Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672210
Keng-hsing Chao, C. Liao, J. Tsai
In this paper, we present an array of cat's eye retro-reflectors with modulability for an optical identification (ID) system. The modulability is obtained through the use of a smart film, a polymer dispersed liquid crystal device (PDLC). Switching of the image pattern of retro-reflected light is demonstrated. Such a dynamic image can function as the "key" so that a high-security, high-privacy identification system can be constructed.
{"title":"Array of cat's eye retro-reflectors with modulability for an optical identification system","authors":"Keng-hsing Chao, C. Liao, J. Tsai","doi":"10.1109/OMEMS.2010.5672210","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672210","url":null,"abstract":"In this paper, we present an array of cat's eye retro-reflectors with modulability for an optical identification (ID) system. The modulability is obtained through the use of a smart film, a polymer dispersed liquid crystal device (PDLC). Switching of the image pattern of retro-reflected light is demonstrated. Such a dynamic image can function as the \"key\" so that a high-security, high-privacy identification system can be constructed.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131495185","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672160
Taelim Lee, A. Higo, H. Fujita, Y. Nakano, H. Toshiyoshi
Oscillation of electrons on the metal surface makes surface plasmon polariton, which works as a guide for the waveguide when an array of holes is perforated on the metal surface. From its plasmonic properties, that kind of structure has a wavelength filtering property. Focusing on this filter characteristic, we have designed a novel MEMS tunable filter based on plasmon photonics. The idea is to make line and space structures and to put one on another vertically such that one would change the gap to control the wavelength filtering effect. By using this structure, we would electromechanically control the surface plasmon. As a preliminary research, we obtained optical properties of line-and-space structures that are crossed, by using the FDTD simulator.
{"title":"A study on color-tunable MEMS device based on plasmon photonics","authors":"Taelim Lee, A. Higo, H. Fujita, Y. Nakano, H. Toshiyoshi","doi":"10.1109/OMEMS.2010.5672160","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672160","url":null,"abstract":"Oscillation of electrons on the metal surface makes surface plasmon polariton, which works as a guide for the waveguide when an array of holes is perforated on the metal surface. From its plasmonic properties, that kind of structure has a wavelength filtering property. Focusing on this filter characteristic, we have designed a novel MEMS tunable filter based on plasmon photonics. The idea is to make line and space structures and to put one on another vertically such that one would change the gap to control the wavelength filtering effect. By using this structure, we would electromechanically control the surface plasmon. As a preliminary research, we obtained optical properties of line-and-space structures that are crossed, by using the FDTD simulator.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115712455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672173
N. Weber, H. Zappe, A. Seifert
An optical and fluidic micro-bench with integrated liquid-filled tunable micro-lenses is developed for an endoscopic probe. This novel approach offers not only dynamic focussing, but also a greatly increased working range for biomedical optical imaging. The fabrication and assembly method is highly precise and flexible and can be used for designing optical probes with high functionality.
{"title":"High-precision optical & fluidic micro-bench for endoscopic imaging","authors":"N. Weber, H. Zappe, A. Seifert","doi":"10.1109/OMEMS.2010.5672173","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672173","url":null,"abstract":"An optical and fluidic micro-bench with integrated liquid-filled tunable micro-lenses is developed for an endoscopic probe. This novel approach offers not only dynamic focussing, but also a greatly increased working range for biomedical optical imaging. The fabrication and assembly method is highly precise and flexible and can be used for designing optical probes with high functionality.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116571227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672145
K. Hung, Ying-Chuan Chen, Shih-Hao Huang, Y. Chuang
This paper successfully used inclined exposure technology to fabricate 50/50 3D micro cube beam splitter with 45° optical grade surface (∼1.4 mm thick). This paper tests the effect of solvent loss percentage of the polymer material (optimum surface roughness: 85.45% solvent remove) on the surface roughness of inclined surfaces. The smallest surface roughness achieved in the experiments using SU-8 material with a thickness of 1.4 mm was less than 70 nm (400μm × 400μm area). This type of micro-mirror can be used as a key component in Michelson Interferometer, bio detection systems, data storage system and linear encoder.
{"title":"A novel fabrication method of the micro cube beam-splitter with optical surface roughness","authors":"K. Hung, Ying-Chuan Chen, Shih-Hao Huang, Y. Chuang","doi":"10.1109/OMEMS.2010.5672145","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672145","url":null,"abstract":"This paper successfully used inclined exposure technology to fabricate 50/50 3D micro cube beam splitter with 45° optical grade surface (∼1.4 mm thick). This paper tests the effect of solvent loss percentage of the polymer material (optimum surface roughness: 85.45% solvent remove) on the surface roughness of inclined surfaces. The smallest surface roughness achieved in the experiments using SU-8 material with a thickness of 1.4 mm was less than 70 nm (400μm × 400μm area). This type of micro-mirror can be used as a key component in Michelson Interferometer, bio detection systems, data storage system and linear encoder.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125514246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672153
K. Ozaki, D. Akai, K. Sawada, M. Ishida
Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr0.52, Ti0.48)O3 (PZT) thin film on epitaxial γ-Al2O3/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al2O3(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF2 gas etching. The fabricated device showed polarization-electric field (P-E) hysteresis loop of piezoelectric PZT thin film and the deflection. Therefore, the realization of piezoelectric drive type deformable mirrors (DMs) using epitaxial PZT thin film can be expected.
{"title":"Fabrication and evaluation of piezoelectric drive type 2-axis tilt control device using epitaxial PZT thin film","authors":"K. Ozaki, D. Akai, K. Sawada, M. Ishida","doi":"10.1109/OMEMS.2010.5672153","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672153","url":null,"abstract":"Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr<inf>0.52</inf>, Ti<inf>0.48</inf>)O<inf>3</inf> (PZT) thin film on epitaxial γ-Al<inf>2</inf>O<inf>3</inf>/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al<inf>2</inf>O<inf>3</inf>(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF<inf>2</inf> gas etching. The fabricated device showed polarization-electric field (P-E) hysteresis loop of piezoelectric PZT thin film and the deflection. Therefore, the realization of piezoelectric drive type deformable mirrors (DMs) using epitaxial PZT thin film can be expected.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128966406","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672118
D. Bayat, Ç. Ataman, B. Guldimann, S. Lani, W. Noell, N. D. de Rooij
We present the design and microfabrication technology of a tip-tilt 2 degree of freedom mirror system made out of SOI wafers with two movable mirrors that have diameters of 1cm. The system is intended for precise beam positioning applications and tracking. Having two mirrors allows one mirror to have large static mechanical scan angles (±3.5°) and the other to have fast fine pointing capabilities within ±0.2° static mechanical scan angle. The first mirror is magnetically actuated and has a resonance frequency of 150Hz. The second mirror is actuated electrostatically and has a resonance frequency of 1 KHz. This mirror enables rapid fine-pointing. Potential space applications are robotic 3D vision, imaging LIDARS, docking sensors and inter-satellite laser communications.
{"title":"Large electrostatically and electromagnetically actuated mirror system for space applications","authors":"D. Bayat, Ç. Ataman, B. Guldimann, S. Lani, W. Noell, N. D. de Rooij","doi":"10.1109/OMEMS.2010.5672118","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672118","url":null,"abstract":"We present the design and microfabrication technology of a tip-tilt 2 degree of freedom mirror system made out of SOI wafers with two movable mirrors that have diameters of 1cm. The system is intended for precise beam positioning applications and tracking. Having two mirrors allows one mirror to have large static mechanical scan angles (±3.5°) and the other to have fast fine pointing capabilities within ±0.2° static mechanical scan angle. The first mirror is magnetically actuated and has a resonance frequency of 150Hz. The second mirror is actuated electrostatically and has a resonance frequency of 1 KHz. This mirror enables rapid fine-pointing. Potential space applications are robotic 3D vision, imaging LIDARS, docking sensors and inter-satellite laser communications.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128984996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672186
Sang-Gil Park, Yongje Choi, Minwoo Yi, Jun-Hyuk Choi, K. Jin, Jong-Chul Ye, Jaewook Ahn, K. Jeong
This work presents a plasmon-enhanced photo-conductive antenna for high power THz emission using the localized surface plasmon resonance of hierarchically patterned silver nanoislands. The silver nanoislands on a photoconductive region enhance the electrical amplitude of pump laser beam and the scattering of the pump beam so that the optical power transmitted toward the substrate is amplified. As a result, a high transition rate of the photo-excited carrier was obtained. The plasmon-enhanced antenna shows 1.6-fold increase of peak-to-peak amplitude of the emitted THz wave compared to the photo-conductive antenna without silver nanoislands.
{"title":"High power THz photoconductive antenna using localized surface plasmon resonance","authors":"Sang-Gil Park, Yongje Choi, Minwoo Yi, Jun-Hyuk Choi, K. Jin, Jong-Chul Ye, Jaewook Ahn, K. Jeong","doi":"10.1109/OMEMS.2010.5672186","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672186","url":null,"abstract":"This work presents a plasmon-enhanced photo-conductive antenna for high power THz emission using the localized surface plasmon resonance of hierarchically patterned silver nanoislands. The silver nanoislands on a photoconductive region enhance the electrical amplitude of pump laser beam and the scattering of the pump beam so that the optical power transmitted toward the substrate is amplified. As a result, a high transition rate of the photo-excited carrier was obtained. The plasmon-enhanced antenna shows 1.6-fold increase of peak-to-peak amplitude of the emitted THz wave compared to the photo-conductive antenna without silver nanoislands.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130207901","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672177
F. Jutzi, F. Gueissaz, W. Noell, N. D. de Rooij
A low voltage electrostatically actuated 90° turning flap is modeled and fabricated. The application is a new kind reflective, low-power, MEMS-based display with high contrast and reflectance. The system consists of a poly-silicon flap fabricated onto a silicon substrate with a transparent counter electrode on glass and a device layer of a silicon-on-insulator (SOI) wafer as spacer in between them. Actuation voltages down to 20V are achieved.
{"title":"Low voltage electrostatic 90° turning flap for reflective MEMS display","authors":"F. Jutzi, F. Gueissaz, W. Noell, N. D. de Rooij","doi":"10.1109/OMEMS.2010.5672177","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672177","url":null,"abstract":"A low voltage electrostatically actuated 90° turning flap is modeled and fabricated. The application is a new kind reflective, low-power, MEMS-based display with high contrast and reflectance. The system consists of a poly-silicon flap fabricated onto a silicon substrate with a transparent counter electrode on glass and a device layer of a silicon-on-insulator (SOI) wafer as spacer in between them. Actuation voltages down to 20V are achieved.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"220 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134006471","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672129
Yih-Bin Lin, Rei-Shin Chen, Ju-Feng Liu, Han-bin Lin
A novel approach for modeling photonic crystal circuits is proposed. In this approach, the effective length of photonic crystal waveguide between two devices is estimated. The frequency response of the photonic crystal circuit is modeled as a Fabry-Perot cavity. An example of double 90-degree bend is analyzed by the approach. The results have great agreement with those obtained by finite-difference time-domain method.
{"title":"An approach for modeling photonic crystal circuits","authors":"Yih-Bin Lin, Rei-Shin Chen, Ju-Feng Liu, Han-bin Lin","doi":"10.1109/OMEMS.2010.5672129","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672129","url":null,"abstract":"A novel approach for modeling photonic crystal circuits is proposed. In this approach, the effective length of photonic crystal waveguide between two devices is estimated. The frequency response of the photonic crystal circuit is modeled as a Fabry-Perot cavity. An example of double 90-degree bend is analyzed by the approach. The results have great agreement with those obtained by finite-difference time-domain method.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"137 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134443439","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672168
Hyeon-cheol Park, Cheol Song, K. Jeong
This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and y-scanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.
{"title":"Micromachined two dimensional lens scanner with large aperture beam","authors":"Hyeon-cheol Park, Cheol Song, K. Jeong","doi":"10.1109/OMEMS.2010.5672168","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672168","url":null,"abstract":"This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and y-scanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131223873","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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