首页 > 最新文献

ieeexplore最新文献

英文 中文
IF:
Dual-Band Dynamic Coding Metasurface for Terahertz Holographic Encrypted Imaging 用于太赫兹全息加密成像的双频动态编码超表面
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Pub Date : 2025-12-15 DOI: 10.1109/TPS.2025.3639472
Jing Zhang;Dingyan Chen;Yiming Liu;Xiaoyuan Ren;Jing Lou
Terahertz holographic technology, benefiting from the abundant resources, low photon energy, and strong penetration capabilities of terahertz, demonstrates tremendous potential in ultrawideband and high-speed wireless transmission for next-generation communication. However, current terahertz holographic components suffer from limitations such as restricted information capacity and poor communication security, hindering further development and practical application in the telecommunications field. Here, we report a thermally modulated metasurface with controllable far-field radiation characteristics and demonstrate a dual-band holographic encryption device. The structural symmetry of the meta-atom is broken to excite electromagnetic-induced transparent modes and Fano resonance modes with opposite far-field transmission characteristics at 0.34 and 0.42 THz, respectively. Utilizing the phase transition between insulating and metallic states in temperature-responsive vanadium dioxide, the asymmetric parameters of the meta-atom could be altered to achieve resonance modulation, resulting in amplitude enhancement or attenuation. Based on the proposed meta-atom, the controllable 2-bit encoding units could be constructed at 0.34 and 0.42 THz through structural parametric adjustments. Finally, a holographic element featuring 3-D encryption across polarization, temperature, and frequency is demonstrated in simulation with information including “L,” “C,” and “O.” The proposed strategy will advance the development of encrypted information transmission and integrated communication devices.
太赫兹全息技术得益于太赫兹资源丰富、光子能量低、穿透能力强等特点,在下一代通信的超宽带高速无线传输中显示出巨大的潜力。然而,目前的太赫兹全息元件存在信息容量有限、通信安全性差等局限性,阻碍了其在电信领域的进一步发展和实际应用。本文报道了一种具有可控远场辐射特性的热调制超表面,并演示了一种双频全息加密装置。元原子的结构对称性被打破,分别在0.34 THz和0.42 THz激发出具有相反远场传输特性的电磁诱导透明模式和Fano共振模式。利用温度响应型二氧化钒的绝缘态和金属态之间的相变,可以改变元原子的不对称参数来实现共振调制,从而导致振幅增强或衰减。基于所提出的元原子,通过结构参数调整,可以在0.34和0.42太赫兹下构建可控的2位编码单元。最后,在模拟中演示了具有偏振、温度和频率三维加密功能的全息元件,其中包含“L”、“C”和“o”等信息。提出的战略将促进加密信息传输和集成通信设备的发展。
{"title":"Dual-Band Dynamic Coding Metasurface for Terahertz Holographic Encrypted Imaging","authors":"Jing Zhang;Dingyan Chen;Yiming Liu;Xiaoyuan Ren;Jing Lou","doi":"10.1109/TPS.2025.3639472","DOIUrl":"https://doi.org/10.1109/TPS.2025.3639472","url":null,"abstract":"Terahertz holographic technology, benefiting from the abundant resources, low photon energy, and strong penetration capabilities of terahertz, demonstrates tremendous potential in ultrawideband and high-speed wireless transmission for next-generation communication. However, current terahertz holographic components suffer from limitations such as restricted information capacity and poor communication security, hindering further development and practical application in the telecommunications field. Here, we report a thermally modulated metasurface with controllable far-field radiation characteristics and demonstrate a dual-band holographic encryption device. The structural symmetry of the meta-atom is broken to excite electromagnetic-induced transparent modes and Fano resonance modes with opposite far-field transmission characteristics at 0.34 and 0.42 THz, respectively. Utilizing the phase transition between insulating and metallic states in temperature-responsive vanadium dioxide, the asymmetric parameters of the meta-atom could be altered to achieve resonance modulation, resulting in amplitude enhancement or attenuation. Based on the proposed meta-atom, the controllable 2-bit encoding units could be constructed at 0.34 and 0.42 THz through structural parametric adjustments. Finally, a holographic element featuring 3-D encryption across polarization, temperature, and frequency is demonstrated in simulation with information including “L,” “C,” and “O.” The proposed strategy will advance the development of encrypted information transmission and integrated communication devices.","PeriodicalId":450,"journal":{"name":"IEEE Transactions on Plasma Science","volume":"54 1","pages":"345-349"},"PeriodicalIF":1.5,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145957902","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Simulation and Experimental Study on the Coupling Characteristics of Shielded Multiconductor Cables Under HEMP Environment HEMP环境下屏蔽多导体电缆耦合特性仿真与实验研究
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Pub Date : 2025-12-15 DOI: 10.1109/TPS.2025.3640642
Mingmin Zhao;Zeyuan Mu;Luxing Zhao;Lei Gao;Jiahao Zhu;Peng Zhao;Yang Meng
This article presents the coupling characteristics of shielded multiconductor cables under high-altitude electromagnetic pulse (HEMP) numerically and experimentally. The numerical analysis is employed to study the coupling characteristics of a representative shielded multiconductor cable under different conditions first. The impacts of cable wiring configurations, cable parameters, and propagation direction of incident electromagnetic waves are given. Then, a horizontally polarized hybrid EMP simulator is constructed, and some radiated tests are conducted to validate the conclusions obtained in numerical analysis. The results show that the open circuit of the shielding layer results in the core wire coupling to the same high voltage as the shielding layer, while grounding the shielding layer significantly reduces the coupling voltage on core wires. In addition, increasing cable height, cable length, elevation angle, and azimuth angle all result in an amplification of the level of coupled current. The experimental outcomes of the radiated tests validate the effectiveness of the simulation and the precision of the numerical analysis results.
本文对高空电磁脉冲(HEMP)作用下屏蔽多导体电缆的耦合特性进行了数值和实验研究。首先采用数值分析方法研究了典型屏蔽多导体电缆在不同工况下的耦合特性。给出了电缆布线形式、电缆参数、入射电磁波传播方向等因素的影响。然后,构建了水平极化混合电磁脉冲模拟器,并进行了辐射试验,验证了数值分析的结论。结果表明,屏蔽层开路导致芯线耦合到与屏蔽层相同的高压,而屏蔽层接地显著降低芯线耦合电压。此外,增加电缆高度、电缆长度、仰角和方位角都会导致耦合电流水平的放大。辐射试验结果验证了模拟的有效性和数值分析结果的准确性。
{"title":"Simulation and Experimental Study on the Coupling Characteristics of Shielded Multiconductor Cables Under HEMP Environment","authors":"Mingmin Zhao;Zeyuan Mu;Luxing Zhao;Lei Gao;Jiahao Zhu;Peng Zhao;Yang Meng","doi":"10.1109/TPS.2025.3640642","DOIUrl":"https://doi.org/10.1109/TPS.2025.3640642","url":null,"abstract":"This article presents the coupling characteristics of shielded multiconductor cables under high-altitude electromagnetic pulse (HEMP) numerically and experimentally. The numerical analysis is employed to study the coupling characteristics of a representative shielded multiconductor cable under different conditions first. The impacts of cable wiring configurations, cable parameters, and propagation direction of incident electromagnetic waves are given. Then, a horizontally polarized hybrid EMP simulator is constructed, and some radiated tests are conducted to validate the conclusions obtained in numerical analysis. The results show that the open circuit of the shielding layer results in the core wire coupling to the same high voltage as the shielding layer, while grounding the shielding layer significantly reduces the coupling voltage on core wires. In addition, increasing cable height, cable length, elevation angle, and azimuth angle all result in an amplification of the level of coupled current. The experimental outcomes of the radiated tests validate the effectiveness of the simulation and the precision of the numerical analysis results.","PeriodicalId":450,"journal":{"name":"IEEE Transactions on Plasma Science","volume":"54 1","pages":"253-260"},"PeriodicalIF":1.5,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145957894","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Special Issue on Selected Papers from APSPT-14 May 2027 APSPT-14论文精选特刊2027年5月
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Pub Date : 2025-12-15 DOI: 10.1109/TPS.2025.3640044
{"title":"Special Issue on Selected Papers from APSPT-14 May 2027","authors":"","doi":"10.1109/TPS.2025.3640044","DOIUrl":"https://doi.org/10.1109/TPS.2025.3640044","url":null,"abstract":"","PeriodicalId":450,"journal":{"name":"IEEE Transactions on Plasma Science","volume":"53 12","pages":"4017-4017"},"PeriodicalIF":1.5,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11300749","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145754248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
IEEE Transactions on Plasma Science Special Issue on Discharges and Electrical Insulation in Vacuum IEEE等离子体科学汇刊:真空中的放电和电绝缘
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Pub Date : 2025-12-15 DOI: 10.1109/TPS.2025.3640341
{"title":"IEEE Transactions on Plasma Science Special Issue on Discharges and Electrical Insulation in Vacuum","authors":"","doi":"10.1109/TPS.2025.3640341","DOIUrl":"https://doi.org/10.1109/TPS.2025.3640341","url":null,"abstract":"","PeriodicalId":450,"journal":{"name":"IEEE Transactions on Plasma Science","volume":"53 12","pages":"4019-4019"},"PeriodicalIF":1.5,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11300751","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145754237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Solid-State Modular High-Voltage DC Power Supply With Pulse Capability for High-Power RF Amplifier 大功率射频放大器用具有脉冲能力的固态模块化高压直流电源
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Pub Date : 2025-12-15 DOI: 10.1109/TPS.2025.3641793
Rinki Upadhyay;Manmath Kumar Badapanda;Akhilesh Tripathi;Rajeev Tyagi;Sachin Rathi;Ramesh Kumar
A multisecondary transformer-based solid-state modular crowbarless high-voltage dc power supply with pulse capability is employed for biasing 1 MW, 352 MHz klystron amplifier. The primary windings of four numbers of multisecondary transformers are suitably phase shifted to realize 24-pulsed input system at 11 kV. Attempt has been made to equalize the mutual coupling between primary and secondary windings of these multisecondary transformers to enable cancellation of lower order harmonics. Low-ripple high-voltage dc output is achieved by phase staggering the outputs of 144 numbers of ac–dc converter-based power modules employed in this power supply. This power supply employs only feed forward control for its dc and pulse mode of operation. The design challenges associated with power module and their mitigation strategies for meeting the needs of continuous wave (CW) and pulse mode of operations are presented in this article. Availability analysis of this modular power supply incorporating active redundant power modules is also presented in this article. Wire burn test is carried out on the power supply to ensure that output stored energy is below 10 J. This power supply achieves output voltage stability $le$ 0.5%, output ripple $le$ 0.5%, current THD $le$ 0.5%, input power factor (IPF) $ge 0.97$ at 87 kV, 18.7 A dc operating point. In pulse mode, rise time $le$ 100 us and fall time $le$ 100 us are achieved at 100 kV, 22 A operating point at pulsewidth of 2 ms and repetition rate of 40 Hz.
提出了一种基于多二次变压器的固态模块化无铲杆高压直流脉冲电源,用于偏置1mw, 352 MHz速调管放大器。通过对4号多次变压器的一次绕组进行适当的相移,实现了11kv的24脉冲输入系统。已经尝试平衡这些多次变压器初级和次级绕组之间的相互耦合,以消除低次谐波。低纹波高压直流输出是通过在该电源中采用的144个基于交流-直流变换器的功率模块的输出相交错来实现的。该电源仅采用直流和脉冲工作模式的前馈控制。本文介绍了与功率模块相关的设计挑战及其缓解策略,以满足连续波(CW)和脉冲操作模式的需求。本文还对采用有源冗余电源模块的模块化电源进行了可用性分析。对电源进行烧线试验,确保输出储能在10j以下,电源输出电压稳定$le$ 0.5%, output ripple $le$ 0.5%, current THD $le$ 0.5%, input power factor (IPF) $ge 0.97$ at 87 kV, 18.7 A dc operating point. In pulse mode, rise time $le$ 100 us and fall time $le$ 100 us are achieved at 100 kV, 22 A operating point at pulsewidth of 2 ms and repetition rate of 40 Hz.
{"title":"Solid-State Modular High-Voltage DC Power Supply With Pulse Capability for High-Power RF Amplifier","authors":"Rinki Upadhyay;Manmath Kumar Badapanda;Akhilesh Tripathi;Rajeev Tyagi;Sachin Rathi;Ramesh Kumar","doi":"10.1109/TPS.2025.3641793","DOIUrl":"https://doi.org/10.1109/TPS.2025.3641793","url":null,"abstract":"A multisecondary transformer-based solid-state modular crowbarless high-voltage dc power supply with pulse capability is employed for biasing 1 MW, 352 MHz klystron amplifier. The primary windings of four numbers of multisecondary transformers are suitably phase shifted to realize 24-pulsed input system at 11 kV. Attempt has been made to equalize the mutual coupling between primary and secondary windings of these multisecondary transformers to enable cancellation of lower order harmonics. Low-ripple high-voltage dc output is achieved by phase staggering the outputs of 144 numbers of ac–dc converter-based power modules employed in this power supply. This power supply employs only feed forward control for its dc and pulse mode of operation. The design challenges associated with power module and their mitigation strategies for meeting the needs of continuous wave (CW) and pulse mode of operations are presented in this article. Availability analysis of this modular power supply incorporating active redundant power modules is also presented in this article. Wire burn test is carried out on the power supply to ensure that output stored energy is below 10 J. This power supply achieves output voltage stability <inline-formula> <tex-math>$le$ </tex-math></inline-formula>0.5%, output ripple <inline-formula> <tex-math>$le$ </tex-math></inline-formula>0.5%, current THD <inline-formula> <tex-math>$le$ </tex-math></inline-formula>0.5%, input power factor (IPF) <inline-formula> <tex-math>$ge 0.97$ </tex-math></inline-formula> at 87 kV, 18.7 A dc operating point. In pulse mode, rise time <inline-formula> <tex-math>$le$ </tex-math></inline-formula>100 us and fall time <inline-formula> <tex-math>$le$ </tex-math></inline-formula>100 us are achieved at 100 kV, 22 A operating point at pulsewidth of 2 ms and repetition rate of 40 Hz.","PeriodicalId":450,"journal":{"name":"IEEE Transactions on Plasma Science","volume":"54 1","pages":"219-227"},"PeriodicalIF":1.5,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145957876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Special Issue on the 40th PSSI National Symposium on Plasma Science and Technology (PLASMA 2025) 第40届PSSI全国等离子体科学与技术学术研讨会(Plasma 2025)特刊
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Pub Date : 2025-12-15 DOI: 10.1109/TPS.2025.3640339
{"title":"Special Issue on the 40th PSSI National Symposium on Plasma Science and Technology (PLASMA 2025)","authors":"","doi":"10.1109/TPS.2025.3640339","DOIUrl":"https://doi.org/10.1109/TPS.2025.3640339","url":null,"abstract":"","PeriodicalId":450,"journal":{"name":"IEEE Transactions on Plasma Science","volume":"53 12","pages":"4018-4018"},"PeriodicalIF":1.5,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11300548","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145754225","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Blank Page 空白页
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Pub Date : 2025-12-15 DOI: 10.1109/TPS.2025.3638105
{"title":"Blank Page","authors":"","doi":"10.1109/TPS.2025.3638105","DOIUrl":"https://doi.org/10.1109/TPS.2025.3638105","url":null,"abstract":"","PeriodicalId":450,"journal":{"name":"IEEE Transactions on Plasma Science","volume":"53 12","pages":"C4-C4"},"PeriodicalIF":1.5,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11300737","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145754239","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of Inactivation Effect of Nitrogen Gas–Liquid Plasma on Staphylococcus aureus 氮气-液体等离子体对金黄色葡萄球菌灭活效果分析
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Pub Date : 2025-12-15 DOI: 10.1109/TPS.2025.3641208
Dong-Ao Li;Jie Shen;Wen-Xue Duan;Shi-Dong Fang
Low-temperature plasma (LTP) is a major technology for aquatic pathogen elimination, with advantages of safety, effectiveness, and dynamic disinfection. Herein, nitrogen gasliquid plasma was used to inactivate Staphylococcus aureus in liquid, while optical emission spectroscopy (OES) and chemical reagents analyzed reactive oxygen and nitrogen species (RONS) formation. Short-lived species (OH and nitric oxide (NO) radicals) from plasma discharge dominated bacterial lethality; liquid-contact-induced long-lived species (H2O2, HNO2, and HNO3) exerted synergistic effects. Additionally, with subsequent reactions, ONOOH formation may play an important role in the disinfection process. The production of liquid-phase reactive species and their corresponding disinfection mechanisms were systematically studied. Utilizing both contact and noncontact treatment modes of nitrogen-liquid plasma, it was found that the lethal effect of bacteria was mainly due to short-lived species, whereas long-lived species had a synergistic effect. Bacterial inactivation mainly results from liquid RONS damaging cell membranes and elevating intracellular RONS, which highlights the great potential of the gasliquid plasma system in microbial inactivation.
低温等离子体(LTP)技术具有安全、有效、动态消毒等优点,是水生病原体清除的主要技术之一。本研究采用氮气气液等离子体灭活液体中的金黄色葡萄球菌,同时利用光学发射光谱(OES)和化学试剂分析活性氧和氮种(RONS)的形成。等离子体放电的短命物种(OH和NO自由基)主导了细菌的致死率;液体接触诱导的长寿命物质(H2O2、HNO2和HNO3)发挥协同效应。此外,在随后的反应中,ONOOH的形成可能在消毒过程中起重要作用。系统地研究了液相反应菌种的产生及其相应的消毒机理。采用氮-液等离子体接触式和非接触式两种处理方式,发现细菌的致死作用主要来自于短命菌种,而长命菌种具有协同作用。细菌灭活主要是由于液体离子离子对细胞膜的破坏和细胞内离子离子离子的升高,这表明气液等离子体系统在微生物灭活方面具有很大的潜力。
{"title":"Analysis of Inactivation Effect of Nitrogen Gas–Liquid Plasma on Staphylococcus aureus","authors":"Dong-Ao Li;Jie Shen;Wen-Xue Duan;Shi-Dong Fang","doi":"10.1109/TPS.2025.3641208","DOIUrl":"https://doi.org/10.1109/TPS.2025.3641208","url":null,"abstract":"Low-temperature plasma (LTP) is a major technology for aquatic pathogen elimination, with advantages of safety, effectiveness, and dynamic disinfection. Herein, nitrogen gasliquid plasma was used to inactivate <italic>Staphylococcus aureus</i> in liquid, while optical emission spectroscopy (OES) and chemical reagents analyzed reactive oxygen and nitrogen species (RONS) formation. Short-lived species (OH and nitric oxide (NO) radicals) from plasma discharge dominated bacterial lethality; liquid-contact-induced long-lived species (H<sub>2</sub>O<sub>2</sub>, HNO<sub>2</sub>, and HNO<sub>3</sub>) exerted synergistic effects. Additionally, with subsequent reactions, ONOOH formation may play an important role in the disinfection process. The production of liquid-phase reactive species and their corresponding disinfection mechanisms were systematically studied. Utilizing both contact and noncontact treatment modes of nitrogen-liquid plasma, it was found that the lethal effect of bacteria was mainly due to short-lived species, whereas long-lived species had a synergistic effect. Bacterial inactivation mainly results from liquid RONS damaging cell membranes and elevating intracellular RONS, which highlights the great potential of the gasliquid plasma system in microbial inactivation.","PeriodicalId":450,"journal":{"name":"IEEE Transactions on Plasma Science","volume":"54 1","pages":"243-252"},"PeriodicalIF":1.5,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145957893","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Data-Driven Endpoint Detection for Small Open Area Etching Using Interpretable Transfer Learning 使用可解释迁移学习的小开放区域蚀刻数据驱动端点检测
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-12-15 DOI: 10.1109/TSM.2025.3643948
Zimeng Wang;Jaehyun Kim;Sanghee Han;Alp Akçay;Heeyeop Chae;Juseong Lee
Accurate endpoint detection is critical in semiconductor plasma etching. Optical emission spectroscopy data contains information about the endpoint, but its analysis requires significant domain knowledge, and it contains large noise when the open area ratio is small. This paper proposes an interpretable data-driven endpoint detection method for small open area etching, leveraging transfer learning. First, we propose a formal metric quantifying the significance of endpoint trend in each wavelength signal and select the wavelength signals that are most sensitive to endpoint variations. Second, we devise an asymmetric autoencoder to uncover the endpoint trend in the noisy signals. Its asymmetric architecture incorporates nonlinear characteristics while ensuring the latent feature reflects the endpoint trends of the individual signals. Experimental results show that the model that learned the large open area etching (11.1%) can detect the endpoints of the small open area etching (0.5%) with the relative mean absolute error less than 0.6%, and amplify the signal-to-noise ratio by a factor of 2-3. Furthermore, the analysis of the selected wavelengths provides deeper insights into the underlying physical processes. The proposed method can be applied with minimal domain knowledge, while its results allow for exploring physical interpretations.
在半导体等离子体蚀刻中,精确的端点检测是至关重要的。光学发射光谱数据包含端点信息,但其分析需要大量的领域知识,且在开区比较小时包含较大的噪声。本文提出了一种利用迁移学习的可解释数据驱动的小开放区域蚀刻端点检测方法。首先,我们提出了一个形式化度量来量化每个波长信号中端点趋势的重要性,并选择对端点变化最敏感的波长信号。其次,我们设计了一个非对称自编码器来揭示噪声信号中的端点趋势。它的非对称结构融合了非线性特征,同时保证了潜在特征反映了单个信号的端点趋势。实验结果表明,学习了大开口面积蚀刻(11.1%)的模型可以检测出小开口面积蚀刻(0.5%)的端点,相对平均绝对误差小于0.6%,信噪比放大了2-3倍。此外,对所选波长的分析提供了对潜在物理过程的更深入的了解。所提出的方法可以应用于最少的领域知识,而其结果允许探索物理解释。
{"title":"Data-Driven Endpoint Detection for Small Open Area Etching Using Interpretable Transfer Learning","authors":"Zimeng Wang;Jaehyun Kim;Sanghee Han;Alp Akçay;Heeyeop Chae;Juseong Lee","doi":"10.1109/TSM.2025.3643948","DOIUrl":"https://doi.org/10.1109/TSM.2025.3643948","url":null,"abstract":"Accurate endpoint detection is critical in semiconductor plasma etching. Optical emission spectroscopy data contains information about the endpoint, but its analysis requires significant domain knowledge, and it contains large noise when the open area ratio is small. This paper proposes an interpretable data-driven endpoint detection method for small open area etching, leveraging transfer learning. First, we propose a formal metric quantifying the significance of endpoint trend in each wavelength signal and select the wavelength signals that are most sensitive to endpoint variations. Second, we devise an asymmetric autoencoder to uncover the endpoint trend in the noisy signals. Its asymmetric architecture incorporates nonlinear characteristics while ensuring the latent feature reflects the endpoint trends of the individual signals. Experimental results show that the model that learned the large open area etching (11.1%) can detect the endpoints of the small open area etching (0.5%) with the relative mean absolute error less than 0.6%, and amplify the signal-to-noise ratio by a factor of 2-3. Furthermore, the analysis of the selected wavelengths provides deeper insights into the underlying physical processes. The proposed method can be applied with minimal domain knowledge, while its results allow for exploring physical interpretations.","PeriodicalId":451,"journal":{"name":"IEEE Transactions on Semiconductor Manufacturing","volume":"39 1","pages":"74-81"},"PeriodicalIF":2.3,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146122769","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Corrections to “Investigation Into Increase Process of High-Power Microwave With S Curve” 对“大功率微波S曲线增长过程研究”的修正
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Pub Date : 2025-12-15 DOI: 10.1109/TPS.2025.3625698
Liang Zhao;Changhua Chen;Yuqun Deng
Presents corrections to the paper, (“Investigation Into Increase Process of High-Power Microwave With S Curve”).
对论文《大功率微波S曲线增长过程的探讨》进行了修正。
{"title":"Corrections to “Investigation Into Increase Process of High-Power Microwave With S Curve”","authors":"Liang Zhao;Changhua Chen;Yuqun Deng","doi":"10.1109/TPS.2025.3625698","DOIUrl":"https://doi.org/10.1109/TPS.2025.3625698","url":null,"abstract":"Presents corrections to the paper, (“Investigation Into Increase Process of High-Power Microwave With S Curve”).","PeriodicalId":450,"journal":{"name":"IEEE Transactions on Plasma Science","volume":"53 12","pages":"4016-4016"},"PeriodicalIF":1.5,"publicationDate":"2025-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11300752","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145754227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1