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2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies最新文献

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FEM simulation of piezoresistive pressure module 压阻式压力模块的有限元仿真
V. Gridchin, M. A. Chebanov
The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. Strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper.
采用有限元模拟方法研究了压阻式模组中奇异点对应力分布的影响。本文提出了奇点对硅-玻璃界面应力分布的强烈影响。
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引用次数: 1
Parameters estimation of the MEM transducer with electrodes produced from different materials 不同材料电极MEM换能器的参数估计
V. Dragunov, M. N. Lyutaeva
The paper contains mathematical expressions for computation of output power for MEM transducer with electrodes produced from different materials. Dependence of transducer output power on resonance frequency and its dependence on difference between work functions of electrode materials are analyzed.
本文给出了计算不同材料电极MEM换能器输出功率的数学表达式。分析了换能器输出功率与谐振频率的关系以及与电极材料功函数差的关系。
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引用次数: 8
Resonance backscattering and negative magnetoresistance in submicron quantum ring interferometer 亚微米量子环干涉仪中的共振后向散射和负磁阻
D. V. Nomokonov, A. Bykov
Reasons for the occurrence of resonance backscattering peaks in submicron electron ring interferometer are investigated in terms of the model of single-mode resonance trail. The suppression of resonance by magnetic field is explained qualitatively.
根据单模谐振尾迹模型,研究了亚微米电子环形干涉仪谐振后向散射峰产生的原因。定性地解释了磁场对共振的抑制作用。
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引用次数: 0
Research methods of absorptivity of nanoscale layers of organometallic compounds in the processes of micromechanics 微观力学过程中有机金属化合物纳米层吸收率的研究方法
D. Mikhailova, D. V. Chesnokov
This paper describes the method to study the absorptivity of nanoscale layers of organometallic compounds. This method is based on frustrated total internal reflection phenomenon.
本文介绍了研究有机金属化合物纳米层吸收率的方法。该方法是基于受挫全内反射现象。
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引用次数: 0
Anisotropy of galvanomagnetic phenomena in epitaxial films of ferroelectric semiconductor PbSnTe:In 铁电半导体PbSnTe: in外延膜中磁现象的各向异性
A. Klimov
Giant anisotropic change of current in constant magnet field is observed in films of narrow band semiconductor PbSnTe:In. This phenomenon is considered with regard for ferroelectric properties in terms of the theory of space-charge-limited currents.
在恒磁场作用下,窄带半导体PbSnTe: in薄膜的电流发生了巨大的各向异性变化。这种现象是根据空间电荷限制电流理论来考虑铁电性质的。
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引用次数: 1
The influence of deformation on conductivity of Ga2O3-In2O3 thin films 变形对Ga2O3-In2O3薄膜电导率的影响
A. Kozlov, E. A. Kurdyukova
Thin films of Ga2O3-In2O3 are obtained by magnetron deposition with further thermal oxidation. Dependences of resistance variation on time under strain and on strain value are observed. The model for explaining the obtained results is developed. It is based on the barrier conductivity of polycrystalline oxide semiconductor materials.
采用磁控管沉积法制备了Ga2O3-In2O3薄膜,并进行了进一步的热氧化。观察到电阻变化与应变时间和应变值的关系。建立了解释所得结果的模型。它是基于多晶氧化物半导体材料的势垒导电性。
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引用次数: 0
Study of the parameters of micromechanical devices with electromagnetic control 电磁控制微机械装置参数的研究
V. Korneyev
The being developed micromechanical device is designed for control of the optical rays position in space. The device is made in the format of the silicon chip with sizes of 1 × 2 cm and consists of 100 micro-mirrors. Each micromirror has an actuator (an engine) in the form of a magnetic dipole. The device is controlled by an external magnetic field induces a magnetic moment in the dipoles. The device works as a diffraction grating with a variable angle of light, redirecting the reflected light flux into one of the diffraction orders.
正在研制的微机械装置是为控制射线在空间中的位置而设计的。该装置以1 × 2厘米大小的硅片的形式制作,由100个微镜组成。每个微镜都有一个磁偶极子形式的驱动器(发动机)。该装置由外加磁场在偶极子中产生磁矩来控制。该装置作为一个具有可变光角的衍射光栅,将反射光通量重新定向到一个衍射阶。
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引用次数: 0
Evolution of N-V memories: Flash memory trends with PCRAM/FeRAM/ReRAM N-V存储器的发展:PCRAM/FeRAM/ReRAM闪存的发展趋势
B. Prince
Anything that stores two states can be a memory. The challenge is to get: Required Properties and Reliability for intended application at a competitive cost.
任何存储两种状态的东西都可以是存储器。挑战在于:以具有竞争力的成本获得预期应用所需的性能和可靠性。
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引用次数: 0
Nanoscale Si/SiO2 multilayer structures produced by plasma-chemical technology 等离子体化学技术制备纳米级Si/SiO2多层结构
A. Gismatulin, G. N. Kamaev, A. Antonenko, S. Arzhannikova, V. Volodin, M. Efremov, Anna S. Gileva
Si-SiO2 multilayer nanoscale structures were obtained using а procedures of α-Si:H thin film depositions and subsequently plasma enhanced oxidation. Thus, a structure containing 6 layers of α-Si:H with thickness of 50 Å, inserted between the layers of SiO2 with thickness 150 Å has been created. The experimental setup with source of wide aperture and high-density inductively coupled RF plasma (ICP) was used. The properties of the structures were investigated through the characteristics of MOS capacitors. Electrical measurements reveal significant peculiarities connected with charge transport through prepared multilayer nanoscale structures.
采用α-Si:H薄膜沉积和等离子体增强氧化的方法获得了Si-SiO2多层纳米结构。因此,在厚度为150 Å的SiO2层之间嵌入了厚度为50 Å的6层α-Si:H结构。实验装置采用大孔径高密度电感耦合射频等离子体(ICP)源。通过对MOS电容器的特性分析,研究了该结构的性能。电测量揭示了通过制备的多层纳米结构与电荷传输有关的重要特性。
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引用次数: 2
Experimental evaluation of parameters of the capacitive MEMS converters 电容式MEMS变换器参数的实验评估
D. Ostertak
Parameters of the capacitive mechanical-to-electrical energy MEMS converters are investigated experimentally. A comparison of the theoretical calculations performed using simplified models as well as experimental data is carried out. The analysis shows that existing differences between calculated and experimental data are probably related to the additional factors, e.g. parasitic capacity, which arise during measurements and are not taken into considerations in the simplified models.
实验研究了电容式机械能-电能MEMS变换器的参数。用简化模型和实验数据对理论计算结果进行了比较。分析表明,计算数据与实验数据之间存在的差异可能与测量过程中产生的附加因素有关,例如寄生容量,这些因素在简化模型中没有考虑到。
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引用次数: 5
期刊
2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies
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