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A device based on the Shack-Hartmann wave front sensor for testing wide aperture optics 基于Shack-Hartmann波前传感器的大孔径光学测试装置
Pub Date : 2016-03-16 DOI: 10.1117/12.2219282
A. Nikitin, J. Sheldakova, A. Kudryashov, G. Borsoni, D. Denisov, V. Karasik, A. Sakharov
In this paper we consider two approaches widely used in testing of wide aperture optics: Fizeau interferometer and Shack-Hartmann wavefront sensor. Fizeau interferometer that is common instrument in optical testing can be transformed to a device using Shack-Hartmann wavefront sensor, the alternative technique to check wide aperture optical components. We call this device Hartmannometer, and compare its features to those of Fizeau interferometer.
本文考虑了两种广泛应用于大孔径光学器件测试的方法:菲索干涉仪和沙克-哈特曼波前传感器。菲索干涉仪是一种常用的光学检测仪器,利用沙克-哈特曼波前传感器可以将菲索干涉仪改造成一种检测大口径光学元件的替代技术。我们称这种装置为哈特曼干涉仪,并将其特点与菲索干涉仪进行比较。
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引用次数: 21
Measurement of surface topographies in the nm-range for power chip technologies by a modified low-coherence interferometer 用改进的低相干干涉仪测量功率芯片技术纳米范围内的表面形貌
Pub Date : 2016-03-16 DOI: 10.1117/12.2212913
C. Taudt, T. Baselt, B. Nelsen, H. Assmann, A. Greiner, Edmund Koch, Peter Hartmann
This work introduces a modified low-coherence interferometry approach for nanometer surface-prolometry. The key component of the interferometer is an element with known dispersion which defines the measurement range as well as the resolution. This dispersive element delivers a controlled phase variation which can be detected in the spectral domain and used to reconstruct height differences on a sample. In the chosen setup, both axial resolution and measurement range are tunable by the choice of the dispersive element. The basic working principle was demonstrated by a laboratory setup equipped with a supercontinuum light source ( Δλ= 400-1700 nm). Initial experiments were carried out to characterize steps of 101 nm on a silicon height standard. The results showed that the system delivers an accuracy of about 11.8 nm. These measurements also served as a calibration for the second set of measurements. The second experiment consisted of the measurement of the bevel of a silicon wafer. The modified low-coherence interferometer could be utilized to reproduce the slope on the edge within the previously estimated accuracy. The main advantage of the proposed measurement approach is the possibility to collect data without the need for mechanically moving parts.
本文介绍了一种改进的低相干干涉法用于纳米表面测量。干涉仪的关键部件是已知色散的元件,色散决定了测量范围和分辨率。这种色散元件提供可控的相位变化,可以在光谱域中检测到,并用于重建样品上的高度差。在所选择的设置中,轴向分辨率和测量范围都可以通过选择色散元件来调节。在超连续光源(Δλ= 400-1700 nm)的实验装置上验证了其基本工作原理。在硅高度标准上对101 nm的步长进行了初步的表征。结果表明,该系统的精度约为11.8 nm。这些测量也可作为第二组测量的校准。第二个实验是测量硅片的斜角。利用改进后的低相干干涉仪可以在先前估计的精度范围内再现边缘上的斜率。所提出的测量方法的主要优点是可以在不需要机械运动部件的情况下收集数据。
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引用次数: 0
Stabilization of two frequency combs with a small relative fceo jitter using diode laser injection locking 用二极管激光注入锁定稳定相对fceo抖动小的两个频率梳
Pub Date : 2016-03-16 DOI: 10.1117/12.2212838
B. Chun, Young‐Jin Kim, Seung-Woo Kim
We report a novel stabilization method for two frequency combs with a small relative fceo jitter using a selected single optical mode out of a frequency comb. This proposed method is intended to stabilize optical frequencies which generated by two different optical combs with immunity to environmental disturbance, frequency drift and fluctuation with time so as to enhance the measuring performance of dual comb based spectroscopy and distance measurement. A single comb mode is selected out using a composite optical filtering and diode laser injection locking. The selected optical frequency yields a narrow relative linewidth less than 1 Hz and the frequency stability of 1.58×10-17 at 10 s averaging time. By using this, we generated heterodyned beat signal between generated optical frequency and another comb to stabilize relative fceo using phase lock-in control which adjust driving frequency of acousto-optic modulator. As a result of feedback control, the relative jitter is well stabilized down to 1.06×10-15 at 10 s averaging time. This highly stable frequency instability of two combs can perform to enhance the measuring resolution, accuracy and repeatability for dual comb based spectroscopy and distance metrology.
我们报告了一种新的稳定方法,两个频率梳与一个小的相对fceo抖动使用一个选择的单光学模式的频率梳。该方法旨在稳定两种不同光梳产生的光频率,使其不受环境干扰、频率漂移和时间波动的影响,从而提高双梳光谱学和距离测量的测量性能。采用复合光学滤波和二极管激光注入锁相结合的方法选择出单梳状模式。选择的光频率相对线宽小于1hz,平均时间为10s时的频率稳定度为1.58×10-17。在此基础上,利用锁相控制调节声光调制器的驱动频率,在产生的光频与另一梳频之间产生外差拍信号,以稳定相对频率。作为反馈控制的结果,相对抖动在10 s的平均时间内稳定到1.06×10-15。这种高度稳定的双梳频率不稳定性可以提高基于双梳的光谱和距离计量的测量分辨率、精度和可重复性。
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引用次数: 0
Smart slit assembly for high-resolution spectrometers in space 用于空间高分辨率光谱仪的智能狭缝组件
Pub Date : 2016-03-16 DOI: 10.1117/12.2209336
B. Guldimann, K. Minoglou
This paper introduces a novel imaging spectrometer subsystem concept, the Smart Slit Assembly (SSA), that improves instrument performances and enables new features for future Earth Observation. Derived from CarbonSat (ESA study) requirements, a concept of an SSA based on MEMS micro-shutters/mirrors and associated instrument design aspects are presented. The SSA replaces the classical grating spectrometer slit aperture in the focal plane of the telescope with three core elements, namely an input multimode waveguide array followed by a spatial light modulator (SLM) and an output multimode waveguide array which ends at the slit aperture viewed by the spectrometer. The SLM’s in-and-outputs being coupled to waveguide arrays leads to an enhanced SLM with light de-coherence, polarization scrambling and scene/object homogenization capabilities. The additional advantage of this subsystem’s arrangement is that waveguide level homogeneous spatial light modulation can be achieved with spatially in-homogeneous coupling from in to output multimode waveguides, allowing new, simpler and less costly designs for the SLM part of the SSA. The SSA is particularly useful for instance to reduce stray light by scene/object selection or modulation (e.g. de-clouding, intensity equalization), relax on the required dynamic range of the detectors, increase spectral stability by waveguide level intensity homogenization/scrambling, continuous in-flight monitoring of the co-registration between two or several spectrometer channels and inflight monitoring of stray light.
本文介绍了一种新的成像光谱仪子系统概念——智能狭缝组件(Smart Slit Assembly, SSA),它提高了仪器的性能,并为未来的地球观测提供了新的功能。根据欧洲航天局(ESA)的研究要求,提出了基于MEMS微快门/反射镜的SSA概念和相关仪器设计方面的问题。SSA用三个核心元件取代了望远镜焦平面上的经典光栅光谱仪狭缝孔径,即以空间光调制器(SLM)为中心的输入多模波导阵列和以光谱仪观察到的狭缝孔径为终点的输出多模波导阵列。SLM的输入和输出与波导阵列耦合,从而增强了SLM的光去相干性、偏振置乱和场景/物体均匀化能力。该子系统的另一个优点是,波导级均匀空间光调制可以通过从输入到输出多模波导的空间非均匀耦合来实现,从而允许对SSA的SLM部分进行新的,更简单且成本更低的设计。
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引用次数: 7
Low-cost facile interferometer for displacement mapping of harmonically excited MEMS 用于谐波激励MEMS位移映射的低成本简易干涉仪
Pub Date : 2016-03-16 DOI: 10.1117/12.2213822
M. Ma̧dzik, Jaime Viegas
In this work, we present a simple, assembled from readily available components, low cost, imaging vibrometer based on a Twyman-Green interferometer with digital interferogram acquisition, allowing to map displacement contour levels of a harmonically excited piezoelectric membrane, on the principle of exposure integration. We experimentally demonstrate the capabilities of our setup on imaging the 4th mechanical mode of vibration of a 200 micrometer radius piezoelectric micromachined ultrasonic transducer membrane vibrating at 842 kHz, with an out-of-plane amplitude of 475 nm. Our results allow a direct visualization of the influence of etching trenches onto the vibrating membrane, in excellent agreement with FEM simulations.
在这项工作中,我们提出了一种简单的,由现成的组件组装而成的低成本成像振动仪,该振动仪基于带有数字干涉图采集的Twyman-Green干涉仪,允许根据暴露集成原理绘制谐波激发压电膜的位移轮廓水平。我们通过实验证明了我们的装置能够成像半径为200微米的压电微机械超声换能器膜在842 kHz振动时的第四种机械振动模式,其面外振幅为475 nm。我们的结果允许直接可视化蚀刻沟对振动膜的影响,与FEM模拟非常一致。
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引用次数: 2
Fiber Bragg grating based tunable sensitivity goniometer 基于光纤布拉格光栅的可调灵敏度测角仪
Pub Date : 2016-03-16 DOI: 10.1117/12.2212400
S. Padma, Sharath Umesh, Shweta Pant, T. Srinivas, S. Asokan
Goniometer has found extensive usage in diverse applications, primary being medical field in which it is employed for obtaining the range of motion of joints during physical therapy. It is imperative to have a dynamic system to measure the range of motion which will aid for a progressive therapeutic treatment. Hence in the present study, a novel goniometer for real time dynamic angle measurement between two surfaces with the aid of a Fiber Bragg Grating sensor is proposed. The angular rotation between the two surfaces will be identified by the two arms of the Fiber Bragg Grating Goniometer (FBGG), which is translated to the rotation of the shaft which holds these arms together. A cantilever beam is fixed onto the base plate whose free end is connected to the rotating shaft. The rotating shaft will actuate a mechanism which will pull the free end of the cantilever resulting in strain variation over the cantilever beam. The strain variation on the cantilever beam is measured by the Fiber Bragg Grating sensor bonded over it. Further, the proposed FBGG facilitates tunable sensitivity by the discs of varying diameters on the rotating shaft. Tunable sensitivity of the FBGG is realised by the movement of these discs by varying circumferential arc lengths for the same angular movement, which will actuate the pull on the cantilever beam. As per the requirement of the application in terms of resolution and range of angular measurement, individual mode of sensitivity may be selected.
测角仪有着广泛的用途,主要是在医学领域,在物理治疗中,测角仪用于获得关节的活动范围。必须有一个动态系统来测量运动范围,这将有助于渐进的治疗。因此,在本研究中,提出了一种利用光纤光栅传感器实时测量两个表面之间动态角度的新型测角仪。两个表面之间的角旋转将由光纤布拉格光栅测角仪(FBGG)的两个臂来确定,这被转化为将这些臂连接在一起的轴的旋转。悬臂梁固定在底板上,其自由端与转轴连接。旋转轴将驱动一个机构,该机构将拉动悬臂梁的自由端,导致悬臂梁上的应变变化。悬臂梁上的应变变化由粘接在其上的光纤光栅传感器测量。此外,所提出的FBGG便于通过旋转轴上不同直径的圆盘调节灵敏度。FBGG的可调灵敏度是通过这些圆盘的运动来实现的,通过改变圆周弧长来实现相同的角度运动,这将驱动对悬臂梁的拉力。根据应用在角度测量的分辨率和范围方面的要求,可以选择单独的灵敏度模式。
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引用次数: 2
Investigation of light output uniformity and performance using a UV transmitting glass optic for a multi-UV LED array 多紫外LED阵列用紫外透射玻璃光输出均匀性及性能研究
Pub Date : 2016-03-16 DOI: 10.1117/12.2209714
Brian Jasenak, Rachel Willsey, A. Willsey, Jamie Forish
Ultraviolet light-emitting diode (UV LED) adoption is accelerating; they are being used in new applications such as UV curing, germicidal irradiation, nondestructive testing, and forensic analysis. In many of these applications, it is critically important to produce a uniform light distribution and consistent surface irradiance. Flat panes of fused quartz, silica, or glass are commonly used to cover and protect multi-UV LED arrays. However, they don’t offer the advantages of an optical lens design. An investigation was conducted to determine the effect of a secondary glass optic on the uniformity of the light distribution and irradiance. Glass optics capable of transmitting UV-A, UV-B, and UV-C wavelengths can improve light distribution and intensity. In this study, a UV transmitting glass formulation and secondary linear optic were designed and manufactured to demonstrate their effects on achievable irradiance intensity and uniformity. Prismatic patterning on the light source surface of the lens was used to minimize reflection losses on the incident surface of the glass. Fresnel optics were molded into the opposite side of the UV transmitting glass to control the refraction of the light and to gain the desired light intensity distribution from two multi-UV LED arrays. A 20% increase in relative irradiance was observed while maintaining the same coverage area. This work discusses the optical design and the resulting benefits of controlled light output on UV LED systems, which include reduced driving current, decreased thermal deterioration, improved energy efficiency, and longer LED lifetime.
紫外发光二极管(UV LED)的采用正在加速;它们被用于新的应用,如紫外线固化、杀菌照射、无损检测和法医分析。在许多这些应用中,产生均匀的光分布和一致的表面辐照度是至关重要的。熔融石英,二氧化硅或玻璃的平板通常用于覆盖和保护多紫外LED阵列。然而,它们没有光学透镜设计的优势。研究了二次光学玻璃对光分布均匀性和辐照度的影响。能够传输UV-A、UV-B和UV-C波长的玻璃光学元件可以改善光的分布和强度。在这项研究中,设计和制造了一种紫外线透射玻璃配方和二次线性光学元件,以证明它们对可实现的辐照强度和均匀性的影响。透镜光源表面的棱镜图案被用来最小化玻璃入射表面的反射损失。菲涅尔光学元件被模压到紫外线透射玻璃的另一侧,以控制光的折射,并从两个多紫外LED阵列中获得所需的光强分布。在保持相同覆盖面积的情况下,观察到相对辐照度增加了20%。这项工作讨论了光学设计和控制UV LED系统的光输出的好处,包括减少驱动电流,减少热劣化,提高能源效率和更长的LED寿命。
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引用次数: 0
SFFT based phase demodulation for faster interference fringes analysis 基于SFFT的相位解调更快的干涉条纹分析
Pub Date : 2016-03-16 DOI: 10.1117/12.2211716
Chen-Yu Lee, Kuan-Yu Hsu, Chih-Kung Lee
Try to take advantages of the high-resolution CCD/CMOS developed over the years for real-time three-dimensional deformation/geometry metrology system development, Fourier transform (FT) based algorithms have been integrated to convert interference fringes to wrapped phase maps and then to unwrapped phase maps. All of which led to easy implementation of the algorithms developed over the years to achieve extremely efficient FT computation. Sparse Fast Fourier Transform (SFFT) that only calculating the non-zero coefficient in frequency domain, includes calculations of imaginary part and log, was implemented to further accelerate the computation rate for the above-mentioned FT based operations. Coupling the SFFT accelerated phase map computation approach with Michelson interferometer and Electronic Speckle Pattern Interferometry (ESPI) for near real-time three-dimensional deformation measurement led to the newly developed system. The directions of object deformation are revealed by performing FT to the interference fringes obtained with pre-introduced spatial carrier frequency, which provides a way to retrieve the phase maps by using a single rather than several intensity maps. With only one image frame needed, the interference fringes caused by the deformation could be recorded for off-line phase maps computation if the computation efforts are longer than the recording frame rate. To apply the SFFT algorithm on phase retrieval, a conceptual framework was presented. The benefit of using SFFT as compared to FT was also demonstrated.
利用多年来为实时三维变形/几何测量系统开发而开发的高分辨率CCD/CMOS,集成了基于傅立叶变换(FT)的算法,将干涉条纹转换为包裹相位图,然后再转换为解包裹相位图。所有这些都使多年来开发的算法易于实现,从而实现极其高效的FT计算。采用稀疏快速傅里叶变换(SFFT),只计算频域非零系数,包括虚部和对数的计算,进一步加快了上述基于傅里叶变换的运算速度。将SFFT加速相位图计算方法与迈克尔逊干涉仪和电子散斑干涉(ESPI)相结合,实现近实时三维变形测量。通过对预先引入空间载波频率的干涉条纹进行傅里叶变换,揭示了物体变形的方向,这提供了一种通过使用单个而不是多个强度图来检索相位图的方法。只需一帧图像,如果计算量大于记录帧速率,则可以记录变形引起的干涉条纹用于离线相位图计算。为了将SFFT算法应用于相位检索,提出了一个概念框架。与FT相比,使用SFFT的好处也得到了证明。
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引用次数: 1
Characterizing opto-electret based paper speakers by using a real-time projection Moiré metrology system 利用实时投影莫尔测量系统表征基于光驻极体的纸质扬声器
Pub Date : 2016-03-16 DOI: 10.1117/12.2212010
Ya-Ling Chang, Kuan-Yu Hsu, Chih-Kung Lee
Advancement of distributed piezo-electret sensors and actuators facilitates various smart systems development, which include paper speakers, opto-piezo/electret bio-chips, etc. The array-based loudspeaker system possess several advantages over conventional coil speakers, such as light-weightness, flexibility, low power consumption, directivity, etc. With the understanding that the performance of the large-area piezo-electret loudspeakers or even the microfluidic biochip transport behavior could be tailored by changing their dynamic behaviors, a full-field real-time high-resolution non-contact metrology system was developed. In this paper, influence of the resonance modes and the transient vibrations of an arraybased loudspeaker system on the acoustic effect were measured by using a real-time projection moiré metrology system and microphones. To make the paper speaker even more versatile, we combine the photosensitive material TiOPc into the original electret loudspeaker. The vibration of this newly developed opto-electret loudspeaker could be manipulated by illuminating different light-intensity patterns. Trying to facilitate the tailoring process of the opto-electret loudspeaker, projection moiré was adopted to measure its vibration. By recording the projected fringes which are modulated by the contours of the testing sample, the phase unwrapping algorithm can give us a continuous phase distribution which is proportional to the object height variations. With the aid of the projection moiré metrology system, the vibrations associated with each distinctive light pattern could be characterized. Therefore, we expect that the overall acoustic performance could be improved by finding the suitable illuminating patterns. In this manuscript, the system performance of the projection moiré and the optoelectret paper speakers were cross-examined and verified by the experimental results obtained.
分布式压电驻极体传感器和执行器的进步促进了各种智能系统的发展,包括纸扬声器,光电压电/驻极体生物芯片等。与传统线圈扬声器相比,阵列扬声器系统具有轻量化、灵活性、低功耗、指向性等优点。基于对大面积压电驻极体扬声器甚至微流控生物芯片传输行为可通过改变其动态行为来定制的认识,开发了一种全场实时高分辨率非接触计量系统。本文采用实时投影式声频测量系统和传声器,测量了阵列式扬声器系统的共振模态和瞬态振动对声效的影响。为了使纸质扬声器更加通用,我们将光敏材料TiOPc结合到原始驻极体扬声器中。这种新开发的光驻极体扬声器的振动可以通过照亮不同的光强度模式来控制。为了方便对光驻极体扬声器的定制,采用投影莫尔仪对其振动进行测量。相位解包裹算法通过记录被测样轮廓调制的投影条纹,得到与目标高度变化成正比的连续相位分布。借助投影莫尔测量系统,可以表征与每种不同光模式相关的振动。因此,我们期望通过寻找合适的照明模式来改善整体声学性能。本文对光驻极体纸扬声器和光驻极体投影扬声器的系统性能进行了交叉检验,并通过实验结果进行了验证。
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引用次数: 0
A hybrid 3D LIDAR imager based on pixel-by-pixel scanning and DS-OCDMA 基于逐像素扫描和DS-OCDMA的混合三维激光雷达成像仪
Pub Date : 2016-03-16 DOI: 10.1117/12.2208274
Gunzung Kim, Jeongsook Eom, Yongwan Park
We propose a new hybrid 3D light detection and ranging (LIDAR) system, which measures a scene with 1280 x 600 pixels at a refresh rate of 60fps. The emitted pulses of each pixel are modulated by direct sequence optical code division multiple access (DS-OCDMA) techniques. The modulated pulses include a unique device identification number, the pixel position in the line, and a checksum. The LIDAR emits the modulated pulses periodically without waiting to receive returning light at the detector. When all the pixels are completely through the process, the travel time, amplitude, width, and speed are used by the pixel-by-pixel scanning LIDAR imager to generate point cloud data as the measured results. We programmed the entire hybrid 3D LIDAR operation in a simulator to observe the functionality accomplished by our proposed model.
我们提出了一种新的混合3D光探测和测距(LIDAR)系统,该系统以60fps的刷新率测量1280 x 600像素的场景。每个像素的发射脉冲通过直接序列光码分多址(DS-OCDMA)技术进行调制。所述调制脉冲包括唯一的设备标识号、在所述线中的像素位置和校验和。激光雷达周期性地发射调制脉冲,而无需等待探测器接收返回的光。当所有像素完全通过该过程后,逐像素扫描LIDAR成像仪利用其行程时间、幅度、宽度和速度生成点云数据作为测量结果。我们在模拟器中对整个混合3D激光雷达操作进行了编程,以观察我们提出的模型所实现的功能。
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引用次数: 5
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SPIE OPTO
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