Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787760
C. Mauc, T. Perrier, R. Lévy, J. Moulin, P. Kayser
This paper presents a resonating quartz MEMS magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials and the differential measurement of the resonance frequencies of two DETFs. It is targeted for applications such as magneto-inertial navigation. This sensor was fabricated using a wet HF/NH4F etching process and its working principle was proven correct with a magnetic sensitivity of 770 Hz/T.
{"title":"Magnetometer based on a quartz MEMS resonator with two DETFs and a stack of magnetic materials","authors":"C. Mauc, T. Perrier, R. Lévy, J. Moulin, P. Kayser","doi":"10.1109/INERTIAL53425.2022.9787760","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787760","url":null,"abstract":"This paper presents a resonating quartz MEMS magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials and the differential measurement of the resonance frequencies of two DETFs. It is targeted for applications such as magneto-inertial navigation. This sensor was fabricated using a wet HF/NH4F etching process and its working principle was proven correct with a magnetic sensitivity of 770 Hz/T.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134494997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787750
S. Weidlich, R. Forke, K. Hiller, D. Bülz, A. Shaporin, H. Kuhn
In this contribution we introduce and describe three electronics for MEMS and ASIC testing. With them it is possible to select best working MEMS- and ASIC dies to set up high performance gyroscope systems. We highlight the Active Probecard which makes it possible to operate and characterize MEMS gyroscopes as a provisionally system already at wafer-level. These results are compared with the resulting system-level tests and coherences are shown. The most influencing parameters on noise level are elaborated. Moreover, first results of the new designed DC quadrature compensation electrodes on noise performance are shown which reduce ARW from 0.07 °/√h to 0.02 °/√h and BI from 1.3 °/h to 0.4 °/h.
{"title":"Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes","authors":"S. Weidlich, R. Forke, K. Hiller, D. Bülz, A. Shaporin, H. Kuhn","doi":"10.1109/INERTIAL53425.2022.9787750","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787750","url":null,"abstract":"In this contribution we introduce and describe three electronics for MEMS and ASIC testing. With them it is possible to select best working MEMS- and ASIC dies to set up high performance gyroscope systems. We highlight the Active Probecard which makes it possible to operate and characterize MEMS gyroscopes as a provisionally system already at wafer-level. These results are compared with the resulting system-level tests and coherences are shown. The most influencing parameters on noise level are elaborated. Moreover, first results of the new designed DC quadrature compensation electrodes on noise performance are shown which reduce ARW from 0.07 °/√h to 0.02 °/√h and BI from 1.3 °/h to 0.4 °/h.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121570547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787751
Ming-Na Tong, Ya Zhang, Qingxin Wang, Jianbo Shao
Aiming at the difficulty and high cost of positioning multiple unmanned surface vessels (USVs), this paper designs a multiple USVs cooperative localization algorithm based on delay square root cubature Kalman filtering. In order to compensate the positioning error caused by the communication delay in the process of cooperative localization, a new filtering method with communication delay is proposed. The measurements are predicted in advance to compensate the state estimation error. The simulation results show that this method can effectively compensate for the positioning error caused by communication delay, and provide a reference for the practice of USVs collaborative positioning engineering.
{"title":"A Cooperative Localization Algorithm Based on Time Delay Square Root Cubature Kalman Filter for USVs","authors":"Ming-Na Tong, Ya Zhang, Qingxin Wang, Jianbo Shao","doi":"10.1109/INERTIAL53425.2022.9787751","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787751","url":null,"abstract":"Aiming at the difficulty and high cost of positioning multiple unmanned surface vessels (USVs), this paper designs a multiple USVs cooperative localization algorithm based on delay square root cubature Kalman filtering. In order to compensate the positioning error caused by the communication delay in the process of cooperative localization, a new filtering method with communication delay is proposed. The measurements are predicted in advance to compensate the state estimation error. The simulation results show that this method can effectively compensate for the positioning error caused by communication delay, and provide a reference for the practice of USVs collaborative positioning engineering.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"433 8","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133911421","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787743
I. Prikhodko
In this paper we discuss Analog Device’s approach to enable safe, reliable autonomous transport by developing highly accurate, real-time sensor fusion for navigation. Our perception sensor suite uses radar, lidar, cameras, and IMUs to provide a trustworthy position of a vehicle in GPS-denied environment. We experimentally demonstrate strapdown inertial navigation for automobiles with position errors reaching GPS-like accuracies by using a tactical-grade IMU and visual/lidar/radar odometry. We analyze the propagation of sensor errors into positional error and compare theory with field test results.
{"title":"Inertial and Imaging Sensor Fusion for an Autonomous Tomorrow","authors":"I. Prikhodko","doi":"10.1109/INERTIAL53425.2022.9787743","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787743","url":null,"abstract":"In this paper we discuss Analog Device’s approach to enable safe, reliable autonomous transport by developing highly accurate, real-time sensor fusion for navigation. Our perception sensor suite uses radar, lidar, cameras, and IMUs to provide a trustworthy position of a vehicle in GPS-denied environment. We experimentally demonstrate strapdown inertial navigation for automobiles with position errors reaching GPS-like accuracies by using a tactical-grade IMU and visual/lidar/radar odometry. We analyze the propagation of sensor errors into positional error and compare theory with field test results.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124981887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787726
D. Serrano, A. Rahafrooz, Ron Lipka, Duane Younkin, K. Nunan, John English, Chih-Mying Chen, R. Hennessy, Y. Jeong, Eugene Ivanov, D. Sullivan, I. Jafri
This paper reports on the design and characterization of a low-noise, wide-bandwidth, mode-matched bulk-acoustic wave (BAW) gyroscope operating in a rotation-rate closed-loop configuration. The high Q (350,000), second-elliptical degenerate modes (4.84 MHz) of a vacuum-packaged (100) single-crystal silicon disk are interfaced with integrated electronics in a force-to-rebalance (FTR) architecture, achieving an angle white noise (AWN) of 0.021 ″/√Hz, an angle random walk (ARW) of 0.017 °/√h, and an Allan deviation of 0.25 °/h in the bias instability (BI) region. By utilizing a relatively low disk polarization voltage of -5 V, the contribution of drive-loop flicker noise, induced by parallel-plate capacitive non-linearity, is significantly reduced. The use of a negative bias voltage, which is internally generated by a new charge pump architecture within the integrated circuit, guarantees that wide tuning and quadrature compensation ranges can still be attained.
{"title":"0.25 deg/h Closed-Loop Bulk Acoustic Wave Gyroscope","authors":"D. Serrano, A. Rahafrooz, Ron Lipka, Duane Younkin, K. Nunan, John English, Chih-Mying Chen, R. Hennessy, Y. Jeong, Eugene Ivanov, D. Sullivan, I. Jafri","doi":"10.1109/INERTIAL53425.2022.9787726","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787726","url":null,"abstract":"This paper reports on the design and characterization of a low-noise, wide-bandwidth, mode-matched bulk-acoustic wave (BAW) gyroscope operating in a rotation-rate closed-loop configuration. The high Q (350,000), second-elliptical degenerate modes (4.84 MHz) of a vacuum-packaged (100) single-crystal silicon disk are interfaced with integrated electronics in a force-to-rebalance (FTR) architecture, achieving an angle white noise (AWN) of 0.021 ″/√Hz, an angle random walk (ARW) of 0.017 °/√h, and an Allan deviation of 0.25 °/h in the bias instability (BI) region. By utilizing a relatively low disk polarization voltage of -5 V, the contribution of drive-loop flicker noise, induced by parallel-plate capacitive non-linearity, is significantly reduced. The use of a negative bias voltage, which is internally generated by a new charge pump architecture within the integrated circuit, guarantees that wide tuning and quadrature compensation ranges can still be attained.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115053568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787767
M. Guessoum, R. Gautier, Q. Bouton, L. Sidorenkov, A. Landragin, R. Geiger
The Sagnac effect is at the heart of the modern precision inertial sensors. An interferometer with a physical area, when spun, exhibits a phase shift at its output. Measuring this phase-shift leads to a direct measurement of the rotation rate. Fundamentally, although well understood, the physics behind this effect lacked precise measurements to be validated.
{"title":"High Stability Two Axis Cold-Atom Gyroscope","authors":"M. Guessoum, R. Gautier, Q. Bouton, L. Sidorenkov, A. Landragin, R. Geiger","doi":"10.1109/INERTIAL53425.2022.9787767","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787767","url":null,"abstract":"The Sagnac effect is at the heart of the modern precision inertial sensors. An interferometer with a physical area, when spun, exhibits a phase shift at its output. Measuring this phase-shift leads to a direct measurement of the rotation rate. Fundamentally, although well understood, the physics behind this effect lacked precise measurements to be validated.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128655368","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787722
Martino De Carlo, F. De Leonardis, F. Dell’Olio, Pietro Peliti, Fabrizio Berton, Mario Lucchesini, V. Passaro
Optical gyroscopes, which exploit the Sagnac effect, are one of the preferred choices for high-resolution sensing of angular velocity. However, their miniaturization and integration for high-resolution sensing is still a challenge in optoelectronics research. In fact, in interferometric fiber-optic gyroscopes (IFOGs) the sensitivity is proportional to the area enclosed by the fiber-optic sensing coil. Whereas, in resonant fiber-optic gyroscopes (RFOGs) and resonant micro-optical gyroscopes (RMOGs) the sensitivity is proportional to the ratio between the area enclosed by the cavity and the perimeter of the cavity. Non-Hermitian optical architectures (especially with parity-time-symmetric Hamiltonians) have been recently proposed in literature to solve this scaling problem. In this work, an anti-parity-time-symmetric gyroscope has been designed with two resonant cavities, indirectly coupled via an auxiliary bus. At the operating condition of the so-called "exceptional point", it is possible to demonstrate that the sensitivity of the gyroscope is independent of the dimensions of the device. Finally, it will be shown that the anti-parity-time-symmetric architectures represent a better choice for angular velocity sensing than the parity-time symmetric version. An enhancement of the sensitivity of several orders of magnitude with respect to standard Sagnac-based gyros with the same footprint is expected.
{"title":"Indirectly-coupled optical resonators for anti-parity-time-symmetric gyroscopes","authors":"Martino De Carlo, F. De Leonardis, F. Dell’Olio, Pietro Peliti, Fabrizio Berton, Mario Lucchesini, V. Passaro","doi":"10.1109/INERTIAL53425.2022.9787722","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787722","url":null,"abstract":"Optical gyroscopes, which exploit the Sagnac effect, are one of the preferred choices for high-resolution sensing of angular velocity. However, their miniaturization and integration for high-resolution sensing is still a challenge in optoelectronics research. In fact, in interferometric fiber-optic gyroscopes (IFOGs) the sensitivity is proportional to the area enclosed by the fiber-optic sensing coil. Whereas, in resonant fiber-optic gyroscopes (RFOGs) and resonant micro-optical gyroscopes (RMOGs) the sensitivity is proportional to the ratio between the area enclosed by the cavity and the perimeter of the cavity. Non-Hermitian optical architectures (especially with parity-time-symmetric Hamiltonians) have been recently proposed in literature to solve this scaling problem. In this work, an anti-parity-time-symmetric gyroscope has been designed with two resonant cavities, indirectly coupled via an auxiliary bus. At the operating condition of the so-called \"exceptional point\", it is possible to demonstrate that the sensitivity of the gyroscope is independent of the dimensions of the device. Finally, it will be shown that the anti-parity-time-symmetric architectures represent a better choice for angular velocity sensing than the parity-time symmetric version. An enhancement of the sensitivity of several orders of magnitude with respect to standard Sagnac-based gyros with the same footprint is expected.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125689885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787747
A. Bonnin, Y. Bidel, J. Bernard, C. Blanchard, M. Cadoret, N. Zahzam, Sylvain Schwartz, A. Bresson
Gravity field mapping from moving vehicles as ship or aircraft allows to cover large regional areas with a spatial resolution ranging from typically 1 to 10 km. In this paper, we present an absolute cold atom gravimeter capable of performing high performance measurements in such dynamical environments. The demonstrated stability and repeatability reached typically few 0.1 × 10−5 m.s−2 in a marine campaign [1] and few 1 ×10−5 m.s−2 in an airborne survey [2]. The intrinsic very high stability of this atom sensor allows to relax many operational constraints linked to drifts or calibration processes and to obtain repeatable and harmonized gravity maps on long time scales.
{"title":"Marine and Airborne Gravimetry with an Absolute Cold Atom Sensor","authors":"A. Bonnin, Y. Bidel, J. Bernard, C. Blanchard, M. Cadoret, N. Zahzam, Sylvain Schwartz, A. Bresson","doi":"10.1109/INERTIAL53425.2022.9787747","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787747","url":null,"abstract":"Gravity field mapping from moving vehicles as ship or aircraft allows to cover large regional areas with a spatial resolution ranging from typically 1 to 10 km. In this paper, we present an absolute cold atom gravimeter capable of performing high performance measurements in such dynamical environments. The demonstrated stability and repeatability reached typically few 0.1 × 10−5 m.s−2 in a marine campaign [1] and few 1 ×10−5 m.s−2 in an airborne survey [2]. The intrinsic very high stability of this atom sensor allows to relax many operational constraints linked to drifts or calibration processes and to obtain repeatable and harmonized gravity maps on long time scales.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133029418","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787529
M. Descampeaux, G. Feugnet, F. Bretenaker, B. Debord, F. Benabid, F. Gérôme, F. Amrani
A resonant fiber ring cavity based on a photonic-bandgap hollow-core fiber is described and characterized. We explore the fine spectral dependence of the transmission losses of this cavity and their impact on the performances of the resulting resonator fiber optic gyroscope (RFOG).
{"title":"Impact of Photonic Bandgap Hollow-Core Fiber Loss Wavelength Dependence on the Performance of RFOG","authors":"M. Descampeaux, G. Feugnet, F. Bretenaker, B. Debord, F. Benabid, F. Gérôme, F. Amrani","doi":"10.1109/INERTIAL53425.2022.9787529","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787529","url":null,"abstract":"A resonant fiber ring cavity based on a photonic-bandgap hollow-core fiber is described and characterized. We explore the fine spectral dependence of the transmission losses of this cavity and their impact on the performances of the resulting resonator fiber optic gyroscope (RFOG).","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125193597","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787527
Eric Bozeman, Minhdao H. Nguyen, Mohammad Alam, J. Onners
This paper presents a method for applying Reinforcement Learning (RL) techniques to extend the holdover time of an inertial system in the absence of aiding from a Global Navigation Satellite System (GNSS). Several RL algorithms were evaluated using this method. The performance results, in terms of positional error, for each algorithm are compared to each other as well as to the results from an unaided Kalman Filter and a navigation-grade Inertial Navigation System.
{"title":"Inertial Navigation Compensation with Reinforcement Learning","authors":"Eric Bozeman, Minhdao H. Nguyen, Mohammad Alam, J. Onners","doi":"10.1109/INERTIAL53425.2022.9787527","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787527","url":null,"abstract":"This paper presents a method for applying Reinforcement Learning (RL) techniques to extend the holdover time of an inertial system in the absence of aiding from a Global Navigation Satellite System (GNSS). Several RL algorithms were evaluated using this method. The performance results, in terms of positional error, for each algorithm are compared to each other as well as to the results from an unaided Kalman Filter and a navigation-grade Inertial Navigation System.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130958146","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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