首页 > 最新文献

2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)最新文献

英文 中文
Drop Impact Analysis of AMOLED Display with Buffer Designs by Using Dynamic Finite Element Simulation 基于动态有限元仿真的带缓冲设计的AMOLED显示器跌落冲击分析
Chang-Chun Lee, Chi-Wei Wang
This study focused on the development of simulation methodology for dropping test is presented to estimate the impact of dropping load on the flexible displays. The structure design and material selection are optimized to enhance the corresponding mechanical reliability of flexible display. The simulated results is further verified as compared with the actual experimental results so as to endure the accuracy of the simulation. According to the simulation results, the proposed estimated results of flexible display characteristics would be beneficial to the designers or makers with the field of flexible displays when developing a more useful and comfortable flexible electronic products.
本文主要研究了跌落试验的模拟方法,以评估跌落载荷对柔性显示器的影响。优化了柔性显示器的结构设计和材料选择,提高了柔性显示器的机械可靠性。将仿真结果与实际实验结果进行对比,进一步验证仿真结果的准确性。根据仿真结果,所提出的柔性显示特性估计结果将有助于柔性显示领域的设计者或制造商开发出更实用、更舒适的柔性电子产品。
{"title":"Drop Impact Analysis of AMOLED Display with Buffer Designs by Using Dynamic Finite Element Simulation","authors":"Chang-Chun Lee, Chi-Wei Wang","doi":"10.23919/AM-FPD.2019.8830618","DOIUrl":"https://doi.org/10.23919/AM-FPD.2019.8830618","url":null,"abstract":"This study focused on the development of simulation methodology for dropping test is presented to estimate the impact of dropping load on the flexible displays. The structure design and material selection are optimized to enhance the corresponding mechanical reliability of flexible display. The simulated results is further verified as compared with the actual experimental results so as to endure the accuracy of the simulation. According to the simulation results, the proposed estimated results of flexible display characteristics would be beneficial to the designers or makers with the field of flexible displays when developing a more useful and comfortable flexible electronic products.","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127925063","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
AM-FPD 2019 Contents AM-FPD 2019内容
{"title":"AM-FPD 2019 Contents","authors":"","doi":"10.23919/am-fpd.2019.8830609","DOIUrl":"https://doi.org/10.23919/am-fpd.2019.8830609","url":null,"abstract":"","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125878878","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A study on Improvement of Electrical and Retention characteristics of Non-volatile Memory with Al2O3 Insulator Al2O3绝缘体改善非易失性存储器电学和保持特性的研究
Geonju Yoon, Jeongsoo Kim, Donggi Shin, Kumar Mallem, Jinsu Park, Jaemin Kim, Jaehyun Cho, Sangwoo Bae, Jin-Seok Kim, Hyun-Hoo Kim, J. Yi
We report the controllable charge (Electron/hole) trapping window layer properties of atomic layer deposited (ALD) aluminum oxide (Al2O3) gate dielectric layer on the Si substrate. Electron/hole blocking mechanism was archived by controlling the Al2O3 composition, band gap and post deposition annealing affect, respectively. The chemical composition of the Al2O3 was confirmed from the X-ray photoelectron spectroscopy analysis. The capacitance-voltage (C-V) characteristic of Al/Al2O3/Si (MOS) metal-oxide-semiconductor structure showed clear accumulation, depletion and inversion regions as-compared with the Al/SiNx/Si MOS devices, respectively, From the C-V curves, the flat band voltage(ΔFB) was shifted accordingly positive and negative with respect to electron/hole trapping effect. In addition, 10 nm AlOx storage layer and SiNx storage layer were compared in the same structure. The 10 nm SiNx storage layer showed a very low retention of 55.1% and the memory window also showed a relatively low value of 2.72V at 18V.
本文报道了硅衬底上原子层沉积(ALD)氧化铝(Al2O3)栅极介电层的可控电荷(电子/空穴)俘获窗层特性。通过控制Al2O3的组成、带隙和沉积后退火的影响,研究了电子/空穴的阻挡机制。通过x射线光电子能谱分析确定了Al2O3的化学成分。Al/Al2O3/Si (MOS)金属氧化物半导体结构的电容电压(C-V)特性与Al/SiNx/Si MOS器件相比,分别表现出明显的积累区、枯竭区和反转区,从C-V曲线上可以看出,由于电子/空穴捕获效应,平带电压(ΔFB)相应发生了正负偏移。此外,还比较了相同结构下的10 nm AlOx存储层和SiNx存储层。10 nm的SiNx存储层的保留率很低,为55.1%,在18V时的存储窗口也相对较低,为2.72V。
{"title":"A study on Improvement of Electrical and Retention characteristics of Non-volatile Memory with Al2O3 Insulator","authors":"Geonju Yoon, Jeongsoo Kim, Donggi Shin, Kumar Mallem, Jinsu Park, Jaemin Kim, Jaehyun Cho, Sangwoo Bae, Jin-Seok Kim, Hyun-Hoo Kim, J. Yi","doi":"10.23919/AM-FPD.2019.8830613","DOIUrl":"https://doi.org/10.23919/AM-FPD.2019.8830613","url":null,"abstract":"We report the controllable charge (Electron/hole) trapping window layer properties of atomic layer deposited (ALD) aluminum oxide (Al2O3) gate dielectric layer on the Si substrate. Electron/hole blocking mechanism was archived by controlling the Al2O3 composition, band gap and post deposition annealing affect, respectively. The chemical composition of the Al2O3 was confirmed from the X-ray photoelectron spectroscopy analysis. The capacitance-voltage (C-V) characteristic of Al/Al2O3/Si (MOS) metal-oxide-semiconductor structure showed clear accumulation, depletion and inversion regions as-compared with the Al/SiNx/Si MOS devices, respectively, From the C-V curves, the flat band voltage(ΔFB) was shifted accordingly positive and negative with respect to electron/hole trapping effect. In addition, 10 nm AlOx storage layer and SiNx storage layer were compared in the same structure. The 10 nm SiNx storage layer showed a very low retention of 55.1% and the memory window also showed a relatively low value of 2.72V at 18V.","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122315058","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
AM-FPD 2019 Committees AM-FPD 2019委员会
{"title":"AM-FPD 2019 Committees","authors":"","doi":"10.23919/am-fpd.2019.8830573","DOIUrl":"https://doi.org/10.23919/am-fpd.2019.8830573","url":null,"abstract":"","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134517539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Recent Progress in Inverted OLEDs: Mechanism of Electron Injection without Use of Alkali Metals 倒置oled的新进展:不使用碱金属的电子注入机理
H. Fukagawa, Tsubasa Sasaki, Taku Oono, Takahisa Shimizu
Inverted organic light-emitting diodes (iOLEDs) without the use of alkali metals have attracted extensive attention owing to the demand for the realization of flexible OLEDs that do not require stringent encapsulation; however, the advantage of iOLEDs and the device physics in iOLEDs have seldom been discussed. We show the advantage of iOLEDs over the conventional OLEDs from the fact that the luminance of a conventional-OLED-based flexible display decreases rapidly, whereas our iOLED-based flexible display exhibits approximately half of its initial luminance even after about 392 d. Electrons are injected into iOLEDs effectively by utilizing the solution process and a suitable dopant that can reduce the surface work function.
由于实现不需要严格封装的柔性有机发光二极管的需求,不使用碱金属的倒置有机发光二极管(ioled)引起了广泛关注;然而,关于ioled的优势和器件物理特性的讨论却很少。我们展示了ioled相对于传统oled的优势,因为基于传统oled的柔性显示器的亮度会迅速下降,而基于ioled的柔性显示器即使在大约392 d后也能显示其初始亮度的大约一半。通过利用溶液工艺和合适的掺杂剂,可以有效地将电子注入到ioled中,从而降低表面功函数。
{"title":"Recent Progress in Inverted OLEDs: Mechanism of Electron Injection without Use of Alkali Metals","authors":"H. Fukagawa, Tsubasa Sasaki, Taku Oono, Takahisa Shimizu","doi":"10.23919/AM-FPD.2019.8830566","DOIUrl":"https://doi.org/10.23919/AM-FPD.2019.8830566","url":null,"abstract":"Inverted organic light-emitting diodes (iOLEDs) without the use of alkali metals have attracted extensive attention owing to the demand for the realization of flexible OLEDs that do not require stringent encapsulation; however, the advantage of iOLEDs and the device physics in iOLEDs have seldom been discussed. We show the advantage of iOLEDs over the conventional OLEDs from the fact that the luminance of a conventional-OLED-based flexible display decreases rapidly, whereas our iOLED-based flexible display exhibits approximately half of its initial luminance even after about 392 d. Electrons are injected into iOLEDs effectively by utilizing the solution process and a suitable dopant that can reduce the surface work function.","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"88 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133093241","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of two-layered ReRAM using Ga-Sn-O thin film 用Ga-Sn-O薄膜制备两层ReRAM
Ayata Kurasaki, Sumio Sugiski, R. Tanaka, T. Matsuda, M. Kimura
We have studied Resistive Random Access Memory (ReRAM) using Ga-Sn-O (GTO) thin film. The device fabricated in this study has a sandwich structure in which two layers of GTO thin films with different resistance values are sandwiched between electrodes. From the current-voltage characteristics of the fabricated device, it was possible to confirm the function as memory even if writing and erasing are repeated 400 times.
本文研究了采用Ga-Sn-O (GTO)薄膜的电阻式随机存取存储器(ReRAM)。本研究制作的器件具有夹层结构,在电极之间夹有两层不同电阻值的GTO薄膜。从所制备器件的电流-电压特性来看,即使重复写入和擦除400次,也可以确认其作为存储器的功能。
{"title":"Development of two-layered ReRAM using Ga-Sn-O thin film","authors":"Ayata Kurasaki, Sumio Sugiski, R. Tanaka, T. Matsuda, M. Kimura","doi":"10.23919/AM-FPD.2019.8830625","DOIUrl":"https://doi.org/10.23919/AM-FPD.2019.8830625","url":null,"abstract":"We have studied Resistive Random Access Memory (ReRAM) using Ga-Sn-O (GTO) thin film. The device fabricated in this study has a sandwich structure in which two layers of GTO thin films with different resistance values are sandwiched between electrodes. From the current-voltage characteristics of the fabricated device, it was possible to confirm the function as memory even if writing and erasing are repeated 400 times.","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115224577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Phosphorus Followed by Hydrogen Two-Step Ion Implantation Used for Forming Low Resistivity Doped Silicon at 300°C 磷后氢两步离子注入在300°C下形成低电阻率掺杂硅
T. Nagao, Y. Inouchi, J. Tatemichi, T. Sugawara, M. Hasumi, T. Sameshima
We report formation of low resistivity n-type doped silicon region at 300°C by the method of two-step ion implantation. Phosphorus ions with a dose of 2×1014 cm−2 at 70 keV followed by hydrogen ions with 1×1016 cm−2 at 8 keV were implanted at RT to the both surfaces of single crystalline silicon substrates. Post heating at 300°C for 90 min decreased the sheet resistivity to 417 Ω/sq. The activation ratio was estimated as 75% under the assumption of electron mobility of 50 cm2/Vs in the doped region. Moreover, the minority carrier effective lifetime (τeff) was also increased to 253 μs. This indicates a low density of surface recombination defect states of 6.4×1010 cm−2. In contrast, a high sheet resistivity of 8×104 Ω/sq and a low τeff of 64 μs resulted from a single phosphorus ion implantation with 2×1014 cm−2 at 70 keV followed by 300°C heating for 90 min. The hydrogen ion implantation probably decreased the silicon bonding energy to easily move phosphorus atoms in the silicon lattice sites at 300°C and passivated the doped region by terminating silicon dangling bonds.
本文报道了用两步离子注入的方法在300°C下形成低电阻率n型掺杂硅区。在RT下,以2×1014 cm−2 (70 keV)剂量的磷离子和以1×1016 cm−2 (8 keV)剂量的氢离子分别注入到单晶硅衬底的两个表面。在300°C下加热90分钟后,薄片的电阻率降低到417 Ω/sq。在假设掺杂区电子迁移率为50 cm2/Vs的情况下,活化率估计为75%。少数载流子有效寿命τeff也提高到253 μs。这表明6.4×1010 cm−2的表面复合缺陷态密度较低。在70 keV下以2×1014 cm−2注入单磷离子,300℃加热90 min,得到的片电阻率为8×104 Ω/sq, τeff为64 μs。氢离子注入可能降低了硅键能,使磷原子在300℃时容易在硅晶格位上移动,并通过终止硅悬空键使掺杂区钝化。
{"title":"Phosphorus Followed by Hydrogen Two-Step Ion Implantation Used for Forming Low Resistivity Doped Silicon at 300°C","authors":"T. Nagao, Y. Inouchi, J. Tatemichi, T. Sugawara, M. Hasumi, T. Sameshima","doi":"10.23919/AM-FPD.2019.8830611","DOIUrl":"https://doi.org/10.23919/AM-FPD.2019.8830611","url":null,"abstract":"We report formation of low resistivity n-type doped silicon region at 300°C by the method of two-step ion implantation. Phosphorus ions with a dose of 2×10<sup>14</sup> cm<sup>−2</sup> at 70 keV followed by hydrogen ions with 1×10<sup>16</sup> cm<sup>−2</sup> at 8 keV were implanted at RT to the both surfaces of single crystalline silicon substrates. Post heating at 300°C for 90 min decreased the sheet resistivity to 417 Ω/sq. The activation ratio was estimated as 75% under the assumption of electron mobility of 50 cm<sup>2</sup>/Vs in the doped region. Moreover, the minority carrier effective lifetime (τ<inf>eff</inf>) was also increased to 253 μs. This indicates a low density of surface recombination defect states of 6.4×10<sup>10</sup> cm<sup>−2</sup>. In contrast, a high sheet resistivity of 8×10<sup>4</sup> Ω/sq and a low τ<inf>eff</inf> of 64 μs resulted from a single phosphorus ion implantation with 2×10<sup>14</sup> cm<sup>−2</sup> at 70 keV followed by 300°C heating for 90 min. The hydrogen ion implantation probably decreased the silicon bonding energy to easily move phosphorus atoms in the silicon lattice sites at 300°C and passivated the doped region by terminating silicon dangling bonds.","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124386909","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Low Temperature High-k Solution Processed Hybrid Gate Insulator for High Performance Amorphous In-Ga-Zn-O Thin-Film Transistors 用于高性能非晶In-Ga-Zn-O薄膜晶体管的低温高k溶液处理混合栅极绝缘体
Ployrung Kesorn, J. Bermundo, Naofumi Yoshida, T. Nonaka, M. Fujii, Y. Ishikawa, Y. Uraoka
Low temperature process is required to fabricate high performance amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) on plastic substrates for flexible display applications. In addition, high-k material which allows higher mobility, higher drain current and lower threshold voltage while facilitating miniaturization, is poised to replace conventional SiO2 gate insulators in TFTs. Therefore, hybrid material containing high-k BaTiO3 nanoparticles and transparent Poly-siloxane (Poly-SX) were used as gate insulator in a-IGZO TFTs. Opting for a hybrid material instead of only a BaTiO3 film enables lowering of process temperatures. This paper presents the performance of a-IGZO TFTs with solution processed hybrid gate insulators at different BaTiO3/Poly-SX ratios deposited at a lower temperature (300°C). The device shows a high mobility of 30.17 cm2/Vs, low threshold voltage of 0.4 V, and leakage current density of ~10−8 A/cm2.
在塑料衬底上制造高性能非晶In-Ga-Zn-O (a-IGZO)薄膜晶体管(TFTs)用于柔性显示应用,需要低温工艺。此外,高k材料在促进小型化的同时具有更高的迁移率、更高的漏极电流和更低的阈值电压,有望取代传统的SiO2栅极绝缘子。因此,采用含高k BaTiO3纳米粒子和透明聚硅氧烷(Poly-SX)的杂化材料作为a-IGZO TFTs的栅极绝缘体。选择混合材料而不仅仅是BaTiO3薄膜可以降低工艺温度。本文研究了在较低温度(300℃)下沉积不同BaTiO3/Poly-SX比率的溶液处理混合栅绝缘子的a- igzo TFTs的性能。该器件具有30.17 cm2/Vs的高迁移率、0.4 V的低阈值电压和~10−8 a /cm2的漏电流密度。
{"title":"Low Temperature High-k Solution Processed Hybrid Gate Insulator for High Performance Amorphous In-Ga-Zn-O Thin-Film Transistors","authors":"Ployrung Kesorn, J. Bermundo, Naofumi Yoshida, T. Nonaka, M. Fujii, Y. Ishikawa, Y. Uraoka","doi":"10.23919/AM-FPD.2019.8830627","DOIUrl":"https://doi.org/10.23919/AM-FPD.2019.8830627","url":null,"abstract":"Low temperature process is required to fabricate high performance amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) on plastic substrates for flexible display applications. In addition, high-k material which allows higher mobility, higher drain current and lower threshold voltage while facilitating miniaturization, is poised to replace conventional SiO2 gate insulators in TFTs. Therefore, hybrid material containing high-k BaTiO3 nanoparticles and transparent Poly-siloxane (Poly-SX) were used as gate insulator in a-IGZO TFTs. Opting for a hybrid material instead of only a BaTiO3 film enables lowering of process temperatures. This paper presents the performance of a-IGZO TFTs with solution processed hybrid gate insulators at different BaTiO3/Poly-SX ratios deposited at a lower temperature (300°C). The device shows a high mobility of 30.17 cm2/Vs, low threshold voltage of 0.4 V, and leakage current density of ~10−8 A/cm2.","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"118 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123228139","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Effects of Sputtering Gas on Crystal Growth Orientations and Durability of Al-doped ZnO Transparent Electrodes in Harsh Environment 溅射气体对恶劣环境下掺铝ZnO透明电极晶体生长取向和耐久性的影响
Fahmi Machda, Takaya Ogawa, H. Okumura, K. Ishihara
Aluminum-doped zinc oxide (AZO) transparent electrodes prepared by radio frequency (RF) magnetron sputtering were investigated to elucidate effects of crystal growth orientations on durability of AZO films, evaluated by electrical resistivity. During the deposition, the flow of oxygen gas was 60 sccm, while argon gas was varied from 3 to 60 sccm. As the argon gas flow increased, a transition of crystal growth orientations from (110) to (002) was observed by X-ray diffractometry (XRD). Damp heat test was conducted at 85°C and 85% of relative humidity for 25 days. As a result, the AZO films prepared with higher argon (or total) gas flows having (002) main crystal growth orientation exhibited better durability.
采用射频磁控溅射法制备了掺铝氧化锌(AZO)透明电极,研究了晶体生长取向对AZO薄膜耐久性的影响。在沉积过程中,氧气流量为60 sccm,氩气流量为3 ~ 60 sccm。x射线衍射(XRD)观察到,随着氩气流量的增加,晶体生长取向由(110)向(002)转变。湿热试验在85℃、85%相对湿度条件下进行,持续25天。结果表明,主晶体生长取向为(002)的高氩气流量(或总气流量)制备的AZO膜具有较好的耐久性。
{"title":"Effects of Sputtering Gas on Crystal Growth Orientations and Durability of Al-doped ZnO Transparent Electrodes in Harsh Environment","authors":"Fahmi Machda, Takaya Ogawa, H. Okumura, K. Ishihara","doi":"10.23919/AM-FPD.2019.8830628","DOIUrl":"https://doi.org/10.23919/AM-FPD.2019.8830628","url":null,"abstract":"Aluminum-doped zinc oxide (AZO) transparent electrodes prepared by radio frequency (RF) magnetron sputtering were investigated to elucidate effects of crystal growth orientations on durability of AZO films, evaluated by electrical resistivity. During the deposition, the flow of oxygen gas was 60 sccm, while argon gas was varied from 3 to 60 sccm. As the argon gas flow increased, a transition of crystal growth orientations from (110) to (002) was observed by X-ray diffractometry (XRD). Damp heat test was conducted at 85°C and 85% of relative humidity for 25 days. As a result, the AZO films prepared with higher argon (or total) gas flows having (002) main crystal growth orientation exhibited better durability.","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125750887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Influence of Thermal Treatment of Sol-Gel Derived (Ca0.8Sr0.2)ZrO3 Dielectric Thin Films 热处理对溶胶-凝胶衍生(Ca0.8Sr0.2)ZrO3介电薄膜的影响
Cheng-Hsing Hsu, Po-Yu Chou, C. Tseng
Effect of thermal treatment on microstructures and electrical properties of the sol-gel derived (Ca0.8Sr0.2)ZrO3 thin films were investigated. The diffraction pattern showed that the deposited films exhibited a polycrystalline microstructure. Scanning electron microscopy results show that the grain size are found to be dependent on the annealing temperature. Based on the surface structure and morphological characteristics, the thin films were sensitive to deposition conditions, such as the preheating temperature and annealing temperature. At a preheating temperature of 400°C and an annealing temperature of 700°C, the (Ca0.8Sr0.2)ZrO3 film observes a dielectric constant of 24 (f = 1 MHz), a dissipation factor of 0.21 (f = 1 MHz), and a leakage current density of 3.8×10−9 A/cm2 at an electrical field of 10 kV/cm.
研究了热处理对溶胶-凝胶法制备的(Ca0.8Sr0.2)ZrO3薄膜微观结构和电学性能的影响。衍射图表明,沉积膜具有多晶结构。扫描电镜结果表明,晶粒尺寸与退火温度有关。基于表面结构和形态特征,薄膜对沉积条件(如预热温度和退火温度)敏感。在400℃预热和700℃退火条件下,(Ca0.8Sr0.2)ZrO3薄膜在10 kV/cm电场下介电常数为24 (f = 1 MHz),耗散系数为0.21 (f = 1 MHz),漏电流密度为3.8×10−9 a /cm2。
{"title":"Influence of Thermal Treatment of Sol-Gel Derived (Ca0.8Sr0.2)ZrO3 Dielectric Thin Films","authors":"Cheng-Hsing Hsu, Po-Yu Chou, C. Tseng","doi":"10.23919/AM-FPD.2019.8830616","DOIUrl":"https://doi.org/10.23919/AM-FPD.2019.8830616","url":null,"abstract":"Effect of thermal treatment on microstructures and electrical properties of the sol-gel derived (Ca0.8Sr0.2)ZrO3 thin films were investigated. The diffraction pattern showed that the deposited films exhibited a polycrystalline microstructure. Scanning electron microscopy results show that the grain size are found to be dependent on the annealing temperature. Based on the surface structure and morphological characteristics, the thin films were sensitive to deposition conditions, such as the preheating temperature and annealing temperature. At a preheating temperature of 400°C and an annealing temperature of 700°C, the (Ca0.8Sr0.2)ZrO3 film observes a dielectric constant of 24 (f = 1 MHz), a dissipation factor of 0.21 (f = 1 MHz), and a leakage current density of 3.8×10−9 A/cm2 at an electrical field of 10 kV/cm.","PeriodicalId":129222,"journal":{"name":"2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121755028","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1