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2005 International Vacuum Nanoelectronics Conference最新文献

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Damage of carbon nanotube films during field emission 场致发射过程中碳纳米管薄膜的损伤
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619618
X.H. Liang, N. Xu, Jun Chen, S. Deng
The damage effects of emission current of different levels on the carbon nanotube (CNT) films were investigated. A critical emission current density is found, which divides the different dominative mechanisms responsible for the damage of the CNT films.
研究了不同强度的发射电流对碳纳米管薄膜的损伤效应。发现了一个临界发射电流密度,划分了导致碳纳米管薄膜损伤的不同主导机制。
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引用次数: 0
Electron field emission from a single carbon nanotube: effects of anode location 单碳纳米管的电子场发射:阳极位置的影响
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619587
R.C. Smith, W. Tsang, D. Cox, S. Silva
Electron field emission from an isolated carbon nanotube (CNT) were performed in-situ in a modified scanning electron microscope, over a range of anode to CNT tip separations, D, of 1 to 60 /spl mu/m. The CNT was exposed from a CNT-polymer composite which was physically broken and examined along the broken edge. The threshold field required for an emission of 100 nA was seen to decrease from a value of 45 V/spl mu/m/sup -1/ at an anode to CNT tip separation of 1 /spl mu/m, and asymptotically approaches 4 V/spl mu/m/sup -1/ at a separation of 60 /spl mu/m. By defining the separation as (D-h) rather than D, where h is the height of the CNT, our applied electric field is E=V/(D-h). Calculation of enhancement factor using the Fowler Nordheim equation shows an increase in enhancement factor with an increasing D, and ties in well with the decrease in threshold field with increasing D. Under "far field" conditions, where D > 3h, the CNT enhancement factor is no longer dependent on D as shown by the asymptotic behaviour of threshold field, and is purely a factor of the CNT height and radius. Fowler-Nordheim analysis allowed calculation of the emission currents for given CNT to tip separation. The calculated emission current, threshold field and enhancement are comparable to that found experimentally.
在改进的扫描电子显微镜下,对分离的碳纳米管(CNT)进行了原位电子场发射,在阳极到碳纳米管尖端分离的范围内,D为1至60 /spl mu/m。碳纳米管从碳纳米管聚合物复合材料中暴露出来,该复合材料被物理破坏并沿着破碎的边缘进行检查。从阳极到碳纳米管尖端间距为1/ spl mu/m时,100 nA发射所需的阈值场从45 V/spl mu/m/sup -1/减小,并在间距为60 /spl mu/m时渐近于4 V/spl mu/m/sup -1/。通过将分离定义为(D-h)而不是D,其中h是碳纳米管的高度,我们的施加电场是E=V/(D-h)。利用Fowler Nordheim方程计算增强因子时,增强因子随D的增加而增加,与阈值场随D的增加而减小密切相关。在“远场”条件下,当D > 3h时,阈值场的渐近行为表明,碳纳米管增强因子不再依赖于D,而纯粹是碳纳米管高度和半径的一个因素。Fowler-Nordheim分析允许计算给定碳纳米管到尖端分离的发射电流。计算得到的发射电流、阈值场和增强与实验结果相当。
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引用次数: 91
Density control of carbon nanotubes for field emission display by control of catalytic layer diffusion 通过控制催化层扩散控制场发射显示用碳纳米管的密度
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619634
Y. Park, H. Kim, I. Han, A.Z. Zoulkarneev, K. Min, C.W. Baek, T. Jeong, D. Chung, S. Park, J.H. Choi, B. K. Song, H.S. Kang, J. Heo, Y.W. Jin, J.M. Kim
In this report, we have controlled the growth of multiwalled carbon nanotubes (MWNT) in terms of the populations and diameters by introducing a buffer layer between catalytic layer and amorphous silicon coated substrates. The carbon nanotubes growth with the chemical vapor deposition technique might produce interaction of the metallic catalyst with silicon layer, which could interrupt the catalytic effect. We will show how control of diffusion layer between the amorphous silicon and metal catalyst effectively control the formation of the silicide phase and consequently optimize the carbon nanotubes growth. It is performed on amorphous silicon coated glass by infrared radiation heated thermal chemical vapor deposition(CVD), using a gas mixture of carbon mono-oxide and hydrogen and Fe-Ni-Co alloy catalyst at temperatures as low as 480/spl sim/580/spl deg/C.
在本报告中,我们通过在催化层和非晶硅涂层衬底之间引入缓冲层来控制多壁碳纳米管(MWNT)在数量和直径方面的生长。化学气相沉积法生长碳纳米管可能会导致金属催化剂与硅层相互作用,从而中断催化效果。我们将展示如何控制非晶硅和金属催化剂之间的扩散层有效地控制硅化相的形成,从而优化碳纳米管的生长。在低至480/spl sim/580/spl℃的温度下,采用红外辐射加热的热化学气相沉积法(CVD)在非晶硅镀膜玻璃上进行镀膜。
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引用次数: 0
Field electron emission of nanorods of semiconductors of wide energy band gaps 宽能带隙半导体纳米棒的场电子发射
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619458
Zhibing Li, Weiliang Wang, S. Deng, N. Xu
It is shown that significant field emission from nanorods of wide band gap semiconductors is possible. The nanorod is assumed to have a thin surface layer containing a large number of localized states originating from defects. Taking SiC as an example, the electrostatic potential, charge distribution, conduction current, tunnelling current, and field enhancement are calculated. It is found that the field-induced insulator to semimetal transition is responsible for the efficient field emission from the nanorods and that field enhancement is not constant with applied fields but varies with the field and has a maximum.
结果表明,宽禁带半导体的纳米棒可以产生显著的场发射。假设纳米棒具有薄的表面层,其中包含大量源自缺陷的局域态。以SiC为例,计算了静电势、电荷分布、传导电流、隧穿电流和场增强。发现场致绝缘体到半金属的转变是纳米棒有效场发射的原因,场增强随外加场的变化而变化,并有一个最大值。
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引用次数: 4
Vertically aligned carbon nanotubes field emission devices fabricated by furnace thermal CVD at atmospheric pressure 常压炉热CVD制备垂直排列碳纳米管场致发射器件
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619595
S. Wei, W. Kang, J. Davidson, W. Hofmeister, B. Choi, J.H. Huang
In this paper, vertically aligned carbon nanotubes field emission devices were fabricated from the as grown carbon nanotubes (CNTs) by furnace thermal CVD at atmospheric pressure. The device was tested in vacuum (/spl sim/10/sup -6/ torr) for field emission characterization. The turn-on field was about 3 V//spl mu/m, which is comparable to data reported elsewhere.
本文采用常压炉热气相沉积法制备了垂直排列的碳纳米管场发射器件。在真空(/spl sim/10/sup -6/ torr)中进行了场发射特性测试。开路面积约为3 V//spl mu/m,与其他地方报告的数据相当。
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引用次数: 0
The electron field emission properties of Ag-SiO/sub 2/ nanocomposite layers Ag-SiO/sub - 2/纳米复合层的电子场发射性能
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619558
W. Tsang, V. Stolojan, C. Giusca, C. Poa, B. Sealy, S. Silva, S. Wong
This paper investigates the introduction of nano-sized Ag cluster into a SiO/sub 2/ matrix by Ag/sup +/ implantation on thermally oxidised SiO/sub 2/ layers. The embedded Ag nanoclusters create conducting paths for the emissive electrons from substrate to emission surface and give rise to a local electric field enhancement due to an electrical inhomogeneity effect.
本文研究了在热氧化SiO/sub - 2/层上通过Ag/sup +/注入将纳米Ag团簇引入SiO/sub - 2/基体的方法。嵌入的银纳米团簇为发射电子从衬底到发射表面创造了导电路径,并且由于电非均匀性效应而产生局部电场增强。
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引用次数: 0
High-current emission from active-matrix HEED (high-efficiency electron emission device) - application to image sensing 有源矩阵高效电子发射器件的大电流发射——在图像传感中的应用
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619490
N. Negishi, T. Nakada, K. Sakemura, Y. Okuda, H. Satoh, A. Watanabe, T. Yoshikawa, K. Ogasawara, M. Namba, S. Okazaki, K. Tanioka, N. Egami, N. Koshida
A 256 /spl times/ 192 pixels active-matrix cold electron emitter array with integrated scan driver circuits is developed. The basic structure of the electron emitter is almost the same as that of an advanced HEED (high-efficiency electron emission device) previously reported. The emission current density of the active-matrix HEED has been enhanced more than 100 times compared to that of the advanced HEED under the passive operation mode. It is demonstrated that the developed emitter can be applied to flat image sensing with a high-gain avalanche rushing amorphous photoconductor (HARP) target.
研制了一种集成扫描驱动电路的256 /spl倍/ 192像素有源矩阵冷电子发射阵列。电子发射体的基本结构与先前报道的先进的高效电子发射装置(HEED)几乎相同。在无源工作模式下,有源矩阵HEED的发射电流密度比先进的HEED提高了100倍以上。实验结果表明,所研制的发射体可用于高增益雪崩冲击非晶光导体(HARP)靶的平面图像传感。
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引用次数: 0
Single mask fabrication process of vacuum microelectronics components and preliminary characterization results 真空微电子元件的单掩模制造工艺及初步表征结果
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619639
A. Phommahaxay, G. Lissorgues, T. Bourouina, P. Nicole
In using a single mask fabrication process, our work enables the rapid prototyping of vacuum micro-components. The first prototypes, including lateral diodes and triodes, have been produced with a low-cost aluminum process, consisting of one metal layer, one lithography step and silicon micromachining. The effects of the process optimization on the characteristics will be assessed. Different configurations using more suitable field emitter materials such as tungsten will be studied in the future.
在使用单一掩模制造工艺时,我们的工作使真空微组件的快速原型制作成为可能。第一批原型,包括横向二极管和三极管,已经用低成本的铝工艺生产出来,包括一个金属层,一个光刻步骤和硅微加工。将评估工艺优化对特性的影响。未来将研究采用更合适的场极材料(如钨)的不同结构。
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引用次数: 0
Field emission from carbon nanotube FEAs in hydrogen 氢中碳纳米管FEAs的场发射
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619613
J. Shaw, D. Hsu
Field emission in hydrogen at pressures near 10/sup -4/ torr increases the current produced by carbon nanotube field emitter arrays. In this paper, a more detailed current and energy analysis including the effects of cracking the hydrogen using a hot filament, long-term exposure, and the production of ions is reported. The carbon nanotubes are grown using PECVD. With the gate voltage held at 24 V, the anode current increased from 0.4 /spl mu/A before exposure to H, to 4 /spl mu/A after half an hour under atomic hydrogen. Fowler-Nordheim analysis suggests a reduced work function or emitter radius and reduced emission area or reduced density of states.
在接近10/sup -4/ torr的压力下,氢中的场发射增加了碳纳米管场发射阵列产生的电流。本文报道了更详细的电流和能量分析,包括使用热灯丝裂解氢的影响,长期暴露和离子的产生。碳纳米管是用PECVD生长的。当栅极电压保持在24 V时,阳极电流由H作用前的0.4 /spl mu/A增加到氢原子作用半小时后的4 /spl mu/A。Fowler-Nordheim分析表明,减小了功函数或发射极半径,减小了发射面积或减小了态密度。
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引用次数: 0
Field emission characteristics form SiC micro powders 碳化硅微粉的场发射特性
Pub Date : 2005-07-10 DOI: 10.1109/IVNC.2005.1619579
T. Yoshimoto, N. Yokogawa, T. Iwata
The field emission characteristics from the SiC micro powders with sharp edge are investigated. The edge of the SiC powder works as the field emitter. The emission current follows the Fowler-Nordheim relationship. An excellent emission stability in short term is confirmed. These results show that the SiC powder is a good candidate for field electron source.
研究了具有锋利边缘的碳化硅微粉的场发射特性。SiC粉末的边缘作为场发射极。发射电流遵循Fowler-Nordheim关系。在短期内具有良好的发射稳定性。这些结果表明,SiC粉末是一种很好的场电子源。
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2005 International Vacuum Nanoelectronics Conference
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