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2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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UmiX series: How to miniaturize FOG technology UmiX系列:如何使FOG技术小型化
Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787535
Sébastien Ferrand, Maxime Rattier, C. Moluçon, Kevin Gautier, Pierrick Cheiney, E. Peter, Marco Mancini
This paper will present the sensor miniaturization strategy for FOG and accelerometers embedded in the UmiX IMU. It will also discuss the performances achieved by the sensors.
本文将介绍在UmiX IMU中嵌入光纤陀螺和加速度计的传感器小型化策略。还将讨论传感器所实现的性能。
{"title":"UmiX series: How to miniaturize FOG technology","authors":"Sébastien Ferrand, Maxime Rattier, C. Moluçon, Kevin Gautier, Pierrick Cheiney, E. Peter, Marco Mancini","doi":"10.1109/INERTIAL53425.2022.9787535","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787535","url":null,"abstract":"This paper will present the sensor miniaturization strategy for FOG and accelerometers embedded in the UmiX IMU. It will also discuss the performances achieved by the sensors.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132417420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
INERTIAL 2022 Preface 惯性2022
Pub Date : 2022-05-08 DOI: 10.1109/inertial53425.2022.9787733
{"title":"INERTIAL 2022 Preface","authors":"","doi":"10.1109/inertial53425.2022.9787733","DOIUrl":"https://doi.org/10.1109/inertial53425.2022.9787733","url":null,"abstract":"","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132982875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
SAR Imaging Challenges on UAV Trajectory Restitution Study Case with SAR-Light Prototype at X-Band 无人机轨迹恢复的SAR成像挑战——以x波段SAR- light原型机为例
Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787523
Nouvel Jean-Francois, Castet Nicolas, Henrion Jérôme
ONERA is working on a research project to design a SAR sensor prototype suitable for operation on board an UAV. In SAR processing domain a precise knowledge of airborne vehicle’s trajectory is needed. After a first validation campaign, analyses of the trajectories show significant instabilities in the post-processing stage of our inertial data. Distribution of ground GNSS stations was not optimal and may be at the origin of this phenomenon. To quantify errors on trajectory, autofocus techniques have been applied and after this step SAR images presented a better focusing proving efficiency of the motion compensation from autofocus algorithm.
ONERA正在进行一项研究项目,设计一种适合在无人机上操作的SAR传感器原型。在SAR处理领域中,需要精确地了解飞行器的运动轨迹。在第一次验证活动之后,对轨迹的分析表明,我们的惯性数据的后处理阶段存在显著的不稳定性。地面GNSS站的分布并不理想,这可能是造成这种现象的原因。为了量化轨迹上的误差,采用了自动对焦技术,经过自动对焦后的SAR图像具有较好的对焦效果,证明了自动对焦算法的运动补偿效率。
{"title":"SAR Imaging Challenges on UAV Trajectory Restitution Study Case with SAR-Light Prototype at X-Band","authors":"Nouvel Jean-Francois, Castet Nicolas, Henrion Jérôme","doi":"10.1109/INERTIAL53425.2022.9787523","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787523","url":null,"abstract":"ONERA is working on a research project to design a SAR sensor prototype suitable for operation on board an UAV. In SAR processing domain a precise knowledge of airborne vehicle’s trajectory is needed. After a first validation campaign, analyses of the trajectories show significant instabilities in the post-processing stage of our inertial data. Distribution of ground GNSS stations was not optimal and may be at the origin of this phenomenon. To quantify errors on trajectory, autofocus techniques have been applied and after this step SAR images presented a better focusing proving efficiency of the motion compensation from autofocus algorithm.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122232310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Temperature Drift Self-calibration for Honeycomb-like Disk Resonator Gyroscope 蜂窝状圆盘谐振陀螺仪的温度漂移自校正
Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787729
Tongqiao Miao, Yi Xu, Qingsong Li, Jiangkun Sun, Xuezhong Wu, D. Xiao, Xiaoping Hu
This paper reports a self-calibrating method based on the mode reversal to real-time compensation the temperature drift of Honeycomb disk resonator gyroscope (HDRG). Through analyzing the mechanism of the temperature drift and designing the experiment of verification, the temperature drift of HDRG can be effectively suppressed. It is demonstrated that the zero-rate bias (ZRB) of HDRG in turn-on period can reach 0.08 °/h (1σ) with self-calibrating method. Also, the bias stability of 1.85 °/h (1σ) is realized when the temperature is changed from 0 ℃ to 60 ℃ at the heating speed of 1 ℃/min. Interestingly, the phenomenon of nonlinear change of ZRB is observed at under variable temperature, which may be due to the thermal stress of the immature packaging of device or the modal coupling between different modes of MEMS resonator. Finally, the approach in this paper is also widely applicable to other vibration inertial sensors with symmetrical mode shapes, which may be useful for ZRB compensation on inertial sensors with high performance.
提出了一种基于模式反转的自校准方法,实时补偿蜂窝盘谐振陀螺仪的温度漂移。通过对温度漂移机理的分析和验证实验的设计,可以有效抑制HDRG的温度漂移。结果表明,采用自校准方法,HDRG在导通周期的零速率偏置(ZRB)可达0.08°/h (1σ)。当升温速度为1℃/min,温度从0℃变化到60℃时,可实现1.85°/h (1σ)的偏置稳定性。有趣的是,在变温度下观察到ZRB的非线性变化现象,这可能是由于器件封装不成熟的热应力或MEMS谐振器不同模式之间的模态耦合造成的。最后,本文的方法也广泛适用于其他具有对称振型的振动惯性传感器,可用于高性能惯性传感器的ZRB补偿。
{"title":"Temperature Drift Self-calibration for Honeycomb-like Disk Resonator Gyroscope","authors":"Tongqiao Miao, Yi Xu, Qingsong Li, Jiangkun Sun, Xuezhong Wu, D. Xiao, Xiaoping Hu","doi":"10.1109/INERTIAL53425.2022.9787729","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787729","url":null,"abstract":"This paper reports a self-calibrating method based on the mode reversal to real-time compensation the temperature drift of Honeycomb disk resonator gyroscope (HDRG). Through analyzing the mechanism of the temperature drift and designing the experiment of verification, the temperature drift of HDRG can be effectively suppressed. It is demonstrated that the zero-rate bias (ZRB) of HDRG in turn-on period can reach 0.08 °/h (1σ) with self-calibrating method. Also, the bias stability of 1.85 °/h (1σ) is realized when the temperature is changed from 0 ℃ to 60 ℃ at the heating speed of 1 ℃/min. Interestingly, the phenomenon of nonlinear change of ZRB is observed at under variable temperature, which may be due to the thermal stress of the immature packaging of device or the modal coupling between different modes of MEMS resonator. Finally, the approach in this paper is also widely applicable to other vibration inertial sensors with symmetrical mode shapes, which may be useful for ZRB compensation on inertial sensors with high performance.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115431996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
An Analtical Model for Vibration Analysis of Disk Resonator Gyroscopes 圆盘谐振陀螺仪振动分析的解析模型
Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787727
Mehran Hosseini‐Pishrobat, Baha Erim Uzunoglu, Derin Erkan, E. Tatar
Disk resonator gyroscopes (DRGs) utilize the circular symmetry of a set of concentric rings to realize high-performance MEMS gyroscopes. We set forth an analytical method to calculate the mode shapes of the rings and then obtain the corresponding modal mass, Coriolis mass, and stiffness. Following the Ritz method, we minimize the total potential energy of the rings subject to the boundary conditions imposed by the spokes that connect the rings. We show the efficacy of our method using the frequency response of a fabricated DRG and comparison with the finite element method (FEM). With respect to the FEM, our modeling is more straightforward, more intuitive, and can be extended to model imperfections and ensuing effects such as quadrature error and frequency split.
圆盘谐振陀螺仪(DRGs)利用一组同心圆环的圆对称性来实现高性能MEMS陀螺仪。提出了一种计算环模态振型的解析方法,从而得到相应的模态质量、科里奥利质量和刚度。根据里兹方法,我们在连接环的辐条所施加的边界条件下,将环的总势能最小化。我们通过制造DRG的频率响应并与有限元法(FEM)进行比较,证明了该方法的有效性。相对于FEM,我们的建模更直接,更直观,并且可以扩展到模型缺陷和随后的影响,如正交误差和频率分裂。
{"title":"An Analtical Model for Vibration Analysis of Disk Resonator Gyroscopes","authors":"Mehran Hosseini‐Pishrobat, Baha Erim Uzunoglu, Derin Erkan, E. Tatar","doi":"10.1109/INERTIAL53425.2022.9787727","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787727","url":null,"abstract":"Disk resonator gyroscopes (DRGs) utilize the circular symmetry of a set of concentric rings to realize high-performance MEMS gyroscopes. We set forth an analytical method to calculate the mode shapes of the rings and then obtain the corresponding modal mass, Coriolis mass, and stiffness. Following the Ritz method, we minimize the total potential energy of the rings subject to the boundary conditions imposed by the spokes that connect the rings. We show the efficacy of our method using the frequency response of a fabricated DRG and comparison with the finite element method (FEM). With respect to the FEM, our modeling is more straightforward, more intuitive, and can be extended to model imperfections and ensuing effects such as quadrature error and frequency split.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121157106","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Gytrix, a novel axisymmetric quartz MEMS gyroscope for navigation purpose Gytrix是一种新型的轴对称石英MEMS导航陀螺仪
Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787719
T. Perrier, O. Traon, R. Lévy, J. Guerard, A. A. Ledier, P. Lavenus
This paper reports a novel axisymmetric quartz MEMS gyroscope, named GYTRIX, able to work -for the first time to our knowledge- as a whole angle gyro. The proposed GYTRIX cell differs from the state of the art by the use of balanced vibration modes, naturally decoupled from the support, and a very simple and pure axisymmetric design, implementing an original principle of decoupling of the useful modes, which gives the resonators very high quality factors. As a proof of concept, the gyroscope presented is designed to operate in open-loop mode in order to facilitate the first characterizations of the cell. Thanks to its symmetry, isotropy and high quality factor, the gyroscope characteristics give up towards a theoretical angular random walk of 0.003°/√h and a bias stability better than 0.1°/h.
本文报道了一种新型轴对称石英MEMS陀螺仪,名为GYTRIX,据我们所知,它首次能够作为一个完整的角度陀螺仪工作。所提出的GYTRIX单元不同于目前的状态,使用平衡的振动模式,自然地从支撑中解耦,以及非常简单和纯粹的轴对称设计,实现了有用模式解耦的原始原理,这给了谐振器非常高的质量因素。作为概念验证,所提出的陀螺仪被设计成在开环模式下运行,以促进细胞的第一次表征。由于其对称性、各向同性和高品质因数,陀螺仪的理论角随机游走为0.003°/√h,偏置稳定性优于0.1°/h。
{"title":"Gytrix, a novel axisymmetric quartz MEMS gyroscope for navigation purpose","authors":"T. Perrier, O. Traon, R. Lévy, J. Guerard, A. A. Ledier, P. Lavenus","doi":"10.1109/INERTIAL53425.2022.9787719","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787719","url":null,"abstract":"This paper reports a novel axisymmetric quartz MEMS gyroscope, named GYTRIX, able to work -for the first time to our knowledge- as a whole angle gyro. The proposed GYTRIX cell differs from the state of the art by the use of balanced vibration modes, naturally decoupled from the support, and a very simple and pure axisymmetric design, implementing an original principle of decoupling of the useful modes, which gives the resonators very high quality factors. As a proof of concept, the gyroscope presented is designed to operate in open-loop mode in order to facilitate the first characterizations of the cell. Thanks to its symmetry, isotropy and high quality factor, the gyroscope characteristics give up towards a theoretical angular random walk of 0.003°/√h and a bias stability better than 0.1°/h.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"2003 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125786190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigating the effects of Silicon etching imperfections on the quadrature error in MEMS gyroscopes 研究硅刻蚀缺陷对MEMS陀螺仪正交误差的影响
Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787765
Alexandre Azier, B. Leverrier, N. Kacem, B. Chaumet, N. Bouhaddi
Due to the structure symmetry of the architecture of most of the highly sensitive MEMS gyroscopes, their native quadrature error is null. However, with the actual precision limitations of the silicon etching processes, some dispersion in the etching of the flexure springs may results in non-zero coupling stiffness between the X and Y-axis, which leads to a quadrature error. As the stiffness of the flexure springs highly depends on its width, it is necessary to investigate the impact of the local width dispersions on the stiffness coupling. In this paper we report on our approach, which is based on the use of Finite Element Analysis (FEA) to determine the evolution of the stiffness matrix of the springs of our gyroscope regarding the bending beam width imperfections. Based on our results, a statistical analysis is carried out in order to evaluate the mean and the standard deviation of the absolute value of the amplitude of the quadrature signal for a given beam width variation. Then, we compare our model to the actual quadrature error of our gyroscopes, which has been measured with a dedicated bench. It turns out that a bending beam width variation of 0.9% leads to a quadrature error discrepancy with the same order of magnitude that the one measured, emphasizing the importance of the consideration of the bending beams width variation during the dimensioning of MEMS gyroscopes, in order to avoid high quadrature error.
由于大多数高灵敏度MEMS陀螺仪的结构对称性,其固有正交误差为零。然而,由于硅蚀刻工艺的实际精度限制,在蚀刻过程中,柔性弹簧的一些分散可能导致X轴和y轴之间的非零耦合刚度,从而导致正交误差。由于柔性弹簧的刚度高度依赖于其宽度,因此有必要研究局部宽度色散对刚度耦合的影响。在本文中,我们报告了我们的方法,这是基于使用有限元分析(FEA)来确定我们的陀螺仪的弹簧的刚度矩阵关于弯曲光束宽度缺陷的演变。在此基础上,对给定波束宽度变化下正交信号振幅绝对值的均值和标准差进行了统计分析。然后,我们将我们的模型与陀螺仪的实际正交误差进行了比较,该误差已在专用台架上测量。结果表明,当弯曲波束宽度变化0.9%时,会产生与测量值相同数量级的正交误差,强调了在MEMS陀螺仪的尺寸设计中考虑弯曲波束宽度变化的重要性,以避免过高的正交误差。
{"title":"Investigating the effects of Silicon etching imperfections on the quadrature error in MEMS gyroscopes","authors":"Alexandre Azier, B. Leverrier, N. Kacem, B. Chaumet, N. Bouhaddi","doi":"10.1109/INERTIAL53425.2022.9787765","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787765","url":null,"abstract":"Due to the structure symmetry of the architecture of most of the highly sensitive MEMS gyroscopes, their native quadrature error is null. However, with the actual precision limitations of the silicon etching processes, some dispersion in the etching of the flexure springs may results in non-zero coupling stiffness between the X and Y-axis, which leads to a quadrature error. As the stiffness of the flexure springs highly depends on its width, it is necessary to investigate the impact of the local width dispersions on the stiffness coupling. In this paper we report on our approach, which is based on the use of Finite Element Analysis (FEA) to determine the evolution of the stiffness matrix of the springs of our gyroscope regarding the bending beam width imperfections. Based on our results, a statistical analysis is carried out in order to evaluate the mean and the standard deviation of the absolute value of the amplitude of the quadrature signal for a given beam width variation. Then, we compare our model to the actual quadrature error of our gyroscopes, which has been measured with a dedicated bench. It turns out that a bending beam width variation of 0.9% leads to a quadrature error discrepancy with the same order of magnitude that the one measured, emphasizing the importance of the consideration of the bending beams width variation during the dimensioning of MEMS gyroscopes, in order to avoid high quadrature error.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125948221","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Noise Reduction by Data Fusion in a Multisensor System of Replicated MEMS Inclinometers 基于数据融合的微机电系统多传感器降噪
Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787531
A. Nastro, M. Ferrari, V. Ferrari, C. I. Mura, Andrea Labombarda, M. Viti, S. D. Feste
A Data Fusion (DF) approach for noise reduction in a system of multiple MEMS inclinometers is presented. The outputs of four inclinometers (ST IIS2CLX), that are nominally identical and set with the same operative conditions, have been acquired for 48 h consecutively. Each acquired dataset has been studied separately employing the Overlapping Allan VARiance (OAVAR) analysis to identify the Velocity Random Walk (VRW) and the Bias Instability (BI) noise contributions. The DF approach based on ensemble averaging across samples has been then applied combining the four acquired datasets, thus creating new datasets DFn, that contain averaged output data of n inclinometers at each acquisition time. The VRW and BI noise contributions of the DFn datasets have been identified through the OAVAR analysis and compared with the noise contributions of single inclinometers. Experimental results have shown a reduction of the noise variance σ2n for both the BI and VRW with a factor 1/n or, equivalently, the noise deviation σn with a factor $1/sqrt n $, in good agreement with theoretical expectations.
提出了一种用于多MEMS测斜仪系统降噪的数据融合(DF)方法。四个倾角仪(ST IIS2CLX)的输出,名义上相同,设置相同的工作条件,连续48小时。利用重叠Allan方差(OAVAR)分析分别对每个获取的数据集进行了研究,以确定速度随机漫步(VRW)和偏差不稳定性(BI)噪声贡献。然后将基于跨样本集合平均的DF方法结合四个采集的数据集,从而创建新的数据集DFn,该数据集包含每次采集时间n个倾角计的平均输出数据。通过OAVAR分析,确定了DFn数据集的VRW和BI噪声贡献,并与单个倾角计的噪声贡献进行了比较。实验结果表明,BI和VRW的噪声方差σ2n减小了1/n,即噪声偏差σn减小了1/ sqrt n,与理论预期很好地吻合。
{"title":"Noise Reduction by Data Fusion in a Multisensor System of Replicated MEMS Inclinometers","authors":"A. Nastro, M. Ferrari, V. Ferrari, C. I. Mura, Andrea Labombarda, M. Viti, S. D. Feste","doi":"10.1109/INERTIAL53425.2022.9787531","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787531","url":null,"abstract":"A Data Fusion (DF) approach for noise reduction in a system of multiple MEMS inclinometers is presented. The outputs of four inclinometers (ST IIS2CLX), that are nominally identical and set with the same operative conditions, have been acquired for 48 h consecutively. Each acquired dataset has been studied separately employing the Overlapping Allan VARiance (OAVAR) analysis to identify the Velocity Random Walk (VRW) and the Bias Instability (BI) noise contributions. The DF approach based on ensemble averaging across samples has been then applied combining the four acquired datasets, thus creating new datasets DFn, that contain averaged output data of n inclinometers at each acquisition time. The VRW and BI noise contributions of the DFn datasets have been identified through the OAVAR analysis and compared with the noise contributions of single inclinometers. Experimental results have shown a reduction of the noise variance σ2n for both the BI and VRW with a factor 1/n or, equivalently, the noise deviation σn with a factor $1/sqrt n $, in good agreement with theoretical expectations.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127343978","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Towards Real-Time Frequency Modulated Accelerometer Bias Calibration 实时调频加速度计偏置校正
Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787522
A. Sabater, Eric Bozeman, S. Hobbs
This work provides experimental demonstration of a bias calibration method for frequency modulated (FM) accelerometers, that, in the future, could be implemented in a real-time fashion. The foundation for this effort is theoretical work that found connections between bias shift and previously underutilized components of the noise spectrum of a relatively novel class of FM accelerometers. Information on the design, simulation, fabrication, and testing of these devices is provided. Based on experiments, it is found that while secondary components of the noise spectrum can be used to track bias drift, effectively monitoring shifts in the constituent oscillator’s frequency provides a better means to observe in-run bias drift. After removing long-term drift, the remaining stationary noise processes can be filtered using autoregressive methods. Within the limits of the experimental setup, the filtered response provides a Gaussian estimate of local gravity with a bias instability of 180 ng at 1,000 sec.
这项工作为调频(FM)加速度计的偏置校准方法提供了实验证明,在未来,可以以实时方式实现。这项工作的基础是理论工作,发现了偏置位移和以前未充分利用的噪声频谱分量之间的联系,这是一类相对新颖的调频加速度计。提供了有关这些器件的设计、模拟、制造和测试的信息。通过实验发现,虽然噪声频谱的次级分量可以用来跟踪偏置漂移,但有效地监测组成振荡器频率的变化为观察运行中偏置漂移提供了更好的手段。在去除长期漂移后,剩余的平稳噪声过程可以使用自回归方法进行滤波。在实验设置的限制下,滤波后的响应提供了一个高斯估计的局部重力,在1000秒内偏差不稳定性为180 ng。
{"title":"Towards Real-Time Frequency Modulated Accelerometer Bias Calibration","authors":"A. Sabater, Eric Bozeman, S. Hobbs","doi":"10.1109/INERTIAL53425.2022.9787522","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787522","url":null,"abstract":"This work provides experimental demonstration of a bias calibration method for frequency modulated (FM) accelerometers, that, in the future, could be implemented in a real-time fashion. The foundation for this effort is theoretical work that found connections between bias shift and previously underutilized components of the noise spectrum of a relatively novel class of FM accelerometers. Information on the design, simulation, fabrication, and testing of these devices is provided. Based on experiments, it is found that while secondary components of the noise spectrum can be used to track bias drift, effectively monitoring shifts in the constituent oscillator’s frequency provides a better means to observe in-run bias drift. After removing long-term drift, the remaining stationary noise processes can be filtered using autoregressive methods. Within the limits of the experimental setup, the filtered response provides a Gaussian estimate of local gravity with a bias instability of 180 ng at 1,000 sec.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127482669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A Transfer Model of High-G Shock for MEMS in Real Working Conditions 真实工作条件下MEMS高g冲击传递模型
Pub Date : 2022-05-08 DOI: 10.1109/INERTIAL53425.2022.9787749
Tianfang Peng, Zheng You
High-g shock is a critical challenge for MEMS. The acceleration that eventually acts on the microstructure of MEMS is usually different from the original shock in terms of amplitude and frequency due to factors like mounting and packaging. This inconsistency makes it difficult to measure the shocks accurately and assess the reliability of MEMS. This paper proposes a system-level transfer model of shock for MEMS in actual working conditions based on the lumped mechanical system model. Numerical and experimental results validated the effectiveness of this model. Mounting and packaging methods, which may influence the transfer process of high-g shock, were then analyzed. Several shock-resistant suggestions based on our model were proposed and experimentally validated.
高g冲击是MEMS面临的关键挑战。由于安装和封装等因素,最终作用于MEMS微结构的加速度通常在振幅和频率方面与原始冲击不同。这种不一致性给精确测量冲击和评估MEMS的可靠性带来了困难。基于集总机械系统模型,提出了微机电系统在实际工况下的系统级冲击传递模型。数值和实验结果验证了该模型的有效性。对影响高g冲击传递过程的安装和封装方法进行了分析。在此基础上提出了若干抗冲击建议,并进行了实验验证。
{"title":"A Transfer Model of High-G Shock for MEMS in Real Working Conditions","authors":"Tianfang Peng, Zheng You","doi":"10.1109/INERTIAL53425.2022.9787749","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787749","url":null,"abstract":"High-g shock is a critical challenge for MEMS. The acceleration that eventually acts on the microstructure of MEMS is usually different from the original shock in terms of amplitude and frequency due to factors like mounting and packaging. This inconsistency makes it difficult to measure the shocks accurately and assess the reliability of MEMS. This paper proposes a system-level transfer model of shock for MEMS in actual working conditions based on the lumped mechanical system model. Numerical and experimental results validated the effectiveness of this model. Mounting and packaging methods, which may influence the transfer process of high-g shock, were then analyzed. Several shock-resistant suggestions based on our model were proposed and experimentally validated.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117313165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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