Rahmat Hadi Saputro, Tatsuro Maeda, Kaoru Toko, Ryo Matsumura* and Naoki Fukata*,
Germanium-based materials are essential for the integration of Group IV optoelectronics in silicon devices. In addition to tensile strain, high n-type doping is critical, as it provides abundant carriers for recombination, potentially enabling higher photoemissions from Ge-based materials. We report here record-high 68% doping activation on n-Ge with ≥1020 cm–3 carrier density. This study centers on Sb-doped n-type Ge-on-insulator thin films with Si or Sn alloying grown using high-speed continuous-wave laser annealing (CWLA). Crystal mapping revealed the growth of polycrystalline n-GeSn and n-GeSi thin films with grain sizes up to 4 μm in diameter. Micro-PL measurements showed the PL intensity of n-Ge to be enhanced by the alloying of Sn and Si, with peak intensity 1.5 and 3 times higher for n-GeSn and n-GeSi, respectively. Raman peak red shift and broadening are observed in the samples, indicating high tensile strain and n-type doping. The measured carrier density of CWLA-grown films aligns well with the PL intensity trend, suggesting the process has promise for achieving electrically improved Ge-based thin films.
锗基材料对于在硅器件中集成第四族光电子技术至关重要。除了拉伸应变之外,高 n 型掺杂也至关重要,因为它能为重组提供丰富的载流子,从而有可能使锗基材料产生更高的光辐射。我们在此报告了载流子密度≥1020 cm-3 的 n-Ge 上创纪录的 68% 掺杂活化率。这项研究的核心是使用高速连续波激光退火(CWLA)技术生长的掺锑 n 型绝缘体锗薄膜,其中含有硅或锡合金。晶体图显示生长出了晶粒直径达 4 μm 的多晶 n-GeSn 和 n-GeSi 薄膜。显微光致发光测量显示,正锗的光致发光强度因锡和硅的合金化而增强,正锗硒和正锗硅的峰值强度分别高出 1.5 倍和 3 倍。在样品中观察到拉曼峰红移和展宽,表明样品具有较高的拉伸应变和 n 型掺杂。测量到的 CWLA 生长薄膜的载流子密度与 PL 强度趋势非常吻合,这表明该工艺有望实现电性改进的 Ge 基薄膜。
{"title":"High Doping Activation (≥1020 cm–3) in Tensile-Strained n-Ge Alloys Achieved by High-Speed Continuous-Wave Laser Annealing","authors":"Rahmat Hadi Saputro, Tatsuro Maeda, Kaoru Toko, Ryo Matsumura* and Naoki Fukata*, ","doi":"10.1021/acsaelm.4c00399","DOIUrl":"10.1021/acsaelm.4c00399","url":null,"abstract":"<p >Germanium-based materials are essential for the integration of Group IV optoelectronics in silicon devices. In addition to tensile strain, high n-type doping is critical, as it provides abundant carriers for recombination, potentially enabling higher photoemissions from Ge-based materials. We report here record-high 68% doping activation on n-Ge with ≥10<sup>20</sup> cm<sup>–3</sup> carrier density. This study centers on Sb-doped n-type Ge-on-insulator thin films with Si or Sn alloying grown using high-speed continuous-wave laser annealing (CWLA). Crystal mapping revealed the growth of polycrystalline n-GeSn and n-GeSi thin films with grain sizes up to 4 μm in diameter. Micro-PL measurements showed the PL intensity of n-Ge to be enhanced by the alloying of Sn and Si, with peak intensity 1.5 and 3 times higher for n-GeSn and n-GeSi, respectively. Raman peak red shift and broadening are observed in the samples, indicating high tensile strain and n-type doping. The measured carrier density of CWLA-grown films aligns well with the PL intensity trend, suggesting the process has promise for achieving electrically improved Ge-based thin films.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141254117","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Damanpreet Kaur, Rohit Dahiya, Nadeem Ahmed and Mukesh Kumar*,
Recently, amorphous Ga2O3-based photodetectors are garnering interest for their relative ease-of-growth at room temperature and their virtuous use in flexible electronics. However, a major concern that remains is the huge trade-off between key performance parameters, viz., photoresponse and response time. Being replete with oxygen vacancies, acting as trap centers, devices usually boast a large photoresponse but at the cost of longer response time due to prolonged carrier recombination. Most of remedial measures to offset this trade-off include oxygen vacancy engineering but in a continuous manner, implying creating/deleting vacancies throughout the film thickness, leading to a change in only one of the parameters. Herein, we propose defect engineering in amorphous Ga2O3 by grading oxygen vacancies using an intermittent oxygen supply. XPS depth profile studies confirm gradation of vacancies, which may be accessed by applying a different bias, in resonance with electric field distribution simulations. Graded vacancy films show negligible persistent photoconductivity, a high PDCR of 3 × 103, a high UV–vis rejection ratio of 1.49 × 104, and a fast fall time of 85 ms as opposed to continuous supply films, which show either high photoresponse or fast speed (in seconds). This work provides a way to use graded oxygen vacancies as tool in defect engineering to offset the trade-off and achieve high photoresponse and fast response time in amorphous Ga2O3 films simultaneously.
{"title":"Vertically Graded Oxygen Vacancies in Amorphous Ga2O3 for Offsetting the Conventional Trade-Off between Photoresponse and Response Time in Solar-Blind Photodetectors","authors":"Damanpreet Kaur, Rohit Dahiya, Nadeem Ahmed and Mukesh Kumar*, ","doi":"10.1021/acsaelm.4c00759","DOIUrl":"10.1021/acsaelm.4c00759","url":null,"abstract":"<p >Recently, amorphous Ga<sub>2</sub>O<sub>3</sub>-based photodetectors are garnering interest for their relative ease-of-growth at room temperature and their virtuous use in flexible electronics. However, a major concern that remains is the huge trade-off between key performance parameters, viz., photoresponse and response time. Being replete with oxygen vacancies, acting as trap centers, devices usually boast a large photoresponse but at the cost of longer response time due to prolonged carrier recombination. Most of remedial measures to offset this trade-off include oxygen vacancy engineering but in a continuous manner, implying creating/deleting vacancies throughout the film thickness, leading to a change in only one of the parameters. Herein, we propose defect engineering in amorphous Ga<sub>2</sub>O<sub>3</sub> by grading oxygen vacancies using an intermittent oxygen supply. XPS depth profile studies confirm gradation of vacancies, which may be accessed by applying a different bias, in resonance with electric field distribution simulations. Graded vacancy films show negligible persistent photoconductivity, a high PDCR of 3 × 10<sup>3</sup>, a high UV–vis rejection ratio of 1.49 × 10<sup>4</sup>, and a fast fall time of 85 ms as opposed to continuous supply films, which show either high photoresponse or fast speed (in seconds). This work provides a way to use graded oxygen vacancies as tool in defect engineering to offset the trade-off and achieve high photoresponse and fast response time in amorphous Ga<sub>2</sub>O<sub>3</sub> films simultaneously.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141254334","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zhaoyong Guan*, Fangyu Zhang, Linhui Lv, Chao Jia, Weiyi Wang, Yanyan Jiang, Xingxing Li and Ya Su,
Two-dimensional (2D) intrinsic ferromagnetic (FM) materials play a crucial role in spintronics. Through a systematic research of the 2H-MoS2 bilayer (BL) with self-intercalation (SI) of Mo atom, we have discovered that SI can introduce a long-range magnetic order, as MoSI atoms lose electrons. The MoS2 BLs (MomSn) with self-intercalated Mo (MoSI) atoms show antiferromagnetic (AFM) order under a high concentration of MoSI atoms, where the direct exchange interaction dominates over the superexchange interaction. MomSn becomes half-metal (HM) with interlayer FM order after Mo’s self-intercalation, under lower MoSI atom concentrations, independent of the stacking orders. Mo9S16-AA exhibits HM with FM order, with a corresponding Curie temperature (Tc) of 35 K. MomSn-AA and AB stackings with a lower concentration of MoSI atoms transform into half semiconductors (HSCs). Moreover, the magnetic anisotropy energies (MAEs) of Mo9S16-AA and AB stackings are −0.080 and −1.06 meV/f.u., suggesting that the magnetic easy axis (EA) of MomSn tends to the [100] direction, regardless of the stacking orders. However, the MAEs of MomSn-AA and AB stackings differ due to variations in the hybridization interaction between Mo’s d orbitals. The formation energies of MomSn change with the chemical potential of S (μs) and the concentration of MoSI atoms. Furthermore, the formation energy (εf) monotonically increases as the concentration of MoSI monotonically increases. Additionally, MomSn with MoSI atoms could be synthesized under a higher chemical potential of Mo atom (μMo). The MomSn-AB stackings are always more stable than the AA stackings. Self-intercalated MomSn exhibits good dynamic and thermal stability at 300 and 600 K, respectively. These findings suggest a promising approach to introducing a modulated long-range FM order and electromagnetic properties into 2H-MoS2 and other transition metal dichalcogenides (TMDs).
二维(2D)本征铁磁(FM)材料在自旋电子学中发挥着至关重要的作用。通过对具有自掺杂(SI)Mo 原子的 2H-MoS2 双层(BL)的系统研究,我们发现随着 MoSI 原子失去电子,SI 可以引入长程磁序。具有自掺杂 Mo(MoSI)原子的 MoS2 BLs(MomSn)在高浓度 MoSI 原子的作用下显示出反铁磁性(AFM)秩序,其中直接交换相互作用在超交换相互作用中占主导地位。在较低的 MoSI 原子浓度下,MomSn 在 Mo 的自掺杂后成为半金属(HM),具有层间调频阶,与堆叠阶无关。Mo9S16-AA 显示出具有调频阶的 HM,相应的居里温度 (Tc) 为 35 K。在较低的 MoSI 原子浓度下,MomSn-AA 和 AB 叠层转变为半半导体(HSC)。此外,Mo9S16-AA 和 AB 堆叠体的磁各向异性能(MAEs)分别为-0.080 和-1.06 meV/f.u.,表明无论堆叠阶数如何,MomSn 的磁易轴(EA)都趋向于 [100] 方向。然而,由于 Mo 的 d 轨道之间杂化相互作用的变化,MomSn-AA 和 AB 堆叠的 MAE 有所不同。MomSn 的形成能随 S 的化学势(μs)和 MoSI 原子的浓度而变化。此外,形成能(εf)随着 MoSI 浓度的单调增加而单调增加。此外,在较高的 Mo 原子化学势(μMo)条件下,可以合成含有 MoSI 原子的 MomSn。MomSn-AB 堆积总是比 AA 堆积更稳定。自掺杂 MomSn 在 300 K 和 600 K 下分别表现出良好的动态稳定性和热稳定性。这些发现为在 2H-MoS2 和其他过渡金属二卤化物 (TMD) 中引入调制长程调频秩序和电磁特性提供了一种可行的方法。
{"title":"Tailing the Magnetoelectric Properties of 2H-MoS2 by Engineering Covalently Bonded Mo Self-intercalation: Ferromagnetic Materials","authors":"Zhaoyong Guan*, Fangyu Zhang, Linhui Lv, Chao Jia, Weiyi Wang, Yanyan Jiang, Xingxing Li and Ya Su, ","doi":"10.1021/acsaelm.4c00051","DOIUrl":"10.1021/acsaelm.4c00051","url":null,"abstract":"<p >Two-dimensional (2D) intrinsic ferromagnetic (FM) materials play a crucial role in spintronics. Through a systematic research of the 2H-MoS<sub>2</sub> bilayer (BL) with self-intercalation (SI) of Mo atom, we have discovered that SI can introduce a long-range magnetic order, as Mo<sub>SI</sub> atoms lose electrons. The MoS<sub>2</sub> BLs (Mo<i><sub>m</sub></i>S<i><sub>n</sub></i>) with self-intercalated Mo (Mo<sub>SI</sub>) atoms show antiferromagnetic (AFM) order under a high concentration of Mo<sub>SI</sub> atoms, where the direct exchange interaction dominates over the superexchange interaction. Mo<i><sub>m</sub></i>S<i><sub>n</sub></i> becomes half-metal (HM) with interlayer FM order after Mo’s self-intercalation, under lower Mo<sub>SI</sub> atom concentrations, independent of the stacking orders. Mo<sub>9</sub>S<sub>16</sub>-AA exhibits HM with FM order, with a corresponding Curie temperature (<i>T</i><sub>c</sub>) of 35 K. Mo<i><sub>m</sub></i>S<i><sub>n</sub></i>-AA and AB stackings with a lower concentration of Mo<sub>SI</sub> atoms transform into half semiconductors (HSCs). Moreover, the magnetic anisotropy energies (MAEs) of Mo<sub>9</sub>S<sub>16</sub>-AA and AB stackings are −0.080 and −1.06 meV/f.u., suggesting that the magnetic easy axis (EA) of Mo<i><sub>m</sub></i>S<i><sub>n</sub></i> tends to the [100] direction, regardless of the stacking orders. However, the MAEs of Mo<i><sub>m</sub></i>S<i><sub>n</sub></i>-AA and AB stackings differ due to variations in the hybridization interaction between Mo’s d orbitals. The formation energies of Mo<i><sub>m</sub></i>S<i><sub>n</sub></i> change with the chemical potential of S (μ<sub>s</sub>) and the concentration of Mo<sub>SI</sub> atoms. Furthermore, the formation energy (ε<sub>f</sub>) monotonically increases as the concentration of Mo<sub>SI</sub> monotonically increases. Additionally, Mo<i><sub>m</sub></i>S<i><sub>n</sub></i> with Mo<sub>SI</sub> atoms could be synthesized under a higher chemical potential of Mo atom (μ<sub>Mo</sub>). The Mo<i><sub>m</sub></i>S<i><sub>n</sub></i>-AB stackings are always more stable than the AA stackings. Self-intercalated Mo<i><sub>m</sub></i>S<i><sub>n</sub></i> exhibits good dynamic and thermal stability at 300 and 600 K, respectively. These findings suggest a promising approach to introducing a modulated long-range FM order and electromagnetic properties into 2H-MoS<sub>2</sub> and other transition metal dichalcogenides (TMDs).</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141189090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abdul Ghaffar*, Nihar Ranjan Mohapatra, Ryo Maezono and Kenta Hongo*,
Addressing contact resistance challenges at the interface between metals and transition-metal dichalcogenides (TMDs) remains a complex task due to the persistent Fermi level pinning (FLP) effect near the conduction band minima. Various methods have been explored to mitigate FLP by reducing the chemical interaction between metals and semiconductors. However, these approaches often lead to undesirable consequences, such as reduced adhesion and increased tunneling resistance, ultimately resulting in poor interface quality. A promising solution to overcome these limitations lies in the use of substitutionally doped semiconductor/metal interfaces. We conducted a thorough investigation using first-principles calculations, focusing on S-substituted WS2-metal interfaces involving commonly used metals such as Ag, Au, Cu, Pd, Pt, Sc, and Ti. Additionally, we explored the incorporation of nonmetallic dopants, including C, Cl, N, F, O, and P, into the WS2 surface. Our analysis revolved around several critical parameters, including adhesion strength, Schottky barrier height (SBH), tunnel barrier, charge transfer across the interface, and interface dipole formation. Our study demonstrated that substitutionally doped interfaces can undergo Fermi level depinning while maintaining an enhanced adhesion strength and lower tunneling barrier at the interface. This finding marks a departure from existing methods and offers a promising avenue for inducing p-type contact polarity and addressing contact resistance challenges in TMDs.
由于在导带极小值附近存在持续的费米级针销(FLP)效应,解决金属与过渡金属二掺杂化合物(TMDs)界面上的接触电阻问题仍然是一项复杂的任务。人们探索了各种方法,通过减少金属与半导体之间的化学作用来减轻费米级钉住效应。然而,这些方法往往会导致不良后果,如附着力降低和隧穿电阻增加,最终导致界面质量低下。要克服这些限制,一种很有前景的解决方案是使用替代掺杂的半导体/金属界面。我们利用第一原理计算进行了深入研究,重点关注 S 取代的 WS2-金属界面,涉及 Ag、Au、Cu、Pd、Pt、Sc 和 Ti 等常用金属。此外,我们还探讨了在 WS2 表面掺入非金属掺杂剂的问题,包括 C、Cl、N、F、O 和 P。我们的分析围绕几个关键参数展开,包括附着强度、肖特基势垒高度(SBH)、隧道势垒、跨界面电荷转移和界面偶极子形成。我们的研究表明,替代掺杂的界面在保持增强的粘附强度和较低的界面隧道势垒的同时,还能发生费米级去稀化。这一发现标志着与现有方法的不同,为在 TMD 中诱导 p 型接触极性和解决接触电阻难题提供了一条前景广阔的途径。
{"title":"Substitutional Doping Strategies for Fermi Level Depinning and Enhanced Interface Quality in WS2-Metal Contacts","authors":"Abdul Ghaffar*, Nihar Ranjan Mohapatra, Ryo Maezono and Kenta Hongo*, ","doi":"10.1021/acsaelm.4c00609","DOIUrl":"10.1021/acsaelm.4c00609","url":null,"abstract":"<p >Addressing contact resistance challenges at the interface between metals and transition-metal dichalcogenides (TMDs) remains a complex task due to the persistent Fermi level pinning (FLP) effect near the conduction band minima. Various methods have been explored to mitigate FLP by reducing the chemical interaction between metals and semiconductors. However, these approaches often lead to undesirable consequences, such as reduced adhesion and increased tunneling resistance, ultimately resulting in poor interface quality. A promising solution to overcome these limitations lies in the use of substitutionally doped semiconductor/metal interfaces. We conducted a thorough investigation using first-principles calculations, focusing on S-substituted WS<sub>2</sub>-metal interfaces involving commonly used metals such as Ag, Au, Cu, Pd, Pt, Sc, and Ti. Additionally, we explored the incorporation of nonmetallic dopants, including C, Cl, N, F, O, and P, into the WS<sub>2</sub> surface. Our analysis revolved around several critical parameters, including adhesion strength, Schottky barrier height (SBH), tunnel barrier, charge transfer across the interface, and interface dipole formation. Our study demonstrated that substitutionally doped interfaces can undergo Fermi level depinning while maintaining an enhanced adhesion strength and lower tunneling barrier at the interface. This finding marks a departure from existing methods and offers a promising avenue for inducing p-type contact polarity and addressing contact resistance challenges in TMDs.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-05-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsaelm.4c00609","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141197587","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ammar Al-Hamry*, Yang Pan, Mahfujur Rahaman, Oleksandr Selyshchev, Christoph Tegenkamp, Dietrich R. T. Zahn, Igor A. Pašti and Olfa Kanoun*,
Flexible temperature sensors are becoming increasingly important these days. In this work, we explore graphene oxide (GO)/poly(vinyl alcohol) (PVA) nanocomposites for potential application in temperature sensors. The influence of the mixing ratio of both materials, the reduction temperature, and passivation on the sensing performance has been investigated. Various spectroscopic techniques revealed the composite structure and atomic composition. These were complemented by semiempirical quantum chemical calculations to investigate rGO and PVA interaction. Scanning electron and atomic force microscopy measurements were carried out to evaluate dispersion and coated film quality. The temperature sensitivity has been evaluated for several composite materials with different compositions in the range from 10 to 80 °C. The results show that a linear temperature behavior can be realized based on rGO/PVA composites with temperature coefficients of resistance (TCR) larger than 1.8% K–1 and a fast response time of 0.3 s with minimal hysteresis. Furthermore, humidity influence has been investigated in the range from 10% to 80%, and a minor effect is shown. Therefore, we can conclude that rGO/PVA composites have a high potential for excellent passivation-free, humidity-independent, sensitive, and fast response temperature sensors for various applications. The GO reduction is tunable, and PVA improves the rGO/PVA sensor performance by increasing the tunneling effect and band gap energy, consequently improving temperature sensitivity. Additionally, PVA exhibits minimal water absorption, reducing the humidity sensitivity. rGO/PVA maintains its temperature sensitivity during and after several mechanical deformations.
{"title":"Toward Humidity-Independent Sensitive and Fast Response Temperature Sensors Based on Reduced Graphene Oxide/Poly(vinyl alcohol) Nanocomposites","authors":"Ammar Al-Hamry*, Yang Pan, Mahfujur Rahaman, Oleksandr Selyshchev, Christoph Tegenkamp, Dietrich R. T. Zahn, Igor A. Pašti and Olfa Kanoun*, ","doi":"10.1021/acsaelm.4c00729","DOIUrl":"10.1021/acsaelm.4c00729","url":null,"abstract":"<p >Flexible temperature sensors are becoming increasingly important these days. In this work, we explore graphene oxide (GO)/poly(vinyl alcohol) (PVA) nanocomposites for potential application in temperature sensors. The influence of the mixing ratio of both materials, the reduction temperature, and passivation on the sensing performance has been investigated. Various spectroscopic techniques revealed the composite structure and atomic composition. These were complemented by semiempirical quantum chemical calculations to investigate rGO and PVA interaction. Scanning electron and atomic force microscopy measurements were carried out to evaluate dispersion and coated film quality. The temperature sensitivity has been evaluated for several composite materials with different compositions in the range from 10 to 80 °C. The results show that a linear temperature behavior can be realized based on rGO/PVA composites with temperature coefficients of resistance (TCR) larger than 1.8% K<sup>–1</sup> and a fast response time of 0.3 s with minimal hysteresis. Furthermore, humidity influence has been investigated in the range from 10% to 80%, and a minor effect is shown. Therefore, we can conclude that rGO/PVA composites have a high potential for excellent passivation-free, humidity-independent, sensitive, and fast response temperature sensors for various applications. The GO reduction is tunable, and PVA improves the rGO/PVA sensor performance by increasing the tunneling effect and band gap energy, consequently improving temperature sensitivity. Additionally, PVA exhibits minimal water absorption, reducing the humidity sensitivity. rGO/PVA maintains its temperature sensitivity during and after several mechanical deformations.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-05-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsaelm.4c00729","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141197387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This study presents a straightforward approach for fabricating heterogeneous complementary FET (CFET) devices. The process flow commences with a SiGe/Ge/Si epitaxial multilayer structure grown on a SOI substrate. The source/drains for both stacked devices were straightforwardly performed through P and B implantations with precise depth control, respectively. The isolation of the top p-SiGe FET from the bottom n-Si FET was achieved by etching away the middle Ge sacrificial layer and subsequently filled with SiO2 dielectric material. The etching selectivity of Ge over Si and Si0.8Ge0.2 by utilizing a H2O2 solution was nearly infinite, resulting in a flawless structure with p-SiGe channels stacked over n-Si channels. Finally, a functional CFET inverter device composed of a top inversion mode (IM) SiGe nanosheet pFET and a bottom IM Si nanosheet nFET was demonstrated.
本研究提出了一种制造异质互补场效应晶体管 (CFET) 器件的直接方法。工艺流程首先是在 SOI 基底面上生长 SiGe/Ge/Si 外延多层结构。两个堆叠器件的源极/漏极分别通过精确控制深度的 P 和 B 植入直接完成。顶部 p-SiGe FET 与底部 n-Si FET 的隔离是通过蚀刻掉中间的 Ge 牺牲层,然后填充二氧化硅介电材料实现的。通过使用 H2O2 溶液,Ge 对 Si 和 Si0.8Ge0.2 的蚀刻选择性几乎为无限大,从而形成了 p-SiGe 沟道堆叠在 n-Si 沟道上的完美结构。最后,展示了一种由顶部反转模式(IM)硅锗纳米片 pFET 和底部 IM 硅纳米片 nFET 组成的功能 CFET 逆变器件。
{"title":"Fabrication of CFETs with Vertically Stacked p-SiGe/n-Si Channels by SiGe/Ge/Si Multilayer Epitaxy and Ge Selective Etching","authors":"Chun-Lin Chu, Szu-Hung Chen, Wei-Yuan Chang, Shu-Han Hsu, Guang-Li Luo* and Wen-Fa Wu, ","doi":"10.1021/acsaelm.4c00411","DOIUrl":"10.1021/acsaelm.4c00411","url":null,"abstract":"<p >This study presents a straightforward approach for fabricating heterogeneous complementary FET (CFET) devices. The process flow commences with a SiGe/Ge/Si epitaxial multilayer structure grown on a SOI substrate. The source/drains for both stacked devices were straightforwardly performed through P and B implantations with precise depth control, respectively. The isolation of the top p-SiGe FET from the bottom n-Si FET was achieved by etching away the middle Ge sacrificial layer and subsequently filled with SiO<sub>2</sub> dielectric material. The etching selectivity of Ge over Si and Si<sub>0.8</sub>Ge<sub>0.2</sub> by utilizing a H<sub>2</sub>O<sub>2</sub> solution was nearly infinite, resulting in a flawless structure with p-SiGe channels stacked over n-Si channels. Finally, a functional CFET inverter device composed of a top inversion mode (IM) SiGe nanosheet pFET and a bottom IM Si nanosheet nFET was demonstrated.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-05-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141189185","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Amorphous materials have great potential application in gas sensors due to their abundant active sites. However, it is still a challenge to regulate their sensing performance. In this work, we developed a synthesis method of amorphous bimetallic cobalt-based transition-metal oxides, which were prepared via two steps, namely, coprecipitation of bimetallic hydroxides and then annealing at elevating temperature. Sn, Mg, and Zn as the second metal were introduced to prepare amorphous CoSn–O, CoMg–O, and CoZn–O. They were further used to fabricate gas sensors. A sensing investigation revealed that the sensors present different sensing behaviors, in which the CoSn–O, CoMg–O, and CoZn–O sensors show selectivity to TEA, EtOH, and n-BuNH2, respectively. A sensor array based on these three types of sensors was constructed. The actual concentrations of the mixing gases of TEA, EtOH, and n-BuNH2 can be obtained by matrix calculation with an error value of less than 10%. Finally, the sensing processes were discussed, and the sensing mechanism can be attributed to the surface resistance control model. This research affords a convenient method to synthesize amorphous bimetallic oxides with regulated properties for sensing application.
{"title":"Amorphous Bimetallic Cobalt-Based Transition-Metal Oxides for Gas Sensing Application with Regulated Selectivity","authors":"Ruixiang Li, Xinyu Hu, Yufei Fang, Mingji Xu, Chunhua Luo, Hui Peng and Hechun Lin*, ","doi":"10.1021/acsaelm.4c00567","DOIUrl":"10.1021/acsaelm.4c00567","url":null,"abstract":"<p >Amorphous materials have great potential application in gas sensors due to their abundant active sites. However, it is still a challenge to regulate their sensing performance. In this work, we developed a synthesis method of amorphous bimetallic cobalt-based transition-metal oxides, which were prepared via two steps, namely, coprecipitation of bimetallic hydroxides and then annealing at elevating temperature. Sn, Mg, and Zn as the second metal were introduced to prepare amorphous CoSn–O, CoMg–O, and CoZn–O. They were further used to fabricate gas sensors. A sensing investigation revealed that the sensors present different sensing behaviors, in which the CoSn–O, CoMg–O, and CoZn–O sensors show selectivity to TEA, EtOH, and <i>n</i>-BuNH<sub>2</sub>, respectively. A sensor array based on these three types of sensors was constructed. The actual concentrations of the mixing gases of TEA, EtOH, and <i>n</i>-BuNH<sub>2</sub> can be obtained by matrix calculation with an error value of less than 10%. Finally, the sensing processes were discussed, and the sensing mechanism can be attributed to the surface resistance control model. This research affords a convenient method to synthesize amorphous bimetallic oxides with regulated properties for sensing application.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-05-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141197519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thi Muoi Vo, Thi My Huyen Nguyen and Chung Wung Bark*,
Reduced graphene oxide (RGO)-modified copper(I) oxide (Cu2O–RGO) is a high-performance composite and a low-cost photocatalyst for methylene blue (MB) degradation. To evaluate the effect of RGO on the photocatalytic performances of Cu2O–x% RGO composites (where x is the loading amount of RGO) in MB degradation, Cu2O was separately loaded with 10, 20, and 30 wt % RGO via a precipitation method. We synthesized a Cu2O–30% RGO composite with a superior surface area (SBET) of 43.701 m2/g, which provided a large active area for MB photodegradation. Cu2O–30% RGO composite was significantly more effective as a catalyst than bare Cu2O for MB photodegradation, as it degraded 99.2% MB in only 30 min under visible-light irradiation without oxidation agents as compared to the case of bare Cu2O (17.5% MB degradation). Notably, the Cu2O–30% RGO composite afforded the largest rate constant of 0.10193 L/min under visible-light irradiation, which was twice that of the Cu2O–30% RGO composite without irradiation (0.0561 L/min). Electron (e–) capture efficacy of RGO in suppressing electron (e–)–hole (h+) pairs recombination was demonstrated, and a plausible mechanism was proposed to rationalize the high photocatalytic efficiency of Cu2O–30% RGO. The RGO in Cu2O–RGO composites played crucial roles, narrowing the band gap, extending the lifetime, and substantially enhancing the photocatalytic activity of Cu2O. Durability and reusability of the catalysts were also examined, and MB degradation by the Cu2O–30% RGO composite was maintained at 95% in the second decolorization cycle followed by a decline to 87% in the fifth decolorization cycle, rendering the Cu2O–30% RGO composite appropriate for use in real-time environmental applications. This study provides an effective photocatalyst for the degradation of organic pollutants in wastewater and suggests its potential for future applications in related fields. Furthermore, herein, the role of RGO as an electron capturer in Cu2O–RGO composites for MB degradation under visible-light irradiation is comprehensively analyzed for the first time.
{"title":"Reduced Graphene Oxide-Supported Copper(I) Oxide Composites for the Degradation of Methylene Blue: Exploring the Capacity of RGO as an Electron Capturer for Achieving Highly Stable Photocatalytic Activity","authors":"Thi Muoi Vo, Thi My Huyen Nguyen and Chung Wung Bark*, ","doi":"10.1021/acsaelm.4c00479","DOIUrl":"10.1021/acsaelm.4c00479","url":null,"abstract":"<p >Reduced graphene oxide (RGO)-modified copper(I) oxide (Cu<sub>2</sub>O–RGO) is a high-performance composite and a low-cost photocatalyst for methylene blue (MB) degradation. To evaluate the effect of RGO on the photocatalytic performances of Cu<sub>2</sub>O–<i>x</i>% RGO composites (where <i>x</i> is the loading amount of RGO) in MB degradation, Cu<sub>2</sub>O was separately loaded with 10, 20, and 30 wt % RGO via a precipitation method. We synthesized a Cu<sub>2</sub>O–30% RGO composite with a superior surface area (<i>S</i><sub>BET</sub>) of 43.701 m<sup>2</sup>/g, which provided a large active area for MB photodegradation. Cu<sub>2</sub>O–30% RGO composite was significantly more effective as a catalyst than bare Cu<sub>2</sub>O for MB photodegradation, as it degraded 99.2% MB in only 30 min under visible-light irradiation without oxidation agents as compared to the case of bare Cu<sub>2</sub>O (17.5% MB degradation). Notably, the Cu<sub>2</sub>O–30% RGO composite afforded the largest rate constant of 0.10193 L/min under visible-light irradiation, which was twice that of the Cu<sub>2</sub>O–30% RGO composite without irradiation (0.0561 L/min). Electron (e<sup>–</sup>) capture efficacy of RGO in suppressing electron (e<sup>–</sup>)–hole (h<sup>+</sup>) pairs recombination was demonstrated, and a plausible mechanism was proposed to rationalize the high photocatalytic efficiency of Cu<sub>2</sub>O–30% RGO. The RGO in Cu<sub>2</sub>O–RGO composites played crucial roles, narrowing the band gap, extending the lifetime, and substantially enhancing the photocatalytic activity of Cu<sub>2</sub>O. Durability and reusability of the catalysts were also examined, and MB degradation by the Cu<sub>2</sub>O–30% RGO composite was maintained at 95% in the second decolorization cycle followed by a decline to 87% in the fifth decolorization cycle, rendering the Cu<sub>2</sub>O–30% RGO composite appropriate for use in real-time environmental applications. This study provides an effective photocatalyst for the degradation of organic pollutants in wastewater and suggests its potential for future applications in related fields. Furthermore, herein, the role of RGO as an electron capturer in Cu<sub>2</sub>O–RGO composites for MB degradation under visible-light irradiation is comprehensively analyzed for the first time.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-05-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141188739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thermoelectric (TE) generators, based on thermoelectric materials, can efficiently convert thermal energy into electricity via the Seebeck effect, showing great promise for waste-heat recovery research. Recent advancements in TE composites of conductive polymer/carbon nanotubes have been significant. This study evaluates the thermoelectric properties of organic TE films and generators by combining naphthalene diimide (NDI) polymers with single-walled carbon nanotubes (SWCNTs). The results reveal that P(NDI-HTO)/SWCNT composite films containing free radicals and alkyl side chains have enhanced thermoelectric properties compared to P(NDI-HT)/SWCNT composite films without free radicals and P(NDI-TP)/SWCNT composite films containing polar side chains. Among them, maximum power factors reach 264.1 ± 21.9 μW m–1 K–2 for p-type and 72.2 ± 1.5 μW m–1 K–2 for n-type composite films, marking increases of 113% and 32%, respectively, over pristine SWCNT films. Furthermore, a flexible thermoelectric generator based on P(NDI-HTO)/SWCNT, with five pairs of p–n junctions, achieves an output voltage of 28.8 mV and an output power of 1.2 μW at a 60 K temperature differential. These improvements in thermoelectric properties are primarily due to the effective modulation of molecular energy levels, enhancing the charge transfer process between NDI polymers and SWCNTs.
{"title":"Flexible Organic Thermoelectric Composites and Devices with Enhanced Performances through Fine-Tuning of Molecular Energy Levels","authors":"Dunxiao Zheng, Jingyang Zhang, Shiyuan Sun, Jianlun Liang, Yu Li, Jiye Luo* and Danqing Liu*, ","doi":"10.1021/acsaelm.4c00796","DOIUrl":"10.1021/acsaelm.4c00796","url":null,"abstract":"<p >Thermoelectric (TE) generators, based on thermoelectric materials, can efficiently convert thermal energy into electricity via the Seebeck effect, showing great promise for waste-heat recovery research. Recent advancements in TE composites of conductive polymer/carbon nanotubes have been significant. This study evaluates the thermoelectric properties of organic TE films and generators by combining naphthalene diimide (NDI) polymers with single-walled carbon nanotubes (SWCNTs). The results reveal that P(NDI-HTO)/SWCNT composite films containing free radicals and alkyl side chains have enhanced thermoelectric properties compared to P(NDI-HT)/SWCNT composite films without free radicals and P(NDI-TP)/SWCNT composite films containing polar side chains. Among them, maximum power factors reach 264.1 ± 21.9 μW m<sup>–1</sup> K<sup>–2</sup> for p-type and 72.2 ± 1.5 μW m<sup>–1</sup> K<sup>–2</sup> for n-type composite films, marking increases of 113% and 32%, respectively, over pristine SWCNT films. Furthermore, a flexible thermoelectric generator based on P(NDI-HTO)/SWCNT, with five pairs of p–n junctions, achieves an output voltage of 28.8 mV and an output power of 1.2 μW at a 60 K temperature differential. These improvements in thermoelectric properties are primarily due to the effective modulation of molecular energy levels, enhancing the charge transfer process between NDI polymers and SWCNTs.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-05-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141197435","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This review presents a comparative analysis of the analog switching performance of oxide- and two-dimensional (2D)-material-based memristors, focusing on their application in neuromorphic computing systems. This study examines various performance metrics such as endurance, energy consumption, and switching characteristics to elucidate how these parameters are influenced by the unique characteristics of the respective materials. By examining both oxide- and 2D-material-based memristors in array configurations, this review provides insights into their suitability for neuromorphic computing, highlighting advancements, challenges, and future research directions in memristor technology.
{"title":"From Oxides to 2D Materials: Advancing Memristor Technologies for Energy-Efficient Neuromorphic Computing","authors":"Moon-Seok Kim, and , Sungho Kim*, ","doi":"10.1021/acsaelm.4c00428","DOIUrl":"10.1021/acsaelm.4c00428","url":null,"abstract":"<p >This review presents a comparative analysis of the analog switching performance of oxide- and two-dimensional (2D)-material-based memristors, focusing on their application in neuromorphic computing systems. This study examines various performance metrics such as endurance, energy consumption, and switching characteristics to elucidate how these parameters are influenced by the unique characteristics of the respective materials. By examining both oxide- and 2D-material-based memristors in array configurations, this review provides insights into their suitability for neuromorphic computing, highlighting advancements, challenges, and future research directions in memristor technology.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":null,"pages":null},"PeriodicalIF":4.3,"publicationDate":"2024-05-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141197380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}