Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672174
H. Sameshima, T. Tanae, F. Hu, K. Hane
A tunable grating is fabricated by micromachining a GaN crystal layer grown on Si substrate. The tunable grating consists of grating lines, electro-static comb-drive actuator and connection springs. The grating consists of 85nm wide, 12µm long 24 grating lines with 674nm period. The crystallization stress of an HfO2 layer deposited on the GaN crystal is used to compensate the residual stress of the GaN crystal grown on Si substrate. The freestanding GaN structure consisting of the grating and the actuator is fabricated by etching the Si substrate with XeF2 gas. Applying the voltage of 140V, the grating is expanded by 600nm corresponding to the period change of 3.7%.
{"title":"GaN pitch-variable grating fabricated on Si substrate","authors":"H. Sameshima, T. Tanae, F. Hu, K. Hane","doi":"10.1109/OMEMS.2010.5672174","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672174","url":null,"abstract":"A tunable grating is fabricated by micromachining a GaN crystal layer grown on Si substrate. The tunable grating consists of grating lines, electro-static comb-drive actuator and connection springs. The grating consists of 85nm wide, 12µm long 24 grating lines with 674nm period. The crystallization stress of an HfO2 layer deposited on the GaN crystal is used to compensate the residual stress of the GaN crystal grown on Si substrate. The freestanding GaN structure consisting of the grating and the actuator is fabricated by etching the Si substrate with XeF2 gas. Applying the voltage of 140V, the grating is expanded by 600nm corresponding to the period change of 3.7%.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134138471","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672133
Lan Shen, Doo-hwan Kim, Bonggi Min, Z. Gu, Chinho Park
Anodic aluminum oxide (AAO) nano-templates were prepared using the Al/Si substrates with the thickness of the aluminum films of about 500 nm. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure for large area InGaN LED applications was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template.
{"title":"Preparation of anodic aluminum oxide nano-template using Al/Si substrate for large area LED applications","authors":"Lan Shen, Doo-hwan Kim, Bonggi Min, Z. Gu, Chinho Park","doi":"10.1109/OMEMS.2010.5672133","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672133","url":null,"abstract":"Anodic aluminum oxide (AAO) nano-templates were prepared using the Al/Si substrates with the thickness of the aluminum films of about 500 nm. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure for large area InGaN LED applications was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121880026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672120
F. Schneider, J. Draheim, T. Burger, J. Maclaren, M. Herbst, M. Zaitsev, R. Bammer, U. Wallrabe
We present an adaptive membrane lens that is compatible with a magnetic resonance (MR) imaging system, as a part of an objective for in-bore optical motion tracking and correction. Compatibility tests with the high magnetic fields of a 3 T scanner and the shielding of the adaptive lens are discussed. For tracking of a marker an adaptive wide-angle objective has been designed and characterised. The measured mean distortions of the objective are between −2.05 and −2.6 %. The tracking system was verified in a MR scanner model.
{"title":"An adaptive objective for optical motion correction in MRI","authors":"F. Schneider, J. Draheim, T. Burger, J. Maclaren, M. Herbst, M. Zaitsev, R. Bammer, U. Wallrabe","doi":"10.1109/OMEMS.2010.5672120","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672120","url":null,"abstract":"We present an adaptive membrane lens that is compatible with a magnetic resonance (MR) imaging system, as a part of an objective for in-bore optical motion tracking and correction. Compatibility tests with the high magnetic fields of a 3 T scanner and the shielding of the adaptive lens are discussed. For tracking of a marker an adaptive wide-angle objective has been designed and characterised. The measured mean distortions of the objective are between −2.05 and −2.6 %. The tracking system was verified in a MR scanner model.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122183545","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672209
P. Muller, N. Spengler, W. Monch, H. Zappe
A tunable aperture stop based on optofluidic technology is presented. Using the high absorption of aqueous pigment dispersions, we demonstrate that this approach may be used to define optical stops of high contrast. Our highly flexible design is based on photolithographic patterning of dry film resist and allows control of laminar flow in microfluidic chambers.
{"title":"Tunable optofluidic micro-iris","authors":"P. Muller, N. Spengler, W. Monch, H. Zappe","doi":"10.1109/OMEMS.2010.5672209","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672209","url":null,"abstract":"A tunable aperture stop based on optofluidic technology is presented. Using the high absorption of aqueous pigment dispersions, we demonstrate that this approach may be used to define optical stops of high contrast. Our highly flexible design is based on photolithographic patterning of dry film resist and allows control of laminar flow in microfluidic chambers.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125237206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672162
R. Lockhart, R. Stanley, M. Tormen
We present a fully programmable micro diffraction (F-PMDG) grating in which each micromirror in a 1D array can be individually deflected out-of-plane by up to 1 µm. The maximum operating voltage is <30V and the lowest resonant frequency is >10kHz. The 120 µm wide and 700 µm long mirrors are designed to remain optically flat during actuation. The peak-to-valley curvature of a fully actuated micromirror is shown to be 10 nm equal to a radius of curvature of 7m. Fabrication of the F-PMDG requires only three photolithography masks.
{"title":"Pure piston motion of optically flat micromirrors in a fully programmable micro diffraction grating","authors":"R. Lockhart, R. Stanley, M. Tormen","doi":"10.1109/OMEMS.2010.5672162","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672162","url":null,"abstract":"We present a fully programmable micro diffraction (F-PMDG) grating in which each micromirror in a 1D array can be individually deflected out-of-plane by up to 1 µm. The maximum operating voltage is <30V and the lowest resonant frequency is >10kHz. The 120 µm wide and 700 µm long mirrors are designed to remain optically flat during actuation. The peak-to-valley curvature of a fully actuated micromirror is shown to be 10 nm equal to a radius of curvature of 7m. Fabrication of the F-PMDG requires only three photolithography masks.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124225410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672122
B. T. Tung, D. Dao, S. Sugiyama
This paper reports the theoretical investigation of the strain sensitive effect of a 2D photonic crystal (PhC) nanocavity resonator for mechanical sensing applications. By using finite element method (FEM) using ANSYS software and finite different time domain (FDTD) simulation using CrystalWave software, the strain sensitivity of high quality factor PhC nanocavity have been studied. Linear relationships between strain and shift of resonant wavelength of the cavity have been obtained. The sensitivities to longitudinal and transverse strains have been determined to be 1.67nm/mε and 1.4nm/mε, respectively.
{"title":"Investigation of strain sensitivity of photonic crystal nanocavity for mechanical sensing","authors":"B. T. Tung, D. Dao, S. Sugiyama","doi":"10.1109/OMEMS.2010.5672122","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672122","url":null,"abstract":"This paper reports the theoretical investigation of the strain sensitive effect of a 2D photonic crystal (PhC) nanocavity resonator for mechanical sensing applications. By using finite element method (FEM) using ANSYS software and finite different time domain (FDTD) simulation using CrystalWave software, the strain sensitivity of high quality factor PhC nanocavity have been studied. Linear relationships between strain and shift of resonant wavelength of the cavity have been obtained. The sensitivities to longitudinal and transverse strains have been determined to be 1.67nm/mε and 1.4nm/mε, respectively.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"356 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115848601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672211
E. Timurdogan, Sezin Nargul, H. Kavakli, E. Alaca, H. Urey
A biosensor platform is utilized in liquid for detection of His protein. T-shaped thin film nickel cantilevers are actuated magnetically using self-oscillation principle and the sensing is based on embedded diffraction gratings on the cantilevers with interferometric sensitivity. Experiments are performed in a custom 1ml liquid chamber and 5.7ng/ml detection sensitivity is demonstrated. Method is label-free, robust and allows multiplexing. It also doesn't require any electrical connections to the MEMS sensor chip. Therefore, it is suitable for real-time multi analyte screening using a disposable chip in a portable device.
{"title":"Magnetic actuated MOEMS resonant biosensor array","authors":"E. Timurdogan, Sezin Nargul, H. Kavakli, E. Alaca, H. Urey","doi":"10.1109/OMEMS.2010.5672211","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672211","url":null,"abstract":"A biosensor platform is utilized in liquid for detection of His protein. T-shaped thin film nickel cantilevers are actuated magnetically using self-oscillation principle and the sensing is based on embedded diffraction gratings on the cantilevers with interferometric sensitivity. Experiments are performed in a custom 1ml liquid chamber and 5.7ng/ml detection sensitivity is demonstrated. Method is label-free, robust and allows multiplexing. It also doesn't require any electrical connections to the MEMS sensor chip. Therefore, it is suitable for real-time multi analyte screening using a disposable chip in a portable device.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"127 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132348566","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672164
Chun-Che Chang, W. Chiu, Jiun-Ming Wu, Ming-Chang M. Lee, J. Shieh
An optical phase modulator for integrated optics was proposed by monolithic integration of deformable silicon photonic wires and MEMS actuators. Via applying voltage, the silicon wire is deformed and the wire length is extended, resulting in change of optical phase. A phase shift of 0.18 π is achieved at a bias of 35 V for a 150 μm wire according to numerical simulation. By cascading many of the MEMS-actuated wires, a π-phase shift can be realized at very low operation voltage. Based on this idea, a MEMS-actuated Mach-Zehnder interferometer was demonstrated.
{"title":"MEMS-actuated waveguide phase modulators","authors":"Chun-Che Chang, W. Chiu, Jiun-Ming Wu, Ming-Chang M. Lee, J. Shieh","doi":"10.1109/OMEMS.2010.5672164","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672164","url":null,"abstract":"An optical phase modulator for integrated optics was proposed by monolithic integration of deformable silicon photonic wires and MEMS actuators. Via applying voltage, the silicon wire is deformed and the wire length is extended, resulting in change of optical phase. A phase shift of 0.18 π is achieved at a bias of 35 V for a 150 μm wire according to numerical simulation. By cascading many of the MEMS-actuated wires, a π-phase shift can be realized at very low operation voltage. Based on this idea, a MEMS-actuated Mach-Zehnder interferometer was demonstrated.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121629568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672185
J. Masson, A. Bich, W. Noell, R. Voelkel, K. Weible, N. D. de Rooij
A dynamic laser beam shaper based on MEMS technology is presented. A magnetically actuated deformable single crystal silicon micromembrane is deformed in resonance to diffuse and homogenize laser beams. The large aperture mirror shows line generation with angles up to 1° and line smoothing capabilities. High power density handling is demonstrated up to 140 W/cm2.
{"title":"Tunable optical diffusers for high-power laser applications based on magnetically actuated membranes","authors":"J. Masson, A. Bich, W. Noell, R. Voelkel, K. Weible, N. D. de Rooij","doi":"10.1109/OMEMS.2010.5672185","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672185","url":null,"abstract":"A dynamic laser beam shaper based on MEMS technology is presented. A magnetically actuated deformable single crystal silicon micromembrane is deformed in resonance to diffuse and homogenize laser beams. The large aperture mirror shows line generation with angles up to 1° and line smoothing capabilities. High power density handling is demonstrated up to 140 W/cm2.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114079420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672156
Gordon Brown, Li Li, R. Bauer, Jinsong Liu, D. Uttamchandani
A hybrid two-axis MEMS scanning mirror has been fabricated incorporating two different actuation mechanisms for its orthogonal rotation axes. The 2 mm diameter mirror is rotated about one axis using an electrostatic comb-drive for fast resonance movement and about the other axis using two out-of-plane electrothermal actuators. This hybrid actuation arrangement enables fast sweeps (at the mechanical resonant frequency) to be generated on one axis, with a slower sweep (from a few Hz to a few tens of Hz) to be generated on the orthogonal axis, raising the possibility of complex scan patterns being produced using relatively simple driving schemes. The characteristics of the first iteration of our device have been experimentally determined, and simultaneous driving of both actuation mechanisms has been demonstrated.
{"title":"A two-axis hybrid MEMS scanner incorporating electrothermal and electrostatic actuators","authors":"Gordon Brown, Li Li, R. Bauer, Jinsong Liu, D. Uttamchandani","doi":"10.1109/OMEMS.2010.5672156","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672156","url":null,"abstract":"A hybrid two-axis MEMS scanning mirror has been fabricated incorporating two different actuation mechanisms for its orthogonal rotation axes. The 2 mm diameter mirror is rotated about one axis using an electrostatic comb-drive for fast resonance movement and about the other axis using two out-of-plane electrothermal actuators. This hybrid actuation arrangement enables fast sweeps (at the mechanical resonant frequency) to be generated on one axis, with a slower sweep (from a few Hz to a few tens of Hz) to be generated on the orthogonal axis, raising the possibility of complex scan patterns being produced using relatively simple driving schemes. The characteristics of the first iteration of our device have been experimentally determined, and simultaneous driving of both actuation mechanisms has been demonstrated.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114663316","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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