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Collimated Aerosol Beam Deposition: Sub-5-$mu$m Resolution of Printed Actives and Passives 准直气溶胶束沉积:低于5-$ $ μ $m的印刷活性和被动的分辨率
Pub Date : 2010-05-01 DOI: 10.1109/TADVP.2009.2038615
D. Schulz, J. Hoey, D. Thompson, O. Swenson, S. Han, J. Lovaasen, X. Dai, C. Braun, K. Keller, I. Akhatov
Materials deposition based upon directed aerosol flow has the potential of finding application in the field of flexible electronics where a low-temperature route to printed transistors with high mobilities remains elusive. NDSU has been actively engaged in addressing this opportunity from the following two perspectives: 1) developing an appreciation of the basic physics that dominate aerosol beam deposition toward engineering a robust method that allows the realization of deposited features with sub-5 μm resolution; and, 2) developing an understanding of the mechanistic transformations of silane-based precursor inks toward the formation of electronic materials at atmospheric-pressure. In this paper, we will briefly discuss the genesis of a new materials deposition method termed collimated aerosol beam direct-write (CAB-DW) where precision linewidth control has been realized using a combined theoretical/experimental approach. Next, we will discuss progress using Si6H12 (cyclohexasilane-a liquid silane) as a precursor for solution-processed diodes and transistors. Finally, we demonstrate the ability to CAB-DW Si6H12-based precursor inks for printing Si-based semiconductors.
基于定向气溶胶流的材料沉积在柔性电子领域具有潜在的应用前景,在柔性电子领域,低温途径到具有高迁移率的印刷晶体管仍然难以捉摸。NDSU一直从以下两个方面积极参与解决这一问题:1)发展对主导气溶胶束沉积的基本物理学的认识,以实现低于5 μm分辨率的沉积特征;2)了解硅烷基前驱体油墨在大气压下形成电子材料的机理转变。在本文中,我们将简要讨论一种称为准直气溶胶光束直接写入(CAB-DW)的新材料沉积方法的起源,其中使用理论/实验相结合的方法实现了精确的线宽控制。接下来,我们将讨论使用Si6H12(环己硅烷-一种液体硅烷)作为溶液处理二极管和晶体管的前驱体的进展。最后,我们展示了CAB-DW si6h12基前驱体油墨用于印刷si基半导体的能力。
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引用次数: 18
Synthesis of High-Quality Vertically Aligned Carbon Nanotubes on Bulk Copper Substrate for Thermal Management 用于热管理的高质量垂直排列碳纳米管在大块铜衬底上的合成
Pub Date : 2010-05-01 DOI: 10.1109/TADVP.2009.2034335
Wei Lin, Rongwei Zhang, K. Moon, C. Wong
Vertically aligned carbon nanotubes (VACNTs) grown on bulk copper substrate are of great importance for real-life commercial applications of carbon nanotubes (CNTs) as thermal interface materials in microelectronic packaging. However, their reproducible syntheses have been a great challenge so far. In this study, by introducing a well-controlled conformal Al2O3 support layer on the bulk copper substrate by atomic layer deposition, we reproducibly synthesized VACNTs of good alignment and high quality on the copper substrate. The alignment and the quality were characterized by scanning electron microscope, transmission electron microscope, and Raman spectroscopy. The key roles of the conformal Al2O3 support layer by atomic layer deposition are discussed. This progress may provide a real-life VACNT application for thermal management.
垂直排列的碳纳米管(VACNTs)生长在块状铜衬底上,对于碳纳米管(CNTs)作为微电子封装热界面材料的实际商业应用具有重要意义。然而,到目前为止,他们的可重复性合成一直是一个巨大的挑战。在本研究中,通过原子层沉积在大块铜衬底上引入一层控制良好的共形Al2O3支撑层,我们在铜衬底上可重复性地合成出良好取向和高质量的VACNTs。采用扫描电镜、透射电镜和拉曼光谱对其取向和质量进行了表征。讨论了原子层沉积的保形支撑层的关键作用。这一进展可能为热管理提供一个现实生活中的VACNT应用。
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引用次数: 59
Fast Iterative Solution Algorithms in the Frequency-Domain Layered Finite Element Method for Analyzing Integrated Circuits 集成电路频域分层有限元分析中的快速迭代求解算法
Pub Date : 2010-05-01 DOI: 10.1109/TADVP.2009.2029561
Feng Sheng, H. Gan, D. Jiao
Fast algorithms are developed in this work for solving the system matrix resulting from a frequency-domain layered finite element based analysis of integrated circuits. The frequency-domain layered finite element method represents a 3-D layered system by a 2-D layered system, and further by a single-layered one. The reduced system matrix is generally denser than the original sparse matrix. In this paper, we show that 1) the dense matrix-vector multiplication can be performed in linear complexity; in addition, the reduction cost can be bypassed, 2) an effective preconditioner can be developed to converge the iterative solution of the reduced system matrix in a small number of iterations, and 3) the preconditioner can be solved in linear complexity. As a result, the reduced system matrix can be solved efficiently. The algorithms are rigorous without making any approximation. They apply to any arbitrarily-shaped multilayer structure. Numerical results demonstrated the accuracy, effectiveness, and efficiency of the proposed algorithms in analyzing on-chip circuits.
在这项工作中,开发了快速算法来求解基于集成电路频域分层有限元分析的系统矩阵。频域分层有限元法用二维分层系统表示三维分层系统,再用单层系统表示单层系统。简化后的系统矩阵通常比原始稀疏矩阵更密集。在本文中,我们证明了1)密集矩阵-向量乘法可以在线性复杂度下进行;此外,可以绕过约简代价,2)可以开发有效的预条件,在少量迭代中收敛约简系统矩阵的迭代解,3)预条件可以在线性复杂度中求解。这样可以有效地求解化简后的系统矩阵。算法是严格的,没有做任何近似。它们适用于任意形状的多层结构。数值结果证明了所提算法在分析片上电路时的准确性、有效性和高效性。
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引用次数: 2
Simplified Delay Extraction-Based Passive Transmission Line Macromodeling Algorithm 基于简化延迟提取的无源传输线宏观建模算法
Pub Date : 2010-05-01 DOI: 10.1109/TADVP.2009.2032157
N. Nakhla, M. Nakhla, R. Achar
With higher operating frequencies, signal integrity and interconnect analysis in high-speed designs is becoming increasingly important. Recently, a passive delay extraction-based macromodeling algorithm (DEPACT) has been presented for simulation of long lossy coupled lines. In this paper, a new macromodeling algorithm based on DEPACT is introduced to handle several practical cases of importance, resulting in a simple and compact implementation in SPICE-like circuit simulators. The accuracy and efficiency of the proposed algorithm are validated using several practical examples.
随着工作频率的提高,高速设计中的信号完整性和互连分析变得越来越重要。近年来,提出了一种基于无源延迟提取的宏建模算法(DEPACT),用于长损耗耦合线的仿真。本文介绍了一种新的基于DEPACT的宏建模算法来处理几种重要的实际情况,从而使其在类似spice的电路模拟器中实现简单紧凑。通过实例验证了该算法的准确性和有效性。
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引用次数: 23
Comments on "Influence of Interfacial Compliance on Thermomechanical Stresses in Multilayered Microelectronic Packaging “界面顺应性对多层微电子封装中热机械应力的影响”一文述评
Pub Date : 2010-05-01 DOI: 10.1109/TADVP.2009.2033571
H. Yin
An approach previously developed by Suhir in 1986 for calculating the interfacial compliance of a long-narrow strip is a general, explicit method, but Basaran and Wen claimed that there had been an error in the derivation. Using an additional approximation, they obtained a different form of longitudinal interfacial compliance. However, that approximation is not appropriate. Disregarding it, we can see that their result is the same as Suhir's result. However, a minor inconsistence in Suhir's derivation is still found. The applicability and modification of Suhir's model are discussed.
Suhir早在1986年就提出了一种计算狭长带的界面柔顺性的方法,这是一种通用的显式方法,但Basaran和Wen声称推导过程中存在错误。使用额外的近似,他们获得了一种不同形式的纵向界面顺应性。然而,这种近似是不合适的。不考虑它,我们可以看到他们的结果和Suhir的结果是一样的。然而,在Suhir的推导中仍然发现了一个小的矛盾。讨论了Suhir模型的适用性和修正问题。
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引用次数: 4
Sensitivity Analysis of Lossy Nonuniform Multiconductor Transmission Lines With Nonlinear Terminations 具有非线性终端的有耗非均匀多导体传输线的灵敏度分析
Pub Date : 2010-05-01 DOI: 10.1109/TADVP.2009.2035439
L. Dou, J. Dou
This paper applies the Lax-Friedrichs technique, usually used in fluid dynamics, to transmission line sensitivity analysis. The Lax-Friedrichs difference scheme for sensitivity analysis of both uniform and nonuniform transmission lines is derived. Based on this scheme, a method for analyzing multiconductor transmission line sensitivity, which does not need to be decoupled, is presented by combining with matrix operations. Using numerical experiments, the proposed method is compared with the characteristic method and the fast Fourier transform approach. With the presented method, the sensitivity of a nonlinear circuit including nonuniform multiconductor transmission lines is analyzed and the results are verified by the HSPICE perturbation method. The proposed method can be applied to either linear or nonlinear circuits, which include lossy nonuniform multiconductor transmission lines, and is proved to be efficient.
本文将流体力学中常用的拉克斯-弗里德里希技术应用于传输线的灵敏度分析。推导了均匀和非均匀输电线路灵敏度分析的拉克斯-弗里德里希差分格式。在此基础上,结合矩阵运算,提出了一种无需解耦的多导体传输线灵敏度分析方法。通过数值实验,将该方法与特征法和快速傅里叶变换方法进行了比较。利用该方法对含非均匀多导体传输线的非线性电路进行了灵敏度分析,并用HSPICE微扰法对结果进行了验证。该方法既适用于线性电路,也适用于非线性电路,包括有损耗的非均匀多导体传输线,并被证明是有效的。
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引用次数: 10
Power-Bus Sensitivity Analysis 电源母线灵敏度分析
Pub Date : 2010-05-01 DOI: 10.1109/TADVP.2009.2022322
L. De Camillis, G. Antonini, V. Jandhyala
Design of modern printed circuit boards requires robust simulation techniques to model power-bus structures. A reliable method is the cavity model which assumes small spacing between power and ground planes. Designers often make the proper tradeoffs between conflicting design requirements using optimization techniques, to obtain the best possible performance. To this aim, sensitivity information with respect to power-bus parameters are required by optimizers which employ gradient-based techniques and need the knowledge of sensitivities of the output responses. In this paper, the sensitivity analysis of power-bus structures is presented. Relying on the cavity model, voltage sensitivity is computed in a rational function form or rational polynomial form leading to a time-domain macromodel which can be efficiently interfaced with linear and nonlinear terminations or Spice-like simulators. The simulation results show the accuracy of the proposed approach.
现代印刷电路板的设计需要强大的仿真技术来模拟电源总线结构。一种可靠的方法是假设功率面与地平面间距较小的空腔模型。设计人员经常使用优化技术在相互冲突的设计需求之间做出适当的权衡,以获得最佳性能。为此,采用基于梯度技术的优化器需要有关功率总线参数的灵敏度信息,并且需要了解输出响应的灵敏度。本文对电力母线结构进行了灵敏度分析。基于腔体模型,电压灵敏度以有理函数形式或有理多项式形式计算,从而得到时域宏模型,该模型可以有效地与线性和非线性终端或Spice-like模拟器接口。仿真结果表明了该方法的准确性。
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引用次数: 0
Signal Integrity Analysis of Package and Printed Circuit Board With Multiple Vias in Substrate of Layered Dielectrics 层状介质衬底中多通孔封装和印刷电路板的信号完整性分析
Pub Date : 2010-05-01 DOI: 10.1109/TADVP.2009.2026482
B. Wu, L. Tsang
This paper successfully extends the Foldy-Lax multiple scattering approach to model massively-coupled multiple vias in substrate of layered dielectrics between two horizontal power/ ground plates. The dyadic Green's functions of layered dielectrics are expressed in vector cylindrical waves and modal representations. Formulations are derived for admittances and S-parameters of single via and multiple vias structures. The CPUs and results of S-parameters are illustrated for various sizes of via array. For the case of 16 × 16 via array through hybrid dielectrics in single interior layer, the CPU is about 0.8 s per frequency and is at least three orders of magnitude faster than Ansoft HFSS. The results are within 5% difference of accuracy up to 20 GHz. This full-wave method is able to include all the coupling effects among the multiple vias. It is also shown that the approach of using effective dielectric constant by assuming an effective homogeneous media does not give accurate results.
本文成功地将fold - lax多重散射方法扩展到两个水平电源/接地板之间的层状介质衬底中大量耦合的多个通孔。层状介质的并矢格林函数用矢量柱面波和模态表示。推导了单通孔和多通孔结构的导纳和s参数公式。给出了不同尺寸的通孔阵列的cpu和s参数计算结果。在单内层采用混合介质的16 × 16通孔阵列的情况下,CPU每频率约为0.8 s,比Ansoft HFSS至少快3个数量级。在20ghz范围内,精度误差在5%以内。这种全波方法能够考虑多个过孔之间的所有耦合效应。通过假设有效介质为均匀介质而采用有效介电常数的方法不能得到准确的结果。
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引用次数: 42
Design and Development of Fine Pitch Copper/Low-K Wafer Level Package 小间距铜/低k晶圆级封装的设计与开发
Pub Date : 2010-04-22 DOI: 10.1109/TADVP.2010.2043253
V. S. Rao, Xiaowu Zhang, H. Wee, R. Rajoo, C. Premachandran, V. Kripesh, S. Yoon, J. Lau
Copper (Cu)/low-dielectric constant (K) structures are desired choices for advanced integrated circuits (ICs) as the IC technology moving towards fine pitch, high speed, increased integration and high performance. Copper interconnects with low-k dielectric material improve the performance of ICs by reducing interconnect the RC delay, the cross talk between the adjacent metal lines and the power loss. However, the packaging of Cu/low-k IC device is a challenge for the packaging industry to integrate these devices without any failure during assembly and reliability. The current work presents, 1) the finite element model (FEM) based parametric study on Cu/low-K wafer level package (WLP) reliability and stresses on Cu/low-K layers, and 2) experimental validation of WLP reliability by fabricating the test chips. FEM modeling and simulation results have shown that high aspect ratio interconnects, thinner die, and thinner printed circuit board can reduce the stress in low-k layer and enhance the board level interconnect reliability. Test chip of 7 mm ? 7 mm size is designed with 128 input/output (I/O) off-chip interconnects at 300-?m pitch in two depopulated rows using redistribution layers (RDL). Test chips are fabricated on 200-mm-diameter wafer with blanket black diamond (BD) low-K layers structure. Two different Pb free solder interconnects, thick copper column of 100 ?m height with SnAg solder cap and SnAg solder bump of 150 ?m height with 5-?m-thick copper under bump metallurgy (UBM), are fabricated. The Cu/low-K test chips are assembled onto a two layer high glass transition temperature (Tg) FR-4 substrate using two different types of no-flow underfills (NFU) to build the test vehicles and assembled test vehicles are subjected to various JEDEC standard reliability tests, and related failure analysis is carried out. Cu/low-k WLP with copper column interconnects without no-flow underfill passed 1000 h high-temperature storage (HTS) test, and passed the JEDEC drop test with no-flow underfill. Thin die test vehicles of Cu column interconnects with no-flow underfill and extra solder shown better thermal cycling (TC) performance and the board level TC performance can be improved further using thicker RDL.
随着集成电路技术向细间距、高速、高集成度和高性能发展,铜(Cu)/低介电常数(K)结构成为先进集成电路(IC)的理想选择。采用低k介电材料的铜互连通过降低互连的RC延迟、相邻金属线之间的串扰和功率损耗来提高集成电路的性能。然而,铜/低钾IC器件的封装对于封装行业来说是一个挑战,即在组装和可靠性期间集成这些器件而不会出现任何故障。目前的工作是:1)基于有限元模型(FEM)的Cu/低k晶圆级封装(WLP)可靠性和Cu/低k层应力参数研究;2)通过制作测试芯片对WLP可靠性进行实验验证。有限元建模和仿真结果表明,高纵横比互连、更薄的模具和更薄的印刷电路板可以降低低k层的应力,提高板级互连的可靠性。7毫米测试芯片?7mm尺寸设计有128个输入/输出(I/O)片外互连在300-?使用再分配层(RDL)在两个未填充的行中添加m间距。采用毡状黑金刚石(BD)低钾层结构,在直径200mm的硅片上制备了测试芯片。两种不同的无铅焊料互连,100 μ m高的厚铜柱带SnAg焊锡帽和150 μ m高的SnAg焊锡包带5-?采用碰撞冶金法制备m厚铜。采用两种不同类型的无流底填(NFU)将Cu/low-K测试芯片组装在两层高玻璃化转变温度(Tg) FR-4基板上构建测试车,并对组装好的测试车进行了各种JEDEC标准可靠性测试,并进行了相关的失效分析。铜柱互连无底填料的Cu/low-k WLP通过了1000 h高温储存(HTS)试验,并通过了无底填料的JEDEC跌落试验。采用无流动底填和额外焊料的铜柱互连的薄模试验车辆显示出更好的热循环(TC)性能,并且使用更厚的RDL可以进一步提高板级TC性能。
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引用次数: 7
Three-Dimensional Modelling to Study the Effect of Die-Stacking Shape on Mould Filling During Encapsulation of Microelectronic Chips 三维建模研究微电子芯片封装过程中模具堆积形状对模具填充的影响
Pub Date : 2010-04-15 DOI: 10.1109/TADVP.2009.2034013
M. K. Abdullah, M. Z. Abdullah, M. Mujeebu, Z. M. Ariff, K. A. Ahmad
Multistacked-chip scale package (S-CSP) is a new technology that provides high density electronic package. A fully 3-D numerical model is developed to simulate mould filling behavior in the epoxy moulding compound (EMC) encapsulation of multi-S-CSP. Four different shapes of chip arrangement namely uniform, rotated, z-staggered-Type A and z-staggered-Type B, have been tested. The EMC is treated as a generalized Newtonian fluid (GNF). The developed methodology combines the Kawamura and Kuwahara technique-based finite difference method (FDM) and the robustness of volume-tracking (VOF) method to solve the two-phase flow field around the complex arrangement of microchips in a cavity. The Castro-Macosko rheology model with Arrhenius temperature dependence is adopted in the viscosity model. Short-shot experiments are conducted to investigate the filling patterns at several time intervals. The results show that the rotated shape die-arrangement gives minimum filling time and better mould filling yield. The close agreement between the experimental and simulation results illustrates the applicability of the proposed numerical model.
多层叠芯片规模封装(S-CSP)是一种提供高密度电子封装的新技术。建立了一种全三维数值模型,模拟了多s - csp环氧模压复合物(EMC)封装过程中的充模行为。测试了四种不同形状的芯片排列,即均匀排列、旋转排列、z-交错排列A型和z-交错排列B型。电磁兼容被视为广义牛顿流体(GNF)。该方法结合了基于Kawamura和Kuwahara技术的有限差分法(FDM)和体积跟踪法(VOF)的鲁棒性,求解了微芯片在腔内复杂排列周围的两相流场。粘度模型采用具有Arrhenius温度依赖性的Castro-Macosko流变模型。在不同的时间间隔内进行了短时间试验,研究了填充模式。结果表明,采用旋转型排模可以缩短充型时间,提高充型成品率。实验结果与仿真结果吻合较好,说明了所提数值模型的适用性。
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引用次数: 8
期刊
IEEE Transactions on Advanced Packaging
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