/ISOT.2009.5326052
A. Iqbal, Zhizheng Wu, F. B. Amara
This paper presents experimental results on the H∞ control of a magnetic fluid deformable mirror (MFDM) used in retinal imaging adaptive optics (AO) systems. MFDMs are a recently proposed novel type of active optical elements called wavefront correctors, which constitute the central part of AO systems. They offer cost and performance advantages over existing wavefront correctors. They have been found particularly suitable for ophthalmic imaging systems where they can be used to compensate for the complex optical aberrations in the eye that blur the images of the internal parts of the eye. However, their practical implementation in clinical devices is hampered by the lack of effective methods to control the shape of their deformable surface. This paper presents a control algorithm that can be used to compensate for high-order, time-varying optical aberrations using a MFDM. The control algorithm is developed using the mixed-sensitivity H∞ design method which ensures optimal performance in tracking the desired wavefront shapes using MFDM and also limits the magnitude of the input control voltages. Experimental results showing the performance of a closed-loop system comprising the developed controller and a 19-channel prototype MFDM are presented.
{"title":"Mixed sensitivity H∞ control of magnetic fluid deformable mirrors","authors":"A. Iqbal, Zhizheng Wu, F. B. Amara","doi":"10.1109/ISOT.2009.5326052","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326052","url":null,"abstract":"This paper presents experimental results on the H∞ control of a magnetic fluid deformable mirror (MFDM) used in retinal imaging adaptive optics (AO) systems. MFDMs are a recently proposed novel type of active optical elements called wavefront correctors, which constitute the central part of AO systems. They offer cost and performance advantages over existing wavefront correctors. They have been found particularly suitable for ophthalmic imaging systems where they can be used to compensate for the complex optical aberrations in the eye that blur the images of the internal parts of the eye. However, their practical implementation in clinical devices is hampered by the lack of effective methods to control the shape of their deformable surface. This paper presents a control algorithm that can be used to compensate for high-order, time-varying optical aberrations using a MFDM. The control algorithm is developed using the mixed-sensitivity H∞ design method which ensures optimal performance in tracking the desired wavefront shapes using MFDM and also limits the magnitude of the input control voltages. Experimental results showing the performance of a closed-loop system comprising the developed controller and a 19-channel prototype MFDM are presented.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116369904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-11-10DOI: 10.1109/ISOT.2009.5326102
F. Oohira, T. Nakano, O. Sasaki, K. Terao, Takaaki Suzuki
This paper presents two types of low cost mirror devices composed of the glass and the polymer material. These devices are new constructions composed of the inexpensive glass as the mirror substrate and the polymer as the torsion hinge. The devices can be fabricated by the photolithography and wet etching processes without deep-RIE process. The proposed one construction is the Lorentz force type mirror device made of polyimide material. And the other construction is the electromagnet force type mirror device made of SU-8 material containing the magnetic particles. In the former type mirror, the mirror device was fabricated without expensive dry etching equipment such as RIE, and the device can be fabricated only by the sputtering, photolithography and wet etching processes. Further, the inexpensive glass and polymer material are used instead of expensive Si. In the latter type mirror, the SU-8 polymer material containing the magnetic particles is used. The actuation system which attracts the mirror directly with the electromagnet is adopted. We fabricated the large-sized mirror (20mm × 10mm) device without expensive dry etching equipment such as deep-RIE, and evaluated the characteristics of the fabricated mirror device. The optical deflection angle of ±20deg. was achieved. As the result, we confirmed the feasibility to realize the low cost polymer MEMS mirror.
{"title":"Low cost polymer MEMS mirrors fabricated by photolithography and wet etching processes","authors":"F. Oohira, T. Nakano, O. Sasaki, K. Terao, Takaaki Suzuki","doi":"10.1109/ISOT.2009.5326102","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326102","url":null,"abstract":"This paper presents two types of low cost mirror devices composed of the glass and the polymer material. These devices are new constructions composed of the inexpensive glass as the mirror substrate and the polymer as the torsion hinge. The devices can be fabricated by the photolithography and wet etching processes without deep-RIE process. The proposed one construction is the Lorentz force type mirror device made of polyimide material. And the other construction is the electromagnet force type mirror device made of SU-8 material containing the magnetic particles. In the former type mirror, the mirror device was fabricated without expensive dry etching equipment such as RIE, and the device can be fabricated only by the sputtering, photolithography and wet etching processes. Further, the inexpensive glass and polymer material are used instead of expensive Si. In the latter type mirror, the SU-8 polymer material containing the magnetic particles is used. The actuation system which attracts the mirror directly with the electromagnet is adopted. We fabricated the large-sized mirror (20mm × 10mm) device without expensive dry etching equipment such as deep-RIE, and evaluated the characteristics of the fabricated mirror device. The optical deflection angle of ±20deg. was achieved. As the result, we confirmed the feasibility to realize the low cost polymer MEMS mirror.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"140 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116469714","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-11-10DOI: 10.1109/ISOT.2009.5326068
H. Kadono, Koichi Kobayashi
In this study, a highly accurate optical interferometric technique called ‘statistical interferometry’[1–3] has been developed and improved to expand its dynamic range. In contrast to the conventional interferometry where the phase is determined in a completely deterministic way, we consider the interference of completely random wave fronts, i.e., speckle fields, and it has been proved that the complete randomness of the speckle field can play the role of a standard phase in a statistical sense. The advantage of the method is that since the phase of the object under testing can be derived in a statistical way, the accuracy of the measurement depends only on the number of data taken to calculate a probability density distribution of speckle phase. This feature permits a simple optical system to achieve measurements with an extremely high accuracy. According to a computer simulation, the accuracy of λ/1000 can be achieved using 40,000 data of the speckle intensity. Statistical interferometry was applied as a strain sensor to monitor growth behavior of plant in ultra-short term, aiming to investigate the influence of the environmental conditions. In the experiments, the plants were exposed to ozone that is the main substance of photochemical oxidants. It was demonstrated that growth behavior of the plant could be measured with the accuracy of sub-nanometer and a time scale of second achieving a dynamic range of several hundred microns.
{"title":"Improvement of dynamic range of statistical interferometry and its application to monitor ultra-short term growth behaviour of plant","authors":"H. Kadono, Koichi Kobayashi","doi":"10.1109/ISOT.2009.5326068","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326068","url":null,"abstract":"In this study, a highly accurate optical interferometric technique called ‘statistical interferometry’[1–3] has been developed and improved to expand its dynamic range. In contrast to the conventional interferometry where the phase is determined in a completely deterministic way, we consider the interference of completely random wave fronts, i.e., speckle fields, and it has been proved that the complete randomness of the speckle field can play the role of a standard phase in a statistical sense. The advantage of the method is that since the phase of the object under testing can be derived in a statistical way, the accuracy of the measurement depends only on the number of data taken to calculate a probability density distribution of speckle phase. This feature permits a simple optical system to achieve measurements with an extremely high accuracy. According to a computer simulation, the accuracy of λ/1000 can be achieved using 40,000 data of the speckle intensity. Statistical interferometry was applied as a strain sensor to monitor growth behavior of plant in ultra-short term, aiming to investigate the influence of the environmental conditions. In the experiments, the plants were exposed to ozone that is the main substance of photochemical oxidants. It was demonstrated that growth behavior of the plant could be measured with the accuracy of sub-nanometer and a time scale of second achieving a dynamic range of several hundred microns.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131690611","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-11-10DOI: 10.1109/ISOT.2009.5326142
A. Kiraz, M. Mestre, Y. Karadağ, S. C. Yorulmaz, M. Gundogan
While their spherical geometry is mostly preserved, salt-water microdroplets can be studied in stable experimental conditions when standing on a superhydrophobic surface. Here, we report how the photothermal effect can be used to continuously tune or lock the whispering gallery mode (WGM) spectrum (therefore the size) of salt-water microdroplets on a superhydrophobic surface. The microdroplets are kept in the controlled atmosphere of a humidity chamber. Local heating by an infrared laser focused at the center of the microdroplet causes it to depart from its equilibrium size, shifting the WGM spectrum. This photothermal tuning effect is fully reversible and can be used to tune the microdroplet radius with a precision reaching 1 Å by finely controlling the heating laser power. We demonstrate a new spectroscopy method based on this effect, and use it to measure Q-factors of WGM resonances of up to ∼ 105. Conversely, focusing the heating laser to the microdroplet rim causes it to experience absorption resonances, leading to a hysteretic behavior when increasing and decreasing the laser power. We show that this behavior can be used to lock the size of a microdroplet and make it function as an optically bistable element. WGM resonances of microdroplets locked in such a way are probed using a tunable laser, showing a locking precision reaching ≪ 0.01 nm over tens of minutes. These results indicate that the challenges in terms of position and wavelength stability inherent to liquid microdroplets surrounded by air can be overcome, and that they provide an easily tunable and lockable alternative to solid optical microcavities.
{"title":"High precision size tuning and stabilization of single salt-water microdroplets on a superhydrophobic surface","authors":"A. Kiraz, M. Mestre, Y. Karadağ, S. C. Yorulmaz, M. Gundogan","doi":"10.1109/ISOT.2009.5326142","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326142","url":null,"abstract":"While their spherical geometry is mostly preserved, salt-water microdroplets can be studied in stable experimental conditions when standing on a superhydrophobic surface. Here, we report how the photothermal effect can be used to continuously tune or lock the whispering gallery mode (WGM) spectrum (therefore the size) of salt-water microdroplets on a superhydrophobic surface. The microdroplets are kept in the controlled atmosphere of a humidity chamber. Local heating by an infrared laser focused at the center of the microdroplet causes it to depart from its equilibrium size, shifting the WGM spectrum. This photothermal tuning effect is fully reversible and can be used to tune the microdroplet radius with a precision reaching 1 Å by finely controlling the heating laser power. We demonstrate a new spectroscopy method based on this effect, and use it to measure Q-factors of WGM resonances of up to ∼ 105. Conversely, focusing the heating laser to the microdroplet rim causes it to experience absorption resonances, leading to a hysteretic behavior when increasing and decreasing the laser power. We show that this behavior can be used to lock the size of a microdroplet and make it function as an optically bistable element. WGM resonances of microdroplets locked in such a way are probed using a tunable laser, showing a locking precision reaching ≪ 0.01 nm over tens of minutes. These results indicate that the challenges in terms of position and wavelength stability inherent to liquid microdroplets surrounded by air can be overcome, and that they provide an easily tunable and lockable alternative to solid optical microcavities.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115059874","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-09-01DOI: 10.1109/ISOT.2009.5326059
Jeff T. Meade, A. Cenko, B. Behr, A. Hajian
A dispersed Fourier transform spectrometer (dFTS) was used to measure the radial velocity of stellar targets. A mechanical-based metrology system intrinsically built into the dFTS instrument was enhanced with a laser-based optical metrology system. Precisions of the optical path difference within the instrument were brought from about 20 nm to 0.1 nm resulting in highly precise radial velocity measurements on the order of 1.5 m/s. Without the optical metrology system radial velocity measurements were only precise to about 300 m/s. The stability of the dFTS instrument was measured by calculating the zero-point radial velocity over the operational time of the instrument using a thorium-argon line-spectrum light source.
{"title":"An optical metrology system for delay position measurement in a dispersed Fourier transform spectrometer","authors":"Jeff T. Meade, A. Cenko, B. Behr, A. Hajian","doi":"10.1109/ISOT.2009.5326059","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326059","url":null,"abstract":"A dispersed Fourier transform spectrometer (dFTS) was used to measure the radial velocity of stellar targets. A mechanical-based metrology system intrinsically built into the dFTS instrument was enhanced with a laser-based optical metrology system. Precisions of the optical path difference within the instrument were brought from about 20 nm to 0.1 nm resulting in highly precise radial velocity measurements on the order of 1.5 m/s. Without the optical metrology system radial velocity measurements were only precise to about 300 m/s. The stability of the dFTS instrument was measured by calculating the zero-point radial velocity over the operational time of the instrument using a thorium-argon line-spectrum light source.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127169835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-09-01DOI: 10.1109/ISOT.2009.5326114
T. Schuldt, M. Gohlke, D. Weise, U. Johann, C. Braxmaier
In this paper, we present a high-precision dilatometer for dimensional characterization of highly-stable materials. The dilatometer is based on a highly symmetric heterodyne interferometer where a reference and a measurement mirror are fixed inside a tubular shaped specimen made of the material under investigation. The specimen is placed inside a thermally controlled oven; the temperature can be varied between 20°C and 60°C. We measured the linear coefficient of thermal expansion (CTE) of tubes made of carbon-fiber reinforced plastics (CFRP) and Zerodur, a thermally highly stable glass ceramics. An accuracy ≪10−7 K−1 was achieved.
{"title":"A high-precision dilatometer based on sub-nm heterodyne interferometry","authors":"T. Schuldt, M. Gohlke, D. Weise, U. Johann, C. Braxmaier","doi":"10.1109/ISOT.2009.5326114","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326114","url":null,"abstract":"In this paper, we present a high-precision dilatometer for dimensional characterization of highly-stable materials. The dilatometer is based on a highly symmetric heterodyne interferometer where a reference and a measurement mirror are fixed inside a tubular shaped specimen made of the material under investigation. The specimen is placed inside a thermally controlled oven; the temperature can be varied between 20°C and 60°C. We measured the linear coefficient of thermal expansion (CTE) of tubes made of carbon-fiber reinforced plastics (CFRP) and Zerodur, a thermally highly stable glass ceramics. An accuracy ≪10−7 K−1 was achieved.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121921822","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-09-01DOI: 10.1109/ISOT.2009.5326126
Ying Wang, D. N. Wang, Mingwei Yang, W. Hong, P. Lu
A micro-hole in single mode fiber is created by using femtosecond laser irradiation for refractive index sensing. This in-fiber device is simple, compact and of low cost and can be used for temperature independent sensing.
{"title":"Femtosecond laser drilled micro-hole in a single-mode fiber for refractive index sensing","authors":"Ying Wang, D. N. Wang, Mingwei Yang, W. Hong, P. Lu","doi":"10.1109/ISOT.2009.5326126","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326126","url":null,"abstract":"A micro-hole in single mode fiber is created by using femtosecond laser irradiation for refractive index sensing. This in-fiber device is simple, compact and of low cost and can be used for temperature independent sensing.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114985208","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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