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Cover Image: Volume 3 Issue 2 封面图片:第 3 卷第 2 期
Pub Date : 2024-04-02 DOI: 10.1002/appl.202470201
Jianhui Liu, Xiaolin Liu, Tianfu Zhang, Jinqing Huang, Ben Zhong Tang, Ying Chau

Membraneless organelles (MLOs) can assemble via liquid–liquid phase separation (LLPS). Here, we review the metastable MLOs driven by LLPS, from multifaceted regards including energy state, molecular interactions, molecular structure, phase transition, and the associations with diseases, to advance the insight into properties and pathogenesis associated with LLPS of biological matter. Read the article here: https://onlinelibrary.wiley.com/doi/abs/10.1002/appl.202300071.

无膜细胞器(MLO)可通过液-液相分离(LLPS)组装。在此,我们将从能态、分子相互作用、分子结构、相变以及与疾病的关联等多个角度,对由液相分离驱动的可蜕变 MLOs 进行综述,以加深对生物物质液相分离相关特性和致病机理的认识。点击此处阅读文章:https://onlinelibrary.wiley.com/doi/abs/10.1002/appl.202300071。
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引用次数: 0
Callistemon citrinus: A Plant‐mediated synthesis of Sustainable Rhodium Nanoparticles and their Antimicrobial Activity. Callistemon citrinus:植物介导的可持续铑纳米粒子合成及其抗菌活性。
Pub Date : 2024-03-18 DOI: 10.1002/appl.202300130
Enas Ismail, Abubaker Mohamed, E. Maboza, M.S. Dhlamini, R. Adam
This work investigates the potential of using Callistemon citrinu flower extract, commonly known as bottlebrush, in the environmentally friendly synthesis of Rhodium nanoparticles (Rh NPs). Callistemon citrinu flower extract contains a high concentration of flavonoids and other phytochemicals. Hence, the extract was used to provide the essential components for an environmentally, sustainable synthesis method of Rh NPs. Different characterization analyses were used to evaluate the different properties of the synthesized particles. UV spectroscopy analysis demonstrated a continuous UV absorption spectrum attributed to the formation of Rh NPs. The XRD data and SAED analysis showed an amorphous nature of the synthesized Rh NPs. The HRTEM imaging provided morphological information about the Rh NPs tested sample, where the efficiency of Callistemon citrinu flower extract as a capping agent was reported. Furthermore, Raman spectra displayed the characteristic vibrational bands of the synthesized Rh NPs. The antimicrobial activity of the synthesized samples was tested against several dental pathogens, that play a role in dental caries, Staphylococcus aureus (SA), Bacillus subtilis (BS), Candida albicans (CA), Escherichia coli (Eco), and Staphylococcus epidermidis (S. Epi). In comparison with the control, Chlorhexidine (CHX), Rh NPs showed a greater impact on Candida albicans (20≤ Zone of inhibition (ZOI) (mm)≤ 26). The statistical analysis demonstrated that Rh NPs had a greater mean ZOI than the Callistemon citrinu flower extract. These results reveal the considerable potential and biological capacity Rh NPs have as an antifungal agent for dental applications.This article is protected by copyright. All rights reserved.
这项研究探讨了利用俗称 "瓶子草 "的柠檬花(Callistemon citrinu)萃取物以环保方式合成铑纳米粒子(Rh NPs)的潜力。Callistemon citrinu 花提取物含有高浓度的类黄酮和其他植物化学物质。因此,该提取物被用于为 Rh NPs 的环境可持续合成方法提供重要成分。不同的表征分析用于评估合成颗粒的不同特性。紫外光谱分析表明,Rh NPs 的形成具有连续的紫外吸收光谱。XRD 数据和 SAED 分析表明合成的 Rh NPs 具有无定形性质。HRTEM 成像提供了 Rh NPs 测试样品的形态信息,报告了 Callistemon citrinu 花提取物作为封端剂的效率。此外,拉曼光谱显示了合成 Rh NPs 的特征振带。测试了合成样品对几种牙齿病原体的抗菌活性,这些病原体包括金黄色葡萄球菌(SA)、枯草杆菌(BS)、白色念珠菌(CA)、大肠杆菌(Eco)和表皮葡萄球菌(S. Epi)。与对照组洗必泰(CHX)相比,Rh NPs 对白色念珠菌的影响更大(20≤ 抑制区(ZOI)(毫米)≤ 26)。统计分析表明,Rh NPs 的平均 ZOI 值大于 Callistemon citrinu 花提取物。这些结果揭示了 Rh NPs 在牙科应用中作为抗真菌剂所具有的巨大潜力和生物能力。本文受版权保护。
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引用次数: 0
Design Modification and Comparative Analysis of Glycol‐Based Natural Gas Dehydration Plant 基于乙二醇的天然气脱水装置的设计修改和比较分析
Pub Date : 2024-03-18 DOI: 10.1002/appl.202300093
C.O Wosu, J.G Akpa, A. A. Wordu, E. Ehirim, E.M Ezeh
Natural gas production from reservoirs is often associated with water, which poses numerous challenges, such as methane hydrate formation, sludge, corrosion, and flow assurance issues in gas processing plants and sales gas transmission pipelines. To effectively remove water from natural gas, there is a need to design, compare, and modify dehydration plants. This study investigated the performance difference between a conventional Triethylene Glycol (TEG)‐based dehydration system with a cooler at the TEG inlet to the contactor, and a newly proposed TEG‐based dehydration system with a heat exchanger replacing the cooler at the TEG inlet with the contactor. The advanced process simulation software Aspen HYSYS was used to design and compare two dehydration system configurations. The modified design configuration exhibited better performance in terms of energy conservation and water‐removal capability. The material balance of molar flow, mass flow, and volume flow of dry gas produced in the absorber/contactor column showed a higher volume of dry gas produced in the modified system configuration, indicating that it is a better design. The modified design configuration also produced dry gas within the recommended temperature range for underground storage and transmission. There was a significant difference in the percentage difference of 64% between the conventional and modified designs in terms of energy consumption, whereas the percentage differences of 0% and 0.6% showed non‐significant and significant differences between the two plant design configurations. Both plant design configurations showed a significant reduction (from 0.005 mol% to 0.0002 mol%) in the water composition of natural gas after the simulation.This article is protected by copyright. All rights reserved.
从储层中生产天然气通常会伴生水,这带来了许多挑战,如甲烷水合物的形成、污泥、腐蚀以及天然气加工厂和销售天然气输送管道中的流量保证问题。为了有效去除天然气中的水分,需要对脱水设备进行设计、比较和改造。本研究调查了基于三乙二醇 (TEG) 的传统脱水系统与基于 TEG 的新脱水系统之间的性能差异,前者在 TEG 与接触器的入口处安装了冷却器,而后者则在 TEG 与接触器的入口处安装了热交换器以取代冷却器。先进的工艺模拟软件 Aspen HYSYS 用于设计和比较两种脱水系统配置。改进后的设计配置在节能和脱水能力方面表现出更好的性能。吸收器/接触器塔中产生的干气的摩尔流量、质量流量和体积流量的物料平衡显示,改进后的系统配置产生的干气体积更大,表明它是一种更好的设计。修改后的设计配置产生的干气也符合地下储存和输送的建议温度范围。在能耗方面,传统设计和改进设计的百分比差异为 64%,差异显著,而两种工厂设计配置的百分比差异分别为 0% 和 0.6%,差异不显著,差异显著。两种工厂设计配置在模拟后都显示天然气的水成分显著降低(从 0.005 mol% 降至 0.0002 mol%)。本文受版权保护。
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引用次数: 0
Unravelling florfenicol's effects on splenic histology, erythrocytes and hematology of healthy Oreochromis niloticus juveniles 揭示氟苯尼考对健康裸鲤幼鱼脾脏组织学、红细胞和血液学的影响
Pub Date : 2024-03-15 DOI: 10.1002/appl.202400017
A. Bardhan, Thangapalam Jawahar Abraham, Ratnapriya Das, P. K. Patil
The study aimed to investigate the impact of administering the antibiotic florfenicol (FFC) through dietary means on Oreochromis niloticus. The experiment involved exposing the fish to FFC at doses 0 to 10 times the therapeutic dose of 15 mg/kg biomass per day for 10 consecutive days. The group receiving the therapeutic dose showed 100% survival on the 10th day of dosing. Histological analysis revealed dose‐dependent changes in the spleen, including an increase in sinusoidal space, splenic necrosis, white pulp proliferation, splenitis, and red pulp hemorrhages. Additionally, there was an exponential rise in leucocyte counts accompanied by a significant decrease in erythrocyte counts, indicating the development of anemia due to FFC. The observed splenic histological damage, along with increased erythrophagia, erythro‐membrane breakage, and poikilocytosis, highlighted the splenotoxic and haemotoxic effects of FFC at higher doses. Importantly, these toxic effects showed considerable reduction upon discontinuation of FFC dosing. The study emphasized the need to consider FFC‐induced splenotoxic and hemotoxic outcomes in O. niloticus during its application in aquaculture.This article is protected by copyright. All rights reserved.
该研究旨在调查通过饮食方式施用抗生素氟苯尼考(FFC)对黑鲷的影响。实验中,鱼类连续 10 天接触氟苯尼考,剂量为治疗剂量(每天每公斤生物量 15 毫克)的 0 至 10 倍。接受治疗剂量的组在用药第 10 天的存活率为 100%。组织学分析表明,脾脏的变化与剂量有关,包括窦状间隙增大、脾坏死、白髓增生、脾炎和红髓出血。此外,白细胞计数呈指数上升,红细胞计数显著下降,这表明全氟甲烷导致了贫血。观察到的脾脏组织学损伤,以及红细胞吞噬功能增强、红细胞膜破裂和嗜酸性细胞增多等现象,凸显了高剂量 FFC 的脾脏毒性和血液毒性效应。重要的是,这些毒性效应在停止服用全氟甲烷后明显减轻。该研究强调,在水产养殖中应用 FFC 时,需要考虑 FFC 诱导的黑线鳕脾毒性和血液毒性结果。本文受版权保护。
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引用次数: 0
Physicochemical and Sensory Evaluation of Lemon Grass Leaves extracts Enriched Soy Yoghurt from Soybeans (Glycine Max) Milk 柠檬草叶提取物富含大豆酸奶的理化和感官评价
Pub Date : 2024-03-15 DOI: 10.1002/appl.202400013
Nyiranshuti Angelique, K. Koskei, Marguerite Niyibituronsa
There are challenges in the utilization of soybean‐based foods due to undesirable associated flavors. This study aimed to prepare soybean based yoghurt with different amounts of lemon grass extract in the ratios of 0, 25, 50, 75, and 100 µl per litter of soy yoghurt as shown by figure 1. The table 1 and 2 summarized results of different treatments of Soybeans based yoghurt analyzed for protein by Kjedhal method, fats by Soxhlet method, total ash by muffle furnace method. Soluble crude fiber was determined by dry oven method, pH, titratable acidity, syneresis and viscosity, by AOAC method, total phenolic compounds by spectrophotometric method. Sensory analysis was done by effective tests with 10 panelists using five hedonic scale tools. From the study, the results indicate that moisture content range from (89.3‐89.6%); protein content (5.5‐6.8%); fat (2.7‐3.6%); total ash (0.43‐0.53%); crude fiber (0.06‐0.33%) and carbohydrate (0.59‐0.93%). The level of pH range from 4.30‐5.59; viscosity (2.85‐3.17 pa.s); titratable acidity, (0.01‐0.07 gl) and synersis (6.44‐7.56) and total phenolic compound (8.59‐18.40 mg/g). Most of the parameters did not show any significant variations while the pH and total phenolic compounds varied significantly between the treatments. In addition, figure 2 detailed sensory evaluation results of treatments and that the treatment with highest level of lemon grass extract was the most liked. In conclusion, incorporation of lemon grass extract can help improved the level of phenolic compounds and sensory properties of yoghurt.This article is protected by copyright. All rights reserved.
由于大豆中含有不良的相关味道,因此在利用大豆食品方面存在挑战。本研究旨在制备大豆酸奶,如图 1 所示,每升大豆酸奶中柠檬草提取物的比例分别为 0、25、50、75 和 100 微升。表 1 和表 2 总结了不同处理的大豆酸奶的蛋白质分析结果(Kjedhal 法)、脂肪分析结果(索氏法)和总灰分分析结果(马弗炉法)。可溶性粗纤维用干燥箱法测定,pH 值、可滴定酸度、粘滞性和粘度用 AOAC 法测定,总酚类化合物用分光光度法测定。感官分析是通过 10 位专家小组成员使用五种享乐量表工具进行的有效测试完成的。研究结果表明,水分含量(89.3%-89.6%);蛋白质含量(5.5%-6.8%);脂肪(2.7%-3.6%);总灰分(0.43%-0.53%);粗纤维(0.06%-0.33%)和碳水化合物(0.59%-0.93%)。pH 值(4.30-5.59)、粘度(2.85-3.17 pa.s)、可滴定酸度(0.01-0.07 gl )、苷酸(6.44-7.56)和总酚化合物(8.59-18.40 mg/g)。大多数参数没有显示出明显的变化,而 pH 值和总酚类化合物在不同处理之间有明显的差异。此外,图 2 详细列出了各处理的感官评价结果,其中柠檬草提取物含量最高的处理最受欢迎。总之,添加柠檬草提取物有助于提高酸奶的酚类化合物水平和感官特性。本文受版权保护。
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引用次数: 0
Synthesis and Photo‐initiated Radical Polymerization of Methacrylates Derived from Bio‐based ω‐Hydroxycarboxylic Acids 生物基ω-羟基羧酸衍生甲基丙烯酸酯的合成与光引发的自由基聚合反应
Pub Date : 2024-03-15 DOI: 10.1002/appl.202300124
Markus Heinz, Maximilian Kepkow, B. Strehmel, V. Strehmel
The bio‐based methacrylates 9‐(methacryloyloxy)‐10,18‐dihydroxyoctadecanoic acid/9,18‐dihydroxy‐10‐(methacryloyloxy)octadecanoic acid isomer mixture and 22‐methacryloyloxydocosanoic acid were synthesized from 9,10‐epoxy‐18‐hydroxyoctadecanoic acid and 22‐hydroxydocosanoic acid. The white crystalline 9,10‐epoxy‐18‐hydroxyoctadecanoic acid and cream‐colored 22‐hydroxydocosanoic acid were isolated from both bark of Betula pendula and cork of Quercus suber after extraction of the milled plant materials with methanol, treating the insoluble residues with 2‐propanole containing suspended sodium hydroxide, application of a working up procedure developed in this work for the resulting mixture, and purification of the products obtained. The new bio‐based methacrylates show higher reactivity in the photoinitiated polymerization in comparison with the commercial laurylmethacrylate as detected by photo‐DSC. For comparison, traditional free radical polymerization of the new bio‐based methacrylates was carried out in dimethylsulfoxide using 2,2’‐azobis‐(2‐propionitrile) as initiator. Furthermore, quantitative conversion of the bio‐based monomers during the photoinitiated polymerization makes these bio‐based monomers interesting for application in coatings. As expected, the photopolymer made from the 9‐(methacryloyloxy)‐10,18‐dihydroxyoctadecanoic acid/9,18‐dihydroxy‐10‐(methacryloyloxy)octadecanoic acid isomer mixture is amorphous. Interestingly, the photopolymer made from the 22‐methacryloyloxydocosanoic acid contains crystalline structures as detected by DSC investigation.This article is protected by copyright. All rights reserved.
由 9,10-环氧-18-羟基十八烷酸和 22-羟基二十二酸合成了生物基甲基丙烯酸酯 9-(甲基丙烯酰氧基)-10,18-二羟基十八烷酸/9,18-二羟基-10-(甲基丙烯酰氧基)十八烷酸异构体混合物和 22-甲基丙烯酰氧基二十二酸。用甲醇萃取磨碎的植物材料,用含有悬浮氢氧化钠的 2-丙醇处理不溶性残留物,对得到的混合物采用本研究开发的加工程序,并对得到的产品进行纯化,然后从桦树和柞树的树皮中分离出白色结晶的 9,10-epoxy-18-hydroxyoctadecanoic acid 和乳白色的 22-hydroxydocosanoic acid。与商用十二烷基甲基丙烯酸酯相比,新的生物基甲基丙烯酸酯在光引发聚合中显示出更高的反应活性,这是由光致电导率扫描仪检测到的。为了进行比较,使用 2,2'-偶氮双(2-丙腈)作为引发剂,在二甲基亚砜中对新型生物基甲基丙烯酸酯进行了传统的自由基聚合。此外,生物基单体在光引发聚合过程中的定量转化使得这些生物基单体有望应用于涂料。不出所料,由 9-(甲基丙烯酰氧基)-10,18-二羟基十八烷酸/9,18-二羟基-10-(甲基丙烯酰氧基)十八烷酸异构体混合物制成的光聚合物是无定形的。有趣的是,由 22-甲基丙烯酰氧基二十二酸制成的光聚合物含有结晶结构,这是由 DSC 研究检测到的。本文受版权保护。
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引用次数: 0
Optimizing the Series Cascade Control Structure for Non‐minimum Phase System Regulation 优化非最小相位系统调节的串联级联控制结构
Pub Date : 2024-03-06 DOI: 10.1002/appl.202300051
Ashish Kumar Singhal, Manish Yadav, Vijay Yadav, Jyoti Deshmukh, Manish Billore, Hirak Mazumdar
This work elucidates the control of integrating a non‐minimum phase system via a series cascade scheme with fractional‐order P.I. (Proportional–Integral) plus D (Derivative) controller. The traditional Internal Model Control (IMC) is adopted for inner loop controller design. The feedback D controller is synthesized with the outer loop process model, showing the proposed work's universality. The outer loop controller is suggested in the IMC framework after the accountability of fractional‐filter and inverse response compensator. This combination is revealed to enhance performance without compromising robustness. The Riemann sheet principle is explored to compute the stability of the suggested controller. The sensitivity analysis has asserted the robustness. More importantly, the optimal value of controller settings is achieved via the Teaching Learning Based Optimization (TLBO) algorithm. This TLBO algorithm uses an objective function that minimizes Integral Square Error (ISE). Two illustrative problems are utilized to examine the recommended control structure's virtue.This article is protected by copyright. All rights reserved.
本研究阐明了通过分数阶 P.I.(比例-积分)加 D(微分)控制器的串联级联方案对非最小相位系统进行集成控制的问题。内环控制器设计采用了传统的内部模型控制(IMC)。反馈 D 控制器与外环过程模型合成,显示了所提议工作的通用性。在 IMC 框架中,建议采用分式滤波器和反响应补偿器。结果表明,这种组合能在不影响稳健性的情况下提高性能。利用黎曼表原理计算了建议控制器的稳定性。灵敏度分析证明了其稳健性。更重要的是,控制器设置的最佳值是通过基于教学学习的优化(TLBO)算法实现的。该 TLBO 算法使用的目标函数是最小化积分平方误差 (ISE)。本文受版权保护。本文受版权保护,保留所有权利。
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引用次数: 0
Leveraging wastewater surveillance to actively monitor Covid‐19 community dynamics in rural areas with reduced reliance on clinical testing 利用废水监测积极监测农村地区 Covid-19 群落动态,减少对临床检测的依赖
Pub Date : 2024-03-05 DOI: 10.1002/appl.202400012
Michelle M. Jarvie, Thu Ngoc Thi Nguyen, Benjamin Southwell, Derek Wright
The prevalence of COVID‐19 in the community has become more difficult to gauge utilizing clinical testing due to a decrease in reported test results stemming from the availability of at‐home test kits and a reduction in the number of cases seeking medical treatment. The purpose of this study was to examine the trend of diminishing correlation between reported clinical cases of COVID‐19 and wastewater‐based surveillance epidemiological data as home testing became available in the Eastern Upper Peninsula of Michigan. Wastewater grab samples were collected weekly from 16 regional locations from June 2021‐December 2022. Samples were analyzed for SARS‐CoV‐2 N1 and N2 viral particles using reverse transcriptase digital droplet polymerase chain reaction (RT ddPCR). N1 and N2 gene copies were correlated with clinical cases. The t‐test was used to determine correlation deterioration point. Clinical cases post‐deterioration were calculated for high‐correlated pre‐deterioration locations using linear regression. Correlation between the wastewater‐based surveillance of SARS‐CoV‐2 and reported clinical cases deteriorated after February 1, 2022. This corresponds with the timeframe in which commercially available at‐home test kits became available in the United States. The increase in at‐home testing for SARS‐CoV‐2 likely contributed to the decrease in reported clinical positive tests in early 2022, providing an unrealistic picture of the presence of Covid‐19 in the community. As measures to reduce exposure such as personal masking, clinical testing, social isolating, and quarantining continue to decline, wastewater surveillance for the presence of SARS‐CoV‐2 may be the best method for public health professionals to remain aware of virus dynamics in localized regions. Time‐series modeling adds another layer of information when clinical data is unobtainable or underreported.This article is protected by copyright. All rights reserved.
COVID-19 在社区中的流行程度越来越难以通过临床检测来衡量,原因是家庭检测试剂盒的出现导致报告的检测结果减少,以及寻求医疗治疗的病例数量减少。本研究的目的是考察密歇根州东部上半岛地区随着家庭检测的普及,COVID-19 临床病例报告与基于废水的监测流行病学数据之间相关性降低的趋势。2021 年 6 月至 2022 年 12 月期间,每周从 16 个地区采集废水样本。使用逆转录酶数字液滴聚合酶链反应(RT ddPCR)分析样本中的 SARS-CoV-2 N1 和 N2 病毒颗粒。N1 和 N2 基因拷贝与临床病例相关。采用 t 检验确定相关性恶化点。使用线性回归法计算恶化前高相关性地点恶化后的临床病例。2022 年 2 月 1 日之后,基于废水的 SARS-CoV-2 监测与报告的临床病例之间的相关性下降。这与美国商业化家庭检测试剂盒上市的时间相吻合。SARS-CoV-2 居家检测的增加很可能导致 2022 年初报告的临床检测阳性病例的减少,从而提供了社区中存在 Covid-19 的不真实情况。随着个人遮蔽、临床检测、社会隔离和检疫等减少接触的措施不断减少,对 SARS-CoV-2 的存在进行废水监测可能是公共卫生专业人员了解局部地区病毒动态的最佳方法。当临床数据无法获得或报告不足时,时间序列模型可提供另一层信息。本文受版权保护。
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引用次数: 0
Narrowing Lab‐to‐Market Gaps: Device Innovations in Fuel Generation, Solar‐Cell, and Photodetection 缩小实验室到市场的差距:燃料发电、太阳能电池和光电检测领域的设备创新
Pub Date : 2024-03-05 DOI: 10.1002/appl.202300109
Sukanta Nandi, Raaghesh Vijayan, Manjeet Chhetri
Academic translational research efforts to industry are often an underlying sought‐after goal among various researchers. Through the interchanges of research endeavors between academia‐industry, great innovations can/has been achieved that cater to the real‐world application by bridging “industrially relevant” problem solving with pursuing fundamental studies. It is pertinent that, most of the studies from university level research works may not translate into demonstrable market products due to various reasons. Funding support, individual researcher goals, socio‐economic factors, and most importantly the technical know‐how of generating revenue strategies for startups, are a few of the factors that have slowed the pace of collaborative efforts. However, we believe that the most crucial component is identification of the critical parameters that solve long standing problems which hinder the scale‐up of the lab scale research into marketable products considering the techno‐economic analysis. To illustrate this, we take three most relevant examples of devices for fuel generation, devices to utilize solar radiation and devices for detection and other related applications. In this perspective, we provide an in‐depth case study of each of these critical parameters to comment on the direction of research avenues that can serve as step‐stones for the commercialization of university‐level lab research studies.This article is protected by copyright. All rights reserved.
面向产业的学术转化研究工作往往是不同研究人员追求的基本目标。通过学术界与产业界之间的研究工作交流,在解决 "与产业相关 "的问题与开展基础研究之间架起了一座桥梁,从而能够/已经取得了巨大的创新成果,满足了现实世界的应用需求。与此相关的是,由于各种原因,大学研究工作中的大多数研究可能无法转化为可证实的市场产品。资金支持、研究人员的个人目标、社会经济因素,以及最重要的初创企业创收战略的技术诀窍,都是放慢合作步伐的几个因素。然而,我们认为,最关键的因素是要确定关键参数,以解决长期存在的问题,这些问题阻碍了实验室规模研究向市场化产品的扩展,同时还要考虑到技术经济分析。为了说明这一点,我们以燃料生产设备、太阳辐射利用设备和检测设备及其他相关应用设备这三个最相关的设备为例进行说明。从这一角度出发,我们对每个关键参数都进行了深入的案例研究,以评述可作为大学实验室研究成果商业化基石的研究途径的方向。本文受版权保护。
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引用次数: 0
Epitaxial silicon transition zone measurements by spreading resistance profiling (SRP) and Fourier transform infrared (FTIR) reflectometry 利用展阻剖面法 (SRP) 和傅立叶变换红外反射仪测量外延硅过渡区
Pub Date : 2024-03-01 DOI: 10.1002/appl.202300146
Eszter Najbauer, Lucza Sinkó, Szilvia Biró, Zsolt Durkó, Peter Basa
Silicon epitaxy is an essential building block in the manufacturing of complementary metal‐oxide semiconductor (CMOS) devices. Accurate determination of epitaxial layer thickness is indispensable for a uniform and reproducible process. In this paper, we compare thickness values of the transition zone in silicon epitaxial wafers obtained by two of Semilab's production‐compatible electrical and optical characterization techniques: Fourier‐transform infrared (FTIR) reflectometry and spreading resistance profiling (SRP). We demonstrate a high correlation between transition zone thicknesses obtained from the optical modelling of FTIR reflectance spectra and SRP profiles. The dependance of transition zone thickness change on the high‐temperature annealing steps is also examined. FTIR reflectometry thus offers a quick, contactless alternative for obtaining structural parameters of an epitaxial layer, and these values can be well matched to those given by SRP.This article is protected by copyright. All rights reserved.
硅外延是制造互补金属氧化物半导体(CMOS)器件的重要组成部分。外延层厚度的精确测定对于实现均匀、可重复的工艺是不可或缺的。在本文中,我们比较了通过 Semilab 两种与生产兼容的电气和光学表征技术获得的硅外延片过渡区的厚度值:傅立叶变换红外(FTIR)反射仪和展阻曲线(SRP)。我们证明了通过傅立叶变换红外反射光谱光学建模获得的过渡区厚度与 SRP 曲线之间的高度相关性。我们还研究了过渡区厚度变化与高温退火步骤的关系。因此,傅立叶变换红外反射仪为获得外延层的结构参数提供了一种快速、非接触式的替代方法,而且这些参数值与 SRP 所给出的参数值非常匹配。本文受版权保护。
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引用次数: 0
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