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Fourteenth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)最新文献

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Development of an IT equipment lumped capacitance parameter database for transient data center simulations 用于瞬态数据中心仿真的IT设备集总电容参数数据库的开发
D. Demetriou, H. Erden, H. Khalifa, R. Schmidt
The transient behavior of IT equipment can be represented by a lumped thermal capacitance for use in data center level transient thermal simulations. Previous work has proposed a mathematical methodology to extract the necessary lumped capacitance parameters, the server's time constant and heat transfer effectiveness, via air temperature measurements. This work describes and experimentally tests that proposed methodology to introduce a possible approach for developing an easy-to-use database of lumped capacitance characteristics for use in transient thermal simulations. The database will allow the user to select the appropriate transient parameters based on characteristics that do not require an “autopsy” of each-and-every server in the data center. Experiments are conducted to provide representative transient parameters which classify the servers by mass density and operating air flow rate. The paper describes the experimental methodology in detail to allow for the easy addition of other IT equipment or future server generations.
IT设备的瞬态行为可以用一个集总热电容来表示,用于数据中心级的瞬态热模拟。先前的工作提出了一种数学方法,通过空气温度测量来提取必要的集总电容参数,服务器的时间常数和传热效率。这项工作描述和实验测试提出的方法,以引入一种可能的方法来开发一个易于使用的集总电容特性数据库,用于瞬态热模拟。数据库将允许用户根据特征选择适当的瞬态参数,而不需要对数据中心中的每个服务器进行“解剖”。通过实验提供了具有代表性的瞬态参数,以质量密度和工作空气流量对服务器进行分类。本文详细描述了实验方法,以便轻松添加其他IT设备或未来的服务器一代。
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引用次数: 4
Simulations of damage and fracture in ULK under pad structures during Cu wirebond process 焊盘结构下ULK在Cu线焊过程中的损伤与断裂模拟
Kritika Upreti, Hung-Yun Lin, G. Subbarayan, D. Jung, B. Sammakia
Mechanical integrity of the dielectric stack is challenged by the trend towards porous, lower dielectric constant interlayer dielectric (ILD) materials. As a result, fracture in the ILD stacks caused either by assembly process or by the dicing process is an important reliability consideration. In general, there is a need to either assess the propensity of the structure to fracture under assembly conditions, or to design crack-arrest features that prevent propagation of cracks into active areas. In the case of wire bonded packages, the reliability concern associated with the fracture of Ultra Low-k (ULK) dielectrics while bonding over the active circuits (BOAC) is a significant challenge due to the impact load and the high ultrasonic energy transmitted to the ILD stack. In this paper, a multi-level modeling procedure is presented to assess the risk of fracture in ILD stacks during wire bonding process. First, a nonlinear, dynamic finite element model is developed to simulate the process steps - impact stage and last cycle of ultrasonic vibration and study the mechanical response of the ball, pad, and the underlying ULK under pad during copper wire bonding. Further, a simulation framework based on enriched isogeometric approximations is presented to compute damage accumulation in the ULK stacks using a cohesive damage description. The simulation framework is employed to develop insights on the potential crack initiation sites within the ILD stack and to evaluate the risk of fracture during each process step.
多孔、低介电常数层间介电材料(ILD)的发展趋势对介电材料的机械完整性提出了挑战。因此,装配过程或切割过程引起的ILD堆叠断裂是一个重要的可靠性考虑因素。一般来说,有必要评估结构在装配条件下的断裂倾向,或设计裂纹止裂特征,以防止裂纹扩展到活动区域。对于线键合封装,由于冲击载荷和传递到ILD堆栈的高超声能量,超低k (ULK)电介质在有源电路(BOAC)上键合时断裂的可靠性问题是一个重大挑战。本文提出了一种多层建模方法来评估焊接过程中焊接层的断裂风险。首先,建立了非线性动态有限元模型,模拟了超声振动过程的冲击阶段和最后一个周期,研究了铜线键合过程中球、焊盘和焊盘下ULK的力学响应。在此基础上,提出了一种基于丰富等几何近似的仿真框架,利用内聚损伤描述来计算ULK堆的损伤累积。模拟框架用于深入了解ILD堆栈中潜在的裂纹起裂位置,并评估每个工艺步骤中的断裂风险。
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引用次数: 5
The effects of aging on the Anand viscoplastic constitutive model for SAC305 solder 时效对SAC305焊料Anand粘塑性本构模型的影响
Munshi M. Basit, M. Motalab, J. Suhling, P. Lall
Lead free solder materials are widely used in electronic packaging industry due to environmental concerns. However, experimental testing and microstructural characterization have revealed that Pb-free solders exhibit evolving properties that change significantly with environmental exposures such as isothermal aging and thermal cycling. These changes are especially large in harsh environments, where the effects of aging on solder joint behavior must be accounted for and included in constitutive models when predicting reliability. In this work, we have adapted the Anand viscoplastic stress-strain relations for Pb-free solders to include material parameters that evolve with the thermal history of the solder material. In particular, aging effects have been examined by performing uniaxial tensile tests on SAC305 samples that were aged for various durations (0-12 months) at temperature of 100 C. For each set of aging conditions, several sets of constant strain rate and temperature tests were conducted on the aged solder samples. Testing conditions included strain rates of 0.001, 0.0001, and 0.00001 (1/sec), and temperatures of 25, 50, 75, 100, and 125 C. Using the measured uniaxial test data, the Anand parameters were calculated for each set of aging conditions, and the effects of aging on the nine Anand model parameters were determined. Mechanical tests have been performed using both water quenched (WQ) and reflowed (RF) SAC305 samples (two unique specimen microstructures). In the case of the water quenched samples, there is rapid microstructural transitioning during the brief time that occurs between placing molten solder into the glass tubes and immersing the tubes in water bath. On the other hand, the reflowed samples are first cooled by water quenching, and then sent through a reflow oven to re-melt the solder in the tubes and subject them to a desired temperature profile matching that used in PCB assembly. From the experimental results, the differences between the extracted Anand model parameters of water quenched and reflowed samples were high for samples with no prior aging. As expected, the water quenched samples had much higher mechanical properties (stiffness and strength) than reflowed samples prior to aging. For both the water quenched and reflowed specimens, significant degradation of the mechanical properties was observed with aging. The variations of the Anand model parameters with aging time have been characterized, and empirical relationships were established to model the observed changes. After long aging times, the water quenched and reflowed SAC305 materials were found to exhibit similar mechanical properties, and thus their Anand parameters converged and became nearly identical.
由于对环境的关注,无铅焊料被广泛应用于电子封装行业。然而,实验测试和微观结构表征表明,无铅焊料的性能随着环境暴露(如等温老化和热循环)而发生显著变化。在恶劣环境中,这些变化尤其大,在预测可靠性时,老化对焊点行为的影响必须考虑在内,并包括在本构模型中。在这项工作中,我们对无铅焊料的Anand粘塑性应力-应变关系进行了调整,以包括随焊料热历史演变的材料参数。特别是,通过在100℃下进行不同时效时间(0-12个月)的SAC305样品进行单轴拉伸试验,研究了时效效应。对于每组时效条件,对老化的焊料样品进行了几组恒定应变率和温度试验。试验条件为应变速率0.001、0.0001和0.00001 (1/sec),温度分别为25、50、75、100和125℃。利用实测的单轴试验数据,计算各老化条件下的Anand参数,确定老化对9个Anand模型参数的影响。力学试验使用水淬(WQ)和回流(RF) SAC305样品(两种独特的试样显微结构)进行。在水淬火样品的情况下,在将熔融焊料放入玻璃管和将玻璃管浸入水浴之间的短暂时间内,会发生快速的微观结构转变。另一方面,回流样品首先通过水淬火冷却,然后通过回流炉重新熔化管中的焊料,并使其符合PCB组装中使用的所需温度曲线。从实验结果来看,未进行预时效处理的水淬试样与回流试样提取的Anand模型参数差异较大。正如预期的那样,水淬后的样品比回流后的样品具有更高的力学性能(刚度和强度)。对于水淬和再流试样,随着时效,力学性能明显退化。对Anand模型参数随老化时间的变化进行了表征,并建立了经验关系来模拟观测到的变化。经过长时间时效处理,经水淬再流处理的SAC305材料具有相似的力学性能,其Anand参数趋于一致。
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引用次数: 63
Numerical and compact models to predict the transient behavior of cross-flow heat exchangers in data center applications 数据中心应用中横流换热器瞬态特性的数值和紧凑模型
M. del Valle, A. Ortega
Hybrid air/liquid cooling systems used in data centers enable localized, on-demand cooling, or “smart cooling” using various approaches such as rear door heat exchangers, overhead cooling systems and in row cooling systems. These systems offer the potential to achieve higher energy efficiency by providing local cooling only when it is needed, thereby reducing the overprovisioning that is endemic to traditional systems. At the heart of all hybrid cooling systems is an air to liquid cross flow heat exchanger which regulates the amount of cooling that the system provides by modulating the liquid or air flows or temperatures. Understanding the transient response of the heat exchanger is crucial for the precise control of the system. The aim of this work is the development of a rear door heat exchanger compact model using Artificial Neural Networks (ANN). The transient behavior of the heat exchanger is studied using a Finite Difference (FD) model. Different temperatures perturbations are introduced in the heat exchanger model to study its transient response. The finite different results are then used to train an ANN compact model. Both models are compared in terms of accuracy and computational resources.
数据中心中使用的混合空气/液体冷却系统可以使用各种方法实现本地化,按需冷却或“智能冷却”,例如后门热交换器,顶部冷却系统和排冷却系统。这些系统仅在需要时提供局部冷却,从而提供了实现更高能源效率的潜力,从而减少了传统系统特有的过度供应。所有混合冷却系统的核心是一个空气-液体交叉流热交换器,它通过调节液体或空气的流动或温度来调节系统提供的冷却量。了解热交换器的瞬态响应对系统的精确控制至关重要。本工作的目的是利用人工神经网络(ANN)开发后门热交换器紧凑型模型。采用有限差分(FD)模型研究了换热器的瞬态特性。在换热器模型中引入不同的温度扰动,研究其瞬态响应。然后用有限的不同结果来训练一个神经网络的紧凑模型。两种模型在精度和计算资源方面进行了比较。
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引用次数: 7
Analysis and characterization of thermal transport in GaN HEMTs on Diamond substrates 金刚石衬底上GaN hemt的热输运分析与表征
D. Altman, M. Tyhach, J. Mcclymonds, Samuel H. Kim, S. Graham, Jungwan Cho, K. Goodson, D. Francis, F. Faili, F. Ejeckam, S. Bernstein
The emergence of Gallium Nitride-based High Electron Mobility Transistor (HEMT) technology has proven to be a significant enabler of next generation RF systems. However, thermal considerations currently prevent exploitation of the full electromagnetic potential of GaN in most applications, limiting HEMT areal power density (W/mm2) to a small fraction of electrically limited performance. GaN on Diamond technology has been developed to reduce near junction thermal resistance in GaN HEMTs. However, optimal implementation of GaN on Diamond requires thorough understanding of thermal transport in GaN, CVD diamond and interfacial layers in GaN on Diamond substrates, which has not been thoroughly previously addressed. To meet this need, our study pursued characterization of constituent thermal properties in GaN on Diamond substrates and temperature measurement of operational GaN on Diamond HEMTs, employing electro-thermal modeling of the HEMT devices to interpret and relate data. Strong agreement was obtained between simulations and HEMT operational temperature measurements made using two independent thermal metrology techniques, enabling confident assessment of peak junction temperature. The results support the potential of GaN on Diamond to enable a 3X increase in HEMT areal dissipation density without significantly increasing operational temperature. Such increases in HEMT power density will enable smaller, higher power density Monolithic Microwave Integrated Circuits (MMICs).
基于氮化镓的高电子迁移率晶体管(HEMT)技术的出现已被证明是下一代射频系统的重要推动者。然而,目前在大多数应用中,热方面的考虑阻碍了氮化镓的全部电磁潜力的开发,将HEMT的面功率密度(W/mm2)限制在电限制性能的一小部分。金刚石上氮化镓技术的发展是为了降低氮化镓hemt的近结热阻。然而,氮化镓在金刚石上的最佳实现需要彻底了解氮化镓、CVD金刚石和氮化镓在金刚石衬底上的界面层中的热传输,这在以前没有得到彻底的解决。为了满足这一需求,我们的研究采用HEMT器件的电热建模来解释和关联数据,对金刚石衬底上GaN的组成热特性进行了表征,并对金刚石HEMT上运行GaN的温度进行了测量。利用两种独立的热测量技术,在模拟和HEMT工作温度测量之间获得了强有力的一致性,从而能够对峰值结温进行可靠的评估。研究结果支持GaN在金刚石上的潜力,使HEMT的面积耗散密度增加3倍,而不会显著提高工作温度。HEMT功率密度的增加将使更小、更高功率密度的单片微波集成电路(mmic)成为可能。
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引用次数: 43
Event-based use conditions method for thermo-mechanical reliability risk assessment 基于事件的热力机械可靠性风险评估使用条件方法
I. Sauciuc, S. Goyal, M. Pei, T. Harirchian, Maritza Tse, R. Kwasnick, S. Tripathi, A. Matusevich
The traditional approach of thermo-mechanical (T-M) reliability modeling is based on power cycle events. This approach is not useful for products which are rarely powered down, because power cycles alone do not capture all the reliability stress from temperature variation over these products' use life. This paper describes a methodology to determine the temperature cycle requirements for products like smartphones and tablets which accounts for the temperature variation associated with usage events, which we call “mini-cycles”. The T-M model is based on the distribution of individual users' histories as a series of events over time, which is then translated into a temperature vs. time trace for each user. These temperature traces are then used as the main inputs to T-M models, for example using the Norris-Landzberg (N-L) acceleration model to evaluate solder damage for each user. Results are summarized in a distribution of T-M damage across all users. This new methodology improves the understanding of thermo-mechanical reliability requirements due to the impact of “mini-cycles”.
传统的热-机械可靠性建模方法是基于功率循环事件。这种方法不适用于很少断电的产品,因为在这些产品的使用寿命中,单靠电源循环并不能捕捉到温度变化带来的所有可靠性压力。本文描述了一种确定智能手机和平板电脑等产品温度周期要求的方法,该方法考虑了与使用事件相关的温度变化,我们称之为“迷你周期”。T-M模型是基于单个用户的历史分布作为一段时间内的一系列事件,然后将其转换为每个用户的温度与时间跟踪。然后将这些温度迹线用作T-M模型的主要输入,例如使用Norris-Landzberg (N-L)加速模型来评估每个用户的焊料损伤。结果总结为所有用户的T-M损害分布。由于“小循环”的影响,这种新方法提高了对热机械可靠性要求的理解。
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引用次数: 4
Nanomechanical characterization of SAC305 solder joints - effects of aging SAC305焊点的纳米力学特性-时效效应
M. Hasnine, J. Suhling, B. Prorok, M. Bozack, P. Lall
In this work, aging phenomena in solder joints have been explored by nano-mechanical testing. Using nanoindentation techniques, the elastic, plastic, and creep behavior of SAC305 solder joint materials have been explored for various aging conditions. Single crystal solder joints were first extracted from PBGA assemblies (14 × 14 mm, 0.8 mm ball pitch, 0.46 mm ball diameter), and then subjected to aging at T = 125 C for various aging times. After the aging exposures, the joints were loaded in the nano-indentor, and the load-deformation behavior during indentation was used to characterize the mechanical properties of the solder joints for various aging conditions including modulus, hardness, and yield stress. Using constant force at max indentation, the creep response of the aged and non-aged solder joint materials have also been measured for various stress levels. With this approach, aging effects have been quantified in joints, and their magnitudes correlated to those observed in testing of miniature bulk specimens. The measured results have demonstrated that the mechanical behavior of actual solder joints degrade significantly with aging. The results show that the aging induced degradations of the mechanical properties (modulus, hardness) in the SAC joints were of similar order (30-40%) as those seen previously in the testing of larger “bulk” uniaxial solder specimens. The creep rate of the tested SAC305 joints were found to increase by up to 75X with one year of aging. These degradations, while significant, were much less than those observed in larger bulk solder uniaxial tensile specimens with several hundred grains, where the increase was over 900X. Additional testing has been performed on very small tensile specimens with approximately 10 grains, and the aging-induced creep rate degradations found in these specimens were on the same order of magnitude as those observed in the single grain joints. Thus, the lack of the grain boundary sliding creep mechanism in the single grain joints is an important factor in avoiding the extremely large creep rate degradations ocurring in larger bulk SAC samples. The test results also show that the elastic, plastic, and creep properties of the solder joints and their sensitivities to aging are highly dependent on their crystal orientations. Polarized light microscopy and Electron Back Scattered Diffraction (EBSD) were used to identify the grain structure and crystal orientations in the tested joints. Microstructural analysis of the joints has shown that Ag3Sn precipitates coarsen during isothermal aging, which results in fewer but larger particles. The Sn dendrite cell size also was observed to grow significantly, but the boundaries are no longer well defined due to coarsening.
本文采用纳米力学测试的方法研究了焊点的老化现象。利用纳米压痕技术,研究了SAC305焊点材料在不同时效条件下的弹性、塑性和蠕变行为。首先从PBGA组件(14 × 14 mm, 0.8 mm球距,0.46 mm球径)中提取单晶焊点,然后在T = 125℃下进行不同时效时间的时效处理。老化后,将焊点加载到纳米压痕器中,并利用压痕过程中的载荷变形行为来表征不同老化条件下焊点的力学性能,包括模量、硬度和屈服应力。在最大压痕处使用恒定力,还测量了不同应力水平下时效和非时效焊点材料的蠕变响应。利用这种方法,对关节的老化效应进行了量化,并将其大小与微型体试件试验中观察到的结果相关联。测试结果表明,实际焊点的力学性能随着老化而显著下降。结果表明,SAC接头的力学性能(模量、硬度)的时效退化与之前在较大的“大块”单轴焊料试样中观察到的相似(30-40%)。经测试的SAC305接头的蠕变率在时效1年后提高了75倍。这些退化虽然显著,但远远小于在具有数百晶粒的较大块体单轴拉伸试样中观察到的,其中增加超过900X。在大约有10个晶粒的非常小的拉伸试样上进行了额外的测试,在这些试样中发现的时效引起的蠕变速率下降与在单晶粒节理中观察到的相同数量级。因此,在单晶粒节理中缺乏晶界滑动蠕变机制是避免较大体积SAC试样发生极大蠕变速率退化的重要因素。试验结果还表明,焊点的弹性、塑性和蠕变性能及其对时效的敏感性与晶体取向高度相关。利用偏振光显微镜和电子背散射衍射(EBSD)对接头的晶粒结构和晶体取向进行了表征。对接头的组织分析表明,等温时效过程中,Ag3Sn析出粗晶,晶粒数量少但体积大。锡树突细胞的大小也明显增大,但由于粗化,边界不再明确。
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引用次数: 4
An overview of the IBM zEnterprise EC12 processor cooling system IBM zEnterprise EC12处理器冷却系统概述
G. Goth, Robert K. Mullady, R. Zoodsma, A. VanDeventer, D. Porter, P. Kelly
On September 19, 2012 IBM announced its latest System z Enterprise Class zServer, the IBM zEnterprise EC12 (zEC12). This server uses a 96 mm glass ceramic substrate to interconnect processors and related cache chips on a multi-chip module (MCM). In rare applications, the power in these MCMs can exceed 2000W, well beyond air cooling capability. This paper describes a new cooling methodology IBM employs in zEC12 to cool its processor MCMs. From the IBM S/390 G4, which first shipped in 1997, through z196 which is EC12's enterprise class predecessor, IBM's high end System z servers have utilized vapor compression refrigeration to cool its processor MCMs. In zEC12, the thermal solution employs an air to water heat exchanger to provide this function. This paper discusses the technical details of this cooling system. Thermal performance of each component of the cooling path from processor core to ambient, as well as comparison to prior cooling approaches in terms of temperatures, reliability, and energy efficiency will be reviewed. In summary, this technology shows considerable promise for cooling this class of server.
2012年9月19日,IBM宣布了其最新的System z企业级zServer, IBM zEnterprise EC12 (zEC12)。该服务器采用96毫米玻璃陶瓷衬底,将处理器和相关缓存芯片连接在一个多芯片模块(MCM)上。在一些罕见的应用中,这些mcm的功率可以超过2000W,远远超出了空气冷却能力。本文描述了IBM在zEC12中采用的一种新的冷却方法来冷却其处理器mcm。从1997年首次发货的IBM S/390 G4到EC12的企业级前身z196, IBM的高端System z服务器已经利用蒸汽压缩制冷来冷却其处理器mcm。在zEC12中,热解决方案采用空气-水热交换器来提供此功能。本文讨论了该冷却系统的技术细节。从处理器核心到环境冷却路径的每个组件的热性能,以及在温度,可靠性和能源效率方面与先前的冷却方法的比较将被审查。总之,这项技术在冷却这类服务器方面显示出相当大的前景。
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引用次数: 6
The Plenum concept: Improving scalability, security, and efficiency for data centers 全会概念:提高数据中心的可扩展性、安全性和效率
D. Hackenberg
Data centers are very costly structures, both in terms of capital and operational expenditures. The high innovation rate in the IT business conflicts with the long-term character of data centers. In order to ensure lifetime usability, flexibility is a major concern for any data center design. Recent developments of data center air-cooling, in particular containment solutions for hot/cold air separation, allow rethinking of traditional data center design approaches. In this paper we present the Plenum concept that represents a major overhaul of traditional design principles. Our approach requires the construction of a full additional building story instead of a traditional raised floor. We then position the computer room air-handling (CRAH) units directly below the hot aisle of a block of racks. The down- ward flow direction of hot air makes the strict use of hot/cold air separation mandatory. Our approach minimizes or eliminates support space on the IT floor, moves almost all support structures into the Plenum, and creates very clean interfaces between both spaces. This greatly reduces the need for support personnel on the IT floor. Vice versa, IT personnel does not need to access support spaces, allowing for simplified data center operations. Insight from the planning process of a 5 MW data center currently under construction at TU Dresden shows that the construction of a full building story below the IT floor instead of a traditional raised floor does not necessarily increase the building volume. The simplified access and the separation of IT and support personnel reduces corridor and access spaces. We show that the overall building volume can even be decreased in comparison to classical approaches. Our design easily supports more than 15 kW average heat loads per rack with n+1 CRAH unit redundancy at a highly efficient CRAH operating point and with little scalability limitations regarding computer room size.
数据中心是非常昂贵的结构,无论是资本支出还是运营支出。IT业务的高创新率与数据中心的长期性相矛盾。为了确保终生可用性,灵活性是任何数据中心设计的主要关注点。数据中心空气冷却的最新发展,特别是用于冷热空气分离的密封解决方案,使人们能够重新思考传统的数据中心设计方法。在本文中,我们提出了全会的概念,代表了传统设计原则的重大改革。我们的方法需要建造一个完整的额外建筑层,而不是传统的高架地板。然后,我们将机房空气处理(CRAH)单元直接放置在机架的热通道下方。热空气的向下流动方向使得严格使用冷热空气分离成为强制性的。我们的方法最大限度地减少或消除了IT层的支撑空间,将几乎所有的支撑结构移动到全会室内,并在两个空间之间创建非常干净的界面。这大大减少了对IT层支持人员的需求。反之亦然,IT人员不需要访问支持空间,从而简化了数据中心的操作。德累斯顿工业大学(TU Dresden)目前正在建设的一个5mw数据中心的规划过程表明,在IT层以下建造一个完整的建筑楼层,而不是传统的高架楼层,并不一定会增加建筑体积。通道的简化和IT人员与支持人员的分离减少了走廊和通道空间。我们表明,与传统方法相比,整体建筑体积甚至可以减少。我们的设计在一个高效的CRAH工作点上轻松支持每个机架超过15 kW的平均热负荷,具有n+1 CRAH单元冗余,并且在机房大小方面几乎没有可扩展性限制。
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引用次数: 3
Characterization of cu free air ball constitutive behavior using microscale compression test 用微尺度压缩试验表征无铜空气球的本构行为
Sai Sudharsanan Paranjothy, Y. Singh, Allen Tippman, Hung-Yun Lin, G. Subbarayan, D. Jung, B. Sammakia
In recent years, there is increasing interest in copper wirebond technology as an alternative to gold wirebond in microelectronic devices due to its superior electrical performance and low cost. At present, validated constitutive models for the strain rate and temperature dependent behavior of Cu free air ball (FAB) appear to be largely missing in the literature. The lack of reliable constitutive models for the Cu FAB has hampered the modeling of the wirebonding process and the ability to assess risk of fracture in ultra low-k dielectric stacks. The challenge to FAB characterization is primarily due to the difficulty in performing mechanical tests on spherical FAB of micrometers in size. To address this challenge, we perform compression tests on FAB using custom-built microscale tester in the current study. Specifically, the tester has three closed-loop controlled linear stages with submicron resolutions, a manual tilt stage, a six-axis load cell with sub-Newton load resolution for eliminating misalignment, a milliNewton resolution load cell, a capacitance sensor to estimate sample deformation and to control the vertical stage in closed loop, a high working depth camera for viewing the sample deformation, and controllers for the stages implemented in the LabVIEW environment. We compress the FAB between tungsten carbide punches and develop a constitutive model for the copper of FAB through an inverse modeling procedure. In the inverse procedure, the assumed constitutive model parameter values are iterated until the load-displacement response matches the experimentally observed response.
近年来,由于铜线键合技术具有优异的电性能和较低的成本,人们对其作为微电子器件中金线键合的替代品越来越感兴趣。目前,文献中缺乏有效的无Cu空气球(FAB)应变速率和温度依赖行为的本构模型。Cu FAB缺乏可靠的本构模型,这阻碍了对超低k介电层中线连接过程的建模和评估断裂风险的能力。FAB表征的挑战主要是由于难以对微米大小的球形FAB进行机械测试。为了解决这一挑战,我们在当前的研究中使用定制的微型测试器对FAB进行了压缩测试。具体来说,该测试仪具有三个亚微米分辨率的闭环控制线性级,一个手动倾斜级,一个具有亚牛顿负载分辨率的六轴称重传感器,用于消除不对准,一个千牛顿分辨率的称重传感器,一个电容传感器用于估计样品变形并在闭环中控制垂直级,一个高工作深度相机用于查看样品变形,以及在LabVIEW环境中实现的级控制器。我们将FAB压缩在碳化钨冲头之间,并通过反建模程序建立了FAB铜的本构模型。在反过程中,迭代假设的本构模型参数值,直到荷载-位移响应与实验观测响应相匹配。
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引用次数: 2
期刊
Fourteenth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)
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