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Reduction of membrane-derived noise using beam-tilt measurement and deep learning in observation using environmental cell. 利用波束倾斜测量和环境细胞观测中的深度学习降低膜源噪声。
IF 1.9 Pub Date : 2026-01-01 DOI: 10.1093/jmicro/dfaf031
Fumiaki Ichihashi, Yoshio Takahashi, Toshiaki Tanigaki

Electron microscopy using an environmental cell is a powerful tool for observing catalysts and other nanomaterials in gases and liquids. An environmental cell must contain amorphous silicon-nitride membranes because they protect the sample environment from the vacuum of the electron microscope and enable the electron beam to pass through the cell. However, the membranes superimpose non-uniform contrast on the projected image, degrading image quality. We propose a method for removing the noise derived from the membranes using Noise2Noise, a deep-learning method, for a series of transmission-electron-microscope images with slight electron-beam tilt and evaluated its effectiveness. We succeeded in removing the membrane-derived noise while retaining the information of the sample in the cell. We also succeeded in efficiently removing Poisson noise. We believe this method will enable measurements requiring high signal-to-noise ratios, which could previously only be observed in a vacuum, to be conducted in an environmental cell.

使用环境电池的电子显微镜是观察气体和液体中的催化剂和其他纳米材料的有力工具。环境电池必须包含非晶氮化硅膜,因为它们保护样品环境免受电子显微镜的真空影响,并使电子束能够通过电池。然而,薄膜在投影图像上叠加不均匀的对比度,降低图像质量。我们提出了一种使用Noise2Noise(一种深度学习方法)去除来自膜的噪声的方法,用于一系列具有轻微电子束倾斜的透射电子显微镜图像,并评估了其有效性。我们成功地去除了膜源噪声,同时保留了细胞中样品的信息。我们还成功地有效地去除了泊松噪声。我们相信这种方法将使需要高信噪比的测量,以前只能在真空中观察到,在环境电池中进行。
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引用次数: 0
Biomedical application of organosilica nanoparticles. 有机二氧化硅纳米颗粒的生物医学应用。
IF 1.9 Pub Date : 2026-01-01 DOI: 10.1093/jmicro/dfaf030
Vikas Shukla, Junna Nakamura, Tomohiro Haruta, Michihiro Nakamura

Organosilica nanoparticles are considered one of the promising nanomaterials for biomedical imaging and clinical applications due to their tunable properties, biocompatibility and multimodal imaging ability. In this review, we summarize the synthesis and functionalization of organosilica nanoparticles with a particular focus on their importance in biomedical imaging. By their high fluorescence intensity and unique photostability, organosilica nanoparticles provide capabilities for high-resolution and long-term imaging for in vivo, mesoscopic and microscopic applications. In addition, surface modifications of organosilica nanoparticles control cellular interactions, facilitating the accurate monitoring of cellular uptake, mitochondrial activity and endosomal sorting. Incorporating recent progress and experimental results, this review summarizes the multiformity and extensive prospects of organosilica nanoparticle-based imaging modalities and offers perspectives on future development in nanoparticle-driven biomedical imaging and therapeutic strategies.

有机二氧化硅纳米颗粒由于其可调特性、生物相容性和多模态成像能力被认为是生物医学成像和临床应用的有前途的纳米材料之一。在这篇综述中,我们总结了有机二氧化硅纳米颗粒的合成和功能化,特别关注了它们在生物医学成像中的重要性。由于其高荧光强度和独特的光稳定性,有机二氧化硅纳米颗粒为体内、介观和微观应用提供了高分辨率和长期成像的能力。此外,有机二氧化硅纳米颗粒的表面修饰控制细胞相互作用,促进细胞摄取,线粒体活性和内体分选的准确监测。结合最近的研究进展和实验结果,本文总结了基于纳米二氧化硅的生物医学成像方式的多样性和广阔的前景,并对纳米颗粒驱动的生物医学成像和治疗策略的未来发展提出了展望。
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引用次数: 0
Characterization of ultra-variable-pressure detector for secondary electrons in low-vacuum SEM. 低真空扫描电镜中二次电子超变压探测器的表征。
IF 1.9 Pub Date : 2026-01-01 DOI: 10.1093/jmicro/dfaf037
Yuanzhao Yao, Ryosuke Sonoda, Yasunari Sohda, Takashi Sekiguchi

Scanning electron microscope (SEM) observation in low vacuum can overcome the issue of charge-up at the specimen surface, allowing for the observation of insulating samples without sample pretreatment. The ultra-variable-pressure detector (UVD) was developed as a secondary electron (SE) detector for the low-vacuum observation in SEM. It works by collecting the light signal released from the collision between SEs and gas molecules. In this study, we propose a simple method using a stainless-steel sphere to characterize the feature of UVD signal in low-vacuum SEM and compare it with the traditional Everhart-Thornley (E-T) detector in normal SEM. The UVD signal showed characteristic features, namely a two-round-peak feature in the profile, which is different from that of E-T detector. Through experiment and simulation, we revealed that at higher vacuum levels (as a few Pa), SEs provide the primary contribution to the UVD signal, exhibiting a profile similar to that of the E-T signal. As the vacuum deteriorates, as 30 Pa, the main contribution to the UVD signal shifts from SEs to low-energy backscattered electrons (BSEs). Our finding indicates that by tuning the chamber pressure, we can vary the UVD image between SE and low-energy BSE features.

扫描电子显微镜(SEM)在低真空下的观察可以克服试样表面带电的问题,允许在没有样品预处理的情况下观察绝缘样品。超变压探测器(UVD)是一种用于扫描电镜低真空观测的二次电子探测器。它的工作原理是收集二次电子和气体分子碰撞时释放的光信号。在本研究中,我们提出了一种简单的方法,使用不锈钢(SUS)球来表征低真空扫描电镜下UVD信号的特征,并将其与传统的埃弗哈特-索恩利(E-T)探测器在普通扫描电镜下进行比较。UVD信号在剖面上表现出与E-T探测器不同的特征,即双圆峰特征。通过实验和模拟,我们发现在较高的真空水平(如几Pa), se是UVD信号的主要贡献者,表现出与E-T信号相似的特征。随着真空度的降低,在30 Pa时,UVD信号的主要贡献从se转移到低能量背散射电子(BSE)。我们的发现表明,通过调节腔压力,我们可以在SE和低能量BSE特征之间改变UVD图像。
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引用次数: 0
Valence electron spectroscopy using soft X-ray emission spectroscopy electron microscopes. 使用软x射线发射光谱电子显微镜的价电子能谱。
IF 1.9 Pub Date : 2025-12-27 DOI: 10.1093/jmicro/dfaf057
Masami Terauchi

Compact soft-X-ray emission spectroscopy (SXES) instrument, which was first applied to transmission electron microscope, was recently applied to scanning electron microscope and electron-probe microanalyzer, which improved the practical applicability of SXES as a tool investigating chemical bonding state of elements in bulk materials. Intensity profiles of Al-L, B-K and Si-L emission spectra which directly reflect the partial density of state of valence band (VB) were explained. Those energy positions are affected by core-level shift (chemical shift; CS) and a change of density of state (DOS) of VB, for example a bandgap formation. Those VB DOS measurements combined with electron-beam scanning technique can conduct a chemical bond mapping of a bulk material. It was presented that L-emission spectra of 3d transition-metal elements gives DOS+CS information in Lα,β emission, dielectric information in Lℓ,η, and the number of 3d electrons in the integrated intensity ratio of Lα,β/(Lα,β+ Lℓ,η). Since the electron-beam excited SXES experiment for bulk specimens can control the self-absorption effect, L-absorption profile of 3d-TM elements is obtainable from L-emission measurements by changing the accelerating voltage. Furthermore, CB information can be obtained from SXES spectra of semiconductor materials, Si and diamond cases were presented, by using the self-absorption effect on the background intensity of bremsstrahlung (BS) caused by electron-beam irradiation of the specimen.

紧凑型软x射线发射光谱(SXES)仪器最初应用于透射电子显微镜,最近又应用于扫描电子显微镜和电子探针微量分析仪,提高了SXES作为块状材料中元素化学键态研究工具的实用性。解释了直接反映价带态(VB)偏密度的Al-L、B-K和Si-L发射光谱的强度分布。这些能量位置受到核心层位移(化学位移;CS)和VB的态密度变化(DOS)的影响,例如形成带隙。这些VB DOS测量与电子束扫描技术相结合,可以对块状材料进行化学键映射。三维过渡金属元素的L-发射光谱给出了Lα、β发射中的DOS+CS信息,Lα、η中的介电信息,以及Lα、β/(Lα,β+ Lα、η)积分强度比中的三维电子数。由于块状试样的电子束激发SXES实验可以控制自吸收效应,因此通过改变加速电压,可以从l发射测量中获得3d-TM元素的l吸收曲线。此外,利用电子束辐照引起的轫致辐射(BS)背景强度的自吸收效应,可以从半导体材料的SXES光谱中获得CB信息。
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引用次数: 0
Semi-supervised semantic segmentation of SEM images considering multi-scale structural consistency loss in semiconductor pattern layouts. 考虑半导体模式布局中多尺度结构一致性损失的SEM图像半监督语义分割。
IF 1.9 Pub Date : 2025-12-26 DOI: 10.1093/jmicro/dfaf056
Akira Ito, Atsushi Miyamoto

In the fabrication of semiconductor devices, increased yield is achieved using Scanning Electron Microscopes (SEM) to measure and inspect circuit patterns. With recent decreasing scale and increasing complexity of semiconductor circuit patterns, it has become increasingly difficult to recognize patterns accurately using rule-based image processing methods. As such, we propose a method that uses semi-supervised learning for segmentation processing, to recognize which pattern level each pixel represents. With existing methods, the pseudo-labels used for training were not accurate enough, and there were issues such as inconsistent recognition of repeated-pattern layouts and mixed-up results in large unmarked areas distant from the pattern contour. Accordingly, the proposed method is able to perform highly accurate segmentation with the design of new types of loss for evaluating consistency in pattern structure at various scales. When compared with Unimatch and CAC, which are well-known high-performance segmentation methods, the accuracy relative to visual identification increased dramatically, from 10-12% to 100%. In quantitative evaluation using mean Intersection-over-Union (mIoU) at the pixel level, mean values also increased from a range between 0.45 and 0.65 to over 0.94, confirming that the proposed method is effective.

在半导体器件的制造中,使用扫描电子显微镜(SEM)来测量和检查电路模式可以提高产量。随着半导体电路图形规模的不断缩小和复杂度的不断增加,使用基于规则的图像处理方法来准确识别图形变得越来越困难。因此,我们提出了一种使用半监督学习进行分割处理的方法,以识别每个像素所代表的模式级别。现有方法用于训练的伪标签不够准确,在距离图案轮廓较远的大面积无标记区域存在重复图案布局识别不一致、结果混淆等问题。因此,该方法可以通过设计新的损失类型来评估不同尺度下图案结构的一致性,从而实现高精度的分割。与Unimatch和CAC这两种众所周知的高性能分割方法相比,相对于视觉识别的准确率从10-12%显著提高到100%。在像元水平上使用平均交联(Intersection-over-Union, mIoU)进行定量评价时,均值也从0.45 ~ 0.65增加到0.94以上,证实了所提方法的有效性。
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引用次数: 0
EELS of phonons: polarity and temperature dependence. 声子的EELS:极性和温度依赖性。
IF 1.9 Pub Date : 2025-12-19 DOI: 10.1093/jmicro/dfaf055
Jun Kikkawa

This paper provides an overview of phonon measurement using electron energy loss spectroscopy (EELS) in the electron microscope, with polar cubic boron nitride (c-BN) and nonpolar diamond crystals as representative examples. Differential scattering cross-sections for phonon creation and annihilation are reviewed, highlighting the influence of crystal polarity under kinematical and dynamical scattering conditions. The temperature dependence of EELS intensity is examined, with local absolute temperature evaluated by analysing the ratio of phonon annihilation to creation intensities. Practical aspects and challenges associated with phonon measurement in EELS are also discussed, together with future perspectives in this evolving field.

本文以极性立方氮化硼(c-BN)和非极性金刚石晶体为代表,综述了电子能量损失谱(EELS)在电子显微镜下的声子测量方法。回顾了声子产生和湮灭的微分散射截面,重点介绍了晶体极性在运动学和动力学散射条件下的影响。研究了EELS强度的温度依赖性,通过分析声子湮灭与产生强度的比值来评估局部绝对温度。在EELS声子测量相关的实际方面和挑战也进行了讨论,以及在这个不断发展的领域的未来前景。
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引用次数: 0
Development of a Wire Corrector for Low Accelerating Voltage Scanning Electron Microscopy. 低加速电压扫描电镜用导线校正器的研制。
IF 1.9 Pub Date : 2025-12-18 DOI: 10.1093/jmicro/dfaf054
Tomonori Nakano, Yu Yamazawa

Aberration correctors are essential for achieving high-resolution imaging in advanced electron microscopy. However, their complexity and cost have limited their integration into conventional scanning electron microscopes (SEMs), particularly in low-voltage applications. In this study, we present a wire aberration corrector that utilizes symmetrically arranged current lines to generate multipole fields. The corrector was implemented in a cold field emission SEM equipped with a bright-field STEM detector and operated at 30 kV. Experimental results demonstrate successful generation of quadrupole to dodecapole fields, effective correction of spherical aberration, and improved imaging of carbon multilayers. These findings demonstrate that wire correctors offer a compact and cost-effective means to enhance imaging performance in standard SEM systems, and the underlying principle could be adapted for other electron microscopy platforms such as TEM or STEM.

像差校正器是必不可少的实现高分辨率成像在先进的电子显微镜。然而,它们的复杂性和成本限制了它们与传统扫描电子显微镜(sem)的集成,特别是在低压应用中。在这项研究中,我们提出了一种利用对称排列的电流线来产生多极场的线像差校正器。校正器安装在配有亮场STEM探测器的冷场发射SEM中,工作电压为30 kV。实验结果表明,四极到十二极磁场的成功产生,有效地校正了球差,提高了碳多层膜的成像效果。这些发现表明,导线校正器提供了一种紧凑且具有成本效益的方法来提高标准SEM系统的成像性能,其基本原理可以适用于其他电子显微镜平台,如TEM或STEM。
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引用次数: 0
Radiation-induced short-range order in ceramics. 陶瓷中辐射诱发的短程有序。
IF 1.9 Pub Date : 2025-12-02 DOI: 10.1093/jmicro/dfaf053
Manabu Ishimaru

The development of radiation tolerant materials is of technological importance for establishing safe operating systems in the nuclear industry, from power generation to the immobilization of high-level radioactive waste. Harsh radiation environments generate interstitials and vacancies in materials, and their accumulation leads to structural changes, including order-to-disorder phase transformations and amorphization. These structural changes are induced locally on an atomic scale; therefore, transmission electron microscopy is a useful technique for analyzing radiation effects in materials. In addition, the strong interaction between matter and electrons enables the detection of weak signals associated with phase transformations, such as diffuse scattering and halo rings. This article provides an overview of radiation-induced amorphous structures in materials consisting of light elements, such as boron carbide and silicon oxycarbide, as well as the short-range ordered structure that appears during an order-to-disorder phase transformation in fluorite structural derivatives.

开发耐辐射材料对于建立核工业从发电到高放射性废物固定化的安全操作系统具有重要的技术意义。恶劣的辐射环境会在材料中产生间隙和空位,它们的积累会导致结构变化,包括有序到无序的相变和非晶化。这些结构变化是在局部原子尺度上引起的;因此,透射电子显微镜是分析材料辐射效应的一种有用的技术。此外,物质和电子之间的强相互作用使得检测与相变相关的弱信号成为可能,例如漫射散射和晕环。本文概述了由轻元素(如碳化硼和碳化氧硅)组成的材料中辐射诱导的非晶态结构,以及萤石结构衍生物在有序到无序相变过程中出现的短程有序结构。
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引用次数: 0
Auto-thresholding for unbiased electron counting. 无偏电子计数的自动阈值。
IF 1.9 Pub Date : 2025-12-01 DOI: 10.1093/jmicro/dfaf025
Julie Marie Bekkevold, Jonathan J P Peters, Ryo Ishikawa, Naoya Shibata, Lewys Jones

As interest in fast real-space frame-rate scanning transmission electron microscopy for both structural and functional characterization of materials increases, so does the need for precise and fast electron detection techniques. Electron counting, with monolithic, segmented, or 4D detectors, has been explored for many years. Recent studies have shown that a retrofittable signal digitizer for a monolithic or segmented detector can be a sustainable and accessible way to enhance the performance of existing detectors, especially for imaging at fast scan speeds. Since such signal digitization uses a threshold on the gradient of the detector signal to identify electron events, appropriate threshold choice is key. Previously, this threshold has been set manually by the operator and is therefore inherently susceptible to human bias. In this work, we introduce an auto-thresholding approach for electron counting to determine the optimal threshold by maximizing the difference in identified counts from a stream with real electron events and a stream with only noise. This leads to easier operation, increased throughput and eliminates human bias in signal digitization. When pixel dwell time becomes shorter than scintillator response time, digitization of the detector signal is needed to avoid artefacts in STEM images. Optimizing the threshold for this digitization process automatically is crucial to achieve high-quality quantitative digitized images, free of human bias for what threshold yields the best digitization.

随着对用于材料结构和功能表征的快速实时空间帧速率扫描透射电子显微镜的兴趣增加,对精确和快速电子检测技术的需求也在增加。电子计数,与单片,分段,或四维探测器,已经探索了许多年。最近的研究表明,用于单片或分段探测器的可改装信号数字化仪可以是一种可持续的和可访问的方法,以提高现有探测器的性能,特别是在快速扫描速度下成像。由于这种信号数字化使用检测器信号梯度上的阈值来识别电子事件,因此适当的阈值选择是关键。以前,这个阈值是由操作员手动设置的,因此天生就容易受到人为偏见的影响。在这项工作中,我们引入了一种用于电子计数的自动阈值方法,通过最大化具有真实电子事件的流和只有噪声的流的识别计数的差异来确定最佳阈值。这使得操作更容易,提高了吞吐量,并消除了信号数字化中的人为偏差。
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引用次数: 0
Expanding the potential of paraffin section studies using NanoSuit-correlative light and electron microscopy. 利用纳米光镜和电子显微镜扩大石蜡切片研究的潜力。
IF 1.9 Pub Date : 2025-12-01 DOI: 10.1093/jmicro/dfaf028
Hideya Kawasaki

Histological examination using optical microscopy is essential in life sciences and diagnostic medicine, particularly for formalin-fixed paraffin-embedded (FFPE) tissue sections stained with hematoxylin and eosin or 3,3'-diaminobenzidine. However, conventional electron microscopy faces challenges, such as sample destruction, complex processing and difficulty in correlating light and electron microscopy images. The NanoSuit method overcomes these limitations by forming an ultrathin protective membrane that enhances conductivity and preserves hydrated tissue architecture, enabling high-resolution scanning electron microscopy imaging. In this study, we applied NanoSuit-correlative light and electron microscopy (CLEM) to FFPE sections to assess its potential for non-destructive and reversible electron microscopy characterization. Using NanoSuit-CLEM, we successfully visualized endothelial structures, amyloid deposits, sarcomeres, mitochondria, bacteria, viruses and foreign body deposits in FFPE sections. Energy-dispersive X-ray spectrometry further facilitated elemental analysis of foreign materials. These findings demonstrate that NanoSuit-CLEM allows for the precise visualization of ultrastructural details in FFPE sections without requiring new equipment. This method holds promise for advancing pathology by improving diagnostic accuracy and enabling multimodal tissue analysis.

使用光学显微镜进行组织学检查在生命科学和诊断医学中是必不可少的,特别是对于用苏木精和伊红或3,3'-二氨基联苯胺染色的福尔马林固定石蜡包埋(FFPE)组织切片。然而,传统的电子显微镜面临的挑战,如样品破坏,复杂的处理,以及难以将光学和电子显微镜图像相关联。NanoSuit方法通过形成超薄保护膜来提高导电性并保持水合组织结构,从而克服了这些限制,实现了高分辨率扫描电子显微镜成像。在这项研究中,我们将纳米套件相关的光学和电子显微镜(CLEM)应用于FFPE切片,以评估其无损和可逆的电子显微镜表征的潜力。利用nanofit - clem,我们成功地可视化了FFPE切片中的内皮结构、淀粉样蛋白沉积、肌瘤、线粒体、细菌、病毒和异物沉积。能量色散x射线光谱法进一步促进了外来物质的元素分析。这些发现表明,nanosuite - clem可以在不需要新设备的情况下精确显示FFPE切片的超微结构细节。这种方法有望通过提高诊断准确性和实现多模态组织分析来推进病理学。
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引用次数: 0
期刊
Microscopy (Oxford, England)
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