Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672169
Takuro Aonuma, S. Kumagai, M. Sasaki
Large-size (∼mm) reflow microlens is fabricated combining with UV curing process. Underlying stacked resist layers can assist the material movement of the photoresist in the reflow process generating the convex parabola shape. Stacking thickness shows the clear linearity. Infrared imaging performance is confirmed using 1.5mm-diameter microlens.
{"title":"Large-size infrared reflow microlens based on stacked layers","authors":"Takuro Aonuma, S. Kumagai, M. Sasaki","doi":"10.1109/OMEMS.2010.5672169","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672169","url":null,"abstract":"Large-size (∼mm) reflow microlens is fabricated combining with UV curing process. Underlying stacked resist layers can assist the material movement of the photoresist in the reflow process generating the convex parabola shape. Stacking thickness shows the clear linearity. Infrared imaging performance is confirmed using 1.5mm-diameter microlens.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121728015","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672127
Satoshi Takahashi, Chih‐Hao Chang, S. Yang, G. Barbastathis
A dielectric subwavelength Luneburg lens structure was designed using Hamiltonian ray tracing, and fabricated using electron beam lithography. Analysis from Hamiltonian ray tracing was in agreement with finite difference in time domain (FDTD) method with wavefront error between the two methods below λ/8, while an improvement in speed of approximately 100 times was observed. The fabricated Luneburg lens structure was tested with a fiber laser with a wavelength of λ=1.55µm, and proved its capabilities of focusing.
{"title":"Design and fabrication of dielectric nanostructured Luneburg lens in optical frequencies","authors":"Satoshi Takahashi, Chih‐Hao Chang, S. Yang, G. Barbastathis","doi":"10.1109/OMEMS.2010.5672127","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672127","url":null,"abstract":"A dielectric subwavelength Luneburg lens structure was designed using Hamiltonian ray tracing, and fabricated using electron beam lithography. Analysis from Hamiltonian ray tracing was in agreement with finite difference in time domain (FDTD) method with wavefront error between the two methods below λ/8, while an improvement in speed of approximately 100 times was observed. The fabricated Luneburg lens structure was tested with a fiber laser with a wavelength of λ=1.55µm, and proved its capabilities of focusing.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116929655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672148
Ye Liu, Hongrui Jiang
We report on a droplet-based, in situ formed tunable cylindrical microlens array in microchannels. The deionized water microlenses are formed via liquid-air interfaces of liquid droplets at T-shaped junctions of octadecyltrichlorosilane (OTS) treated polymerized isobornyl acrylate [poly(IBA)] microchannels, and their focal length can be tuned individually by pneumatic manipulation. These microlenses possess low spherical aberrations. Gravity, which affects the shape of the liquid microlenses, is considered in the design. Fluorescence enhancement for potential lab-on-a-chip applications is also demonstrated using such microlens array.
{"title":"Droplet-based lateral tunable optofluidic microlens array with pneumatic control","authors":"Ye Liu, Hongrui Jiang","doi":"10.1109/OMEMS.2010.5672148","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672148","url":null,"abstract":"We report on a droplet-based, in situ formed tunable cylindrical microlens array in microchannels. The deionized water microlenses are formed via liquid-air interfaces of liquid droplets at T-shaped junctions of octadecyltrichlorosilane (OTS) treated polymerized isobornyl acrylate [poly(IBA)] microchannels, and their focal length can be tuned individually by pneumatic manipulation. These microlenses possess low spherical aberrations. Gravity, which affects the shape of the liquid microlenses, is considered in the design. Fluorescence enhancement for potential lab-on-a-chip applications is also demonstrated using such microlens array.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123726433","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672155
J. Chiou, C. Hung, Chun-Ying Lin
This work presents a MEMS-based image stabilizer applied for anti-shaking function in photographic cell phones. The proposed stabilizer is designed as a two axis decoupling XY stage and strong to suspend an image sensor. Based on the special designs of a hollow handle layer and a corresponding wire bonding assisted holder, electrical signals of the suspended image sensor can be sent out with signal springs. The longest traveling distance of the stabilizer is 25μm with 51V applied voltage and sufficient to resolve the anti-shaking problem in a three megapixel image sensor and with excellent decoupling capability.
{"title":"Design, fabrication, and package of MEMS-based image stabilizer for photographic cell phone applications","authors":"J. Chiou, C. Hung, Chun-Ying Lin","doi":"10.1109/OMEMS.2010.5672155","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672155","url":null,"abstract":"This work presents a MEMS-based image stabilizer applied for anti-shaking function in photographic cell phones. The proposed stabilizer is designed as a two axis decoupling XY stage and strong to suspend an image sensor. Based on the special designs of a hollow handle layer and a corresponding wire bonding assisted holder, electrical signals of the suspended image sensor can be sent out with signal springs. The longest traveling distance of the stabilizer is 25μm with 51V applied voltage and sufficient to resolve the anti-shaking problem in a three megapixel image sensor and with excellent decoupling capability.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"115 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122888193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672136
Quynh Nhu Nguyen Truong, N. Truong, C. Park, J. Jung
The poly[2-methoxy-5-(2-ethylhexyloxy-p-phenylene-vinylene)] (MEH-PPV) thin films were deposited on indium tin oxide (ITO) coated glass by using spin-coating technique at room temperature. The effect of spin-coating speed on the electrical and morphological properties of MEH-PPV film was studied. The surface roughness would be controlled by varied spin-coating speeds. I-V characteristics of ITO/MEH-PPV/Al structure have measured by solar simulator at the optimum condition.
{"title":"The morphological control of MEH-PPV films on an ITO electrode for hybrid solar cell fabrication","authors":"Quynh Nhu Nguyen Truong, N. Truong, C. Park, J. Jung","doi":"10.1109/OMEMS.2010.5672136","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672136","url":null,"abstract":"The poly[2-methoxy-5-(2-ethylhexyloxy-p-phenylene-vinylene)] (MEH-PPV) thin films were deposited on indium tin oxide (ITO) coated glass by using spin-coating technique at room temperature. The effect of spin-coating speed on the electrical and morphological properties of MEH-PPV film was studied. The surface roughness would be controlled by varied spin-coating speeds. I-V characteristics of ITO/MEH-PPV/Al structure have measured by solar simulator at the optimum condition.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"105 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124742400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672141
Chabum Lee, K. Hane, Sun-Kyu Lee
This paper presents electromagnetic analysis of Si-based small period blazed reflection gratings for a period of 0.6–1.5 μm in terms of the rigorous coupled wave analysis (RCWA) and its fabrication using fast atom beam (FAB) etching method. The optimized blazed gratings were successfully fabricated on a slanted silicon substrate by FAB etching method, and diffraction efficiencies (DE) for four kinds of gratings were evaluated from optical testing and these results showed good agreement with these theoretical values, respectively.
{"title":"Fast atom beam-based fabrication of high-efficienct blazed grating using slanting angle control of a substrate","authors":"Chabum Lee, K. Hane, Sun-Kyu Lee","doi":"10.1109/OMEMS.2010.5672141","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672141","url":null,"abstract":"This paper presents electromagnetic analysis of Si-based small period blazed reflection gratings for a period of 0.6–1.5 μm in terms of the rigorous coupled wave analysis (RCWA) and its fabrication using fast atom beam (FAB) etching method. The optimized blazed gratings were successfully fabricated on a slanted silicon substrate by FAB etching method, and diffraction efficiencies (DE) for four kinds of gratings were evaluated from optical testing and these results showed good agreement with these theoretical values, respectively.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129832315","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672144
J. Chiou, K. Hou
In this paper, we describe an optical configuration with a holographic optical element (HOE) for the small-form-factor (SFF) pickup head. This system adopts a finite-conjugate objective lens for both red and blue wavelength. A holographic optical element is used for simplifying the optical configuration which provides a better approach for alignment. In addition to demonstrating this OPH by using existing discrete components, flip chip bonder with high accuracy alignment was to integrate it. Fabrication process of the micro holographic optical pickup has been successfully verified. The experimental results verify the optical performance and the system have been demonstrated.
{"title":"Fabrication and verification for the micro holographic optical pickup","authors":"J. Chiou, K. Hou","doi":"10.1109/OMEMS.2010.5672144","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672144","url":null,"abstract":"In this paper, we describe an optical configuration with a holographic optical element (HOE) for the small-form-factor (SFF) pickup head. This system adopts a finite-conjugate objective lens for both red and blue wavelength. A holographic optical element is used for simplifying the optical configuration which provides a better approach for alignment. In addition to demonstrating this OPH by using existing discrete components, flip chip bonder with high accuracy alignment was to integrate it. Fabrication process of the micro holographic optical pickup has been successfully verified. The experimental results verify the optical performance and the system have been demonstrated.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129935534","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672204
Chih-Cheng Yang, Yih-Ching Wang, J. Yeh
A dynamic response of liquid microlens using dielectric force was demonstrated using comparison between experimental and simulation results. The theoretical results of the simulation match fairly well with the experiment in liquid microlens with a diameter of 500 μm. An high speed motion camera with a speed of 3000 fps was used to capture the images of dynamic response for 500μm, 2mm and 5mm droplets in diameter, respectively. Results indicate that a viscosity strongly affects dynamic response time for 2mm droplet in diameter, but only weakly impacts on final contact angle. A propagation of wave on the droplet surface was found when 100Vrms voltage applied on microlens with a diameter of 5mm. The study may provide the basis for development of optical liquid microlens.
{"title":"Dynamic response of dielectric liquid microlens","authors":"Chih-Cheng Yang, Yih-Ching Wang, J. Yeh","doi":"10.1109/OMEMS.2010.5672204","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672204","url":null,"abstract":"A dynamic response of liquid microlens using dielectric force was demonstrated using comparison between experimental and simulation results. The theoretical results of the simulation match fairly well with the experiment in liquid microlens with a diameter of 500 μm. An high speed motion camera with a speed of 3000 fps was used to capture the images of dynamic response for 500μm, 2mm and 5mm droplets in diameter, respectively. Results indicate that a viscosity strongly affects dynamic response time for 2mm droplet in diameter, but only weakly impacts on final contact angle. A propagation of wave on the droplet surface was found when 100Vrms voltage applied on microlens with a diameter of 5mm. The study may provide the basis for development of optical liquid microlens.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130177446","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672128
Chun-Chia Chiu, Ding-Wei Huang
A polarization independent grating coupler for coupling the light from an optical fiber into a silicon-on-insulator (SOI) waveguide with a coupling efficiency independent of the polarization of the incident light was proposed. Such a polarization independent grating coupler can be achieved by superimposing the grating couplers which were originally designed for coupling solely the TE and the TM modes. Furthermore, it may have the advantage of being fabricated by a single etching step.
{"title":"Polarization independent grating coupler for silicon-on-insulator waveguides","authors":"Chun-Chia Chiu, Ding-Wei Huang","doi":"10.1109/OMEMS.2010.5672128","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672128","url":null,"abstract":"A polarization independent grating coupler for coupling the light from an optical fiber into a silicon-on-insulator (SOI) waveguide with a coupling efficiency independent of the polarization of the incident light was proposed. Such a polarization independent grating coupler can be achieved by superimposing the grating couplers which were originally designed for coupling solely the TE and the TM modes. Furthermore, it may have the advantage of being fabricated by a single etching step.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127640968","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672196
Daesung Lee, W. S. Lee, S. Mitra, R. Howe, H. Wong
This paper presents a four-mask fabrication process of lateral nanoelectromechanical (NEM) electrostatic actuators based on spacer technology. Critical dimensions of the actuators, i.e., the beam width and the gap size between the movable and fixed electrodes can be made smaller than the lithographic resolution by creating nitride spacers on an oxide hardmask followed by selective etching of the oxide hardmask. The combined oxide hardmask, nitride spacer, and another mask (photoresist mask) is then transferred to an underlying polysilicon structural layer to create lateral NEM electrostatic actuators with narrow beam and narrow gap.
{"title":"Four-mask process based on spacer technology for scaled-down lateral NEM electrostatic actuators","authors":"Daesung Lee, W. S. Lee, S. Mitra, R. Howe, H. Wong","doi":"10.1109/OMEMS.2010.5672196","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672196","url":null,"abstract":"This paper presents a four-mask fabrication process of lateral nanoelectromechanical (NEM) electrostatic actuators based on spacer technology. Critical dimensions of the actuators, i.e., the beam width and the gap size between the movable and fixed electrodes can be made smaller than the lithographic resolution by creating nitride spacers on an oxide hardmask followed by selective etching of the oxide hardmask. The combined oxide hardmask, nitride spacer, and another mask (photoresist mask) is then transferred to an underlying polysilicon structural layer to create lateral NEM electrostatic actuators with narrow beam and narrow gap.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125847649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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