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Photospectral Data Obtaining with the Unmanned Aerial Spectrometry Vehicle 利用无人航空光谱飞行器获取光光谱数据
IF 0.4 Pub Date : 2023-04-07 DOI: 10.21122/2220-9506-2023-14-1-7-17
Lamaka A.A A.N. Sevchenko, A. Lamaka, A. V. Gutarau, N. G. Shcherbakou, P. V. Ivuts, A. N. Sevchenko
Study of the Earth’s surface objects reflectance characteristics with unmanned aerial vehicles is one of the most actual remote sensing trends. Aim of this work was to develop a method for obtaining of photospectral data using unmanned aerial spectrometry vehicle.An adaptation of the cameras spatial resolution evaluating technique based on a specialized target photographic fixation was proposed. A method for synchronizing of the camera and spectrometer of the videospectral device was also proposed. It was based on an experiment with spectra and screen images recording. Different colors were sequentially displayed on the screen. The percentage contribution of each of colors to the “mixed” spectra was calculated. So the out-of-sync time estimation became possible. In addition the work proposed the method for combining images and spectra with their merging into photospectral images. The method allows to consider the aircraft displacement when linking the spectrometer field of view to the RGB image. The way for photospectral images combining based on the images key points detectors was also proposed.Spatial resolutions for 3 aerial vehicle cameras were obtained. The study showed that the spatial resolution decrease of Zenmuse H20T caused by the device carrier movement with a speed of up to 5 m/s can be ignored. The videospectral device camera and spectrometer out-of-sync time was evaluated. An automatic merging of a set of images using key points detection was made. The spectrometry areas were linked to the panoramic image. The reflectance coefficients were obtained for each of the areas in the range of 350–900 nm. The areas to image linking accuracy was 84.9 ± 11.6 %.A discrepancy between the angular spatial resolution values got experimentally and theoretically was revealed as a result of the cameras spatial resolution evaluating. This indicates the importance of the imaging equipment spatial resolution experimental evaluation. The videospectral device spectrometer and observation camera out-of-sync time evaluation made it possible to correct the data recording time. This led to the timing error standard deviation reduction from 142 ms to 15 ms. The way for the unmanned aerial spectrometry vehicle data obtaining in a photospectral representation was developed. The proposed methods and techniques can be used in similar unmanned systems.
利用无人机研究地球表面物体的反射率特征是目前遥感研究最现实的趋势之一。本文的目的是开发一种利用无人航空光谱飞行器获取光光谱数据的方法。提出了一种基于特定目标摄影固定的自适应相机空间分辨率评价技术。提出了一种视谱仪摄像机与光谱仪同步的方法。它是基于光谱和屏幕图像记录的实验。不同的颜色依次显示在屏幕上。计算了每种颜色对“混合”光谱的百分比贡献。所以不同步的时间估计成为可能。此外,本文还提出了将图像与光谱相结合并合并成光光谱图像的方法。该方法允许在将光谱仪视场与RGB图像连接时考虑飞机位移。提出了基于图像关键点检测器的光光谱图像组合方法。获得了3个机载相机的空间分辨率。研究表明,在高达5 m/s的移动速度下,Zenmuse H20T的空间分辨率下降可以忽略不计。对视谱仪摄像机与光谱仪的不同步时间进行了评价。利用关键点检测技术实现了一组图像的自动合并。光谱区域与全景图像相关联。在350 ~ 900 nm范围内得到了每个区域的反射率系数。区域对图像的连接精度为84.9±11.6%。通过对摄像机的空间分辨率进行评估,发现实验得到的角空间分辨率值与理论得到的角空间分辨率值存在差异。这说明了成像设备空间分辨率实验评价的重要性。视谱仪光谱仪与观测相机的不同步时间评定使数据记录时间的校正成为可能。这导致计时误差标准偏差从142毫秒减少到15毫秒。提出了一种以光光谱形式获取无人机数据的方法。所提出的方法和技术可用于类似的无人系统。
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引用次数: 0
Intelligent Sensor for Measurement Systems with Sinusoidal Excitation Response 用于正弦激励响应测量系统的智能传感器
IF 0.4 Pub Date : 2023-04-07 DOI: 10.21122/2220-9506-2023-14-1-18-26
U. A. Mikitsevich, A. Svistun, A. V. Samarina, K. Pantsialeyeu, A. Zharin
Measuring devices and systems containing sensors that require sinusoidal excitation are widely used in information and measurement technology both in production conditions and in research practice. Examples include various types of metal detectors, eddy current flaw detectors, analyzers of liquid media, electrometers with a dynamic capacitor, etc. The aim of the work was to develop the optimal architecture and algorithms for the operation of intelligent sensors intended for use in measuring systems operating according to the sinusoidal excitation – response scheme.This paper describes the approach proposed by the authors to the construction of intelligent sensors based on modern microcontrollers, the distinctive feature of which is the continuous generation of sinusoidal excitation and reading responses in the background, as well as setting the readiness flags for data processing in the main process of the microprocessor, which ensures uninterrupted execution of background processes, the main of which is the generation of a sinusoidal excitatory action.This approach has been tested in the development of charge-sensitive surface mapping systems, such as the Kelvin probe based on a vibrating capacitor, and the surface photo voltage probe for the case of semiconductors.
在生产条件和研究实践中,包含需要正弦激励的传感器的测量装置和系统广泛应用于信息和测量技术中。例子包括各种类型的金属探测器、涡流探伤仪、液体介质分析仪、带有动态电容的静电计等。这项工作的目的是开发智能传感器的最佳结构和算法,用于根据正弦激励响应方案运行的测量系统。本文介绍了作者提出的基于现代微控制器的智能传感器的构建方法,其特点是在后台连续产生正弦激励和读取响应,并在微处理器主进程中设置数据处理的就绪标志,从而保证后台进程的不间断执行,其中主要是正弦激励动作的产生。这种方法已经在电荷敏感表面测绘系统的开发中得到了测试,例如基于振动电容器的开尔文探头,以及用于半导体的表面光电电压探头。
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引用次数: 1
Charge-Sensitive Technique for Deformation Processes’ Study 变形过程的电荷敏感技术研究
IF 0.4 Pub Date : 2022-12-22 DOI: 10.21122/2220-9506-2022-13-4-291-301
K. Pantsialeyeu, U. A. Mikitsevich, A. Svistun, R. Vorobey, O. Gusev, A. Zharin
Surface charge can be used as an information parameter about the change in the state of the material under the action of mechanical stresses. The aim of the work was to develop methods for studying deformation processes in metallic and polymeric materials using a charge-sensitive method.Experimental studies of deformation processes under tensile, compressive and impact loads were carried out on samples of various materials: aluminum alloy of AMg2 grade, steel of grade 08PS, high-pressure polyethylene of grade 12203-250 and samples of composite materials based on it, F4 polytetrafluoroethylene. As a research method, the analysis of changes in the relative values of the surface electron work function in the case of metals and the surface electrostatic potential in the case of polymers and composite materials is used. A scanning modification of a charge-sensitive probe is used as a measuring instrument.The results of experimental studies of materials in a stress-strain state demonstrate the high efficiency of the proposed method. The research methodology makes it possible to detect local changes in the surface potential of the material in the area of deformations, which are not detected on a macroscopic scale using standard methods. The results obtained can serve as a basis for the development of new methods and techniques for studying the mechanical properties of both metals and dielectric materials. 
表面电荷可以作为材料在机械应力作用下状态变化的信息参数。这项工作的目的是开发使用电荷敏感方法研究金属和聚合物材料变形过程的方法。对AMg2级铝合金、08PS级钢、12203-250级高压聚乙烯及其复合材料F4聚四氟乙烯样品进行了拉伸、压缩和冲击载荷作用下的变形过程实验研究。作为一种研究方法,分析了金属的表面电子功函数和聚合物和复合材料的表面静电势的相对值的变化。一种扫描改造的电荷敏感探头被用作测量仪器。对处于应力-应变状态的材料进行了实验研究,结果表明了该方法的有效性。该研究方法可以检测变形区域材料表面电位的局部变化,这是使用标准方法无法在宏观尺度上检测到的。所得结果可作为研究金属和介电材料力学性能的新方法和新技术的发展的基础。
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引用次数: 1
Concept of Vector Multicomponent Physical Quantities, Models and Measurement Method 矢量多分量物理量的概念、模型和测量方法
IF 0.4 Pub Date : 2022-12-22 DOI: 10.21122/2220-9506-2022-13-4-281-290
V. Nesterov
The paper presents a new view of vector physical quantities as multicomponent quantities. Each of the components of the mentioned multicomponent quantities can carry important and even unique information about the sources and causes of their occurrence. Looking at the vector quantity as the multicomponent quantity led to the need to form the corresponding conception. There are three positions of this conception in this paper, which are formulated as follows: vector multicomponent physical quantities are considered as functions of the set of their constituent information components; the communication functions of the specified information components in the models of multicomponent physical quantities are determined by the laws of vector algebra; information models of vector multicomponent physical quantities allow an alternative representation of information components depending on the selected coordinate system.The mathematical model of the vector multicomponent physical quantity is presented. This model is fundamental and directly follows from the positions of the conception formulated above. This model can be applied to describe multicomponent displacements and deformations that both simple and complex objects undergo. An example of the complex object can be the manipulator of the universal industrial robot. The space for modeling multicomponent displacements of simple objects was shown in the paper. Information models of vector multicomponent physical quantities allow one to alternatively represent informative components. And the task of constructing such models is complex and ambiguous. Therefore, the formal apparatus for the synthesis of such models, which is based on certain rules and conventions, was proposed in the paper. The theoretical foundations of the method of optical measurements of informative components of multicomponent displacements and deformations of simple objects, which involves the use of multidimensional test objects, are presented.
本文提出了向量物理量作为多分量量的新观点。上述多组分量的每个组分都可以携带有关其发生的来源和原因的重要甚至独特的信息。将矢量视为多分量量导致需要形成相应的概念。本文对这一概念有三种立场,表述如下:将矢量多分量物理量视为其组成信息分量集合的函数;多分量物理量模型中指定信息分量的通信功能由向量代数定律决定;矢量多分量物理量的信息模型允许根据所选坐标系对信息分量进行替代表示。提出了矢量多分量物理量的数学模型。这个模型是基本的,直接遵循上述概念的立场。该模型可用于描述简单和复杂物体所经历的多分量位移和变形。通用工业机器人的机械手就是复杂物体的一个例子。给出了简单物体多分量位移建模的空间。矢量多分量物理量的信息模型允许人们交替地表示信息分量。而构建这种模型的任务既复杂又模棱两可。因此,本文提出了一种基于一定规则和惯例的模型综合形式装置。介绍了利用多维测试对象进行简单物体多分量位移和变形信息分量光学测量的理论基础。
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引用次数: 0
Assessment of Electrical Machines’ State Based on Mathematical Modeling of Defect Formation in Windings 基于绕组缺陷形成数学模型的电机状态评估
IF 0.4 Pub Date : 2022-12-22 DOI: 10.21122/2220-9506-2022-13-4-302-313
A. V. Isaev, U. V. Suchodolov, D. V. Balakhonov
The highest quality and timely diagnostics of windings’ state of various types of electrical machines including of asynchronous motors’ windings is an impoitant task. Among the existing diagnostic methods currently the most promising are those ones based on methods for analyzing resonance processes occurring in electrical machines. The aim of the article was to assess the possibility of use resonant processes occurring in electrical machines for qualitative diagnostics of their windings state using the asynchronous motors example, to build mathematical models that allow describing defect formation in windings and to analyze the deviation of mathematical models relative to the results obtained.Analysis of the influence of the level of interturn resistances, the number of closed turns and the location of closed turns in sections on the phase-frequency characteristics of asynchronous motors windings of various classes has been carried out. Mathematical models of the phase-frequency characteristics are obtained, coefficients of polynomials are determined and the relative discrepancy between these mathematical dependences relative to the experimental data is estimated depending on the considered parameters characterizing defects in the coils’ windings of electrical machines.Obtained mathematical models and coefficients for them can serve as the basis for construction of automated control and diagnostic systems for checking of the windings state of electrical machines including assessing the residual life of their work.
对包括异步电动机在内的各类电机的绕组状态进行高质量和及时的诊断是一项重要的任务。在现有的诊断方法中,目前最有前途的是那些基于分析电机中发生的共振过程的方法。本文的目的是利用异步电动机为例,评估使用电机中发生的谐振过程定性诊断其绕组状态的可能性,建立允许描述绕组中缺陷形成的数学模型,并分析数学模型相对于所获得的结果的偏差。分析了匝间电阻的高低、闭合匝数和闭合匝段的位置对各类异步电动机绕组相频特性的影响。得到了相频特性的数学模型,确定了多项式系数,并根据表征电机线圈绕组缺陷的所考虑的参数,估计了这些数学依赖关系与实验数据之间的相对差异。所获得的数学模型和系数可作为构建自动控制和诊断系统的基础,用于检查电机的绕组状态,包括评估其工作的剩余寿命。
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引用次数: 0
Monte Carlo Simulation of Flash Memory Elements’ Electrophysical Parameters 闪存元件电物理参数的蒙特卡罗模拟
IF 0.4 Pub Date : 2022-12-22 DOI: 10.21122/2220-9506-2022-13-4-276-280
O. Zhevnyak, V. Borzdov, A. Borzdov, A. N. Petlitsky
Operation of modern flash memory elements is based on electron transport processes in the channel of silicon MOSFETs with floating gate. The aim of this work was calculation of electron mobility and study of the influence of phonon and ionized impurity scattering mechanisms on the mobility, as well as calculation of parasitic tunneling current and channel current in the conductive channel of flash memory element. Numerical simulation during the design stage of flash memory element allows working out guidelines for optimization of device parameters defining its performance and reliability.In the work such electrophysical parameters, characterizing electron transport, as mobility and average electron energy, as well as tunneling current and current in the channel of the flash memory element are studied via the numerical simulation by means of Monte Carlo method. Influence of phonon and ionized impurity scattering processes on electron mobility in the channel has been analyzed. It is shown that in the vicinity of drain region a sufficient decrease of electron mobility defined by phonon scattering processes occurs and the growth of parasitic tunneling current is observed which have a negative influence on device characteristics.The developed simulation program may be used in computer-aided design of flash memory elements for the purpose of their structure optimization and improvement of their electrical characteristics.
现代快闪存储元件的工作原理是基于浮栅硅mosfet沟道中的电子传递过程。本工作的目的是计算电子迁移率,研究声子和电离杂质散射机制对迁移率的影响,以及计算闪存元件导电通道中的寄生隧道电流和通道电流。在闪存元件的设计阶段进行数值模拟,为器件参数的优化制定指导方针,确定其性能和可靠性。本文采用蒙特卡罗方法对表征电子传递的电物理参数迁移率、平均电子能、隧道电流和闪速存储器元件通道内的电流进行了数值模拟研究。分析了声子和电离杂质散射过程对通道中电子迁移率的影响。结果表明,在漏极区附近,由声子散射过程定义的电子迁移率发生了充分的下降,并且观察到寄生隧道电流的增长,这对器件特性有负面影响。所开发的仿真程序可用于闪存元件的计算机辅助设计,以优化其结构和改善其电学特性。
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引用次数: 0
Possibilities of Using of Surface and Subsurface Waves’ Amplitude-Angle Characteristics for Control of Materials with Surface-Hardened Inhomogeneous Layer 利用表面波和次表面波幅角特性控制表面硬化非均匀层材料的可能性
IF 0.4 Pub Date : 2022-12-21 DOI: 10.21122/2220-9506-2022-13-4-263-275
A. Baev, M. Asadchaya, A. Mayorov, O. Sergeeva, N. V. Delenkovsky
Improving the efficiency of ultrasonic control of hardened surface layers of metal products with a heterogeneous structure obtained using different technologies is a pressing problem of industrial production. The purpose of this work was to investigate the possibilities of measuring the depth of the surface inhomogeneous layer of steel objects on the basis of the use of amplitude and amplitude-angle characteristics of surface and subsurface transverse waves.The analysis of ultrasonic methods of control of physical and mechanical properties of metals by using surface and subsurface waves and experimentally investigated amplitude-angular characteristics of surface waves, the maximum angle of which increases by 3° at change of dimensionless layer depth hλ from zero to0.82. For the first time, the ratio of normalized amplitudes of surface waves taken at certain angles on theamplitude-angle characteristic curve obtained in the echo mode was proposed to be used as correlating parameters with the depth of the hardened layer. As a result of this research, the possibility of using a phased array transducers to solve the above problems.The effect of the hardened layer depth varying from zero to five in the working frequency range of 1.8– 10 MHz on the peculiarities of the refraction effect (including interference) and dependence of the subsurface wave amplitude on the acoustic base has been studied, making it possible to establish conditions that provide for the determination of the hardened layer depth.Circuit solutions have been offered in order to increase the efficiency of control of properties of the surface layers of metal articles on the basis of utilization of small-aperture transducers and ultrasonic reflectors making it possible to form fields of surface waves of different directional pattern. 
提高采用不同工艺获得的异质结构金属制品表面硬化层的超声控制效率是工业生产中迫切需要解决的问题。这项工作的目的是研究在利用表面和次表面横波的振幅和振幅角特性的基础上测量钢物体表面非均匀层深度的可能性。分析了利用表面波和次表面波控制金属物理力学性能的超声方法,并实验研究了表面波的幅角特性,当无量纲层深hλ从0到0.82变化时,表面波的最大角度增加了3°。首次提出在回波模式下获得的幅角特征曲线上,以一定角度的面波归一化幅值之比作为硬化层深度的相关参数。由于本研究的结果,有可能采用相控阵换能器来解决上述问题。研究了在1.8 - 10 MHz工作频率范围内,硬化层深度从0到5变化对折射效应特性(包括干涉)和次表面波振幅对声学基的依赖性的影响,从而有可能建立确定硬化层深度的条件。利用小孔径换能器和超声波反射器,可以形成不同方向图案的表面波场,从而提高对金属制品表面层性能的控制效率。
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引用次数: 1
High-Frequency Capacitor with Working Substance "Insulator-Undoped Silicon-Insulator" 工作物质为“绝缘子-未掺杂硅绝缘子”的高频电容器
IF 0.4 Pub Date : 2022-12-21 DOI: 10.21122/2220-9506-2022-13-4-247-255
N. Poklonski, I. I. Anikeev, S. A. Vyrko
The study of the parameters of capacitors with various working substances is of interest for the design and creation of electronic elements, in particular for the development of high-frequency phase-shifting circuits.The purpose of the work is to calculate the high-frequency capacitance of a capacitor with the working substance "insulator-undoped silicon-insulator" at different applied to the capacitor direct current (DC) voltages, measuring signal frequencies and temperatures.A model of such the capacitor is proposed, in which 30 µm thick layer of undoped (intrinsic) crystalline silicon (i-Si) is separated from each of the capacitor electrodes by 1 µm thick insulator layer (silicon dioxide).The dependences of the capacitor capacitance on the DC electrical voltage U on metal electrodes at zero frequency and at the measuring signal frequency of 1 MHz at absolute temperatures T = 300 and 400 K are calculated. It is shown that the real part of the capacitor capacitance increases monotonically, while the imaginary part is negative and non-monotonically depends on U at the temperature T = 300 K. An increase in the real part of the capacitor capacitance up to the geometric capacitance of oxide layers with increasing temperature is due to a decrease in the electrical resistance of i-Si layer. As a result, with an increase in temperature up to 400 K, the real and imaginary parts of the capacitance take constant values independent of U. The capacitance of i-Si layer with an increase in both temperature T and voltage U is shunted by the electrical conductivity of this layer. The phase shift is determined for a sinusoidal electrical signal with a frequency of 0.3, 1, 10, 30, 100, and 300 MHz applied to the capacitor at temperatures 300 and 400 K.
研究具有各种工作物质的电容器的参数对电子元件的设计和制造,特别是对高频移相电路的开发具有重要意义。本工作的目的是用工作物质“绝缘子-未掺杂硅-绝缘子”计算不同施加于电容器直流(DC)电压下的高频电容,测量信号频率和温度。提出了这种电容器的模型,其中30µm厚的未掺杂(本征)晶体硅(i-Si)层与电容器的每个电极隔有1µm厚的绝缘层(二氧化硅)。计算了在绝对温度T = 300和400k时,零频率和测量信号频率为1mhz时,电容容量对金属电极上直流电压U的依赖关系。结果表明,在温度T = 300 K时,电容器电容的实部随U的变化呈单调递增,虚部随U的变化呈非单调递增。随着温度的升高,电容的实部电容增加到氧化层的几何电容,这是由于i-Si层的电阻降低所致。因此,当温度升高到400k时,电容的实部和虚部取与U无关的恒定值。温度T和电压U同时升高时,i-Si层的电容被该层的电导率分流。对于频率为0.3、1、10、30、100和300 MHz的正弦电信号,在温度为300和400 K时应用于电容器,确定相移。
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引用次数: 0
Domain Structure Formation in Designing of the Opened Informative Measuring Systems 开放式信息测量系统设计中的领域结构形成
IF 0.4 Pub Date : 2022-12-21 DOI: 10.21122/2220-9506-2022-13-4-256-262
M. A. Knyazev
The opened systems possess an increasing significance and possibilities of applying in designing of measuring devices. Now an essentially nonlinear models are used for such systems. The perturbation approach is not enough for these purposes. Models of new types have solutions in a form of soliton or kink and similar objects. The equation of Fisher–Kolmogorov–Petrovskii–Piskunov is one of such equations. This equation is used for description of convection-reaction-diffusion processes. Such processes are used for studying of a self-organisation and formation of a structure in non-equilibrium opened systems. The aim of this work was to construct of a new solution for the modified equation of Fisher–Kolmogorov– Petrovskii–Piskunov in which a space inhomogeneity is accounted.To solve this problem the direct Hirota method for nonlinear partial differential equation is applied.Some modifications into this method were introduced.The new topologically non-trivial solution of the modified Fisher–Kolmogorov–Petrovskii–Piskunov equation is constructed explicitly. This solution has a kink-like form. Some arguments on the stability of such solution are considered.A possibility of domain structure formation in the systems which describe by the Fisher–Kolmogorov– Petrovskii–Piskunov equation is demonstrated. 
开放系统在测量装置设计中具有越来越重要的意义和应用的可能性。现在一个本质上的非线性模型被用于这样的系统。对于这些目的,摄动方法是不够的。新型模型的解以孤子或扭结或类似物体的形式存在。Fisher-Kolmogorov-Petrovskii-Piskunov方程就是其中之一。该方程用于描述对流-反应-扩散过程。这种过程用于研究非平衡开放系统中的自组织和结构的形成。本文的目的是为考虑空间非齐次性的修正方程Fisher-Kolmogorov - Petrovskii-Piskunov构造一个新的解。为了解决这一问题,采用了非线性偏微分方程的直接Hirota法。介绍了对该方法的一些改进。明确构造了改进的Fisher-Kolmogorov-Petrovskii-Piskunov方程的新的拓扑非平凡解。这个解有一个类似扭结的形式。对该解的稳定性进行了讨论。证明了用Fisher-Kolmogorov - Petrovskii-Piskunov方程描述的系统形成域结构的可能性。
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引用次数: 0
Spectral Ellipsometry as a Method of Investigation of Influence of Rapid Thermal Processing of Silicon Wafers on their Optical Characteristics 光谱椭偏法研究硅片快速热加工对其光学特性的影响
IF 0.4 Pub Date : 2022-10-24 DOI: 10.21122/2220-9506-2022-13-3-199-207
V. Solodukha, U. A. Pilipenko, A. Omelchenko, D. V. Shestovski
One of the possible ways of improvement of the surface properties of silicon is the solid phase recrystallization of the surface silicon layer after the chemical-mechanical polishing with application of the rapid thermal treatment with the pulses of second duration. The purpose of the given paper is investigation of influence of the rapid thermal treatment of the initial silicon wafers of the various doping level and reticular density on their optical characteristics by means of the spectral ellipsometry method.The investigation results are presented by means of the spectral ellipsometry method of the rapid thermal processing influence on the initial silicon wafers (KDB12 orientation <100>, KDB10 orientation <111> and KDB0.005 orientation <100>) of the various level of doping and reticular density influence on their optical characteristics: refraction and absorption ratios. Influence was confirmed of the silicon reticular density on its optical characteristics before and after the rapid thermal processing. It was shown, that reduction of the refraction and absorption ratios in the center of the Brillouin zone for the silicon samples with the high Boron concentration after the rapid thermal processing as compared with the low doped silicon. In the area of the maximum absorption peak, corresponding to the energy of the electron exit from the silicon surface (4.34 eV) the refraction indicator of the high doped silicon becomes higher, than of the low doped silicon, which is determined by the high concentration of the vacant charge carriers on the silicon surface in this spectral range.It was established, that the spectral area 3.59–4.67 eV, corresponding to the work of the electrons, exiting the silicon surface, the most informative way shows the difference of the 3 optical parameters of silicon of the different orientation, and for evaluation of influence of the silicon doping level on its optical characteristics the most informative is the spectral range of 3.32–4.34 eV. 
提高硅表面性能的可能途径之一是在化学机械抛光后,应用秒脉冲快速热处理使表面硅层固相再结晶。本文用光谱椭偏法研究了不同掺杂水平和网状密度的初始硅片的快速热处理对其光学特性的影响。利用光谱椭偏法研究了不同掺杂水平对初始硅片(KDB12取向、KDB10取向和KDB0.005取向)的快速热处理影响以及网状密度对其光学特性:折射率和吸收比的影响。确定了快速热处理前后硅网密度对其光学特性的影响。结果表明,与低掺杂硅相比,高硼含量硅样品经过快速热处理后,布里渊区中心的折射和吸收比降低。在最大吸收峰区域,对应于电子从硅表面出口的能量(4.34 eV),高掺杂硅的折射率指数比低掺杂硅的折射率指数更高,这是由硅表面在该光谱范围内的空载流子浓度高决定的。结果表明,在3.59 ~ 4.67 eV的光谱范围内,对应出硅表面的电子所做的功,最能反映出不同取向硅的3个光学参数的差异,而评价硅掺杂水平对其光学特性的影响,最能反映出3.32 ~ 4.34 eV的光谱范围。
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引用次数: 0
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Devices and Methods of Measurements
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