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2008 IEEE 35th International Conference on Plasma Science最新文献

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MHD simulation of conical plasma liners implosion 锥形等离子体衬里内爆的MHD模拟
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4591076
V. Gasilov, A. Boldarev, S. D'yatchenko, E. Kartasheva, O. Golkhovskaya, E. Grabovskiy, V. Alexandrov, I. Frolov, A. Gribov, A. Gritsuk, Y. Laukhin, S. Medovschikov, G. Volkov, K. Mitrofanov, G. Oleynik, A. Samokhin, V.I. Zayatsev, P. Sasorov, V. Smirnov
MHD numerical simulations are applied for multiparameter studies of quasi-spherical magnetic compression of plasma liners created by conical multiwire arrays electrical explosion at ANGARA-5-1 facility (TRINITI) with the discharge current 2 to 3 MA and the pulse rise time about 100 ns. The description of the plasma dynamics at different stages of implosion is reproduced as a result of simulation. Numerical and experimental time profiles of voltage drop at the load and soft X-ray yield power are compared. The effect of the geometry changes upon the implosion process is studied. Numerical simulation is based on 2D RMHD code MARPLE (IMM RAS) using unstructured triangular grids. The code implements one-fluid two-temperature MHD model, grid-characteristic method for radiative energy transfer and the model of prolonged plasma ablation to simulate plasma source. The governing MHD system of is completed by electrical equation for the full circuit including the generator itself, leading-in systems and the discharge chamber with the plasma in it. Equations of state, transport and kinetic coefficients, opacity and emissivity coefficients are taken from the tables. The behavior of the discharge is satisfactorily described in general by the above RMHD model. The plasma ablation model appeared to have a significant effect on both the entire scheme of plasma dynamics and such values as voltage drop at the load and soft X-ray yield power. The improvement of this model based on experimental and theoretical estimations is an issue of the day in 2D and 3D Z-pinch simulations. The MARPLE code calibrated against the conical liners simulations proved to be a useful tool for computations aimed to optimization of the experimental setup for 3D implosion of plasma.
采用MHD数值模拟方法,对在ANGARA-5-1设施(TRINITI)中放电电流为2 ~ 3 MA、脉冲上升时间约为100 ns的锥形多线阵列电爆炸产生的等离子体衬里的准球形磁压缩进行了多参数研究。模拟结果再现了内爆不同阶段等离子体动力学的描述。比较了负载电压降和软x射线屈服功率的数值和实验时间曲线。研究了几何形状变化对内爆过程的影响。数值模拟基于二维RMHD代码MARPLE (IMM RAS),采用非结构化三角网格。实现了一流两温MHD模型、辐射能量传递网格特征法和模拟等离子体源的长时间等离子体烧蚀模型。控制MHD系统是由包括发电机本身、引入系统和等离子体放电室在内的整个电路的电学方程完成的。状态方程、输运和动力学系数、不透明度和发射率系数均取自表格。上述RMHD模型总体上令人满意地描述了放电行为。等离子体烧蚀模型似乎对整个等离子体动力学方案以及负载电压降和软x射线屈服功率等值都有显著影响。基于实验和理论估计的该模型的改进是2D和3D Z-pinch模拟中的一个问题。根据锥形衬里模拟标定的MARPLE程序是优化等离子体三维内爆实验装置的有效计算工具。
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引用次数: 0
The collisional, capacitive RF sheath: models with and without the approximation of a sharp electron edge 碰撞,电容射频护套:模型有和没有尖锐的电子边缘近似
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590656
R. Brinkmann
The transition from quasi-neutrality to charge depletion is one of the characteristic features of the plasma boundary sheath. For modeling purposes, this transition is often described in terms of the so-called step model which assumes a sharp transition point s (electron step) where the electron density ne drops from a value equal to the ion density ni (in the bulk, x>s) to a value of zero (in the sheath, x
从准中性到电荷耗尽的转变是等离子体边界鞘的特征之一。出于建模目的,这种转变通常用所谓的阶梯模型来描述,该模型假设有一个急剧的转变点s(电子阶梯),其中电子密度ne从等于离子密度ni的值(在体中,x>s)下降到零值(在鞘层中,x
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引用次数: 0
Bremmstrahlung target optimization for reflex triodes 反射三极管的轫致靶优化
Pub Date : 2008-06-15 DOI: 10.1063/1.2963090
S. Swanekamp, B. Weber, S. Stephanakis, D. Mosher
Coupled particle-in-cell (PIC) and Monte Carlo simulations of the reflex triode have been performed with tantalum foil thicknesses varying between 2.5 mum (0.0056 times the CSDA range at 1 MeV) to 250 mum (0.56 the CSDA range at 1 MeV). The PIC/Monte Carlo simulations are in good agreement with reflex triode experiments on Gamble II at 1 MV, 1 MA. Experimental measurements and simulations both show that the dose is maximized for a foil thickness of about 20 mum. For foils thicker than 20 mum, the analysis shows that fewer of the 10-100 keV photons escape the foil reducing the dose. For foils thinner than 20 mum, the dose decrease is due to a loss of electron confinement to the foil allowing electrons to drift radially outward and strike a low-atomic-number foil holder which causes the dose to decrease. An examination of the electron orbits shows that for all foil thicknesses electrons initially flow radially inward under the influence of the strong self-magnetic field. If the foil is thick, then electrons lose a significant amount of energy with each interaction with the foil and are absorbed close to the point where they initially interact with the foil. If the foil is thin, electrons lose very little energy with each pass. For very thin foils, the simulations show that, with each pass, the electrons move outward in radius a distance of approximately twice the Larmor radius. Therefore, for thin foils, there are a limited number of passes the electrons can make before moving out of the diode where they strike the foil holder. Based on these results, a formula is derived that is able to predict fairly well the anode thickness that optimizes the dose.
对反射三极管进行了耦合粒子池(PIC)和蒙特卡罗模拟,其中钽箔厚度在2.5 mum (1 MeV时CSDA范围的0.0056倍)到250 mum (1 MeV时CSDA范围的0.56倍)之间变化。PIC/Monte Carlo模拟结果与gamerii上1mv, 1ma的反射三极管实验结果吻合较好。实验测量和模拟结果均表明,当膜厚约为20 μ m时,剂量最大。对于厚度大于20 μ m的箔片,分析表明10-100 keV的光子较少逃离箔片,从而降低了剂量。对于薄于20 μ m的箔片,剂量的减少是由于箔片失去了电子约束,允许电子向外径向漂移并撞击低原子序数的箔片托架,从而导致剂量的减少。对电子轨道的检查表明,对于所有厚度的箔,在强自磁场的影响下,电子最初呈径向向内流动。如果箔很厚,那么电子在每次与箔相互作用时都会损失大量的能量,并且在它们最初与箔相互作用的地方被吸收。如果箔很薄,电子在每次通过时损失很少的能量。对于非常薄的箔,模拟表明,每通过一次,电子向外移动的半径大约是拉莫尔半径的两倍。因此,对于薄箔,有有限数量的通过电子可以使移动出二极管之前,他们击中箔持有人。基于这些结果,导出了一个公式,该公式能够很好地预测最佳剂量的阳极厚度。
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引用次数: 11
Simulation of Doppler reflectometry in turbulent plasmas 紊流等离子体中多普勒反射的模拟
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4591012
C. Lechte, U. Stroth, G. Conway
The absolute plasma density fluctuation strength and its dependence on the fluctuation wave number is determined using Doppler reflectometry as plasma diagnostic. Finite difference time domain code IPF-FD3D is used to investigate the dependence of the returned power from the various plasma conditions.
采用多普勒反射法诊断等离子体,确定了等离子体密度波动的绝对强度及其与波动波数的关系。利用时域有限差分编码IPF-FD3D研究了不同等离子体条件下回波功率的依赖关系。
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引用次数: 0
Solenoidal transport of low-voltage (≤ 20 kV) sheet beams 低压(≤20kv)薄板梁的电磁输运
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4591040
J. Pasour, K. Nguyen, T. Antonsen, P. Larsen, B. Levush
This paper investigates solenoidal transport and show that it is not only feasible but preferred for certain types of devices. In particular, interest in low-voltage (<20 kV), high-power (~10 kW) W-band amplifiers has led to design an extended interaction klystron (EIK) that employs a solenoidal (~9 kG) transport configuration using permanent magnets. The much stronger magnetic field that can be achieved with a solenoidal magnet configuration allows significantly higher perveance beams to be transported, and simulations show excellent beam stability with essentially no current loss over distances of several diocotron growth lengths (typically several cm for millimeter-wave (MMW) device parameters). Semi-empirical scaling laws have been developed that relate the critical beam parameters (voltage, current density, emittance, and aspect ratio) and projected amplifier performance (power and efficiency) to the magnetic focusing strength. The implications of these relationships for the design of compact, low-voltage MMW amplifiers will be presented, and a permanent magnet solenoidal field configuration suitable for a MMW EIK will be described.
本文对螺线管输运进行了研究,表明它不仅是可行的,而且对某些类型的器件是优选的。特别是,对低压(<20 kV),大功率(~10 kW) w波段放大器的兴趣导致设计了一种扩展相互作用速调管(EIK),该管采用永磁体螺线管(~9 kG)传输配置。通过螺线管磁铁结构可以实现更强的磁场,从而可以传输更高性能的光束,并且模拟显示出出色的光束稳定性,在几个二极管生长长度(通常为毫米波(MMW)器件参数的几厘米)的距离上基本上没有电流损失。半经验标度定律已经被开发出来,将临界光束参数(电压、电流密度、发射度和宽高比)和投影放大器性能(功率和效率)与磁聚焦强度联系起来。这些关系对紧凑型低压毫米波放大器设计的影响将被提出,并将描述适合毫米波EIK的永磁螺线管场配置。
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引用次数: 1
Surface wave microplasma for localized etching 局部蚀刻用表面波微等离子体
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590733
J. Narendra, J. Zhang, T. Grotjohn, N. Xi, J. Asmussen
A microwave re-entrant cavity is applied to create a miniature beam of plasma species. A miniature microwave plasma discharge is created using 2.45 GHz microwave energy to generate a discharge inside 1-2 mm inner diameter (i.d.) tubes with a micromachined aperture on the end. Through this aperture the plasma stream for materials processing is formed. The diameter of the plasma stream considered in this study ranges from 2 millimeters down to 10's microns. The I/V characteristics obtained from probe measurements show that the plasma ions pass through the aperture with a aperture hole diameter as small as 14 microns. Additional measurements of the microplasma generated in the discharge tube are performed to determine the electron temperature and gas temperature. Langmuir probe measurements give an electron temperature of approximately 2 eV when the pressure is in the range of 1 - 5 Torr. Optical emission spectroscopy measurements of argon/nitrogen discharge mixtures at 1 Torr in a 2 mm tube with 33 W microwave power give a temperature of 600K - 1200K dependent on the percent argon and nitrogen. The plasma discharge in the tube discharge region is modeled using both a global model and a surface wave discharge model. The flow of the plasma discharge/beam from the source, through the aperture, and down to the substrate surface is also modeled. The modeling results will be compared to experimental results for the size and shape of the region processed by the plasma discharge/beam. A CAD-guided automated path generation system is developed to assist manufacturing micro-structures/patterns automatically using the microplasma applicator. An argon/SF feed gas mixture is used to create a plasma stream with radicals for silicon etching. Also, the etching of Ultra- nanocrystalline Diamond (UNCD) is performed using an argon/oxygen plasma. Data will be reported on the etch results including etch rate and pattern profile for both gas chemistries.
应用微波再入腔来产生等离子体的微型光束。利用2.45 GHz微波能量在1-2 mm内径(i.d)管内产生放电,并在末端形成微机械孔,形成微型微波等离子体放电。通过这个孔形成用于材料加工的等离子体流。本研究考虑的等离子体流直径范围从2毫米到10微米。探针测量得到的I/V特性表明,等离子体离子通过孔径孔径小至14微米的孔径。对放电管中产生的微等离子体进行额外的测量,以确定电子温度和气体温度。当压力在1 - 5 Torr范围内时,Langmuir探针测量得到的电子温度约为2ev。在2毫米管中以33 W微波功率测量1 Torr氩气/氮气放电混合物的光学发射光谱,根据氩气和氮气的百分比,测量温度为600K - 1200K。采用整体模型和表面波放电模型对管放电区域的等离子体放电进行了模拟。等离子体放电/光束从源,通过孔径,并下降到基板表面的流动也被建模。模拟结果将与实验结果进行比较,以确定等离子体放电/光束处理区域的大小和形状。开发了一种cad引导的自动路径生成系统,以帮助使用微等离子体涂抹器自动制造微结构/图案。在硅蚀刻过程中,采用氩气/SF进料气混合物产生具有自由基的等离子体流。同时,利用氩/氧等离子体对超纳米晶金刚石进行了刻蚀。数据将报告蚀刻结果,包括蚀刻速率和两种气体化学的模式剖面。
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引用次数: 0
Theoretical and experimental study of an argon free burning arc dicharge at very high-pressure and low-intensity 超高压低强度无氩燃烧电弧放电的理论与实验研究
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590715
E. Izquierdo, J. González-Aguilar, L. Fulcheri
This paper deals to study a low current intensity, very high-pressure (PGt105 Pa) free-burning argon arc discharge in a tip-tip configuration. A 2D axisymmetric two-temperature fluids model has been developed. The model contains three chemical species (e, Ar, Ar+), the appropriated thermodynamics and transport properties expressed as a function of electron and heavy temperatures and pressure, and the electrodes sheath submodel. Theoretical results were compared with experimental data obtained under pressure comprised between 0,1 to 10 MPa and 0.1 to 500 mA. Highest voltages are obtained at very high pressures and low current intensities. Theoretical model indicates that pressure increment causes an arc diameter reduction. This is due to the augmentation of radial heat losses by natural convection at arc fringes and by conduction due to a better energy transfer by neutral- electrons collisions. Surprisingly, the very high-pressure conditions seems having a stabilizing effect on the arc discharge.
本文研究了一种低电流强度、极高压(pgt105pa)自由燃烧氩弧尖顶结构放电。建立了二维轴对称双温流体模型。该模型包含三种化学物质(e, Ar, Ar+),适当的热力学和输运性质表示为电子和重温度和压力的函数,以及电极鞘子模型。在0.1 ~ 10mpa和0.1 ~ 500ma的压力范围内,对理论结果进行了比较。在非常高的压力和低的电流强度下获得最高电压。理论模型表明,压力增加会导致弧径减小。这是由于电弧边缘的自然对流增加了径向热损失,以及由于中性电子碰撞带来更好的能量传递而产生的传导。令人惊讶的是,高压条件似乎对电弧放电有稳定作用。
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引用次数: 6
Experimental study of xenon and tin discharge produced plasma EUV light source 氙锡放电等离子体极紫外光源的实验研究
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590703
M. Watanabe, N. Kishi, J. Yamada, O. Sakuchi, J. Fei, Zhu Qiushi, A. Okino, K. Horioka, E. Hotta
Recently, a lot of progresses have been made in the field of gas discharge and laser assisted extreme ultraviolet (EUV) light sources. In order to realize the EUV lithography, we have been developing the discharge produced plasma EUV light source with either Xe or Sn fuels. A Xe gas jet Z-pinch discharge system has been developed for generating high quality debris-free EUV emission. A 25kA pulsed power supply system has been constructed and introduced. Observation of optical characteristics are presently in progress. Also, the laser triggered discharge produced plasma with Sn electrode system has been constructed. In our system, after Nd-YAG laser was irradiated on Sn electrode surface for triggering the main discharge, EUV radiation will occur from the generated Sn plasma between electrodes and be collected radially. The maximum discharge current of about 6 kA with a pulse width of 500 ns was supplied to anode-cathode gap. In present study, EUV radiation emitted from gas jet Z- pinch Xe plasma and laser triggered Sn discharge produced plasma was quantitatively measured using an in-band calorimeter. Time-resolved in-band source image measurement was also conducted using a pinhole camera system.
近年来,在气体放电和激光辅助极紫外光源领域取得了很大的进展。为了实现极紫外光刻,我们一直在开发以Xe或Sn为燃料的放电等离子体极紫外光源。为了产生高质量的无碎片EUV辐射,开发了一种Xe气体喷射z夹紧放电系统。构建并介绍了一种25kA脉冲电源系统。光学特性的观测目前正在进行中。此外,还构建了锡电极激光触发放电等离子体系统。在我们的系统中,Nd-YAG激光照射在锡电极表面触发主放电后,在电极之间产生的锡等离子体产生极紫外辐射,并沿径向收集。在阳极-阴极间隙处提供了约6 kA的最大放电电流,脉宽为500 ns。本研究利用带内量热计,定量测量了气体喷射Z夹捏Xe等离子体和激光触发Sn放电等离子体发出的极紫外辐射。利用针孔相机系统进行了带内源图像的时间分辨测量。
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引用次数: 0
Atmospheric oxygen-helium plasma surface modification of medical plastics 医用塑料的常压氧-氦等离子体表面改性
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590932
P. Guschl, R. Hicks, S. MacDavid
This study examines the effect of atmospheric pressure plasma treatment on the surface energy and adhesive bond strength of three medical polymers: acetal copolymer (AC), polycarbonate (PC) and polyethylene terephthalate (PET). Surface treatments were applied with a two-inch plasma beam source and reactive oxygen-helium (~1-3 vol% O2) plasma under 150 and 200 W RF power. Through contact angle measurements and surface energy calculations, the response of these polymers to the plasma was found to be unique. Surface activation was rapid, occurring within 5 to 10 seconds of exposure. The PC and PET surface energies approached ges 70 dyne/cm. The acetal copolymer initially jumped to 58 dyne/cm, then declined with further plasma exposure, possibly due to etching or chain scission of the polymer. Langmuir-Hinshelwood reaction kinetics provided an excellent fit to the surface energy versus time data. Subsequent adhesion tests with epoxy, urethane and acrylate glues revealed large increases in adhesive bond strength for the AC (+50-300%), PC (+20-60%) and PET (+100-350%) following exposure times of 0.25 to 40 s under the plasma beam. At the meeting, I will describe the mechanism for activation of the polymer chains with the atmospheric pressure oxygen plasma.
本研究考察了常压等离子体处理对三种医用聚合物:缩醛共聚物(AC)、聚碳酸酯(PC)和聚对苯二甲酸乙二醇酯(PET)的表面能和粘接强度的影响。在150和200 W的射频功率下,使用两英寸等离子体束源和活性氧-氦(~1-3 vol% O2)等离子体进行表面处理。通过接触角测量和表面能计算,发现这些聚合物对等离子体的响应是独特的。表面激活迅速,在5到10秒内发生。PC和PET表面能接近70达因/cm。缩醛共聚物最初跃升至58达因/厘米,然后随着进一步的等离子暴露而下降,可能是由于聚合物的蚀刻或链断裂。Langmuir-Hinshelwood反应动力学与表面能-时间数据非常吻合。随后用环氧树脂、聚氨酯和丙烯酸酯胶进行的粘合测试显示,在等离子束下暴露0.25至40秒后,AC(+50-300%)、PC(+20-60%)和PET(+100-350%)的粘合强度大幅增加。在会议上,我将描述常压氧等离子体活化聚合物链的机理。
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引用次数: 2
Temporal and spatial evolution of carbon ion beam emission in plasma focus discharges 等离子体聚焦放电中碳离子束发射的时空演化
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590965
A. Henriquez, H. Bhuyan, M. Favre, H. Chuaqui, E. Wyndham
Summary form only given. In plasma focus (PF) a high density, high temperature, short duration Z-pinch like plasma column is formed, following a radial compression phase. The PF is a well known source of energetic ion beams, of characteristic energy from hundreds of keV to tens of MeV. Several theoretical and computational models have been developed in an attempt to explain the ion production and acceleration mechanism in PF discharges. Despite this theoretical effort, a complete explanation of the ion emission mechanism is still not available. We have performed a detailed investigation on the time evolution and angular distribution of PF ion beams. We have previously characterized the main features of ion beam emission in a low energy, 1.8 kJ, 160 kA Mather type PF device, operating in methane. In the present investigation axial and radial biased Faraday cup ion probes, which are also sensitive to XUV radiation, were used simultaneously in conjunction with a radial X-ray detector to correlate the ion beam emission with the different stages in the PF dynamics. We have observed that the ion beams emitted radially are mostly associated with the radial compression phase of the PF discharge, prior to the formation of a Z-pinch like plasma column. At this stage the ion beams composition is dominated by C+2 ions. At later times, around the maximum compression phase, the axial emission becomes dominant and the ion beam composition is found to be mainly C+4 and C+5 ions. In general, the axial ion beam emission is found to be of much higher characteristic energy and flux than the radial emission. These results indicate that no unique mechanism for ion beam emission in PF can be assumed. Based on the time correlations and measured properties of the ion beams, the plasma conditions at the time of the different stages in the ion emission will be discussed, in order to assess the validity of current PF ion beam emission models, which account for different properties of the beams, such as characteristic energy scaling and angular distribution.
只提供摘要形式。在等离子体聚焦(PF)中,在径向压缩阶段之后,形成高密度、高温、短持续时间的z捏状等离子体柱。PF是一种众所周知的高能离子束源,特征能量从数百keV到数十MeV不等。为了解释PF放电中的离子产生和加速机制,已经建立了几个理论和计算模型。尽管在理论上做出了努力,但对离子发射机制的完整解释仍然不可用。我们对PF离子束的时间演化和角度分布进行了详细的研究。我们以前已经描述了在甲烷中工作的低能量,1.8 kJ, 160 kA Mather型PF装置中离子束发射的主要特征。在本研究中,轴向和径向偏置法拉第杯离子探针也对XUV辐射敏感,同时与径向x射线探测器结合使用,将离子束发射与PF动力学的不同阶段相关联。我们已经观察到,离子束径向发射主要与PF放电的径向压缩阶段有关,在形成Z-pinch样等离子体柱之前。在这个阶段,离子束的组成主要是C+2离子。在后期,在最大压缩阶段左右,轴向发射成为主导,离子束成分主要是C+4和C+5离子。一般来说,发现轴向离子束发射比径向发射具有更高的特征能量和通量。这些结果表明,不能假设PF中离子束发射的独特机制。基于离子束的时间相关性和测量性质,讨论了离子束发射不同阶段时的等离子体条件,以评估当前PF离子束发射模型的有效性,这些模型考虑了离子束的不同特性,如特征能量缩放和角度分布。
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引用次数: 0
期刊
2008 IEEE 35th International Conference on Plasma Science
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