Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787761
Vinod Belwanshi, A. Prasad, K. Toland, K. Anastasiou, S. Bramsiepe, R. Middlemiss, D. Paul, G. Hammond
In this work, the effect of temperature change and fabrication tolerances observed from fabricated devices for a geometric anti-spring (GAS) based Microelectromechanical Systems (MEMS) gravimeter is modelled using Finite Element Analysis (FEA). The temperature-induced effects are analysed in terms of the temperature coefficient of deflection (TCD) for GAS flexures of varying cross-section profiles. The simulated models suggest that the maximum TCD is observed at the minimum stiffness operating points of the flexures. The models also suggest that the cross-sectional shape changes due to fabrication tolerances significantly impact the stiffness, and, hence, the resonant frequency of the devices. Interestingly, it is observed that the temperature sensitivities of the simplified models are found to be mainly dependent on the device material (Si), irrespective of the cross-sectional profiles.
{"title":"A Simulation Study of the Temperature Sensitivity and Impact of Fabrication Tolerances on the Performance of a Geometric Anti-Spring Based MEMS Gravimeter","authors":"Vinod Belwanshi, A. Prasad, K. Toland, K. Anastasiou, S. Bramsiepe, R. Middlemiss, D. Paul, G. Hammond","doi":"10.1109/INERTIAL53425.2022.9787761","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787761","url":null,"abstract":"In this work, the effect of temperature change and fabrication tolerances observed from fabricated devices for a geometric anti-spring (GAS) based Microelectromechanical Systems (MEMS) gravimeter is modelled using Finite Element Analysis (FEA). The temperature-induced effects are analysed in terms of the temperature coefficient of deflection (TCD) for GAS flexures of varying cross-section profiles. The simulated models suggest that the maximum TCD is observed at the minimum stiffness operating points of the flexures. The models also suggest that the cross-sectional shape changes due to fabrication tolerances significantly impact the stiffness, and, hence, the resonant frequency of the devices. Interestingly, it is observed that the temperature sensitivities of the simplified models are found to be mainly dependent on the device material (Si), irrespective of the cross-sectional profiles.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130074950","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787737
Jiangkun Sun, Kui Liu, Sheng Yu, X. Xi, Xuezhong Wu, Yongmeng Zhang, D. Xiao
This paper describes the ultrafast characterization method of detection electrode errors under the whole-angle mode. The angle estimation errors, as a direct effect of detection electrode error, are investigated through experiments and theoretical analysis under different detection gain and angle errors. Besides, the consistency of experimental and simulation results proves that the sin and cos components of angle estimation error can be used to characterize detection gain and angle errors respectively. The ultrafast characterization method is proposed based on the analysis of angle estimation error to obtain the compensation parameters of detection electrode errors. After the compensation of detection electrode errors, the angle estimation error has decreased about 200 times to the noise level.
{"title":"Ultra-fast Characterization of Detection Electrode Errors under Whole-angle Mode in 10 Seconds","authors":"Jiangkun Sun, Kui Liu, Sheng Yu, X. Xi, Xuezhong Wu, Yongmeng Zhang, D. Xiao","doi":"10.1109/INERTIAL53425.2022.9787737","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787737","url":null,"abstract":"This paper describes the ultrafast characterization method of detection electrode errors under the whole-angle mode. The angle estimation errors, as a direct effect of detection electrode error, are investigated through experiments and theoretical analysis under different detection gain and angle errors. Besides, the consistency of experimental and simulation results proves that the sin and cos components of angle estimation error can be used to characterize detection gain and angle errors respectively. The ultrafast characterization method is proposed based on the analysis of angle estimation error to obtain the compensation parameters of detection electrode errors. After the compensation of detection electrode errors, the angle estimation error has decreased about 200 times to the noise level.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131635656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787755
Yen-Chieh Wang, Sin-Yun Lu, Min-Chi Chan, Yin-Hsuan Lee, T. Yen, Chia-Chien Wei, Y. Chiu, Ren-Young Liu, Y. Hung
We demonstrate a tactical grade interferometric fiber optics gyroscope (IFOG) based on silicon photonics platform. As-realized silicon chip integrates all passive and active components on the same chip while leaving the light source and fiber coil externally. The proposed Si-based IFOG is a promising alternative to LiNbO3 and MEMS counterparts with a miniaturized footprint and better cost/performance value.
{"title":"CMOS-enabled silicon photonics driver chip for interferometric fiber optics gyroscope","authors":"Yen-Chieh Wang, Sin-Yun Lu, Min-Chi Chan, Yin-Hsuan Lee, T. Yen, Chia-Chien Wei, Y. Chiu, Ren-Young Liu, Y. Hung","doi":"10.1109/INERTIAL53425.2022.9787755","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787755","url":null,"abstract":"We demonstrate a tactical grade interferometric fiber optics gyroscope (IFOG) based on silicon photonics platform. As-realized silicon chip integrates all passive and active components on the same chip while leaving the light source and fiber coil externally. The proposed Si-based IFOG is a promising alternative to LiNbO3 and MEMS counterparts with a miniaturized footprint and better cost/performance value.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132026112","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787698
M. Trigatzis, Marton Kiss-Toth, S. Maddox, I. Riou
This paper reports on the development of a quantum accelerometers that can be embedded in small satellites for atmospheric drag measurement missions. We present payload concepts for single and double axis accelerometers with sensitivities up to 2.3x10-8 m.s-2.Hz-1/2. The effects of rotations on the instrument sensitivity, including contrast loss and Coriolis acceleration, are discussed.
本文报道了一种可嵌入小卫星中用于大气阻力测量任务的量子加速度计的研制。我们提出了单轴和双轴加速度计的有效载荷概念，灵敏度高达2.3x10-8 ms -2 - hz -1/2。讨论了旋转对仪器灵敏度的影响，包括对比度损失和科里奥利加速度。
{"title":"Compact cold atom accelerometer payload for low-Earth orbit atmospheric drag measurement","authors":"M. Trigatzis, Marton Kiss-Toth, S. Maddox, I. Riou","doi":"10.1109/INERTIAL53425.2022.9787698","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787698","url":null,"abstract":"This paper reports on the development of a quantum accelerometers that can be embedded in small satellites for atmospheric drag measurement missions. We present payload concepts for single and double axis accelerometers with sensitivities up to 2.3x10-8 m.s-2.Hz-1/2. The effects of rotations on the instrument sensitivity, including contrast loss and Coriolis acceleration, are discussed.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127956975","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787763
V. Renaudin, Y. Kone, Hanyuan Fu, Ni Zhu
Data-driven methods have attracted the research community from all sectors including positioning-based applications. However, the performances of the AI-based methods depend strongly on the quality of the data. With the fast development of powerful hardware, collecting, storing and training huge databases are not problematic anymore. The true bottleneck to AI is rather getting high-quality labeling of the data, especially for supervised learning. This paper aims at discussing the most suitable and efficient way to label the step instants of wearables, between the choices of using physical approaches and the pattern interpretation approach. Physical approaches refer to using highly accurate foot-mounted equipment to get the step instants then project them on the related body parts. While the pattern interpretation approach relies directly on the signal signatures interpreted with the help of human gait knowledge. It is referred to as the "brain" approach. Two machine learning-based step prediction models are trained with respectively the "physic" and "brain" labeling approach. The performance assessment shows that the step prediction model trained with brain labeling has a true positive detection rate around 85.9% - 95.7% with almost no overdetection while the model trained with physical labeling can only reach 54.7% of true positive rate with a high overdetection rate (around 36.7%).
{"title":"\"Physics\" vs \"Brain\": Challenge of labeling wearable inertial data for step detection for Artificial Intelligence","authors":"V. Renaudin, Y. Kone, Hanyuan Fu, Ni Zhu","doi":"10.1109/INERTIAL53425.2022.9787763","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787763","url":null,"abstract":"Data-driven methods have attracted the research community from all sectors including positioning-based applications. However, the performances of the AI-based methods depend strongly on the quality of the data. With the fast development of powerful hardware, collecting, storing and training huge databases are not problematic anymore. The true bottleneck to AI is rather getting high-quality labeling of the data, especially for supervised learning. This paper aims at discussing the most suitable and efficient way to label the step instants of wearables, between the choices of using physical approaches and the pattern interpretation approach. Physical approaches refer to using highly accurate foot-mounted equipment to get the step instants then project them on the related body parts. While the pattern interpretation approach relies directly on the signal signatures interpreted with the help of human gait knowledge. It is referred to as the \"brain\" approach. Two machine learning-based step prediction models are trained with respectively the \"physic\" and \"brain\" labeling approach. The performance assessment shows that the step prediction model trained with brain labeling has a true positive detection rate around 85.9% - 95.7% with almost no overdetection while the model trained with physical labeling can only reach 54.7% of true positive rate with a high overdetection rate (around 36.7%).","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121428405","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787734
M. Descampeaux, G. Feugnet, F. Bretenaker
We report an original technique for reducing the residual amplitude modulation in a resonator fiber optic gyroscope using fibered components. We illustrate its effectiveness and compare it to the classical method used to control the RAM by checking the photodiode signal spectrum and measuring the free spectral range of the cavity with both methods.
{"title":"Original Technique for Residual Amplitude Modulation Reduction in RFOG","authors":"M. Descampeaux, G. Feugnet, F. Bretenaker","doi":"10.1109/INERTIAL53425.2022.9787734","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787734","url":null,"abstract":"We report an original technique for reducing the residual amplitude modulation in a resonator fiber optic gyroscope using fibered components. We illustrate its effectiveness and compare it to the classical method used to control the RAM by checking the photodiode signal spectrum and measuring the free spectral range of the cavity with both methods.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129172405","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787532
L. Hudeley, O. Traon, T. Perrier, R. Lévy, J. Guerard, A. Bosseboeuf
This paper presents theoretical performances of a novel silicon MEMS Coriolis Vibratory Gyroscope (CVG). Since whole-angle (WA) operation is promising to reach navigation grade, this work proposes an innovative cell design to obtain isotropic in-plane vibration of a central mass, as a Foucault pendulum. This design, based on original link elements between the outer frame and the central mass allows the in plane central mass vibration without energy losses in the outer frame. A FEM calculation shows very low energy losses in the outer frame, of the order of 10-7 of the total energy contained in the resonator. Thus, for a device under vacuum only the thermoelastic losses will limit the Q-factor estimated above 8.5 × 105. We predict with our size design of 2.5 mm × 2.5 mm × 80 µm an angular random walk (ARW) of 0.007 °/√h in close loop configuration. The operating frequency is about 8 kHz and the first eigen mode is above 4.7 kHz, making the device robust to harsh vibratory environments.
介绍了一种新型硅MEMS科里奥利振动陀螺仪(CVG)的理论性能。由于全角(WA)操作有望达到导航级，本工作提出了一种创新的单元设计，以获得中心质量的平面内各向同性振动，如福柯摆。该设计基于原有的外框架与中心质量之间的连接单元，允许中心质量在平面内振动而不造成外框架的能量损失。有限元计算表明，外框架的能量损失非常低，约为谐振器总能量的10-7。因此，对于真空下的器件，只有热弹性损失将限制估计在8.5 × 105以上的q因子。我们预测我们的尺寸设计为2.5 mm × 2.5 mm × 80µm，在闭环配置下角随机游走(ARW)为0.007°/√h。工作频率约为8khz，第一本征模式高于4.7 kHz，使设备在恶劣的振动环境中具有鲁棒性。
{"title":"Planar Foucault pendulum silicon gyro","authors":"L. Hudeley, O. Traon, T. Perrier, R. Lévy, J. Guerard, A. Bosseboeuf","doi":"10.1109/INERTIAL53425.2022.9787532","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787532","url":null,"abstract":"This paper presents theoretical performances of a novel silicon MEMS Coriolis Vibratory Gyroscope (CVG). Since whole-angle (WA) operation is promising to reach navigation grade, this work proposes an innovative cell design to obtain isotropic in-plane vibration of a central mass, as a Foucault pendulum. This design, based on original link elements between the outer frame and the central mass allows the in plane central mass vibration without energy losses in the outer frame. A FEM calculation shows very low energy losses in the outer frame, of the order of 10-7 of the total energy contained in the resonator. Thus, for a device under vacuum only the thermoelastic losses will limit the Q-factor estimated above 8.5 × 105. We predict with our size design of 2.5 mm × 2.5 mm × 80 µm an angular random walk (ARW) of 0.007 °/√h in close loop configuration. The operating frequency is about 8 kHz and the first eigen mode is above 4.7 kHz, making the device robust to harsh vibratory environments.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124866635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787739
C. Yi, Jun Wu, H. Maekoba, A. Parent, T. Ikehashi
This paper reports on a MEMS gravimeter that has a closed-loop system to maintain an ultra-low resonance frequency of 1Hz. The low resonance frequency is attained by using a spring that is the resultant of positive mechanical stiffnesses and negative electrical stiffnesses. Voltage-tunability of the electrical stiffness enables ultra-small and tunable total stiffness. To attain a quick response even at the low resonance frequency, an amplitude monitoring and tuning are done at a higher off-resonance frequency of 330Hz. We demonstrate through simulations that the temperature dependence of the resonance frequency can be eliminated by using closed-loop tuning. To prevent issues caused by the ultra-small stiffness, we employ a force-balanced system that nulls the mass displacement. The sensitivity of the gravimeter is found to be 57V/Gal.
{"title":"Ultra-Low Resonance Frequency Mems Gravimeter with Off-Resonance Closed-Loop Control","authors":"C. Yi, Jun Wu, H. Maekoba, A. Parent, T. Ikehashi","doi":"10.1109/INERTIAL53425.2022.9787739","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787739","url":null,"abstract":"This paper reports on a MEMS gravimeter that has a closed-loop system to maintain an ultra-low resonance frequency of 1Hz. The low resonance frequency is attained by using a spring that is the resultant of positive mechanical stiffnesses and negative electrical stiffnesses. Voltage-tunability of the electrical stiffness enables ultra-small and tunable total stiffness. To attain a quick response even at the low resonance frequency, an amplitude monitoring and tuning are done at a higher off-resonance frequency of 330Hz. We demonstrate through simulations that the temperature dependence of the resonance frequency can be eliminated by using closed-loop tuning. To prevent issues caused by the ultra-small stiffness, we employ a force-balanced system that nulls the mass displacement. The sensitivity of the gravimeter is found to be 57V/Gal.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130047610","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787759
Bin Luo, Zhaoxi Su, J. Shang
This work proposes a glass molding technology for fabricating microstructures. In this method, a relatively higher pressure provided by the thermal decomposition of foaming agents at high temperatures replaces the atmospheric pressure in glass reflow process, which brings about microfabrication ability improvement. A silicon–glass-silicon stack wafer is formed by anodic bonding. The middle borosilicate glass (Type: Borofloat® 33) is driven into the cavities on the mold silicon wafer at high temperatures, forming microstructures. Using this glass molding technology, we have successfully demonstrated a wide variety of glass microstructures including rings, tuning forks, gears, etc.
{"title":"Glass Molding for Microstructures","authors":"Bin Luo, Zhaoxi Su, J. Shang","doi":"10.1109/INERTIAL53425.2022.9787759","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787759","url":null,"abstract":"This work proposes a glass molding technology for fabricating microstructures. In this method, a relatively higher pressure provided by the thermal decomposition of foaming agents at high temperatures replaces the atmospheric pressure in glass reflow process, which brings about microfabrication ability improvement. A silicon–glass-silicon stack wafer is formed by anodic bonding. The middle borosilicate glass (Type: Borofloat® 33) is driven into the cavities on the mold silicon wafer at high temperatures, forming microstructures. Using this glass molding technology, we have successfully demonstrated a wide variety of glass microstructures including rings, tuning forks, gears, etc.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"14 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113980132","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787745
L. G. Pagani, P. Frigerio, Dario Falato, Christian Padovani, F. Rizzini, G. Langfelder
The work presents a novel system formed by a frequency-modulated microelectromechanical system (MEMS) accelerometer and an associated circuit which sustains the anti-phase resonant mode of the MEMS and at the same time operates an active damping of the in-phase, acceleration-sensitive, mode. Within (500x500) µm2, at noise levels in the 50 µg/√Hz range, the system recovers from large (>100 g) shocks in less than 3 ms, which is about 20 times less than in absence of active damping compensation. Additionally, it stands vibrations sweeping around the sensing mode frequency without noticeable effects.
{"title":"Active Shock/Vibes Rejection in FM MEMS Accelerometers","authors":"L. G. Pagani, P. Frigerio, Dario Falato, Christian Padovani, F. Rizzini, G. Langfelder","doi":"10.1109/INERTIAL53425.2022.9787745","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787745","url":null,"abstract":"The work presents a novel system formed by a frequency-modulated microelectromechanical system (MEMS) accelerometer and an associated circuit which sustains the anti-phase resonant mode of the MEMS and at the same time operates an active damping of the in-phase, acceleration-sensitive, mode. Within (500x500) µm2, at noise levels in the 50 µg/√Hz range, the system recovers from large (>100 g) shocks in less than 3 ms, which is about 20 times less than in absence of active damping compensation. Additionally, it stands vibrations sweeping around the sensing mode frequency without noticeable effects.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128492643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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