Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672138
I. Mitsuishi, Y. Ezoe, K. Ishizu, T. Moriyama, Y. Maeda, T. Hayashi, T. Sato, M. Mita, N. Yamasaki, K. Mitsuda, M. Horade, S. Sugiyama, R. Riveros, T. Boggs, H. Yamaguchi, Y. Kanamori, K. Nakajima, R. Maeda
An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ~20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 μm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.
{"title":"X-ray imaging test for a single-stage MEMS X-ray optical system","authors":"I. Mitsuishi, Y. Ezoe, K. Ishizu, T. Moriyama, Y. Maeda, T. Hayashi, T. Sato, M. Mita, N. Yamasaki, K. Mitsuda, M. Horade, S. Sugiyama, R. Riveros, T. Boggs, H. Yamaguchi, Y. Kanamori, K. Nakajima, R. Maeda","doi":"10.1109/OMEMS.2010.5672138","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672138","url":null,"abstract":"An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ~20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 μm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116940051","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672180
K. Lugo, X. Miao, F. Rieke, Lih Y. Lin
We report integration of CdTe quantum dot (QD) film with LnCap (prostate cancer) cell and CdSe QD probes with cortical neurons for control of cellular activity. We demonstrate the remote switching of cellular activity by exciting QDs with light. Changes in membrane potential and ionic currents are recorded using the patch-clamp method. Upon excitation, the cell shows activation of ion channels and hyperpolarization of the cell membrane.
{"title":"Remote switching of cellular activity using light through quantum dots","authors":"K. Lugo, X. Miao, F. Rieke, Lih Y. Lin","doi":"10.1109/OMEMS.2010.5672180","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672180","url":null,"abstract":"We report integration of CdTe quantum dot (QD) film with LnCap (prostate cancer) cell and CdSe QD probes with cortical neurons for control of cellular activity. We demonstrate the remote switching of cellular activity by exciting QDs with light. Changes in membrane potential and ionic currents are recorded using the patch-clamp method. Upon excitation, the cell shows activation of ion channels and hyperpolarization of the cell membrane.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"415 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114058395","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672201
O. Sasaki, Takaaki Suzuki, K. Terao, H. Takao, F. Oohira
In this paper, we propose a polymer MEMS mirror device which has the futures of the large deflection angle and the low cost fabrication. Many conventional MEMS mirror devices have been composed of Si wafer and, the expensive dry etching equipment has been necessary when etching the Si substrate. Then, we propose new composition and the novel fabrication method without the dry etching process by using the inexpensive glass substrate. Also, the torsion bar is composed of a photosensitive polymer that is a low rigid material and can be easily fabricated by the photolithography process. A multilayer wiring process is examined so that the low current actuation and the large deflection angle is attained. The fabricated device showed the large optical deflection angle of more than ±40 degrees at the current of ±16mA when the torsion bar length was 1800µm. The variation of the optical deflection angle was within 0.8 degrees at the 106 times repeatability test.
{"title":"Low cost and large deflection angle polymer MEMS mirror using glass substrate","authors":"O. Sasaki, Takaaki Suzuki, K. Terao, H. Takao, F. Oohira","doi":"10.1109/OMEMS.2010.5672201","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672201","url":null,"abstract":"In this paper, we propose a polymer MEMS mirror device which has the futures of the large deflection angle and the low cost fabrication. Many conventional MEMS mirror devices have been composed of Si wafer and, the expensive dry etching equipment has been necessary when etching the Si substrate. Then, we propose new composition and the novel fabrication method without the dry etching process by using the inexpensive glass substrate. Also, the torsion bar is composed of a photosensitive polymer that is a low rigid material and can be easily fabricated by the photolithography process. A multilayer wiring process is examined so that the low current actuation and the large deflection angle is attained. The fabricated device showed the large optical deflection angle of more than ±40 degrees at the current of ±16mA when the torsion bar length was 1800µm. The variation of the optical deflection angle was within 0.8 degrees at the 106 times repeatability test.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117021814","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672170
Wei Zhang, K. Aljasem, H. Zappe, A. Seifert
A thermo-pneumatically actuated tunable microlens has been developed as a completely integrated system with on-chip actuation and temperature sensing. The focal length of the microlens can be adjusted over a wide range without any external pressure controller. The module consists of a structured silicon chip, a spin-coated PDMS membrane, an optical fluidic chamber, a thermal cavity, and a heating and temperature sensing structure. The focal length is controlled by the applied voltage to the heater and could be tuned in the range between 3.3 and 18.2 mm, corresponding to a temperature variation of 37°C to 24°C, and a change in the numerical aperture from 0.303 to 0.055. At the same time, the cutoff frequency of the optical transfer function, referring to a contrast of 0.2, varies from 30 lines/mm at 27°C to 65 lines/mm at 34°C.
{"title":"A fully integrated thermo-pneumatic tunable microlens","authors":"Wei Zhang, K. Aljasem, H. Zappe, A. Seifert","doi":"10.1109/OMEMS.2010.5672170","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672170","url":null,"abstract":"A thermo-pneumatically actuated tunable microlens has been developed as a completely integrated system with on-chip actuation and temperature sensing. The focal length of the microlens can be adjusted over a wide range without any external pressure controller. The module consists of a structured silicon chip, a spin-coated PDMS membrane, an optical fluidic chamber, a thermal cavity, and a heating and temperature sensing structure. The focal length is controlled by the applied voltage to the heater and could be tuned in the range between 3.3 and 18.2 mm, corresponding to a temperature variation of 37°C to 24°C, and a change in the numerical aperture from 0.303 to 0.055. At the same time, the cutoff frequency of the optical transfer function, referring to a contrast of 0.2, varies from 30 lines/mm at 27°C to 65 lines/mm at 34°C.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117186030","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672135
Myun-Sik Kim, T. Scharf, H. Herzig
High resolution amplitude and phase of light fields emerging from a 2-μm-period amplitude grating are measured for different wavelengths. The amplitude gratings lead to highly periodic patterns caused by the Talbot effect. Such patterns reach periodicities of a fraction of the grating period. We discuss the effect of wavelengths and the number of diffraction orders participating in the imaging.
{"title":"Measurements of light fields emerging from fine amplitude gratings","authors":"Myun-Sik Kim, T. Scharf, H. Herzig","doi":"10.1109/OMEMS.2010.5672135","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672135","url":null,"abstract":"High resolution amplitude and phase of light fields emerging from a 2-μm-period amplitude grating are measured for different wavelengths. The amplitude gratings lead to highly periodic patterns caused by the Talbot effect. Such patterns reach periodicities of a fraction of the grating period. We discuss the effect of wavelengths and the number of diffraction orders participating in the imaging.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116048840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672202
X. Mu, Yingshun Xu, Janak Singh, Nanguang Chen, H. Feng, Guangya Zhou, A. Yu, C. Tan, K. Chen, F. Chau
The paper presents a large rotational angle micromirror base on hypocycloidal electrothermal actuators for circumferential endoscopic imaging. The micromirror consists of a double-side Cr/Au coated high reflective mirror plate (1mm by 0.8mm) laterally supported by two hypocycloidal electrothermal actuators on both sides (Fig. 1(a)). In our design, 1µm PVD Al deposited on 2µm single crystal silicon (SCS) forms a bimorph microstructure with the length of 800 µm and the width of 60µm. Four bimorph structures were staggerly connected in parallel to form a hypocycloidal electrothermal actuator. In this configuration, a metal layer was on a silicon backbone in one bimorph structure while the metal layer was deposited below the silicon backbone in adjacent bimorph structures (Fig. 1(b)). Since the radius of curvature of each bimorph structure is the same, the deflection of each structure is the same. Hence the rotational axis keeps still and there is no lateral shifting effect. Simulations via finite element analysis (FEA) show that the mechanical deflection angle of a micromirror significantly increases by using this actuator design. 141.2° was found in the design with fully double-side Al coated actuators (Fig. 2(a, b)) and 68.6° was found in the design with only frontside Al coated actuators (Fig. 2(c, d)). Micromirrors were fabricated by a post-CMOS MEMS process on 8 inches SOI wafers. An optical microscopic image and a scanning electron microscope (SEM) micrograph of a released micromirror are shown in Fig. 3(a) and (b), respectively. However, so far we have not successfully patterned Al layer below the SCS layer as part of the actuator and therefore only micromirrors equipped by frontside Al coated actuators were experimentally characterized (Fig. 4). ∼35° mechanical deflection was achieved by 2.6 V DC input voltage (Fig. 5). It has a discrepancy in comparison in comparison with the FEA simulation. −3dB cutoff frequency was found to be about 29 Hz as the large signal frequency response (Fig. 5). Current-voltage relationship of an electrothermal actuator is also shown in Fig. 5. A series of frames from a video of a switching micromirror shows various tilting angles of the micromirror under a sinusoidal drive signal with the amplitude of 2.6 V was still with absence of microstructures with backside Al coated, the concept of achieving large deflection angle by using hypocycloidal electrothermal actuators has been demonstrated. Both FEA simulation and experimental results prove the capability of the Single-axis rotational micromirror device.
{"title":"A large rotational angle micromirror based on hypocycloidal electrothermal actuators for endoscopic imaging","authors":"X. Mu, Yingshun Xu, Janak Singh, Nanguang Chen, H. Feng, Guangya Zhou, A. Yu, C. Tan, K. Chen, F. Chau","doi":"10.1109/OMEMS.2010.5672202","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672202","url":null,"abstract":"The paper presents a large rotational angle micromirror base on hypocycloidal electrothermal actuators for circumferential endoscopic imaging. The micromirror consists of a double-side Cr/Au coated high reflective mirror plate (1mm by 0.8mm) laterally supported by two hypocycloidal electrothermal actuators on both sides (Fig. 1(a)). In our design, 1µm PVD Al deposited on 2µm single crystal silicon (SCS) forms a bimorph microstructure with the length of 800 µm and the width of 60µm. Four bimorph structures were staggerly connected in parallel to form a hypocycloidal electrothermal actuator. In this configuration, a metal layer was on a silicon backbone in one bimorph structure while the metal layer was deposited below the silicon backbone in adjacent bimorph structures (Fig. 1(b)). Since the radius of curvature of each bimorph structure is the same, the deflection of each structure is the same. Hence the rotational axis keeps still and there is no lateral shifting effect. Simulations via finite element analysis (FEA) show that the mechanical deflection angle of a micromirror significantly increases by using this actuator design. 141.2° was found in the design with fully double-side Al coated actuators (Fig. 2(a, b)) and 68.6° was found in the design with only frontside Al coated actuators (Fig. 2(c, d)). Micromirrors were fabricated by a post-CMOS MEMS process on 8 inches SOI wafers. An optical microscopic image and a scanning electron microscope (SEM) micrograph of a released micromirror are shown in Fig. 3(a) and (b), respectively. However, so far we have not successfully patterned Al layer below the SCS layer as part of the actuator and therefore only micromirrors equipped by frontside Al coated actuators were experimentally characterized (Fig. 4). ∼35° mechanical deflection was achieved by 2.6 V DC input voltage (Fig. 5). It has a discrepancy in comparison in comparison with the FEA simulation. −3dB cutoff frequency was found to be about 29 Hz as the large signal frequency response (Fig. 5). Current-voltage relationship of an electrothermal actuator is also shown in Fig. 5. A series of frames from a video of a switching micromirror shows various tilting angles of the micromirror under a sinusoidal drive signal with the amplitude of 2.6 V was still with absence of microstructures with backside Al coated, the concept of achieving large deflection angle by using hypocycloidal electrothermal actuators has been demonstrated. Both FEA simulation and experimental results prove the capability of the Single-axis rotational micromirror device.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125402532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672208
C. O’Sullivan
Recent advances in the fabrication of microfluidic platforms initiated during the late 90s have facilitated the realisation of micro total analysis systems [1]. The integration of miniaturised fluidic handling and delivery systems with chemical and biochemical sensors provide applied scientists with powerful tools for in-field measurements away from central laboratories [2]. Amongst the various classes of elements able to transduce a chemical or biochemical events into a measurable signal, electrochemical platforms undoubtedly present the most promising advantages. Electrodes of all type, sizes and geometries can easily be integrated within a microfluidic platform and provide excellent sensitivity and versatility in comparison to other transduction techniques based on for example optical or mass sensing [3]. Furthermore, the associated electronics used to drive the electrochemical detection and signal processing can also be easily miniaturised and integrated onto the same platform by carefully designing application specific integrated circuits [4]. We have recently reported a simple and rapid approach for prototype microfluidics and sensor assembly to perform complex protein and genetic electrochemical assays with excellent reproducibility [5]. The microfluidic platform was realized by high precision milling of polycarbonate sheets, which offers flexibility and rapid turn over of the desired designs. Sixteen-electrode sensor arrays were fabricated using photolithographic deposition technologies in order to realize three-electrodes cells comprising of gold counter and working electrodes as well as silver reference electrode. Fluidic chips and electrode arrays were assembled via a laser machined double-sided adhesive gaskets, creating the microchannels necessary for sample and reagent delivery. Surface chemistry methodologies were evaluated in order to achieve the double function of eliminating non-specific binding and optimal spacing of the anchor biocomponents for maximum accessibility to the target proteins. Storage conditions were optimized, demonstrating a long-term stability of the reporter conjugates jointly stored within a single reservoir in the microsystem. The final system has been optimized in terms of incubation times, temperatures and simultaneous, multiplexed detection of the protein markers was achieved in less than 10 minutes with less than ng/mL detection limits. The microsystem has been validated using real patient serum samples and excellent correlation with ELISA results obtained.
{"title":"Development of an integrated microsystem for the multiplexed detection of protein markers in serum using electrochemical immunosensors","authors":"C. O’Sullivan","doi":"10.1109/OMEMS.2010.5672208","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672208","url":null,"abstract":"Recent advances in the fabrication of microfluidic platforms initiated during the late 90s have facilitated the realisation of micro total analysis systems [1]. The integration of miniaturised fluidic handling and delivery systems with chemical and biochemical sensors provide applied scientists with powerful tools for in-field measurements away from central laboratories [2]. Amongst the various classes of elements able to transduce a chemical or biochemical events into a measurable signal, electrochemical platforms undoubtedly present the most promising advantages. Electrodes of all type, sizes and geometries can easily be integrated within a microfluidic platform and provide excellent sensitivity and versatility in comparison to other transduction techniques based on for example optical or mass sensing [3]. Furthermore, the associated electronics used to drive the electrochemical detection and signal processing can also be easily miniaturised and integrated onto the same platform by carefully designing application specific integrated circuits [4]. We have recently reported a simple and rapid approach for prototype microfluidics and sensor assembly to perform complex protein and genetic electrochemical assays with excellent reproducibility [5]. The microfluidic platform was realized by high precision milling of polycarbonate sheets, which offers flexibility and rapid turn over of the desired designs. Sixteen-electrode sensor arrays were fabricated using photolithographic deposition technologies in order to realize three-electrodes cells comprising of gold counter and working electrodes as well as silver reference electrode. Fluidic chips and electrode arrays were assembled via a laser machined double-sided adhesive gaskets, creating the microchannels necessary for sample and reagent delivery. Surface chemistry methodologies were evaluated in order to achieve the double function of eliminating non-specific binding and optimal spacing of the anchor biocomponents for maximum accessibility to the target proteins. Storage conditions were optimized, demonstrating a long-term stability of the reporter conjugates jointly stored within a single reservoir in the microsystem. The final system has been optimized in terms of incubation times, temperatures and simultaneous, multiplexed detection of the protein markers was achieved in less than 10 minutes with less than ng/mL detection limits. The microsystem has been validated using real patient serum samples and excellent correlation with ELISA results obtained.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125818997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672157
Li Li, G. Thursby, G. Stewart, D. Uttamchandani
We present a novel MEMS application aimed at laser based gas sensing. A low-cost MEMS based external intensity modulator for a laser diode source has been realised and applied to photoacoustic spectroscopy. By using a MEMS based modulator, pure intensity modulation of the laser emission is achieved without the accompanying wavelength modulation which occurs with diode current modulation. This reduces measurement error. We describe the use of the optical MEMS modulator/photoacoustic technique to recover the profile of the 1535.4nm absorption line of acetylene at 100pm concentration in the photoacoustic cell. Based on initial results, we predict a sensitivity of ∼1ppm with this system.
{"title":"MEMS scanning mirror used as an laser external modulator for photoacoustic spectroscopy","authors":"Li Li, G. Thursby, G. Stewart, D. Uttamchandani","doi":"10.1109/OMEMS.2010.5672157","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672157","url":null,"abstract":"We present a novel MEMS application aimed at laser based gas sensing. A low-cost MEMS based external intensity modulator for a laser diode source has been realised and applied to photoacoustic spectroscopy. By using a MEMS based modulator, pure intensity modulation of the laser emission is achieved without the accompanying wavelength modulation which occurs with diode current modulation. This reduces measurement error. We describe the use of the optical MEMS modulator/photoacoustic technique to recover the profile of the 1535.4nm absorption line of acetylene at 100pm concentration in the photoacoustic cell. Based on initial results, we predict a sensitivity of ∼1ppm with this system.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127263782","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672205
Guangya Zhou, Y. Du, K. Cheo, Hongbin Yu, F. Chau
MEMS optical scanners are highly desired due to their low-power, high-speed scanning. The in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning minimizes the dynamic deformation, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis and imaging. Coupling a grating platform to an in-plane moving structure is useful for real-time motion measurement which would otherwise be difficult to analyze. These applications are described including a recent development in the structural design of a double-layer layout which further improves the performance of the grating scanner.
{"title":"Optical scanning with MEMS in-plane vibratory gratings and its applications","authors":"Guangya Zhou, Y. Du, K. Cheo, Hongbin Yu, F. Chau","doi":"10.1109/OMEMS.2010.5672205","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672205","url":null,"abstract":"MEMS optical scanners are highly desired due to their low-power, high-speed scanning. The in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning minimizes the dynamic deformation, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis and imaging. Coupling a grating platform to an in-plane moving structure is useful for real-time motion measurement which would otherwise be difficult to analyze. These applications are described including a recent development in the structural design of a double-layer layout which further improves the performance of the grating scanner.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131597254","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672197
S. Yang, H. Choi, M. Deterre, G. Barbastathis
A new method to fold free standing poly(methyl methacrylate) (PMMA) resist using e-beam exposure is developed and demonstrated. The results prove controllable folding of the patterned PMMA. An explanation of the folding mechanism is proposed based on experimental characterization and theoretical analysis. 3D lithography is achieved by attaching the patterned resist on an adjacent side wall by folding. Patterns are effectively transferred by depositing metal followed by a lift-off process.
{"title":"Nanostructured origami™ folding of patternable resist for 3D lithography","authors":"S. Yang, H. Choi, M. Deterre, G. Barbastathis","doi":"10.1109/OMEMS.2010.5672197","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672197","url":null,"abstract":"A new method to fold free standing poly(methyl methacrylate) (PMMA) resist using e-beam exposure is developed and demonstrated. The results prove controllable folding of the patterned PMMA. An explanation of the folding mechanism is proposed based on experimental characterization and theoretical analysis. 3D lithography is achieved by attaching the patterned resist on an adjacent side wall by folding. Patterns are effectively transferred by depositing metal followed by a lift-off process.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134647219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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