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1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)最新文献

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Acoustic and electromechanical behavior of 1-3 piezocomposites for ultrasonic transducer applications 用于超声波换能器的1-3压电复合材料的声学和机电性能
Q.M. Zhang, X. Geng
A model is derived for the analysis of the dynamic behavior of 1-3 piezocomposites. Based on this model, the effective parameters and their dependence on the aspect ratio of the unit cell of a 1-3 composite, can be evaluated. From the model we show that the mechanical quality factor of a composite can be lower than that of both the ceramic and polymer. The predictions are compared with experimental results and the agreement between the two is quite satisfactory.
建立了1-3压电复合材料动力性能分析模型。基于该模型,可以评估1-3复合材料的有效参数及其与单胞长宽比的依赖关系。从模型中我们发现复合材料的机械质量因子可以低于陶瓷和聚合物。将预测结果与实验结果进行了比较,两者吻合较好。
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引用次数: 1
Influence of metallization on temperature stability of SAW devices 金属化对SAW器件温度稳定性的影响
E. Henry, S. Ballandras, E. Bigler, G. Marianneau, G. Martin, S. Camou
Most Surface Acoustic Wave (SAW) devices exhibit a very small sensitivity to thermal effects. However, even on instrinsically compensated crystal cuts, the deposition of metal strips at the surface (transducers or reflectors) induces important changes in the thermoelastic properties of the device. A theoretical approach based on the Sinha-Tiersten perturbation method is proposed to model the influence of metallization on SAW properties on (ST,X) quartz, namely the temperature stability of the phase velocity of Rayleigh waves. Since this perturbation method only gives access to the first order Temperature Coefficient of Frequency (TCF), it is combined with a conventional calculation of the second order TCF to predict the evolution of the turnover temperature. The proposed calculation also requires temperature derivatives of the elastic constants of the metal which can be calculated for different materials. More classical approaches are also considered based on the calculation of surface permittivity using thermally varied elastic constants. Finally, theoretical results are compared to experimental data measured on SAW devices on (ST,X) quartz using Aluminium, Gold or Chromium gratings.
大多数表面声波(SAW)器件对热效应的敏感性非常小。然而,即使在本征补偿晶体切割上,表面金属条(换能器或反射器)的沉积也会引起器件热弹性性能的重要变化。提出了一种基于Sinha-Tiersten摄动法的理论方法来模拟金属化对(ST,X)石英表面SAW性能的影响,即瑞利波相速度的温度稳定性。由于这种摄动方法只能得到一阶温度频率系数(TCF),因此可以将其与传统的二阶温度频率系数计算相结合来预测翻转温度的演变。提出的计算还需要金属弹性常数的温度导数,可以计算不同材料的弹性常数。基于热变弹性常数计算表面介电常数的更经典的方法也被考虑。最后,将理论结果与在(ST,X)石英上使用铝、金或铬光栅的SAW器件上测量的实验数据进行了比较。
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引用次数: 4
A 128/spl times/128 ultrasonic transducer hybrid array 一种128/spl倍/128超声换能器混合阵列
K. Erikson, A. Hairston, A. Nicoli, J. Stockwell, T. White
Ultrasonic imaging in the low MHz frequency range with large, dense arrays presents many design and fabrication challenges. Conventional ultrasound systems use micro-coaxial cable to connect the array to the front end electronics. While coax technology has improved dramatically in the past decade, interconnecting 16384 array elements with separate wires remains a formidable challenge. In addition to this practical issue, the capacitance of a long coaxial cable (/spl sim/40 pF/m) is much larger than that of a typical 2D array element (<1 pF), creating a voltage divider that severely reduces the signal-to-noise ratio of the channel. A 2D composite piezoelectric receiver array bonded directly to four large custom integrated circuits is described. This 128/spl times/128 (16384 total) element Transducer Hybrid Array (THA) of 200 /spl mu/m unit cell spacing is intended for a 3D real-time imaging system for medical and underwater applications. By reducing the interconnect length to less than 20 /spl mu/m, cable capacitance is no longer a problem. Massively parallel, on-chip signal processing enables true real-time three-dimensional imaging. Favorable tradeoffs using composite piezoelectric materials, enabled by this high-density flip-chip interconnection technology are discussed.
在低MHz频率范围内,大型密集阵列的超声成像提出了许多设计和制造方面的挑战。传统的超声系统使用微型同轴电缆将阵列连接到前端电子设备。虽然在过去的十年里,同轴电缆技术有了很大的进步,但将16384个阵列元素与单独的电线互连仍然是一个艰巨的挑战。除了这个实际问题之外,长同轴电缆的电容(/spl sim/40 pF/m)比典型的2D阵列元件(<1 pF)大得多,产生的分压器严重降低了通道的信噪比。描述了一种直接连接到四个大型定制集成电路的二维复合压电接收器阵列。这种128/spl倍/128(共16384)单元传感器混合阵列(THA)的200 /spl mu/m单元间距用于医疗和水下应用的3D实时成像系统。通过将互连长度减少到20 /spl mu/m以下,电缆电容不再是问题。大规模并行,芯片上的信号处理实现真正的实时三维成像。讨论了高密度倒装芯片互连技术所带来的复合压电材料的有利权衡。
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引用次数: 16
Single element and linear array PZT ultrasound biomicroscopy transducers 单元件和线性阵列PZT超声生物显微镜换能器
M. Lukacs, M. Sayer, S. Foster
PZT coatings have been produced in the thickness range of 5-200 microns using a composite sol gel process (M. Lukacs et al., 1996). The application of this process in the fabrication of high frequency transducers suitable for ultrasound biomicroscopy (UBM) has been investigated. Curved single element transducers have been produced in a range of 70-165 MHz with -6dB bandwidths as high as 52% and minimum insertion losses ranging from -47 to -58 dB. Laser micromachining techniques for patterning linear array structures to operate at similar frequencies have been developed. Trenches <10 /spl mu/m wide with a 50% taper through 20 /spl mu/m of ceramic have been achieved with a pulsed frequency doubled Nd:YAG laser. Trenches 5 /spl mu/m wide with straight walls have been achieved using a pulsed KrF excimer laser.
PZT涂层的厚度范围为5-200微米,采用复合溶胶-凝胶工艺(M. Lukacs et al., 1996)。研究了该工艺在超声生物显微镜(UBM)高频换能器制造中的应用。弯曲单元件换能器的生产范围为70-165 MHz, -6dB带宽高达52%,最小插入损耗范围为-47至-58 dB。激光微加工技术,图案化的线性阵列结构工作在相似的频率已经发展。利用脉冲频率翻倍的Nd:YAG激光器,在20 /spl mu/m的陶瓷中实现了宽度<10 /spl mu/m,锥度为50%的沟槽。利用脉冲KrF准分子激光器实现了5 /spl μ m宽的直壁沟槽。
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引用次数: 14
Application of a Sagnac interferometer for the characterization of scattered ultrasonic fields Sagnac干涉仪在散射超声场表征中的应用
P. Fomitchov, A. Kromine, S. Krishnaswamy, J. Achenbach
Knowledge of the spatial and temporal parameters of ultrasonic beams, as well as details of interaction of such beams with small defects is necessary for effective application of ultrasonic techniques to nondestructive evaluation (NDE). The work presented here employs a fiber-optic Sagnac interferometer to characterize acoustical fields generated by conventional piezoelectric transducers (PZT) and a laser ultrasonic source, and the scattering of such ultrasonic fields by flaws. The high spatial resolution of this interferometer and its ability to provide absolute ultrasonic displacements make this device very suitable for: (i) profiling and calibration of ultrasonic beams generated by PZT transducers or laser sources, and (ii) precision measurement of ultrasonic fields scattered by flaws.
了解超声光束的时空参数,以及这些光束与小缺陷相互作用的细节是有效地将超声技术应用于无损评估(NDE)所必需的。本文采用光纤Sagnac干涉仪来表征由传统压电换能器(PZT)和激光超声源产生的声场,以及这种超声场在缺陷下的散射。该干涉仪的高空间分辨率及其提供绝对超声位移的能力使该设备非常适合:(i) PZT换能器或激光源产生的超声光束的分析和校准,以及(ii)由缺陷散射的超声场的精确测量。
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引用次数: 1
Clinical assessment of the backscatter coefficient in osteoporosis 骨质疏松症后向散射系数的临床评价
P. Laugier, P. Giat, C. Chappard, C. Roux, G. Berger
Current commercial ultrasound "bone densitometers" process only the through-transmitted signals while failing to extract additional information contained in the scattered signals. This work was conducted to investigate the clinical interest of a backscatter ultrasound technique for bone characterization in 24 healthy premenopausal (group N), 24 postmenopausal (group PM), and 13 osteoporotic patients with fractures (group O). Pulse-echo measurements of the backscatter power were performed at the calcaneus (heel bone) using an ultrasound bone imaging scanner. The pulse-echo waveforms backscattered by the internal trabecular micro-architecture were recorded to compute the integrated backscatter coefficient (BUB, dB) in the frequency range 200-600 kHz. BUB was compared to the slope of the frequency-dependent attenuation (BUA, dB/MHz) derived from signals transmitted through the bone and to bone mineral density. Measurements were averaged in an operator-independent automatic ROI. The short-term reproducibility was 1.4%, and 3.5% for BUA, and BUB respectively. Femoral bone mass density (BMD) was measured in all subjects and calcaneal BMD was measured in a subset of 30 patients. The correlation between ultrasound and calcaneal BMD was moderate for BUB (r=0.55, p<10/sup -3/) and strong for BUA (r=0.82, p<10/sup -4/). Significant differences were found in ultrasound parameters and BMD between fracture and non-fracture groups. There was a significant difference in BMD and ultrasound parameters between young normal controls and healthy post-menopausal women. In summary, reflection ultrasound appears to be promising in osteoporosis and larger studies are clearly warranted.
目前的商用超声“骨密度仪”只处理通过传输的信号,而不能提取散射信号中包含的附加信息。本研究对24名健康绝经前(N组)、24名绝经后(PM组)和13名骨质疏松骨折患者(O组)进行了后向散射超声技术骨表征的临床研究。使用超声骨成像扫描仪对跟骨(跟骨)进行了后向散射功率的脉冲回波测量。记录内部小梁微结构后向散射的脉冲回波波形,计算200 ~ 600 kHz频率范围内的综合后向散射系数(BUB, dB)。将BUB与频率相关衰减(BUA, dB/MHz)的斜率进行比较,该衰减来自于通过骨骼传输的信号和骨矿物质密度。测量结果在独立于操作人员的自动ROI中进行平均。BUA和BUB的短期重复性分别为1.4%和3.5%。测量了所有受试者的股骨骨密度(BMD),并测量了30例患者的跟骨骨密度。超声与跟骨骨密度的相关性在BUB中为中等(r=0.55, p<10/sup -3/),在BUA中为较强(r=0.82, p<10/sup -4/)。骨折组与非骨折组超声参数及骨密度有显著性差异。年轻正常对照和健康绝经后妇女的骨密度和超声参数有显著差异。总之,反射超声似乎在骨质疏松症和更大规模的研究是有希望的。
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引用次数: 35
Wave propagation in long compound acoustic transmission line: numerical simulation and measurement 长复合声传输线中的波传播:数值模拟与测量
B. Tittmann, R. Lerch, H. Landes, S. Madden, H. Tavossi
This paper describes the FEM-BEM simulation of and measurements on an acoustic transmission line consisting of three connected components; a long thin tube, a narrow solid cylinder, and a long narrow column of water. The total path length corresponded to about 8500 wavelengths at the highest frequency used, 5 MHz. Applications for this topic are in the field of high resolution ranging and is particularly important in leadscrew position measurement, where high precision over long travel lengths are required. The new aspects of this study lie firstly, in the development of special hybrid FEM-BEM simulation techniques to handle the extremely long lengths, secondly in the optimum choice of waveguide modes, and thirdly in the details of the experimental measurements, especially, when applied to industrial leadscrew position detection. Current techniques for measuring leadscrew positions are based on electromagnetic sensors and give a range resolution of only about 10 mm. The ultrasonic range detection provided a precision of 1 mm.
本文介绍了由三个连接分量组成的声传输线的FEM-BEM仿真和测量;一个细长的管子,一个狭窄的实心圆柱体,和一个狭长的水柱。在使用的最高频率5mhz下,总路径长度对应于大约8500个波长。该主题的应用是在高分辨率测距领域,在丝杠位置测量中尤其重要,其中需要长行程长度的高精度。本研究的新方面首先在于开发特殊的FEM-BEM混合仿真技术来处理超长长度,其次是波导模式的最佳选择,第三是实验测量的细节,特别是在工业丝杠位置检测中的应用。目前测量丝杠位置的技术是基于电磁传感器的,其范围分辨率仅为10毫米左右。超声波测距提供了1毫米的精度。
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引用次数: 1
Modified Green's function approach to analysis of long SAW transducers 改进的格林函数法分析长SAW换能器
S. Balashov, C. M. Cabreira, C. Finardi
Low loss filters based on Single Phase Unidirectional Transducers (SPUDT) could be characterized as a separate class of Surface Acoustic Wave (SAW) filters because they overcome the main SAW filters limitation-6 dB bidirectional insertion loss. For the substrate with the high value of electroacoustic coupling coefficient k/sup 2/ the main effect used to obtain unidirectionality is electrical regeneration which could be treated directly by the Green's Function Model (GFM). The GFM being applicable to an interdigital transducer (IDT) with arbitrary topology is difficult to be applied to the IDT with large number of periods because computation time increases in power law with growth of the IDT length reaching very quickly unacceptable values. In this paper we present the method for calculation of arbitrary SAW filter parameters based on the GFM. Symmetry consideration being used for presentation of the central region of the long IDT, computation time decreases dramatically. At the same time edge effects of the IDT are correctly taken into account. The method developed works both for high and low k/sup 2/ value substrates. Results of calculation of SPUDT characteristics with the help of method proposed are presented.
基于单相单向换能器(SPUDT)的低损耗滤波器可以作为表面声波(SAW)滤波器的一个独立类别,因为它克服了主要表面声波滤波器的限制-6 dB双向插入损耗。对于高电声耦合系数k/sup 2/的基板,获得单向性的主要作用是电再生,可直接用格林函数模型(Green’s Function Model, GFM)进行处理。GFM适用于任意拓扑的数字间换能器(IDT),但由于计算时间随着IDT长度的增长呈幂律增长,很快达到不可接受的值,因此很难应用于周期较大的IDT。本文提出了一种基于GFM的任意声表面波滤波器参数的计算方法。利用对称的考虑来表示长IDT的中心区域,大大减少了计算时间。同时,正确地考虑了IDT的边缘效应。所开发的方法适用于高/低k/sup / value衬底。给出了利用该方法计算SPUDT特性的结果。
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引用次数: 1
SAW filters with very high shape factor SAW滤波器具有非常高的形状因子
V. B. Chvets, P. G. Ivanov, V. M. Makarov, V. S. Orlov
Transversal filters with very high shape factor have been developed based on multiharmonic and withdrawal weighted transducers with isolated sections. The developed simulation technique provides excellent results both for in-line filter structures and those with multistrip couplers. The experimental results are presented for IF filters manufactured on YZ-LiNbO/sub 3/ and ST-quartz substrates. In-line filters exhibit SF in the range 1.15-1.2 and for MSC filters, SF values 1.05-1.1 have been obtained. For all filters the stopband rejection is more than 50 dB.
高形状因子的横向滤波器是基于多谐波和带隔离截面的提取加权换能器研制的。所开发的仿真技术对直列滤波器结构和带多带耦合器的滤波器结构都提供了良好的仿真结果。给出了在YZ-LiNbO/sub - 3/和st -石英衬底上制作的中频滤波器的实验结果。直列滤波器的SF值为1.15-1.2,MSC滤波器的SF值为1.05-1.1。所有滤波器的阻带抑制都大于50db。
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引用次数: 1
Temperature-dependent characteristics of a density sensor based on Lamb waves generated with a P(VF/sub 2/-VF/sub 3/) film 基于P(VF/sub 2/-VF/sub 3/)薄膜产生Lamb波的密度传感器的温度依赖特性
L. Scandelari, N. Noury, P. Benech, E. Chamberod
We present the temperature-dependent characteristics of a Lamb wave device used as a liquid density sensor. Its fabrication process was simplified using a P(VF/sub 2/-VF/sub 3/) film stuck on a non-piezoelectric medium. The lowest order antisymmetric Lamb waves (A/sub 0/ mode) are used for measurements. We measured the phase and group velocities of the waves for different concentrations of NaCl and we analyzed the temperature dependent performance of our device. The synchronism frequency decreases almost 1.4 kHz per Celsius degree increase. Insertion loss decreases with increasing temperature.
我们提出了温度依赖特性的兰姆波装置用作液体密度传感器。将P(VF/sub 2/-VF/sub 3/)薄膜贴在非压电介质上,简化了其制备工艺。测量使用最低阶反对称兰姆波(A/sub 0/ mode)。我们测量了不同NaCl浓度下波的相速度和群速度,并分析了器件的温度依赖性性能。每增加摄氏一度,同步频率降低近1.4千赫。插入损耗随温度升高而降低。
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引用次数: 0
期刊
1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)
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