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2008 IEEE 35th International Conference on Plasma Science最新文献

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Computer simulation for ion sources optimization 离子源优化的计算机模拟
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590683
I. Litovko, V. Gushenets, E. Oks
Computer simulation for ion sources optimization used for ion implantations is reported. Highly stripped ion source is designed to provide high current beams of multiply charged phosphorous and boron ions for high energy ion implantation. Maximum current transport for boron ions is obtained with the optimisation of geometries of the ion-optical system and experimental setup. The maximum attainable percentage of singly charged B ions was 65% and the total current transport was about 60%.
本文报道了离子注入中离子源优化的计算机模拟。高剥离离子源的目的是为高能离子注入提供高电流的多电荷磷离子和硼离子束。通过优化离子光学系统的几何形状和实验装置,获得了硼离子的最大电流输运。单电荷B离子的最大可达率为65%,总电流输运率约为60%。
{"title":"Computer simulation for ion sources optimization","authors":"I. Litovko, V. Gushenets, E. Oks","doi":"10.1109/PLASMA.2008.4590683","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4590683","url":null,"abstract":"Computer simulation for ion sources optimization used for ion implantations is reported. Highly stripped ion source is designed to provide high current beams of multiply charged phosphorous and boron ions for high energy ion implantation. Maximum current transport for boron ions is obtained with the optimisation of geometries of the ion-optical system and experimental setup. The maximum attainable percentage of singly charged B ions was 65% and the total current transport was about 60%.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77319595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nonlinear dynamics in dual frequency capacitive discharges 双频电容放电的非线性动力学
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590713
D. Ziegler, T. Mussenbrock, R. Brinkmann
This paper proposes an effective nonlinear model which derives from a mathematically demanding spatially resolved model by means of concentrating on the fundamental mode. Based on the obtained mode the interaction of the linear bulk and the nonlinear boundary sheath is analyzed. Comparing the results to traditional linear theory shows that nonlinear effects highly complicate the interaction of bulk and sheath. The low driving frequency as well as the high driving frequency contributes to electron heating within the discharge. It can be shown that this effect of nonlinear electron resonance heating considerably contributes to the total power budget of the discharge. Comparing calculated rf currents with experimentally obtained data provides qualitatively and quantitatively good results.
本文通过集中研究基本模态,提出了一种有效的非线性模型,该模型是由数学上要求很高的空间分辨模型推导而来的。在此基础上,分析了线性体与非线性边界护套的相互作用。结果与传统的线性理论比较表明,非线性效应使体鞘相互作用高度复杂化。低驱动频率和高驱动频率都有助于放电内的电子加热。可以看出,非线性电子共振加热对放电的总功率收支有很大的贡献。将计算的射频电流与实验得到的数据进行比较,在定性和定量上都取得了良好的结果。
{"title":"Nonlinear dynamics in dual frequency capacitive discharges","authors":"D. Ziegler, T. Mussenbrock, R. Brinkmann","doi":"10.1109/PLASMA.2008.4590713","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4590713","url":null,"abstract":"This paper proposes an effective nonlinear model which derives from a mathematically demanding spatially resolved model by means of concentrating on the fundamental mode. Based on the obtained mode the interaction of the linear bulk and the nonlinear boundary sheath is analyzed. Comparing the results to traditional linear theory shows that nonlinear effects highly complicate the interaction of bulk and sheath. The low driving frequency as well as the high driving frequency contributes to electron heating within the discharge. It can be shown that this effect of nonlinear electron resonance heating considerably contributes to the total power budget of the discharge. Comparing calculated rf currents with experimentally obtained data provides qualitatively and quantitatively good results.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83645294","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spark gap resistance for an electrostatic discharge at different pressures 静电放电在不同压力下的火花间隙电阻
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590939
O. Diaz, V. Cooray, F. Roman
Summary form only given. Most of the experimental data available in the literature on electrical discharges is referred to the breakdown characteristics of discharge gaps for different geometries in air. However, in order to understand the physical processes associated with the electrical discharges, it is necessary to obtain experimental data on the temporal variation of current- voltage during the pre-breakdown and the spark stage. This information is necessary to understand how the resistance of the discharge channel varies as a function of time and the energy dissipation during the discharge. The aim of this work present a study performed on a self- breakdown pressured gap, where voltage and current were measured when a fast electrostatic discharge (ESD) occurred between two electrodes. This fast ESD was produced by a floating electrode charged with corona currents, obtaining some hundreds of amperes of peak-current amplitude and a few nanoseconds of risetime and pulse width. The internal gas was dry air at different pressures.
只提供摘要形式。文献中大多数关于放电的实验数据都是关于空气中不同几何形状的放电间隙的击穿特性。然而,为了了解与放电相关的物理过程,有必要获得预击穿和火花阶段电流电压随时间变化的实验数据。这些信息对于理解放电通道的电阻如何随时间和放电期间能量耗散的函数而变化是必要的。本研究的目的是在自击穿压力间隙上进行研究,当两个电极之间发生快速静电放电(ESD)时,测量电压和电流。这种快速ESD是由带电电晕电流的浮动电极产生的,获得了数百安培的峰值电流幅度和几纳秒的上升时间和脉冲宽度。内部气体是不同压力下的干燥空气。
{"title":"Spark gap resistance for an electrostatic discharge at different pressures","authors":"O. Diaz, V. Cooray, F. Roman","doi":"10.1109/PLASMA.2008.4590939","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4590939","url":null,"abstract":"Summary form only given. Most of the experimental data available in the literature on electrical discharges is referred to the breakdown characteristics of discharge gaps for different geometries in air. However, in order to understand the physical processes associated with the electrical discharges, it is necessary to obtain experimental data on the temporal variation of current- voltage during the pre-breakdown and the spark stage. This information is necessary to understand how the resistance of the discharge channel varies as a function of time and the energy dissipation during the discharge. The aim of this work present a study performed on a self- breakdown pressured gap, where voltage and current were measured when a fast electrostatic discharge (ESD) occurred between two electrodes. This fast ESD was produced by a floating electrode charged with corona currents, obtaining some hundreds of amperes of peak-current amplitude and a few nanoseconds of risetime and pulse width. The internal gas was dry air at different pressures.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91301307","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Temperature-dependent transition of discharge pattern during helium cryo plasma 氦低温等离子体放电模式的温度依赖性转变
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590710
J. Choi, Y. Noma, K. Terashima
Summary form only given. New cryogenic plasma source, so-called cryo plasma was established under atmospheric pressure. Cryo dielectric barrier discharge (DBD) system could easily control processing temperature from room temperature to 78 K by liquid nitrogen. Reactor chamber for this experiment consisted of two chambers, the inner and outer chamber. We employed a DBD reactor into the inner chamber and connected an AC power supply operating at a frequency of 20 kHz. Helium as discharge gas was introduced into the inner chamber and the operating pressure was kept at atmospheric pressure, with a steady state condition. And the outer chamber played a role to control and sustain gas temperature by flowing liquid nitrogen as a refrigerant. After experiments, we found out the plasma properties, such as discharge patterns and color, showed the temperature- dependent behavior as gas temperature went down. And this result was closely related with the change of emission spectra measured by optical emission spectroscopy. Conclusively, the change of gas temperature induced a transition of discharge mode. The detail will be discussed at the conference.
只提供摘要形式。在常压下建立了新的低温等离子体源,即低温等离子体。低温介质阻挡放电(DBD)系统可以很容易地通过液氮控制处理温度从室温到78 K。本实验的反应器室由内室和外室两部分组成。我们在内室使用了DBD电抗器,并连接了频率为20khz的交流电源。将氦气作为放电气体引入内腔,操作压力保持在常压下,处于稳态状态。外腔通过流动液态氮作为制冷剂,起到控制和维持气体温度的作用。实验发现,当气体温度降低时,等离子体的放电模式和颜色等特性表现出温度依赖性。这一结果与光学发射光谱测量的发射光谱变化密切相关。最后,气体温度的变化引起了放电模式的转变。细节将在会议上讨论。
{"title":"Temperature-dependent transition of discharge pattern during helium cryo plasma","authors":"J. Choi, Y. Noma, K. Terashima","doi":"10.1109/PLASMA.2008.4590710","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4590710","url":null,"abstract":"Summary form only given. New cryogenic plasma source, so-called cryo plasma was established under atmospheric pressure. Cryo dielectric barrier discharge (DBD) system could easily control processing temperature from room temperature to 78 K by liquid nitrogen. Reactor chamber for this experiment consisted of two chambers, the inner and outer chamber. We employed a DBD reactor into the inner chamber and connected an AC power supply operating at a frequency of 20 kHz. Helium as discharge gas was introduced into the inner chamber and the operating pressure was kept at atmospheric pressure, with a steady state condition. And the outer chamber played a role to control and sustain gas temperature by flowing liquid nitrogen as a refrigerant. After experiments, we found out the plasma properties, such as discharge patterns and color, showed the temperature- dependent behavior as gas temperature went down. And this result was closely related with the change of emission spectra measured by optical emission spectroscopy. Conclusively, the change of gas temperature induced a transition of discharge mode. The detail will be discussed at the conference.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89667593","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Surface analysis of demages on escherichia coli caused by oxygen plasma radicals 氧等离子体自由基对大肠杆菌损伤的表面分析
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590923
K. Eleršič, Z. Vratnica, D. Vujošević, I. Junkar, J. Kovač, M. Mozetič, U. Cvelbar
Inductively coupled oxygen plasma was used to study degradation of Escherichia coli. Bacteria were deposited on a silicon wafer substrate and treated by plasma for different periods. The effect of oxygen plasma ions and neutral oxygen atoms was observed by atomic force microscopy (AFM) and scanning electron microscopy (SEM). The first effect was removal of the envelope - a protective coating bacteria developed during growing. After removing the envelope (capsule), slow etching of the cell wall was observed. Further treatment resulted in gradual removal of the cell wall and after 240s, only ashes remained. Images of plasma interaction steps during bacteria degradation are presented and the plasma radical interaction steps explained by observed damages of bacteria.
采用电感耦合氧等离子体对大肠杆菌的降解进行了研究。将细菌沉积在硅片衬底上,用等离子体处理不同时间。通过原子力显微镜(AFM)和扫描电镜(SEM)观察了氧等离子体离子和中性氧原子的作用。第一个效果是去除包膜——细菌在生长过程中形成的一种保护性涂层。去除包膜(囊)后,观察到细胞壁的缓慢蚀刻。进一步处理导致细胞壁逐渐去除,240s后只剩下灰烬。给出了细菌降解过程中等离子体相互作用步骤的图像,并用观察到的细菌损伤解释了等离子体自由基相互作用步骤。
{"title":"Surface analysis of demages on escherichia coli caused by oxygen plasma radicals","authors":"K. Eleršič, Z. Vratnica, D. Vujošević, I. Junkar, J. Kovač, M. Mozetič, U. Cvelbar","doi":"10.1109/PLASMA.2008.4590923","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4590923","url":null,"abstract":"Inductively coupled oxygen plasma was used to study degradation of Escherichia coli. Bacteria were deposited on a silicon wafer substrate and treated by plasma for different periods. The effect of oxygen plasma ions and neutral oxygen atoms was observed by atomic force microscopy (AFM) and scanning electron microscopy (SEM). The first effect was removal of the envelope - a protective coating bacteria developed during growing. After removing the envelope (capsule), slow etching of the cell wall was observed. Further treatment resulted in gradual removal of the cell wall and after 240s, only ashes remained. Images of plasma interaction steps during bacteria degradation are presented and the plasma radical interaction steps explained by observed damages of bacteria.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73553706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spectral investigation of a fireball in low-temperature argon plasma 低温氩等离子体中火球的光谱研究
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590643
S. Guare, D. Dimitriu, C. Ionita, R. Schrittwieser
Summary form only given. By positively biasing an electrode immersed into low-temperature plasma up to a certain threshold value, a complex space charge structure appears in front of it, in form of a luminous quasi-spherical plasma body. This structure was sometimes called anode glow, ball of fire or fireball. Experimental investigation shown that such a structure consists of a positive nucleus (ion-enriched plasma) confined by an electrical double layers. The potential drop across the double layer is almost equal to the ionization potential of the background gas atoms. By accelerating the electrons from the surrounding plasma through this potential drop, the double layer can maintain the equilibrium between the production and the losses of the charged particles (electrons and positive ions), ensuring the existence of the structure. Here we report on the spectral investigation of such a complex space charge structure, in argon plasma. The spectral domain was 550-750 nm, identifying the lines corresponding to different excited states of the argon. The spectral profile of the fireball was obtained by recording the spectra at different positions in front of the electrode. The obtained results shed a new light on the elementary processes at the origin of the appearance and dynamics of the fireball, namely the electron-neutral impact excitations and ionizations.
只提供摘要形式。将电极浸入低温等离子体中,使其正偏置到一定的阈值,在其面前出现复杂的空间电荷结构,即发光的准球形等离子体。这种结构有时被称为阳极辉光、火球或火球。实验研究表明,这种结构由一个被电双层限制的正核(富离子等离子体)组成。跨双层的电势下降几乎等于背景气体原子的电离电势。通过这种电位下降加速来自周围等离子体的电子,双层可以保持带电粒子(电子和正离子)的产生和损失之间的平衡,确保结构的存在。本文报道了氩等离子体中这种复杂空间电荷结构的光谱研究。光谱域为550 ~ 750nm,可以识别出氩的不同激发态对应的谱线。通过记录电极前不同位置的光谱,得到了火球的光谱轮廓。所得结果对火球外观和动力学起源的基本过程,即电子中性撞击激发和电离有了新的认识。
{"title":"Spectral investigation of a fireball in low-temperature argon plasma","authors":"S. Guare, D. Dimitriu, C. Ionita, R. Schrittwieser","doi":"10.1109/PLASMA.2008.4590643","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4590643","url":null,"abstract":"Summary form only given. By positively biasing an electrode immersed into low-temperature plasma up to a certain threshold value, a complex space charge structure appears in front of it, in form of a luminous quasi-spherical plasma body. This structure was sometimes called anode glow, ball of fire or fireball. Experimental investigation shown that such a structure consists of a positive nucleus (ion-enriched plasma) confined by an electrical double layers. The potential drop across the double layer is almost equal to the ionization potential of the background gas atoms. By accelerating the electrons from the surrounding plasma through this potential drop, the double layer can maintain the equilibrium between the production and the losses of the charged particles (electrons and positive ions), ensuring the existence of the structure. Here we report on the spectral investigation of such a complex space charge structure, in argon plasma. The spectral domain was 550-750 nm, identifying the lines corresponding to different excited states of the argon. The spectral profile of the fireball was obtained by recording the spectra at different positions in front of the electrode. The obtained results shed a new light on the elementary processes at the origin of the appearance and dynamics of the fireball, namely the electron-neutral impact excitations and ionizations.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75402403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A microstrip-line microwave interferometer for monitoring of plasma density of processing plasmas 用于监测加工等离子体等离子体密度的微带线微波干涉仪
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590662
C. Hsieh, Y.W. Liang, C. Lin, K. Leou
Summary form only given. We developed a planar transmission-line microwave interferometer for monitoring of electron density for applications in process real-time feedback control of plasma based semiconductor fabrication tools, such plasma etchers or PECVDs. The principle of this technique is the same as the conventional microwave interferometers except that the sensing microwave propagates along a transmission line structure. In this study, the sensor was a microstrip transmission-line where microwave propagates at a phase velocity determined by the structure and the electron density of the surrounding plasma. Thus the variation of plasma density can be estimated from the phase shift of the transmitted microwave from one to the other end of the transmission-line. Compared to the conventional microwave interferometers where line-averaged plasma density is measured, the transmission-line type microwave sensor will be less susceptive to the interference caused by multi-passes reflection/refraction effect resulting from nonuniformity of the plasma density profiles. Therefore, it provides a measurement of higher sensitivity and wider dynamic range. In this work, an U-shaped transmission line with 3 mm in width and 86 mm in length, the quartz based substrate thickness is 3.5 mm, and the distance between input and output ports is 23 mm. The dispersion characteristics of this microstrip line immersed in a plasma of different electron densities was simulated by using a commercial tool, High Frequency Structure Simulation code (Ansoft HFSS), a full- wave electromagnetic simulator using the finite element method. The simulation results show that the phase shift increases gradually with the plasma electron density with a sensitivity 12 degree / 1010 cm"3. Experimental demonstration has been performed with an inductively coupled plasma. The sensor was mounted on the inner wall of plasma chamber. Measurement results show that the dependence of electron density of plasma source RF power predicted by the sensor agrees with the Hairpin probe measurements.
只提供摘要形式。我们开发了一种平面传输在线微波干涉仪,用于监测电子密度,用于等离子体半导体制造工具(如等离子体蚀刻器或pecvd)的过程实时反馈控制。该技术的原理与传统的微波干涉仪相同,只是感测微波沿传输线结构传播。在本研究中,传感器是微带在线传输线,微波以由周围等离子体的结构和电子密度决定的相速度传播。因此,等离子体密度的变化可以通过发射微波从传输线上一端到另一端的相移来估计。与测量等离子体密度线平均的传统微波干涉仪相比,传输在线型微波干涉仪不易受等离子体密度分布不均匀性引起的多道反射/折射效应的干扰。因此,它提供了更高的灵敏度和更宽的动态范围的测量。本作品采用宽3mm,长86mm的u型传输线,石英基衬底厚度为3.5 mm,输入输出端口之间的距离为23mm。利用商用全波电磁仿真软件Ansoft HFSS对微带线在不同电子密度等离子体中的色散特性进行了有限元模拟。仿真结果表明,随着等离子体电子密度的增大,相移逐渐增大,灵敏度为12度/ 1010 cm”3。用电感耦合等离子体进行了实验验证。传感器安装在等离子腔内壁上。测量结果表明,传感器预测的等离子体源射频功率的电子密度依赖关系与发夹探针的测量结果吻合。
{"title":"A microstrip-line microwave interferometer for monitoring of plasma density of processing plasmas","authors":"C. Hsieh, Y.W. Liang, C. Lin, K. Leou","doi":"10.1109/PLASMA.2008.4590662","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4590662","url":null,"abstract":"Summary form only given. We developed a planar transmission-line microwave interferometer for monitoring of electron density for applications in process real-time feedback control of plasma based semiconductor fabrication tools, such plasma etchers or PECVDs. The principle of this technique is the same as the conventional microwave interferometers except that the sensing microwave propagates along a transmission line structure. In this study, the sensor was a microstrip transmission-line where microwave propagates at a phase velocity determined by the structure and the electron density of the surrounding plasma. Thus the variation of plasma density can be estimated from the phase shift of the transmitted microwave from one to the other end of the transmission-line. Compared to the conventional microwave interferometers where line-averaged plasma density is measured, the transmission-line type microwave sensor will be less susceptive to the interference caused by multi-passes reflection/refraction effect resulting from nonuniformity of the plasma density profiles. Therefore, it provides a measurement of higher sensitivity and wider dynamic range. In this work, an U-shaped transmission line with 3 mm in width and 86 mm in length, the quartz based substrate thickness is 3.5 mm, and the distance between input and output ports is 23 mm. The dispersion characteristics of this microstrip line immersed in a plasma of different electron densities was simulated by using a commercial tool, High Frequency Structure Simulation code (Ansoft HFSS), a full- wave electromagnetic simulator using the finite element method. The simulation results show that the phase shift increases gradually with the plasma electron density with a sensitivity 12 degree / 1010 cm\"3. Experimental demonstration has been performed with an inductively coupled plasma. The sensor was mounted on the inner wall of plasma chamber. Measurement results show that the dependence of electron density of plasma source RF power predicted by the sensor agrees with the Hairpin probe measurements.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77957392","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Control of electron beam in bubble regime produced by high intense laser plasma interaction 高强度激光等离子体相互作用产生的气泡区电子束的控制
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4591063
P. Zobdeh, R. Sadighi-Bonabi, H. Afarideh
Ultrashort laser sources have been developed by the C.PA technique in the recent years .This progress causes to produce quasi-monoenergetic electron during the laser-plasma interaction. Such high quality electron beams are generated by different mechanisms. One of the new and effective methods is to prepare the cavity or bubble regime when an ultrashort laser pulse propagates in underdense plasma. In this work we discuss about how to control the output electron energy beam in the cavity regime with using a proper parabolic plasma density profile and discuss about quality of the mentioned beam. The result shows the mentioned profile can control gain and energy of the quasi-monoenergetic electron beam.
近年来利用C.PA技术开发了超短激光源,这一进展使激光与等离子体相互作用产生准单能电子。这种高质量的电子束是由不同的机制产生的。制备超短激光脉冲在低密度等离子体中传播时的空腔或泡区是一种新的有效方法。本文讨论了如何利用合适的抛物等离子体密度分布来控制腔态下输出的电子能量束,并讨论了束流的质量问题。结果表明,该结构可以控制准单能电子束的增益和能量。
{"title":"Control of electron beam in bubble regime produced by high intense laser plasma interaction","authors":"P. Zobdeh, R. Sadighi-Bonabi, H. Afarideh","doi":"10.1109/PLASMA.2008.4591063","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4591063","url":null,"abstract":"Ultrashort laser sources have been developed by the C.PA technique in the recent years .This progress causes to produce quasi-monoenergetic electron during the laser-plasma interaction. Such high quality electron beams are generated by different mechanisms. One of the new and effective methods is to prepare the cavity or bubble regime when an ultrashort laser pulse propagates in underdense plasma. In this work we discuss about how to control the output electron energy beam in the cavity regime with using a proper parabolic plasma density profile and discuss about quality of the mentioned beam. The result shows the mentioned profile can control gain and energy of the quasi-monoenergetic electron beam.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77994953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Transmembrane potential measurements of mammalian and plant cells 哺乳动物和植物细胞的跨膜电位测量
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590821
T. Berghofer, C. Eing, B. Flickinger, C. Gusbeth, R. Strassner, W. Frey, S. Schneider
Summary form only given. Pulsed laser fluorescence microscopy (PLFM) using the voltage sensitive dye ANNINE-6 permits measurements of transmembrane potentials of biological cells with a time resolution of five nanoseconds. Several theories have been proposed to explain the change of the membrane conductivity in response to an external electric field, e.g. pore-models, phase transitions due to electro-compression or local disturbances in the membrane caused by lipid rafts. The measured field-strength-dependence of the transmembrane potential of both mammalian and plant cells exhibits a saturation character which is supposed to occur due to the formation of nano/micropores. For mammalian cells with a typical diameter of 15 mum saturation effects set in at external field strengths in the order of 1 kV/cm. For tobacco-protoplasts (BY-2) with an average size three times the diameter of mammalian cells, the same saturation effect can be observed at about one third of the saturation field strength, observed for mammalian cells. This confirms the general expectations of current membrane charging models. Furthermore, protoplasts exhibit a strong asymmetry of the membrane charging at the hyper- and depolarized hemisphere of the cell, which occurs due to the higher rest potential compared to mammalian cells. The threshold transmembrane voltage for the onset of pore formation has been estimated to an absolute value of +/-200 mV. In addition, time- and field-strength-dependencies of the transmembrane potential's azimuthal distribution have been examined. Time-courses of the transmembrane potential in response to an electric field pulse show a good agreement with theoretical predictions. Results for HEK293, HeLa and 22Rv1 cells as well as for tobacco-protoplasts will be presented and the underlying measurement setup will be described.
只提供摘要形式。脉冲激光荧光显微镜(PLFM)使用电压敏感染料ANNINE-6可以测量生物细胞的跨膜电位,时间分辨率为5纳秒。已经提出了几种理论来解释膜电导率在响应外电场时的变化,例如孔隙模型,由于电压缩引起的相变或脂筏引起的膜局部扰动。测量到的哺乳动物和植物细胞的跨膜电位的场强依赖性表现出饱和特征,这应该是由于纳米/微孔的形成而发生的。对于典型直径为15微米的哺乳动物细胞,在1千伏/厘米量级的外场强度下产生饱和效应。对于平均大小为哺乳动物细胞直径三倍的烟草原生质体(BY-2),在约为哺乳动物细胞饱和场强度的三分之一时,可以观察到相同的饱和效应。这证实了当前膜充电模型的一般预期。此外,原生质体在细胞的超极化半球和去极化半球表现出强烈的膜电荷不对称性,这是由于与哺乳动物细胞相比,原生质体具有更高的静息电位。据估计,孔隙形成起始的阈值跨膜电压的绝对值为+/-200 mV。此外,还研究了跨膜电位的方位分布随时间和场强的变化规律。跨膜电位响应电场脉冲的时间过程与理论预测一致。将介绍HEK293、HeLa和22Rv1细胞以及烟草原生质体的结果,并描述基本的测量设置。
{"title":"Transmembrane potential measurements of mammalian and plant cells","authors":"T. Berghofer, C. Eing, B. Flickinger, C. Gusbeth, R. Strassner, W. Frey, S. Schneider","doi":"10.1109/PLASMA.2008.4590821","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4590821","url":null,"abstract":"Summary form only given. Pulsed laser fluorescence microscopy (PLFM) using the voltage sensitive dye ANNINE-6 permits measurements of transmembrane potentials of biological cells with a time resolution of five nanoseconds. Several theories have been proposed to explain the change of the membrane conductivity in response to an external electric field, e.g. pore-models, phase transitions due to electro-compression or local disturbances in the membrane caused by lipid rafts. The measured field-strength-dependence of the transmembrane potential of both mammalian and plant cells exhibits a saturation character which is supposed to occur due to the formation of nano/micropores. For mammalian cells with a typical diameter of 15 mum saturation effects set in at external field strengths in the order of 1 kV/cm. For tobacco-protoplasts (BY-2) with an average size three times the diameter of mammalian cells, the same saturation effect can be observed at about one third of the saturation field strength, observed for mammalian cells. This confirms the general expectations of current membrane charging models. Furthermore, protoplasts exhibit a strong asymmetry of the membrane charging at the hyper- and depolarized hemisphere of the cell, which occurs due to the higher rest potential compared to mammalian cells. The threshold transmembrane voltage for the onset of pore formation has been estimated to an absolute value of +/-200 mV. In addition, time- and field-strength-dependencies of the transmembrane potential's azimuthal distribution have been examined. Time-courses of the transmembrane potential in response to an electric field pulse show a good agreement with theoretical predictions. Results for HEK293, HeLa and 22Rv1 cells as well as for tobacco-protoplasts will be presented and the underlying measurement setup will be described.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74995255","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multimode calculations of frequency tunable gyrotrons for dynamic nuclear polarization applications 动态核极化应用中频率可调回旋管的多模计算
Pub Date : 2008-06-15 DOI: 10.1109/PLASMA.2008.4590846
Liu Yinghui, S. Kern, M. Beringer, M. Thumm, S. Alberti, J. Hogge
Summary form only given. Recently, gyrotron-based spectrometers suitable for nuclear magnetic resonance (NMR) studies have been constructed to study dynamic nuclear polarization which can result in significant enhancement of the NMR signal. In the present paper multimode calculations of a low-power (above 10W) high-frequency (200 GHz -300 GHz) gyrotron for NMR spectroscopy applications have been performed. The co- rotating TE-7,2 mode has been chosen to be the main operating cavity mode. Five neighbor modes (TE7,2; TE-4,3; TE4,3; TE-2,4; TE2,4) whose coupling factors are above 30% of the main mode and most probably can be excited in the cavity are included into the calculation using the FZK SELFT code packet designed for time dependent and self-consistent multimode calculations. The frequency fine tuning was obtained via the excitation of a sequence of longitudinal modes of TE-7,2,q by varying the beam voltage from 15 kV upward and the magnetic field from 9.6 T to 9.77 T. The results show that the main mode TE-7,2 is quite stable against the possible transverse mode competitors within this magnetic field range and a continuous frequency tuning range more than 800 MHz (263.43 GHz - 264.28 GHz) has been achieved with a velocity ratio of 1.3, the beam radius and current being 1.33 mm and 100 mA respectively.
只提供摘要形式。近年来,人们研制出了适合于核磁共振(NMR)研究的陀螺仪,用于研究动态核极化,可以显著增强核磁共振信号。本文对用于核磁共振波谱应用的低功率(10W以上)高频(200 GHz -300 GHz)回旋管进行了多模计算。选择共旋转te -7,2模式作为主要的工作腔模式。五相邻模态(TE7,2;阳池3;TE4 3;液门,4;采用专为时变自一致多模计算而设计的FZK SELFT码包,将耦合系数大于主模30%且最可能在腔内被激发的TE2,4)纳入计算。频率微调获得通过一系列纵向模式的激励会宗,2,问通过改变光束向上从15千伏电压和磁场从9.6 T 9.77 T·结果表明,主要的模式会宗,2是相当稳定的对可能的横模竞争对手在这个磁场范围和连续频率调谐范围超过800 MHz (263.43 GHz - 264.28 GHz)已经实现传动比为1.3,束流半径为1.33 mm,电流为100 mA。
{"title":"Multimode calculations of frequency tunable gyrotrons for dynamic nuclear polarization applications","authors":"Liu Yinghui, S. Kern, M. Beringer, M. Thumm, S. Alberti, J. Hogge","doi":"10.1109/PLASMA.2008.4590846","DOIUrl":"https://doi.org/10.1109/PLASMA.2008.4590846","url":null,"abstract":"Summary form only given. Recently, gyrotron-based spectrometers suitable for nuclear magnetic resonance (NMR) studies have been constructed to study dynamic nuclear polarization which can result in significant enhancement of the NMR signal. In the present paper multimode calculations of a low-power (above 10W) high-frequency (200 GHz -300 GHz) gyrotron for NMR spectroscopy applications have been performed. The co- rotating TE-7,2 mode has been chosen to be the main operating cavity mode. Five neighbor modes (TE7,2; TE-4,3; TE4,3; TE-2,4; TE2,4) whose coupling factors are above 30% of the main mode and most probably can be excited in the cavity are included into the calculation using the FZK SELFT code packet designed for time dependent and self-consistent multimode calculations. The frequency fine tuning was obtained via the excitation of a sequence of longitudinal modes of TE-7,2,q by varying the beam voltage from 15 kV upward and the magnetic field from 9.6 T to 9.77 T. The results show that the main mode TE-7,2 is quite stable against the possible transverse mode competitors within this magnetic field range and a continuous frequency tuning range more than 800 MHz (263.43 GHz - 264.28 GHz) has been achieved with a velocity ratio of 1.3, the beam radius and current being 1.33 mm and 100 mA respectively.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74679296","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
2008 IEEE 35th International Conference on Plasma Science
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