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Micro-machining: An overview (Part II) 微加工:概述(第二部分)
Pub Date : 2021-10-06 DOI: 10.1177/25165984211045244
V. Jain, D. Patel, J. Ramkumar, B. Bhattacharyya, B. Doloi, B. Sarkar, Prabhat Ranjan, Sarath Sankar E. S., A. D. Jayal
This article on ‘Micro-machining: An Overview (Part II)’ is in continuation to ‘Micro-machining: An Overview (Part I)’ published in this journal (Journal of Micromanufacturing). It consists of four parts, namely, electrochemical micro-texturing, electrochemical spark micro-machining, molecular dynamics simulation and sustainability issues of micro-machining processes. Electrochemical micro-texturing (ECMTex) deals with various techniques developed for micro-texturing on different types of workpiece-surfaces, namely, flat, curved and free-form surfaces. Here, basically two categories of techniques have been reviewed, namely, with mask and without mask. It also deals with ‘single point tool micro-texturing’ which turns out to be a single-step technique requiring minimum time, but the accuracy and repeatability obtained after micro-texturing need to be critically analysed. For mass production, one needs to go for sinking kind of ECMTex processes. Electrochemical spark micro-machining (ECSMM) is an interesting hybrid (ECM+EDM) process which can be applied for electrically conducting as well as electrically non-conducting materials. However, the work reported in this article deals only with the electrically non-conducting materials for which this process was initially developed. This process has a lot of potential for theoretical work to be done. In this article, two theories of sparking/discharging have been briefly mentioned: single bubble discharging/sparking and single surface discharging. It also dicusses its applications for different types of electrically non-conducting materials. Molecular dynamics simulation (MDS) of micro-/nano-machining processes is very important, but it is very cumbersome to understand at atomic/molecular scale. In these processes, the material behaviour at micro-/nano-level machining is completely different as compared to bulk-machining (macro-machining) processes. Hence, some fundamentals of MDS have been discussed. It just gives the idea of available techniques, softwares and models for different types of processes. However, there is the need of further research work to be done for clearly understanding the MDS of micro-/nano-machining. In the end, the sustainability of micro-machining issues have been discussed, mainly based on the energy consumption per unit mass of production. It is concluded that the advanced micro-manufacturing processes are highly energy-intensive processes, and they need further studies to be done for making them more suitable from sustainability point of view. At the end of each section, some potential areas of research for enhancing the accuracy and repeatability, and minimising the production time of each process have been discussed.
这篇关于“微加工:概述(第二部分)”的文章是发表在该杂志(journal of Micromanufacturing)上的“微加工:概述(第一部分)”的延续。由电化学微织构、电化学火花微加工、分子动力学仿真和微加工过程的可持续性问题四个部分组成。电化学微织构(ECMTex)处理的是在不同类型的工件表面,即平面、曲面和自由曲面上进行微织构的各种技术。在这里,基本上回顾了两类技术,即带口罩和不带口罩。它还处理了“单点工具微纹理”,这是一种需要最少时间的单步技术,但微纹理后获得的精度和可重复性需要严格分析。对于大规模生产,需要采用下沉式ECMTex工艺。电化学火花微加工(ECSMM)是一种有趣的混合(ECM+EDM)加工工艺,既可以用于导电材料,也可以用于导电材料。然而,本文报道的工作仅涉及该工艺最初开发的非导电材料。这一过程有很多潜在的理论工作要做。本文简要介绍了两种放电理论:单泡放电和单表面放电。讨论了其在不同类型的非导电材料中的应用。微纳米加工过程的分子动力学模拟(MDS)是非常重要的,但在原子/分子尺度上理解非常麻烦。在这些过程中,材料在微/纳米级加工的行为是完全不同的,相比于大块加工(宏加工)过程。因此,讨论了MDS的一些基本原理。它只是给出了不同类型过程的可用技术、软件和模型的概念。然而,为了更清楚地了解微纳加工的MDS,还需要进一步的研究工作。最后,对微加工的可持续性问题进行了讨论,主要基于单位批量生产的能耗。结论认为,先进微制造工艺是高能耗工艺,需要进一步研究以使其更适合可持续发展。在每个部分的最后,讨论了一些潜在的研究领域,以提高准确性和可重复性,并最大限度地减少每个过程的生产时间。
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引用次数: 4
Parametric studies on laser additive manufacturing of copper on stainless steel 不锈钢激光增材加工铜的参数研究
Pub Date : 2021-10-04 DOI: 10.1177/25165984211047525
S. Yadav, C. Paul, A. Rai, A. N. Jinoop, S. K. Nayak, R. Singh, K. Bindra
Laser additive manufacturing using directed energy deposition (LAM-DED) technique is one of the recent techniques for fabricating engineering components directly from 3D CAD model data using high power lasers. In this respect, LAM-DED of copper (Cu) and stainless steel (SS) is an enduring research area. However, LAM-DED of Cu is challenging due to higher thermal conductivity, lower absorption to infrared radiation and oxide formation tendency. The present work reports an experimental investigation to evaluate the effect of process parameters on the track geometry, contact angle, inter-diffusion and micro-hardness of Cu tracks deposited on SS 304L substrate using LAM-DED. Analysis of variance is used to estimate the contribution percentage of process parameters on the track geometry. Further, Cu bulk structures are deposited at an identified combination of process parameters and they are subjected to optical microscopy for microstructural characterisation. Further, finite-element-based numerical simulation is performed to understand the temperature distribution during the processing of Cu bulk structures on SS304L and the temperature results are co-related with the microstructural transformation during the processing. This investigation paves a way to understand the effect of processing parameters for building Cu bulk structures on SS Substrate using LAM-DED.
激光增材制造采用定向能沉积(LAM-DED)技术是一种最新的技术,直接从3D CAD模型数据中使用高功率激光制造工程部件。在这方面,铜(Cu)和不锈钢(SS)的lamp - ded是一个持久的研究领域。然而,Cu的LAM-DED具有较高的导热系数、较低的红外辐射吸收和氧化倾向,因此具有挑战性。本文研究了工艺参数对在SS 304L衬底上沉积Cu轨道几何形状、接触角、相互扩散和显微硬度的影响。方差分析用于估计工艺参数对轨道几何形状的贡献百分比。此外,在确定的工艺参数组合下沉积铜体结构,并对其进行光学显微镜微观结构表征。在此基础上,通过有限元数值模拟了解了SS304L铜体组织加工过程中的温度分布,温度结果与加工过程中的显微组织转变有密切关系。本研究为了解工艺参数对利用lamd在SS基板上构建Cu体结构的影响奠定了基础。
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引用次数: 2
A numerical model for tool–chip friction in intermittent orthogonal machining 断续正交加工中刀屑摩擦的数值模型
Pub Date : 2021-10-04 DOI: 10.1177/25165984211048121
Akash Saini, A. D. Jayal
This article presents a novel model to study the influence of surface textured cutting tools in near-micromachining conditions. The model utilizes the Challen and Oxley’s asperity deformation model (Van Luttervelt et al., CIRP Ann Manuf Technol, 1998, vol. 47, pp. 587–626; Arrazola et al., CIRP Ann Manuf Technol, 2013, vol. 62, pp. 695–718) paired with an approach to a priori estimate of the interfacial film formation at the tool–chip interface. The procedure considers the chemical effect of the environment, along with the mechanical aspects of the surface texture of the cutting tool’s rake surface. Model performance, in terms of predicting machining forces and coefficient of friction, was validated with existing experimental data (Anand et al., Proceedings of the international conference on advancements and futuristic trends in mechanical and materials engineering, 5–7 October 2012, pp. 661–666). The outcome trend of the proposed model approximately matches with the experimental results. Further, the model tries to explain the impact of cutting tool’s surface roughness on overall tool–chip friction while performing intermittent cutting in the near-micromachining regime.
本文提出了一种新的模型来研究近微加工条件下刀具表面织构的影响。该模型采用了Challen和Oxley的粗糙变形模型(Van lutvelt et al., CIRP Ann manufacturing technology, 1998, vol. 47, pp. 587-626;Arrazola et al., CIRP Ann Manuf technology, 2013, vol. 62, pp. 695-718)结合了一种先验估计工具-芯片界面膜形成的方法。该程序考虑了环境的化学效应,以及刀具耙面表面纹理的机械方面。在预测加工力和摩擦系数方面,模型性能用现有的实验数据进行了验证(Anand等人,机械和材料工程的进步和未来趋势国际会议论集,2012年10月5日至7日,第661-666页)。该模型的结果趋势与实验结果基本吻合。此外,该模型试图解释在近微加工状态下进行间歇切削时,刀具表面粗糙度对刀具-切屑整体摩擦的影响。
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引用次数: 0
Plasma polishing processes applied on optical materials: A review 等离子体抛光技术在光学材料中的应用综述
Pub Date : 2021-08-31 DOI: 10.1177/25165984211038882
H. Yadav, Manjesh Kumar, Abhinav Kumar, M. Das
Nowadays, the surface quality of the material is crucial for industry and science. With the development of micro-electronics and optics, the demand for surface quality has become more and more rigorous, making optical surface polishing more and more critical. Plasma polishing technology is conceived as an essential tool for removing surface and subsurface damages from traditional polishing processes. The plasma processing technology is based on plasma chemical reactions and removes atomic-level materials. Plasma polishing can easily nano-finish hard-brittle materials such as ceramics, glass, crystal, fused silica, quartz, Safire, etc. The optical substrate with micro-level and nano-level surface roughness precision is in demand with the advancement in optics fabrication. The mechanical properties of super-finished optics materials are being used to fulfill the requirement of modern optics. This article discusses the processing of different types of freeform, complex and aspheric optical materials by the plasma polishing process used mainly by the optical industry. The plasma polishing devices developed in the last decade are thoroughly reviewed for their working principles, characteristics and applications. This article also examines the impact of various process parameters such as discharge power, rate of gas flow, mixed gas flow ratio and pressure on the plasma polishing process.
如今,材料的表面质量对工业和科学至关重要。随着微电子和光学技术的发展,对表面质量的要求越来越严格,使得光学表面抛光变得越来越关键。等离子抛光技术被认为是消除传统抛光工艺中表面和表面下损伤的重要工具。等离子体处理技术是基于等离子体化学反应,去除原子级物质。等离子抛光可以很容易地对陶瓷、玻璃、晶体、熔融石英、石英、Safire等硬脆材料进行纳米级抛光。随着光学技术的发展,对具有微米级和纳米级表面粗糙度精度的光学基板提出了更高的要求。超精密光学材料的力学性能正被用于满足现代光学的要求。本文讨论了主要应用于光学工业的等离子体抛光工艺加工不同类型的自由曲面、复杂和非球面光学材料。综述了近十年来发展起来的等离子体抛光装置的工作原理、特点和应用。本文还考察了放电功率、气体流量、混合气体流量比和压力等工艺参数对等离子抛光过程的影响。
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引用次数: 6
Effect of scan pattern on Hastelloy-X wall structures built by laser-directed energy deposition-based additive manufacturing 扫描模式对基于激光定向能沉积的增材制造哈氏合金- x壁结构的影响
Pub Date : 2021-08-26 DOI: 10.1177/25165984211036312
A. N. Jinoop, S. K. Nayak, S. Yadav, C. Paul, R. Singh, J. G. Kumar, K. Bindra
This article systematically analyzes the effect of scan pattern on the geometry and material properties of wall structures built using laser-directed energy deposition (LDED)-based additive manufacturing. Hastelloy-X (Hast-X), a nickel superalloy, is deposited using an indigenously developed 2-kW fiber laser–based LDED system. The wall structures are built using unidirectional and bidirectional scan patterns with the same LDED process parameters and effect of scan pattern on the geometry, microstructural and mechanical characteristics of Hast-X wall structures built using LDED. The wall width is higher for samples deposited with the bidirectional pattern at the starting and ending points as compared to walls built with the unidirectional pattern. Further, the range of width value is higher for walls built with bidirectional strategy as compared to walls built with unidirectional strategy. Wall height is more uniform with unidirectional deposition at the central region, with the range and standard deviation for walls built using bidirectional deposition at 3 and 2.5 times more than unidirectional deposition, respectively. The deposition rate for bidirectional deposition is two times that of unidirectional deposition. The microstructure of the built walls is cellular/dendritic, with bidirectional deposition showing a finer grain structure. Elemental mapping shows the presence of elemental segregation of Mo, C and Si, confirming the formation of Mo-rich carbides. Micro-hardness and ball indentation studies reveal higher mechanical strength for samples built using the bidirectional pattern, with unidirectional samples showing strength lower than the conventional wrought Hast-X samples (197 HV). This study paves a way to understand the effect of scan pattern on LDED built wall structures for building intricate thin-walled components.
本文系统分析了扫描模式对基于激光定向能沉积(LDED)的增材制造墙体结构的几何形状和材料性能的影响。哈斯特洛伊- x(哈斯特洛伊- x)是一种镍高温合金,采用自主开发的2千瓦光纤激光led系统进行沉积。采用具有相同LDED工艺参数的单向和双向扫描模式构建了墙体结构,并研究了扫描模式对使用LDED构建的ast- x墙体结构的几何、微观结构和力学特性的影响。与单向模式相比,在起点和终点以双向模式沉积的样品的壁宽更高。此外,与单向墙体相比,双向墙体的宽度值范围更大。在中心区域单向沉积时,壁高更加均匀,双向沉积的壁高范围和标准差分别是单向沉积的3倍和2.5倍。双向沉积速率是单向沉积速率的2倍。筑壁的微观结构为细胞状/枝晶状,双向沉积表现出较细的晶粒结构。元素映射显示Mo、C和Si元素偏析的存在,证实了富Mo碳化物的形成。显微硬度和球压痕研究表明,使用双向模式构建的样品具有更高的机械强度,单向样品的强度低于传统锻造的ast- x样品(197 HV)。本研究为了解扫描模式对复杂薄壁构件的led墙体结构的影响奠定了基础。
{"title":"Effect of scan pattern on Hastelloy-X wall structures built by laser-directed energy deposition-based additive manufacturing","authors":"A. N. Jinoop, S. K. Nayak, S. Yadav, C. Paul, R. Singh, J. G. Kumar, K. Bindra","doi":"10.1177/25165984211036312","DOIUrl":"https://doi.org/10.1177/25165984211036312","url":null,"abstract":"This article systematically analyzes the effect of scan pattern on the geometry and material properties of wall structures built using laser-directed energy deposition (LDED)-based additive manufacturing. Hastelloy-X (Hast-X), a nickel superalloy, is deposited using an indigenously developed 2-kW fiber laser–based LDED system. The wall structures are built using unidirectional and bidirectional scan patterns with the same LDED process parameters and effect of scan pattern on the geometry, microstructural and mechanical characteristics of Hast-X wall structures built using LDED. The wall width is higher for samples deposited with the bidirectional pattern at the starting and ending points as compared to walls built with the unidirectional pattern. Further, the range of width value is higher for walls built with bidirectional strategy as compared to walls built with unidirectional strategy. Wall height is more uniform with unidirectional deposition at the central region, with the range and standard deviation for walls built using bidirectional deposition at 3 and 2.5 times more than unidirectional deposition, respectively. The deposition rate for bidirectional deposition is two times that of unidirectional deposition. The microstructure of the built walls is cellular/dendritic, with bidirectional deposition showing a finer grain structure. Elemental mapping shows the presence of elemental segregation of Mo, C and Si, confirming the formation of Mo-rich carbides. Micro-hardness and ball indentation studies reveal higher mechanical strength for samples built using the bidirectional pattern, with unidirectional samples showing strength lower than the conventional wrought Hast-X samples (197 HV). This study paves a way to understand the effect of scan pattern on LDED built wall structures for building intricate thin-walled components.","PeriodicalId":129806,"journal":{"name":"Journal of Micromanufacturing","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116173009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Chemomechanical magnetorheological finishing: Process mechanism, research trends, challenges and opportunities in surface finishing 化学机械磁流变表面处理:表面处理的工艺机理、研究趋势、挑战和机遇
Pub Date : 2021-08-23 DOI: 10.1177/25165984211038878
Yogendra Kumar, Harpreet Singh
Chemomechanical magnetorheological finishing (CMMRF) has emerged as a nanofinishing method that combines the characteristics of chemical mechanical polishing (CMP) and magneto-rheological finishing (MRF). The CMMRF process was designed to take into account both the chemical and mechanical effects that occur during the finishing process. In the field of material processing science, this article delves into the fundamentals of the CMMRF method. The potential research patterns linked to CMMRF are assessed and their benefits are determined. Furthermore, the challenges of improving CMMRF process capabilities, as well as the wide futuristic opportunities of the research sector, are emphasised, along with meeting all industrial needs. The findings of this analysis paper will also aid researchers in the field of advanced finishing in identifying process realisation for better results.
化学机械磁流变抛光(CMMRF)是一种结合化学机械抛光(CMP)和磁流变抛光(MRF)特点的纳米抛光方法。CMMRF工艺的设计考虑了精加工过程中发生的化学和机械效应。在材料加工科学领域,本文深入探讨了CMMRF方法的基本原理。评估了与CMMRF相关的潜在研究模式,并确定了它们的益处。此外,在满足所有工业需求的同时,还强调了提高CMMRF工艺能力的挑战,以及研究部门广泛的未来机会。本分析论文的发现也将帮助研究人员在先进的整理领域,以确定过程实现更好的结果。
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引用次数: 7
Micromechanical analysis of effective mechanical properties of graphene/ZrO2-hybrid poly (methyl methacrylate) nanocomposites 石墨烯/ zro2杂化聚甲基丙烯酸甲酯纳米复合材料有效力学性能的微观力学分析
Pub Date : 2021-08-18 DOI: 10.1177/25165984211038861
A. Rathi, S. I. Kundalwal
In this study, the tensile properties of two-phase and three-phase graphene/ZrO2-hybrid poly (methyl methacrylate) (PMMA) nanocomposites are investigated by developing finite element model using ANSYS. Primarily, the effective elastic properties of two- and three-phase graphene/ZrO2-hybrid PMMA nanocomposites (GRPCs) are estimated by developing mechanics of material (MOM) model. Results indicated that the effective elastic properties of GRPCs increase with an increase in the volume fraction of graphene. Also, the stiffness of GRPCs is increased by 78.12% with increasing in the volume fraction of graphene from 0.1 to 0.5 Vf. The incorporation of an additional ZrO2 interphase significantly improved the mechanical performance of resulting GRPCs.
在本研究中,通过ANSYS建立有限元模型,研究了两相和三相石墨烯/ zro2杂化聚甲基丙烯酸甲酯(PMMA)纳米复合材料的拉伸性能。首先,通过建立材料力学(MOM)模型来估计两相和三相石墨烯/ zro2杂化PMMA纳米复合材料(GRPCs)的有效弹性性能。结果表明,随着石墨烯体积分数的增加,复合材料的有效弹性性能有所提高。石墨烯的体积分数从0.1 Vf增加到0.5 Vf, grpc的刚度提高了78.12%。加入额外的ZrO2间相显著提高了所得grpc的机械性能。
{"title":"Micromechanical analysis of effective mechanical properties of graphene/ZrO2-hybrid poly (methyl methacrylate) nanocomposites","authors":"A. Rathi, S. I. Kundalwal","doi":"10.1177/25165984211038861","DOIUrl":"https://doi.org/10.1177/25165984211038861","url":null,"abstract":"In this study, the tensile properties of two-phase and three-phase graphene/ZrO2-hybrid poly (methyl methacrylate) (PMMA) nanocomposites are investigated by developing finite element model using ANSYS. Primarily, the effective elastic properties of two- and three-phase graphene/ZrO2-hybrid PMMA nanocomposites (GRPCs) are estimated by developing mechanics of material (MOM) model. Results indicated that the effective elastic properties of GRPCs increase with an increase in the volume fraction of graphene. Also, the stiffness of GRPCs is increased by 78.12% with increasing in the volume fraction of graphene from 0.1 to 0.5 Vf. The incorporation of an additional ZrO2 interphase significantly improved the mechanical performance of resulting GRPCs.","PeriodicalId":129806,"journal":{"name":"Journal of Micromanufacturing","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127926689","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Effect of higher layer thickness on laser powder bed fusion built single tracks of Ni-Cr-Fe-Nb-Mo alloy 较高层厚对Ni-Cr-Fe-Nb-Mo合金激光粉末床熔敷单轨的影响
Pub Date : 2021-08-11 DOI: 10.1177/25165984211036871
S. K. Nayak, S. Mishra, C. Paul, K. Bindra
Laser Powder Bed Fusion (LPBF) is one of the revolutionary technologies that can fabricate complex-shaped components by selective melting of the pre-placed powder layer, using high-power laser as directed by the input digital files. Generally, research on the LPBF process is called out for layer thickness (LT) up to 50 µm and smaller beam diameter (≤100 µm), but it has lower productivity. In LPBF, higher productivity can be achieved with higher LT (>50 µm), but it consists of various process instabilities. In the present work, parametric studies are performed by laying Ni-Cr-Fe-Nb-Mo single tracks, using LPBF at higher LT. The process parameters such as laser power (P), scan speed (v), and LT are varied among 150–450 W, 0.04–0.1 m s−1, and 80–160 µm, respectively, at three levels each. For the range of parameters under investigation, the maximum track width of 610 µm and aspect ratio of 7.63 are achieved at a P of 450 W and v of 0.04 m s−1 at 80 µm LT. It is observed that an increase in the energy density and layer thickness resulted in the reduction of track width and aspect ratio due to material vaporization occurring from poor heat conductivity due to unconventionally high powder layer thickness. It is also observed that the build rate increases with an increase in P, v, and LT. As single tracks are basic building blocks, the obtained results can provide an insight into the effect of process parameters on LPBF-built single tracks at higher LT for building engineering components of required width with higher build rate. Furthermore, the track dilution is also found to increase with the increase in P and decrease in v.
激光粉末床熔融(LPBF)是一种革命性的技术,它可以通过使用高功率激光根据输入的数字文件的指示,选择性地熔化预先放置的粉末层来制造复杂形状的部件。一般来说,LPBF工艺的研究要求层厚(LT)达到50µm,光束直径更小(≤100µm),但其生产率较低。在LPBF中,更高的LT (bbb50µm)可以实现更高的生产率,但它包含各种工艺不稳定性。在本工作中,参数化研究是通过在更高的ltf下使用LPBF铺设Ni-Cr-Fe-Nb-Mo单轨来进行的。激光功率(P),扫描速度(v)和LT等工艺参数分别在150-450 W, 0.04-0.1 m s - 1和80-160µm之间变化。在所研究的参数范围内,当P为450 W, v为0.04 m s - 1时,在80 μ m lt下,最大轨道宽度为610 μ m,长径比为7.63。我们观察到,能量密度和层厚度的增加导致轨道宽度和长径比减小,这是由于非常规的高粉末层厚度导致的导热性差导致的材料汽化。还观察到,构建速率随着P、v和LT的增加而增加。由于单轨是基本的构建模块,所获得的结果可以深入了解工艺参数对高LT下lpbf构建的单轨的影响,从而以更高的构建速率构建所需宽度的工程部件。径迹稀释随P的增大而增大,随v的减小而减小。
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引用次数: 1
Surface finishing requirements on various internal cylindrical components: A review 表面处理要求各种内部圆柱形组件:一个回顾
Pub Date : 2021-08-11 DOI: 10.1177/25165984211035504
Talwinder Singh Bedi, A. Rana
Modern technology requires producing of a sustainable product with a high surface accuracy. In applications where the surface quality is highly considerable in various internal cylindrical components requires technology to manufacture an ultrafine surface finish. There is, in general, a probability of inducing errors into products by the traditional finishing processes (such as grinding/honing), which lead to failure. Preferably with some evidence in the main text. Further, the advanced finishing processes are developed, where the finishing forces can be controlled by varying the power output. Instead of a solid abrasive tool, the smart polishing fluid is used, which gets activated under the magnetic fields. In this manuscript, the material removal under different internal surface finishing processes is elaborated, which helps in improving the surface quality of various industrial components. Also, the surface quality produced on various industrial components after traditional as well as advanced finishing processes are discussed.
现代技术要求生产具有高表面精度的可持续产品。在各种内部圆柱形部件的表面质量非常可观的应用中,需要制造超细表面光洁度的技术。一般来说,传统的精加工工艺(如磨削/珩磨)有可能导致产品出现错误,从而导致失效。最好在正文中加上一些证据。此外,开发了先进的精加工工艺,其中精加工力可以通过改变功率输出来控制。使用智能抛光液代替固体研磨工具,它在磁场下被激活。本文阐述了不同内表面处理工艺下的材料去除,有助于提高各种工业部件的表面质量。此外,讨论了各种工业部件经过传统和先进的精加工工艺后产生的表面质量。
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引用次数: 1
Study of metal-assisted chemical etching of silicon as an alternative to dry etching for the development of vertical comb-drives 金属辅助硅化学蚀刻替代干法蚀刻发展垂直梳状驱动器的研究
Pub Date : 2021-08-06 DOI: 10.1177/25165984211033422
Varun Sharma, R. Shukla, C. Mukherjee, P. Tiwari, A. K. Sinha
Metal-assisted chemical etching (MaCEtch) has recently emerged as a promising technique to etch anisotropic nano- and microstructures in silicon by metal catalysts. It is an economical wet chemical etching method, which can be a good alternative to deep-reactive ion etching (DRIE) process in terms of verticality and etch depth. In the present study, gold is used as a metal catalyst and deposited using physical vapour deposition. It has already been demonstrated that (100) p-type Si wafer can be etched with vertical and smooth side walls. Effects of varying concentrations of etchant constituents and various other parameters, that is, porosity of deposited Au, surface contaminants, oxide formation, metal catalyst, etching time, role of surface tension of additives on the etch depth and surface defects are studied and discussed in detail. By increasing the hydrofluoric acid (HF) concentration from 7.5 M to 10 M, lateral etching is reduced and the microstructure’s width is increased from 17 µm to 18 µm. Porous defects are suppressed by decreasing the hydrogen peroxide (H2O2) concentration from 1.5 M to 1 M. On increasing the etching time from 30 min to 60 min, the microstructures are over-etched laterally. Smoother side walls are fabricated by using the low-surface-tension additive ethanol. The maximum etch depth of 2.6 µm is achieved for Au catalyst in 30 min. The results are encouraging and useful for the development of vertical comb-drives and Micro-Electro-Mechanical Systems (MEMS).
金属辅助化学蚀刻(MaCEtch)是一种利用金属催化剂在硅中蚀刻各向异性纳米和微结构的新技术。它是一种经济的湿化学蚀刻方法,在垂直度和蚀刻深度方面可以很好地替代深反应离子蚀刻(DRIE)工艺。本研究以金为金属催化剂,采用物理气相沉积法进行沉积。已经证明(100)p型硅片可以蚀刻具有垂直和光滑的侧壁。研究并详细讨论了不同浓度的蚀刻剂成分和其他各种参数的影响,即沉积金的孔隙率、表面污染物、氧化物形成、金属催化剂、蚀刻时间、添加剂表面张力对蚀刻深度和表面缺陷的作用。通过将氢氟酸(HF)浓度从7.5 M增加到10 M,可以减少横向蚀刻,并将微结构的宽度从17µM增加到18µM。将过氧化氢(H2O2)浓度从1.5 M降低到1 M,可以抑制多孔缺陷,当刻蚀时间从30 min增加到60 min时,微观结构横向过度刻蚀。采用低表面张力添加剂乙醇制备光滑的侧壁。在30分钟内,Au催化剂的最大刻蚀深度达到2.6µm。这一结果对垂直梳状驱动和微机电系统(MEMS)的发展具有鼓舞人心的意义。
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引用次数: 1
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Journal of Micromanufacturing
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