Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787764
{"title":"INERTIAL 2022 Copyright Page","authors":"","doi":"10.1109/INERTIAL53425.2022.9787764","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787764","url":null,"abstract":"","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"10 9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133871551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787716
G. Delavoipière, K. Kiryukhina, F. Bezerra, D. Lellouchi, O. Gigan, Y. David, A. Filipe, Guillaume Papin
This paper is an open technical document giving valuable information to users when considering a COTS MEMS Gyro for space applications.
本文是一篇开放的技术文档，为考虑用于空间应用的COTS MEMS陀螺仪的用户提供了有价值的信息。
{"title":"COTS MEMS Gyros for space","authors":"G. Delavoipière, K. Kiryukhina, F. Bezerra, D. Lellouchi, O. Gigan, Y. David, A. Filipe, Guillaume Papin","doi":"10.1109/INERTIAL53425.2022.9787716","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787716","url":null,"abstract":"This paper is an open technical document giving valuable information to users when considering a COTS MEMS Gyro for space applications.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128769574","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787756
G. Gattere, F. Rizzini, L. Guerinoni, L. Falorni, C. Valzasina, F. Vercesi, L. Corso, G. Allegato
This paper presents the design, architecture, and characterization of STMicroelectronics first prototype 6-axis Inertial Measurement Unit (IMU) manufactured with a novel micromachining technology. The platform novelty consists in the fabrication of structural and electrical elements using multiple independent thick epitaxial polysilicon layers. The performance of the device with respect to standard technology is deeply analyzed through the state-of-art characterization steps of STMicroelectronics IMU production. The improvements in terms of electrical figures, parametric stability and mechanical robustness are presented.
{"title":"High Performance MEMS IMU with ThELMA-Double Technology","authors":"G. Gattere, F. Rizzini, L. Guerinoni, L. Falorni, C. Valzasina, F. Vercesi, L. Corso, G. Allegato","doi":"10.1109/INERTIAL53425.2022.9787756","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787756","url":null,"abstract":"This paper presents the design, architecture, and characterization of STMicroelectronics first prototype 6-axis Inertial Measurement Unit (IMU) manufactured with a novel micromachining technology. The platform novelty consists in the fabrication of structural and electrical elements using multiple independent thick epitaxial polysilicon layers. The performance of the device with respect to standard technology is deeply analyzed through the state-of-art characterization steps of STMicroelectronics IMU production. The improvements in terms of electrical figures, parametric stability and mechanical robustness are presented.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131028276","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787758
Lukas Blocher, W. Mayer, Miloš Vujadinović, J. Haack, Johannes Hofele, Dusan Radovic, T. Hiller, J. Gerlach, O. Bringmann
This paper examines vehicle navigation employing a redundant array of two different types of MEMS inertial sensors in combination with wheel speed sensors. We compare the position precision of a purely inertial strap-down algorithm with motion-constraints (SMC, [1]) to gyroscope-aided odometry navigation (GAO). An RTK-corrected GNSS was used in parallel to generate the reference trajectory. Initial heading of both methods was determined by a dual-antenna GNSS moving baseline setup. Across five repeated experiments with a traveled distance of 1600 m over 275 s each, GAO delivered a mean RMSE of 4.36 m, whereas SMC resulted in errors of 634 m. For GAO, we show that initial heading error was dominant compared to the influences of gyroscope noise. Determining accurate initial heading is therefore deemed crucial for applications with prolonged GNSS outages.
{"title":"Gyroscope-Aided Odometry Navigation Using a Highly-Precise Automotive MEMS IMU Complemented by a Low-Cost Sensor Array","authors":"Lukas Blocher, W. Mayer, Miloš Vujadinović, J. Haack, Johannes Hofele, Dusan Radovic, T. Hiller, J. Gerlach, O. Bringmann","doi":"10.1109/INERTIAL53425.2022.9787758","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787758","url":null,"abstract":"This paper examines vehicle navigation employing a redundant array of two different types of MEMS inertial sensors in combination with wheel speed sensors. We compare the position precision of a purely inertial strap-down algorithm with motion-constraints (SMC, [1]) to gyroscope-aided odometry navigation (GAO). An RTK-corrected GNSS was used in parallel to generate the reference trajectory. Initial heading of both methods was determined by a dual-antenna GNSS moving baseline setup. Across five repeated experiments with a traveled distance of 1600 m over 275 s each, GAO delivered a mean RMSE of 4.36 m, whereas SMC resulted in errors of 634 m. For GAO, we show that initial heading error was dominant compared to the influences of gyroscope noise. Determining accurate initial heading is therefore deemed crucial for applications with prolonged GNSS outages.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124235331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787741
O. Halevy, S. Krylov
We report on a simple approach allowing systematic construction of compact reduced order models (ROMs) of resonant accelerometers based on the results of few finite element (FE) runs. The ROM accounts for the coupling between the vibrating sensing beams and can be used for the response analysis in frequency and time domains, under open and closed-loop operation. The implementation is first illustrated using an example of a generic accelerometer incorporating two sensing double-ended tuning forks (DETF). Then, a ROM of a realistic device with four proof masses and parallel linkage amplification mechanism is built. The model predictions are consistent with the FE results and the experimental data.
{"title":"Design Methodology and Model Order Reduction for Resonant Accelerometers","authors":"O. Halevy, S. Krylov","doi":"10.1109/INERTIAL53425.2022.9787741","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787741","url":null,"abstract":"We report on a simple approach allowing systematic construction of compact reduced order models (ROMs) of resonant accelerometers based on the results of few finite element (FE) runs. The ROM accounts for the coupling between the vibrating sensing beams and can be used for the response analysis in frequency and time domains, under open and closed-loop operation. The implementation is first illustrated using an example of a generic accelerometer incorporating two sensing double-ended tuning forks (DETF). Then, a ROM of a realistic device with four proof masses and parallel linkage amplification mechanism is built. The model predictions are consistent with the FE results and the experimental data.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"4018 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127537003","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787520
Madan Parajuli, G. Sobreviela, A. Seshia
This paper reports a MEMS Gyroscope based on mechanical frequency modulation. The gyroscope operates by tracking the resonant frequencies of two high-Q degenerate elliptical modes (∼426 kHz) in a vacuum packaged MEMS gyroscope with a novel quatrefoil suspension system, fabricated on a (100) single-crystal silicon substrate. The frequency-based measurement of the input angular rate is realized using two digital phase-locked loops and implementing electrostatic frequency tuning to decrease the frequency split between the two near-degenerate modes from 4 Hz to 0.8 Hz. Measured results demonstrate an angle random walk (ARW) and bias instability (BI) of 0.917 ◦/$sqrt h $ and 6.7 ◦/h respectively, benchmarking favorably in comparison with other state-of-the-art frequency modulated (FM) gyroscopes.
本文报道了一种基于机械调频的微机电系统陀螺仪。陀螺仪的工作原理是跟踪真空封装MEMS陀螺仪中两个高q简并椭圆模式(~ 426 kHz)的谐振频率，该陀螺仪具有一种新型的四箔悬挂系统，制造在(100)单晶硅衬底上。利用两个数字锁相环实现输入角速率的基于频率的测量，并通过静电频率调谐将两个近简并模式之间的频率分裂从4 Hz减小到0.8 Hz。测量结果表明，角度随机漫步(ARW)和偏置不稳定性(BI)分别为0.917◦/$sqrt h $和6.7◦/h，与其他最先进的调频(FM)陀螺仪相比，基准表现良好。
{"title":"Frequency Modulated Operation in a Silicon MEMS Gyroscope with Quatrefoil Suspension System","authors":"Madan Parajuli, G. Sobreviela, A. Seshia","doi":"10.1109/INERTIAL53425.2022.9787520","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787520","url":null,"abstract":"This paper reports a MEMS Gyroscope based on mechanical frequency modulation. The gyroscope operates by tracking the resonant frequencies of two high-Q degenerate elliptical modes (∼426 kHz) in a vacuum packaged MEMS gyroscope with a novel quatrefoil suspension system, fabricated on a (100) single-crystal silicon substrate. The frequency-based measurement of the input angular rate is realized using two digital phase-locked loops and implementing electrostatic frequency tuning to decrease the frequency split between the two near-degenerate modes from 4 Hz to 0.8 Hz. Measured results demonstrate an angle random walk (ARW) and bias instability (BI) of 0.917 ◦/$sqrt h $ and 6.7 ◦/h respectively, benchmarking favorably in comparison with other state-of-the-art frequency modulated (FM) gyroscopes.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129946014","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787525
Danmeng Wang, Wei Guan, M. Asadian, A. Shkel
This paper reports the effect of metallization on performance of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes (micro-HRGs). For capacitive detection of motion, a conductive coating of the sensing element is required, which results in a reduction of the mechanical quality factors as well as an introduction of the electrical resistance. We experimentally demonstrated the impact of metal coating on both the quality factor and the electrical resistance using a developed in-house FS Dual-Shell Gyroscope (DSG), a version of micro-HRG. We derived an electromechanical model, analytically predicted behavior, and experimentally confirmed the effect of electrical resistance on the motion detection sensitivity and the overall noise performance of the DSG. For the device under test, we identified an optimal thickness of Cr coating to achieve a low resistance for optimal noise performance with a minimal loss of the quality factor.
{"title":"Effect of Metallization on Fused Silica Dual-Shell Gyroscopes","authors":"Danmeng Wang, Wei Guan, M. Asadian, A. Shkel","doi":"10.1109/INERTIAL53425.2022.9787525","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787525","url":null,"abstract":"This paper reports the effect of metallization on performance of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes (micro-HRGs). For capacitive detection of motion, a conductive coating of the sensing element is required, which results in a reduction of the mechanical quality factors as well as an introduction of the electrical resistance. We experimentally demonstrated the impact of metal coating on both the quality factor and the electrical resistance using a developed in-house FS Dual-Shell Gyroscope (DSG), a version of micro-HRG. We derived an electromechanical model, analytically predicted behavior, and experimentally confirmed the effect of electrical resistance on the motion detection sensitivity and the overall noise performance of the DSG. For the device under test, we identified an optimal thickness of Cr coating to achieve a low resistance for optimal noise performance with a minimal loss of the quality factor.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125819980","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787725
S. Solbiati, A. Buffoli, V. Megale, G. Damato, B. Lenzi, G. Langfelder, E. Caiani
Ballistocardiography (BCG) is a non-invasive technique that measures the recoil forces of the body in reaction to the cardiac contraction and blood flow through the vessels. This work compares the performance of a virtual reality (VR) headset-embedded gyroscope and of a novel high-performance gyroscope in measuring median HR from the BCG signal obtained from subtle head movements. Nine healthy volunteers were enrolled in this study. Head BCG signals were acquired for 1 minute in supine position using the triaxial gyroscope (VRG) embedded in an Oculus Quest (Facebook) headset, and a monoaxial high-performance gyroscope (HPG). 1-lead ECG signal was acquired simultaneously and used as a gold standard for HR measurement (HRECG). Automatic beat-by-beat identification was performed on the BCG signals, from which median HR was computed (HRVRG and HRHPG). Results obtained with the three sensors were statistically compared, and linear regression and Bland Altman analyses were performed. Pitch and roll head rotations provided more accurate HR estimates compared to the yaw rotation, with more marked peaks in the BCG signal, possibly due to the to the anatomical orientation of the carotid arteries and to how the head is perfused with blood. Also, the HPG outperformed the VRG, thus potentially allowing a more detailed analysis of the BCG signal morphology, with possible application in the extraction of novel biomarkers with clinical utility.
{"title":"Monitoring Cardiac Activity by Detecting Subtle Head Movements Using MEMS Technology","authors":"S. Solbiati, A. Buffoli, V. Megale, G. Damato, B. Lenzi, G. Langfelder, E. Caiani","doi":"10.1109/INERTIAL53425.2022.9787725","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787725","url":null,"abstract":"Ballistocardiography (BCG) is a non-invasive technique that measures the recoil forces of the body in reaction to the cardiac contraction and blood flow through the vessels. This work compares the performance of a virtual reality (VR) headset-embedded gyroscope and of a novel high-performance gyroscope in measuring median HR from the BCG signal obtained from subtle head movements. Nine healthy volunteers were enrolled in this study. Head BCG signals were acquired for 1 minute in supine position using the triaxial gyroscope (VRG) embedded in an Oculus Quest (Facebook) headset, and a monoaxial high-performance gyroscope (HPG). 1-lead ECG signal was acquired simultaneously and used as a gold standard for HR measurement (HRECG). Automatic beat-by-beat identification was performed on the BCG signals, from which median HR was computed (HRVRG and HRHPG). Results obtained with the three sensors were statistically compared, and linear regression and Bland Altman analyses were performed. Pitch and roll head rotations provided more accurate HR estimates compared to the yaw rotation, with more marked peaks in the BCG signal, possibly due to the to the anatomical orientation of the carotid arteries and to how the head is perfused with blood. Also, the HPG outperformed the VRG, thus potentially allowing a more detailed analysis of the BCG signal morphology, with possible application in the extraction of novel biomarkers with clinical utility.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122266141","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787518
Chi-Shih Jao, Danmeng Wang, Austin R. Parrish, A. Shkel
Zero velocity UPdaTe (ZUPT)-aided Inertial Navigation Systems (INS) using foot-mounted Micro-Electro-Mechanical-Systems (MEMS) Inertial Measurement Units (IMUs) have been considered as a promising technology for localization of emergency responders, including firefighters and other personnel, in GPS-denied environments. Most commercially available general purpose MEMS IMUs are sensitive to ambient temperature changes. As a result, ZUPT-aided INS using these devices can have a degraded performance when operating in temperature-varying scenarios. This paper proposed a ZUPT-aided INS enhanced with a Back-Propagation Neural Network (BPNN)-based thermal compensation method. The proposed approach trained 12 different BPNNs to mitigate 12 thermal-induced errors separately, including bias drifts and noise standard deviation variations of accelerometers and gyroscopes along the three axes. We compared the proposed temperature-compensated ZUPT-aided INS with the traditional ZUPT-aided INS with a series of pedestrian indoor walking experiments in both temperature-static and -varying environments. Our experimental results showed that in the static cases, the traditional approach and our proposed approach had similar position Root-Mean-Squared Error (RMSE) of 0.38 m and 0.34 m, respectively. In the varying cases, however, the traditional approach had an RMSE of 9.29 m while our proposed approach significantly reduced the RMSE to 0.57 m.
{"title":"A Neural Network Approach to Mitigate Thermal-Induced Errors in ZUPT-aided INS","authors":"Chi-Shih Jao, Danmeng Wang, Austin R. Parrish, A. Shkel","doi":"10.1109/INERTIAL53425.2022.9787518","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787518","url":null,"abstract":"Zero velocity UPdaTe (ZUPT)-aided Inertial Navigation Systems (INS) using foot-mounted Micro-Electro-Mechanical-Systems (MEMS) Inertial Measurement Units (IMUs) have been considered as a promising technology for localization of emergency responders, including firefighters and other personnel, in GPS-denied environments. Most commercially available general purpose MEMS IMUs are sensitive to ambient temperature changes. As a result, ZUPT-aided INS using these devices can have a degraded performance when operating in temperature-varying scenarios. This paper proposed a ZUPT-aided INS enhanced with a Back-Propagation Neural Network (BPNN)-based thermal compensation method. The proposed approach trained 12 different BPNNs to mitigate 12 thermal-induced errors separately, including bias drifts and noise standard deviation variations of accelerometers and gyroscopes along the three axes. We compared the proposed temperature-compensated ZUPT-aided INS with the traditional ZUPT-aided INS with a series of pedestrian indoor walking experiments in both temperature-static and -varying environments. Our experimental results showed that in the static cases, the traditional approach and our proposed approach had similar position Root-Mean-Squared Error (RMSE) of 0.38 m and 0.34 m, respectively. In the varying cases, however, the traditional approach had an RMSE of 9.29 m while our proposed approach significantly reduced the RMSE to 0.57 m.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"46 9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128167039","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787721
Min Meng, Kai Yang, Wei Su, Shengwei Dong, Hao Zhang, Jie Zhang, He Li, Xi Wang
A novel modeling method based on three-dimensional (3D) computerized tomography (CT) images was developed for the micro hemispherical resonator gyroscope design. Image reconstruction, processing and meshing by a Micro-CT was used for the finite element modeling (FEM), the accuracy of this non-destructive method is up to 0.5 μm. The modal characteristics of the micro shell resonator (MSR) were analyzed based on this modeling method. The obtained modal frequencies (f1, f2) and frequency split (delta f) of two degenerate wine-glass (WG) modes are consistent with the experimental results extracted by a custom-made quality factor tester. The error of estimated f and delta f was as low as 2.3% and 2.9%, respectively, indicating that the modeling method can be used for resonator dynamics characteristics evaluation and prediction.
{"title":"A Novel Modeling Method Based on 3D CT Images for Dynamics Analysis of The Micro-Hemispherical Resonator Gyroscope","authors":"Min Meng, Kai Yang, Wei Su, Shengwei Dong, Hao Zhang, Jie Zhang, He Li, Xi Wang","doi":"10.1109/INERTIAL53425.2022.9787721","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787721","url":null,"abstract":"A novel modeling method based on three-dimensional (3D) computerized tomography (CT) images was developed for the micro hemispherical resonator gyroscope design. Image reconstruction, processing and meshing by a Micro-CT was used for the finite element modeling (FEM), the accuracy of this non-destructive method is up to 0.5 μm. The modal characteristics of the micro shell resonator (MSR) were analyzed based on this modeling method. The obtained modal frequencies (f1, f2) and frequency split (delta f) of two degenerate wine-glass (WG) modes are consistent with the experimental results extracted by a custom-made quality factor tester. The error of estimated f and delta f was as low as 2.3% and 2.9%, respectively, indicating that the modeling method can be used for resonator dynamics characteristics evaluation and prediction.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132597806","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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