Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672190
F. Xiao, P. Chiou
We report a novel polarization dependent photothermal annealing technique for fine-tuning the shape of metallic micro- and nano-structures with flood exposure of nanosecond laser pulses after they are fabricated. This is realized by utilizing the local field enhancement due to collective electron oscillation on metallic nanostructures driven by electromagnetic waves. We have demonstrated that pre-patterned Au squares can be annealed into Au nanospheres; circular disks into elliptical disks; and rectangular Au microwires into Au nanowires with different aspect ratios.
{"title":"Reshaping gold micro and nano structures with polarization dependent photothermal annealing","authors":"F. Xiao, P. Chiou","doi":"10.1109/OMEMS.2010.5672190","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672190","url":null,"abstract":"We report a novel polarization dependent photothermal annealing technique for fine-tuning the shape of metallic micro- and nano-structures with flood exposure of nanosecond laser pulses after they are fabricated. This is realized by utilizing the local field enhancement due to collective electron oscillation on metallic nanostructures driven by electromagnetic waves. We have demonstrated that pre-patterned Au squares can be annealed into Au nanospheres; circular disks into elliptical disks; and rectangular Au microwires into Au nanowires with different aspect ratios.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115049796","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672172
T. Gessei, Gen Itabashi, Yuki Suzuki, D. Takahashi, T. Arakawa, H. Kudo, K. Mitsubayashi
A fibre-optic biochemical gas sensor (bio-sniffer) for gaseous formaldehyde (FA) was developed and applied for on-site assessment of FA detoxification. The bio-sniffer measures FA as a fluorescence of reduced nicoti-namide adenine dinucleotide (NADH) which is the product of formaldehyde dehydrogenase reaction. The detection limit of the bio-sniffer for gaseous FA was 2.5 ppb, which is enough lower for the purpose of evaluating FA detoxification. The bio-sniffer was then applied to measure phytoremediation with N. E. “Bostoniensis”. The FA level in the measurement chamber decreased down to the detection limit (2.5 ppb), which is lower level than FA level of room air (12 ppb), within 95 min and the value increased to FA level when the chamber was vented.
研制了一种用于气体甲醛(FA)脱毒的光纤生化气体传感器(生物嗅探器)，并应用于FA脱毒的现场评价。生物嗅探器是通过甲醛脱氢酶反应的产物-烟酰胺腺嘌呤二核苷酸(NADH)的荧光来测定FA的。生物嗅探器对气态FA的检出限为2.5 ppb，足以用于评价FA的解毒作用。然后应用生物嗅探器测量N. E. " boston oniensis "对植物的修复作用。在95分钟内，测量室内的FA水平下降到检测极限(2.5 ppb)，低于室内空气的FA水平(12 ppb)，当室内通风时，该值上升到FA水平。
{"title":"Fluorometric bio-sniffer (biochemical gas sensor) with UV-LED light for fomaldehyde vapor as VOC (volatile organic chemical)","authors":"T. Gessei, Gen Itabashi, Yuki Suzuki, D. Takahashi, T. Arakawa, H. Kudo, K. Mitsubayashi","doi":"10.1109/OMEMS.2010.5672172","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672172","url":null,"abstract":"A fibre-optic biochemical gas sensor (bio-sniffer) for gaseous formaldehyde (FA) was developed and applied for on-site assessment of FA detoxification. The bio-sniffer measures FA as a fluorescence of reduced nicoti-namide adenine dinucleotide (NADH) which is the product of formaldehyde dehydrogenase reaction. The detection limit of the bio-sniffer for gaseous FA was 2.5 ppb, which is enough lower for the purpose of evaluating FA detoxification. The bio-sniffer was then applied to measure phytoremediation with N. E. “Bostoniensis”. The FA level in the measurement chamber decreased down to the detection limit (2.5 ppb), which is lower level than FA level of room air (12 ppb), within 95 min and the value increased to FA level when the chamber was vented.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125951785","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672167
T. Ikeda, Y. Kanamori, K. Hane
Mach-Zehnder interferometer (MZI) using submicron silicon waveguide with micro electro-mechanical phase-shifter is studied. The phase-shifter consists of freestanding submicron-wide silicon waveguide with two waveguide couplers and an ultra-small silicon comb-drive actuator. The freestanding waveguide is moved by the actuator to change the optical path length. The optical phase-shift was calculated theoretically by changing the waveguide cross-section. The phase-shift caused by actuation was measured to be 3.0π–4.5π at the actuator displacement of 1.0μm at the voltage of 31–32V. The maximum contrast of the MZI signal was −10.8dB.
{"title":"Submicron silicon waveguide Mach-Zehnder interferometer using micro electro-mechanical phase-shifter","authors":"T. Ikeda, Y. Kanamori, K. Hane","doi":"10.1109/OMEMS.2010.5672167","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672167","url":null,"abstract":"Mach-Zehnder interferometer (MZI) using submicron silicon waveguide with micro electro-mechanical phase-shifter is studied. The phase-shifter consists of freestanding submicron-wide silicon waveguide with two waveguide couplers and an ultra-small silicon comb-drive actuator. The freestanding waveguide is moved by the actuator to change the optical path length. The optical phase-shift was calculated theoretically by changing the waveguide cross-section. The phase-shift caused by actuation was measured to be 3.0π–4.5π at the actuator displacement of 1.0μm at the voltage of 31–32V. The maximum contrast of the MZI signal was −10.8dB.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"138 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115964061","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672179
J. Steyn, T. Brosnihan, J. Fijol, J. Gandhi, N. Hagood, M. Halfman, Stephen R. Lewis, R. Payne, Joyce H. Wu
A new display technology has been developed that overcomes the losses in conventional liquid crystal displays (LCDs). At the heart of this new class of displays is a digital microshutter (DMS™) that eliminates the need for a polarizer that is required in LCDs. The DMS™ also has a response time of approximately 20 times faster than that of an LCD pixel, making it possible to produce a bright field sequential direct view display with increased color gamut (up to 145% NTSC, CIE 1976).
{"title":"A MEMS digital microshutter (DMS™) for low-power high brightness displays","authors":"J. Steyn, T. Brosnihan, J. Fijol, J. Gandhi, N. Hagood, M. Halfman, Stephen R. Lewis, R. Payne, Joyce H. Wu","doi":"10.1109/OMEMS.2010.5672179","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672179","url":null,"abstract":"A new display technology has been developed that overcomes the losses in conventional liquid crystal displays (LCDs). At the heart of this new class of displays is a digital microshutter (DMS™) that eliminates the need for a polarizer that is required in LCDs. The DMS™ also has a response time of approximately 20 times faster than that of an LCD pixel, making it possible to produce a bright field sequential direct view display with increased color gamut (up to 145% NTSC, CIE 1976).","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134457895","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672132
Yongjin Wang, F. Hu, K. Hane
Freestanding circular GaN gratings are fabricated on a GaN-on-silicon substrate, and epitaxial growth of GaN is subsequently conducted on the prepared GaN template by molecular beam epitaxy growth. With the assistance of circular GaN gratings, the surface diffusion is improved and thus, the selective growth of GaN takes place. Epitaxial circular gratings with InGaN/GaN multiple quantum wells are generated with self-organized lateral facets and demonstrate the promising photoluminescence performances. This work provides a feasible approach to produce integrated GaN-Si devices by a combination of fast atom beam etching of GaN, silicon micromachining and epitaxial growth of GaN.
{"title":"Nanoscale epitaxial growth of GaN on freestanding circular GaN grating","authors":"Yongjin Wang, F. Hu, K. Hane","doi":"10.1109/OMEMS.2010.5672132","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672132","url":null,"abstract":"Freestanding circular GaN gratings are fabricated on a GaN-on-silicon substrate, and epitaxial growth of GaN is subsequently conducted on the prepared GaN template by molecular beam epitaxy growth. With the assistance of circular GaN gratings, the surface diffusion is improved and thus, the selective growth of GaN takes place. Epitaxial circular gratings with InGaN/GaN multiple quantum wells are generated with self-organized lateral facets and demonstrate the promising photoluminescence performances. This work provides a feasible approach to produce integrated GaN-Si devices by a combination of fast atom beam etching of GaN, silicon micromachining and epitaxial growth of GaN.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125330218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672138
I. Mitsuishi, Y. Ezoe, K. Ishizu, T. Moriyama, Y. Maeda, T. Hayashi, T. Sato, M. Mita, N. Yamasaki, K. Mitsuda, M. Horade, S. Sugiyama, R. Riveros, T. Boggs, H. Yamaguchi, Y. Kanamori, K. Nakajima, R. Maeda
An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ~20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 μm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.
{"title":"X-ray imaging test for a single-stage MEMS X-ray optical system","authors":"I. Mitsuishi, Y. Ezoe, K. Ishizu, T. Moriyama, Y. Maeda, T. Hayashi, T. Sato, M. Mita, N. Yamasaki, K. Mitsuda, M. Horade, S. Sugiyama, R. Riveros, T. Boggs, H. Yamaguchi, Y. Kanamori, K. Nakajima, R. Maeda","doi":"10.1109/OMEMS.2010.5672138","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672138","url":null,"abstract":"An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ~20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 μm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116940051","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672126
Yih-Bin Lin, Chengru Li, Rei-Shin Chen, J. Su
A simple design of 90-degree bend is proposed for cubic photonic crystals. By doubling the density of rods, new types of bends are created. The greatest proposed bend has transmission efficiencies above 99% for a wide frequency range.
{"title":"Design of high transmission broadband 90-degree bends for two dimensional cubic photonic crystals","authors":"Yih-Bin Lin, Chengru Li, Rei-Shin Chen, J. Su","doi":"10.1109/OMEMS.2010.5672126","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672126","url":null,"abstract":"A simple design of 90-degree bend is proposed for cubic photonic crystals. By doubling the density of rods, new types of bends are created. The greatest proposed bend has transmission efficiencies above 99% for a wide frequency range.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"128 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116829438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672151
Jaesung Song, In-Sung Kim, S. Jeong, Min-Soo Kim
This work studies the lead magnesium niobate-lead zirconium titanate (PMN-PZT) multilayer ceramic actuators (MLCA) for laser scanner applications. PMN-PZT MLCA was fabricated. 5×5×30 mm3 size MLCA was fabricated by conventional tape casting method. The displacement of the MLCA with 30 mm thickness was ∼30 μm at 150 V Tilt stage consisting of multilayer actuator and two hinge type lever mechanisms was investigated. Circular hinge type mechanism showed translation from linear motion to rotation motion along with stroke amplification. The hinge-based mechanical platform showed one-to-one linear translation with strain amplifier, which is suitable for high precision control system.
{"title":"Multilayer piezoelectric ceramic actuator for laser scanner","authors":"Jaesung Song, In-Sung Kim, S. Jeong, Min-Soo Kim","doi":"10.1109/OMEMS.2010.5672151","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672151","url":null,"abstract":"This work studies the lead magnesium niobate-lead zirconium titanate (PMN-PZT) multilayer ceramic actuators (MLCA) for laser scanner applications. PMN-PZT MLCA was fabricated. 5×5×30 mm3 size MLCA was fabricated by conventional tape casting method. The displacement of the MLCA with 30 mm thickness was ∼30 μm at 150 V Tilt stage consisting of multilayer actuator and two hinge type lever mechanisms was investigated. Circular hinge type mechanism showed translation from linear motion to rotation motion along with stroke amplification. The hinge-based mechanical platform showed one-to-one linear translation with strain amplifier, which is suitable for high precision control system.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123684275","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672166
J. Wilkinson
Integrated optical waveguides offer great potential as versatile platforms for constructing advanced biosensors, optical cell-sorters and integrated optofluidic systems, exploiting the technological approaches of microelectronics and guided-wave optics to realise low-cost on-chip systems. Progress towards optical integration in microsystems for bioanalysis will be discussed, with examples in key applications, and challenges and opportunities will be described.
{"title":"Optical waveguide devices for bioanalysis","authors":"J. Wilkinson","doi":"10.1109/OMEMS.2010.5672166","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672166","url":null,"abstract":"Integrated optical waveguides offer great potential as versatile platforms for constructing advanced biosensors, optical cell-sorters and integrated optofluidic systems, exploiting the technological approaches of microelectronics and guided-wave optics to realise low-cost on-chip systems. Progress towards optical integration in microsystems for bioanalysis will be discussed, with examples in key applications, and challenges and opportunities will be described.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125409028","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672165
Masato Suzuki, G. Kawai, K. Nishioka, Tomokazu Takahashi, S. Aoyagi, Y. Amemiya, Masataka Fukuyama, S. Yokoyama
In this paper, a novel inertial force sensor which uses a Mach-Zehnder Interferometer (MZI) type optical waveguide made of crystal silicon is proposed. In this sensor, one branched waveguide of the MZI have floating beam structure, and it is intersected with a cantilever for supporting a proof mass in same plane. To prevent optical loss at the intersection, only the intersectional point of floating waveguide has multi-mode interference (MMI) structure. Efficacy of the MMI waveguide is confirmed by simulation and experimental results. Conclusively, it has succeeded in changing in output of the fabricated initial force sensor by applied force.
{"title":"Inertial force sensor using optical Mach-Zehnder Interferometer and multi mode interferometer","authors":"Masato Suzuki, G. Kawai, K. Nishioka, Tomokazu Takahashi, S. Aoyagi, Y. Amemiya, Masataka Fukuyama, S. Yokoyama","doi":"10.1109/OMEMS.2010.5672165","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672165","url":null,"abstract":"In this paper, a novel inertial force sensor which uses a Mach-Zehnder Interferometer (MZI) type optical waveguide made of crystal silicon is proposed. In this sensor, one branched waveguide of the MZI have floating beam structure, and it is intersected with a cantilever for supporting a proof mass in same plane. To prevent optical loss at the intersection, only the intersectional point of floating waveguide has multi-mode interference (MMI) structure. Efficacy of the MMI waveguide is confirmed by simulation and experimental results. Conclusively, it has succeeded in changing in output of the fabricated initial force sensor by applied force.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130415126","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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