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Analytical study for the selection of mask size and shape for obtaining high machining quality of complex features 为获得复杂特征的高加工质量,对掩模尺寸和形状的选择进行了分析研究
Pub Date : 2023-06-02 DOI: 10.1177/25165984231172007
Gaganpreet Singh, Bhawandeep Sharma, R. Kumar, J. Ramkumar, S. A. Ramakrishna
In this article, an analytical study of the effect of the shape and size of the mask on the machining quality of complex shapes has been carried out. For this study, we considered square and circular masks of varying sizes with varying overlap for the machining of square, inclined, and circular features. Mask size varied from 1 to 20 mm, while overlap varied from 10% to 90%. The machining quality of the aforementioned features was evaluated by studying the unmachined area “An” (in the machining zone) and the machining time “Tm.” For machining a similar feature, it was observed that the square mask performed much better than the circular mask in minimizing the machining time. However, the circular mask is much more suitable for minimizing the unmachined area. For validation, the experiment was conducted to machine the inclined lines with square and circular shape masks with varying overlap percentages. The experimental results were found to be in good agreement with the analytically obtained results, with an error of 2.5%. This study is relevant for the industrial-scale manufacturing of complicated features using the mask projection approach in laser machining.
本文分析研究了掩模的形状和尺寸对复杂形状加工质量的影响。在这项研究中,我们考虑了不同尺寸和不同重叠的方形和圆形掩模,用于方形、倾斜和圆形特征的加工。掩模尺寸为1 ~ 20 mm,重叠度为10% ~ 90%。通过研究未加工区域An和加工时间Tm来评价上述特征的加工质量。对于加工类似的特征,观察到方形掩模比圆形掩模在最小化加工时间方面表现得更好。然而,圆形掩模更适合最小化未加工区域。为了验证该方法的有效性,分别用不同重叠比例的方形和圆形掩模加工斜线。实验结果与解析得到的结果吻合良好,误差为2.5%。本研究为激光加工中使用掩模投影方法进行复杂特征的工业规模制造提供了理论依据。
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引用次数: 0
Influence of energy input parameters on wire feed rate and surface characteristics during WECM of Nitinol SMA 能量输入参数对镍钛诺SMA平轧过程中送丝速度和表面特性的影响
Pub Date : 2023-02-10 DOI: 10.1177/25165984231151303
Naresh Besekar, B. Bhattacharyya
Nitinol shape memory alloy (SMA) has outstanding chemical and mechanical properties which make the machining of Nitinol SMA more difficult than other materials due to super-elasticity and multiphase transformation. Wire electrochemical machining (WECM) is a nontraditional process, which removes conductive material through anodic dissolution despite of material’s properties. In this paper, the mathematical model is presented for slit width calculation for the influence of different parameters using vibration-assisted nozzle jet flushing. In this experimental investigation, the effect of prominent energy input parameters on wire feed rate to achieve better homogeneity, machining accuracy, and surface quality with a 300 µm thick sheet of Nitinol SMA micro-slits has been presented using an in-house developed WECM set-up. Experimental results revealed that the wire feed rate and surface roughness drastically increases with an increase in the most influencing energy input parameter, that is, pulse voltage with minimum average surface roughness (Ra) of 0.1076 µm and 123.60 µm average slit width at 7 V pulse voltage. Finally, the curved complex micro-feature of a 120 µm thick sheet of Nitinol SMA was fabricated successfully with a 137.795 µm average slit width under the controlled process parameter combination using WECM.
镍钛诺形状记忆合金(Nitinol shape memory alloy, SMA)具有优异的化学和机械性能,由于其超弹性和多相转变特性,使得其加工难度高于其他材料。线材电化学加工(WECM)是一种非传统的加工方法,不考虑材料的性能,通过阳极溶解去除导电材料。本文针对振动辅助喷管射流冲刷时不同参数对狭缝宽度的影响,建立了计算狭缝宽度的数学模型。在本实验研究中,利用自行开发的WECM装置,展示了突出的能量输入参数对送丝速度的影响,以获得更好的均匀性、加工精度和表面质量,并对300 μ m厚的镍钛诺SMA微缝板进行加工。实验结果表明,在7 V脉冲电压下,随着影响最大的能量输入参数——脉冲电压的增加,送丝速率和表面粗糙度急剧增加,平均表面粗糙度Ra最小为0.1076µm,平均狭缝宽度为123.60µm。最后,在可控的工艺参数组合下,成功制备了120µm厚、平均狭缝宽度为137.795µm的镍钛诺SMA板材的弯曲复杂微观形貌。
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引用次数: 2
Finishing the surface micro-layer of additively manufactured TiAl alloy using electro-thermal discharge assisted post-processing 利用电热放电辅助后处理技术对增材制造TiAl合金表面微层进行精加工
Pub Date : 2023-02-07 DOI: 10.1177/25165984231151745
Jibin Boban, Afzaal Ahmed
Selective laser melting (SLM) of titanium–aluminium (TiAl) alloy components has gained significant attention in the modern industrial world. The flexibility of the SLM process in producing complex shapes with minimum utilization of material and energy makes it dominant over other manufacturing techniques. As aerospace and biomedical industries demand complex-shaped TiAl alloy components, part fabrication using SLM becomes the ultimate solution. However, the unacceptable level of surface integrity and anisotropic behavior of SLM components demand post processing operations such as laser polishing, chemical polishing, and conventional polishing methods. In this study, a recently developed polishing method called wire electrical discharge polishing (WEDP) is performed on TiAl alloys for obtaining a smooth and defect-free surface. This study aims to investigate the micro-layer modification occurring to the WEDP-processed surface in detail. The experimental results establish the effectiveness of WEDP method in terms of improved surface integrity. The surface finish (Sa) got enhanced by ~88% after WEDP processing. In addition, the thickness of recast layer formed by WEDP was found to be minimum. Moreover, post-processing of TiAl alloy resulted in better surface morphology specifically at lower settings of peak current. It is noteworthy that the migration of wire material was minimum with zinc-coated brass electrode compared to the normal brass electrode. Hence, coated wire electrodes are recommended for WEDP process. In short, an excellent surface integrity can be achieved using WEDP process through favorable surface modification aided by lower peak current and coated wire electrodes. Furthermore, less electrode wear observed in WEDP process enables the deployment of lower feed rates leading to minimal electrode consumption.
钛铝(TiAl)合金零件的选择性激光熔化(SLM)在现代工业领域受到了广泛的关注。SLM工艺在以最小的材料和能源利用率生产复杂形状方面的灵活性使其优于其他制造技术。由于航空航天和生物医学行业需要复杂形状的TiAl合金部件,使用SLM制造零件成为最终解决方案。然而,SLM组件的表面完整性和各向异性行为不可接受的水平需要后处理操作,如激光抛光,化学抛光和传统抛光方法。在这项研究中,一种最新开发的抛光方法被称为线放电抛光(WEDP),用于TiAl合金获得光滑和无缺陷的表面。本研究旨在详细研究wedp加工表面发生的微层改性。实验结果证明了WEDP方法在提高表面完整性方面的有效性。经WEDP处理后,表面光洁度(Sa)提高了约88%。此外,发现WEDP形成的重铸层厚度最小。此外,TiAl合金的后处理导致了更好的表面形貌,特别是在较低的峰值电流设置下。值得注意的是,与普通黄铜电极相比,涂锌黄铜电极的丝材迁移最小。因此,建议在WEDP工艺中使用涂覆丝电极。简而言之,采用WEDP工艺,通过较低的峰值电流和涂覆丝电极进行有利的表面改性,可以实现优异的表面完整性。此外,在WEDP工艺中观察到的电极磨损较少,可以采用较低的进给速率,从而使电极消耗最小。
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引用次数: 3
Hybrid machining of P20 die steel masters for the development of polymer-based microfluidic devices to study the effect of surface roughness on bacterial activity 以混合加工P20模型钢为主,开发基于聚合物的微流控装置,研究表面粗糙度对细菌活性的影响
Pub Date : 2023-01-24 DOI: 10.1177/25165984221148564
P. Pandit, G. Samuel
Compared to the traditional machining and finishing process, a hybrid technique consisting of mechanical micro-milling and electropolishing is advantageous in maintaining dimensional accuracy and fine surface quality without compromising the form. This is a cost-effective, less tedious technique that can fabricate high-quality masters for microfluidic devices. P20-die steel masters are fabricated to evaluate the method with this technique. The dimensional accuracy and surface quality of the masters are studied. It is found that the peak-to-valley surface roughness (Rt) of the masters is reduced by 50%. These die steel masters are then used to make polydimethylsiloxane (PDMS)-based microfluidic devices that could be used for particle separation. As biofouling and bacterial growth are undesirable in most of the microfluidic devices, the fabricated PDMS devices are tested for bacterial growth and adhesion. The growth of DH5α Escherichia coli bacteria in the devices fabricated using the electropolished masters is evaluated. Bacterial growth and adhesion are monitored for 0, 4 and 12 h, and it is found that the growth and adhesion in these devices are reduced by 15–20% and 40–50%, respectively, compared to the devices produced using non-electropolished masters. Enumeration of the bacterial cells in the samples flown is carried out by evaluating the optical density of the sample fluids by UV-visible spectroscopy and quantifying the bacterial cells using the McFarland 0.5 standard.
与传统的加工和精加工工艺相比,由机械微铣削和电抛光组成的混合技术在保持尺寸精度和良好的表面质量方面具有优势,而不影响形状。这是一种成本效益高,不那么繁琐的技术,可以制造高质量的微流体设备。以p20模具钢为例,对该方法进行了评价。对工件的尺寸精度和表面质量进行了研究。研究发现,母材的峰谷表面粗糙度(Rt)降低了50%。这些模型钢主然后被用来制造聚二甲基硅氧烷(PDMS)为基础的微流体装置,可用于颗粒分离。由于在大多数微流控器件中不希望出现生物污垢和细菌生长,因此对制备的PDMS器件进行了细菌生长和粘附测试。对电抛光母材制备的器件中DH5α大肠杆菌的生长进行了评价。对细菌生长和粘附进行0、4和12小时的监测,发现与使用非电抛光母材生产的设备相比,这些设备中的细菌生长和粘附分别减少了15-20%和40-50%。通过紫外可见光谱法测定样品液的光密度,并使用麦克法兰0.5标准对细菌细胞进行定量,对所飞样品中的细菌细胞进行计数。
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引用次数: 0
Maximum spreading behavior of a water droplet on the aluminium surfaces with different wettabilities 水滴在不同润湿性铝表面的最大扩散行为
Pub Date : 2023-01-11 DOI: 10.1177/25165984221143866
Poonam Chauhan, Aditya Kumar
This work demonstrates the maximum spreading behavior of water droplets on prepared surfaces: superhydrophilic (etched), hydrophilic (inherent nature), hydrophobic (treated with hexadecyltrimethoxysilane (HDTMS), and superhydrophobic (etched and HDTMS treated). Here, a simple chemical etching and immersion approach were used to modify the surfaces. Altering one surface property to the next shows a significant variation in the wetting behavior. The change in the wettability of the aluminium surface depends on its surface roughness and surface chemistry. The wettability of the fabricated surfaces was determined via water contact angle (WCA) measurement using a goniometer. A field emission scanning electron microscope (FESEM) and a 3-D optical non-contact profilometer were used to analyze the surface morphology and surface roughness of all manufactured surfaces, respectively. Additional features such as the droplet dynamics property of all surfaces were studied in detail. Finally, the experimental results for the maximum spreading factor were compared to the existing model.
这项工作证明了水滴在制备表面上的最大扩散行为:超亲水性(蚀刻)、亲水性(固有性质)、疏水性(用十六烷基三甲氧基硅烷(HDTMS)处理)和超疏水性(蚀刻和HDTMS处理)。在这里,使用简单的化学蚀刻和浸泡方法来修饰表面。改变一种表面性质到另一种表面性质会显示出润湿行为的显著变化。铝表面润湿性的变化取决于其表面粗糙度和表面化学性质。制备表面的润湿性通过测角仪测量水接触角(WCA)来确定。利用场发射扫描电子显微镜(FESEM)和三维光学非接触式轮廓仪分别分析了所有加工表面的表面形貌和表面粗糙度。详细研究了所有表面的液滴动力学特性等附加特性。最后,将最大扩展因子的实验结果与现有模型进行了比较。
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引用次数: 0
An experimental investigation and multi-objective optimization of abrasive jet machining on Ti-6Al-4V ELI bio-material 磨料射流加工Ti-6Al-4V ELI生物材料的实验研究及多目标优化
Pub Date : 2022-12-19 DOI: 10.1177/25165984221139615
Anu Tomy, S. Hiremath
Titanium is extensively utilized in aerospace and medical scenarios owing to its outstanding mechanical properties and corrosion resistance. Conventional machining of titanium alloys is challenging because of its innate characteristics like hardness, lofty reactivity, modest thermal conductivity and elastic modulus. Therefore, an attempt has been made to study the ease with which titanium alloy (Ti-6Al-4V) can be machined using abrasive jet machining (AJM). Machining of holes in Ti-6Al-4V was executed by incorporating a group of input parameters—air pressure, abrasive grit size and standoff distance. The output responses such as material removal rate (MRR), circularity, radial overcut (ROC) and taper angle (TA) are chosen for the evaluation of the experiment. The machining parameters are optimized for higher MRR (case 1) and for lower ROC and TA (case 2) using multi-objective grey relational analysis to choose a moderate course among the output parameters.
钛因其优异的机械性能和耐腐蚀性被广泛应用于航空航天和医疗领域。钛合金具有硬度高、反应性强、导热系数和弹性模量适中等固有特性,因此传统的钛合金加工具有挑战性。因此,对磨料射流加工Ti-6Al-4V钛合金(Ti-6Al-4V)的容易程度进行了研究。在Ti-6Al-4V材料中,采用气压、磨料粒度和间隙等输入参数对孔进行加工。选取材料去除率(MRR)、圆度、径向过切(ROC)和锥度角(TA)等输出响应对实验进行评价。利用多目标灰色关联分析在输出参数中选择一个适中的过程,针对较高的MRR(案例1)和较低的ROC和TA(案例2)对加工参数进行优化。
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引用次数: 1
Thermoplastic micro-forming process of bulk metallic glass surgical blades using drawing velocity regulation 大块金属玻璃手术刀片的热塑性微成形工艺
Pub Date : 2022-12-09 DOI: 10.1177/25165984221136706
N. Dancholvichit, S. Salapaka, S. Kapoor
Drawing velocity is essential in the manufacturing of the multi-facet bulk metallic glass (BMG) knife edges used in corneal surgery since it is one of the factors that can determine good blade profiles in the thermoplastic forming process. The goal of this article is to determine and regulate drawing velocity based on the viscoelastic filament stretching and knowledge of the thermoplastic forming map of BMG. The generation of drawing velocity profile is done in two stages: the initial transient stage before the extensional viscosity stage is fully developed, and the extensional viscosity stage. The controller based on the system identification of the testbed is then optimized from the requirements of the drawing velocity and its implementation feasibility. The control objectives of regulation performance and robustness to modeling uncertainties are posed and solved in an optimal control (H∞) framework. The proposed controller shows an improvement over other controllers including proportional-integral-derivative controllers in terms of robustness to uncertainties and tracking performance. BMG samples processed from this study result in good quality with improvement of 20% and 54% in X–Y ( 2.2 ± 0.1 µm) and X–Z ( 1.3 ± 0.1 µm) straightness and 25% more consistent edge radii ( 46 ± 3 nm).
在角膜手术中使用的多面大块金属玻璃(BMG)刀口的制造中,拉伸速度是至关重要的,因为它是决定热塑性成形过程中良好刀片轮廓的因素之一。本文的目的是根据粘弹性长丝拉伸和BMG热塑性成形图的知识来确定和调节拉伸速度。拉伸速度剖面的生成分为两个阶段:张性黏性阶段完全发育前的初始瞬变阶段和张性黏性阶段。在对试验台进行系统辨识的基础上,从拉伸速度要求和实现可行性两方面对控制器进行了优化。在最优控制(H∞)框架下提出并求解了调节性能和对建模不确定性鲁棒性的控制目标。所提出的控制器在对不确定性的鲁棒性和跟踪性能方面优于其他控制器,包括比例-积分-导数控制器。本研究处理的BMG样品质量良好,X-Y(2.2±0.1µm)和X-Z(1.3±0.1µm)直线度分别提高20%和54%,边缘半径(46±3 nm)一致性提高25%。
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引用次数: 0
Mechanical peck drilling of Inconel 625: Parametric analysis and grey fuzzy logic based multi-response optimization Inconel 625机械钻削:参数分析和基于灰色模糊逻辑的多响应优化
Pub Date : 2022-11-28 DOI: 10.1177/25165984221135713
P. P, S. Hiremath
Nickel-based superalloy Inconel 625 is considered a hard-to-cut material due to characteristics such as high hardness, strain hardening behavior, and affinity with tool materials. It is challenging to machine through micro-holes of less than Ø 500 µm with the desired quality on Inconel 625 using the mechanical micro-drilling (MMD) process under dry conditions. The machining parameters must be selected optimally to enhance hole quality and to avoid frequent drill breakages. In this study, through micro-holes are machined on Inconel 625 by the MMD process using solid carbide micro-drills under dry conditions using a peck drilling strategy. Experiments are carried out by varying machining parameters such as spindle speed (8000 rpm, 11000 rpm, and 14000 rpm), feed (5 µm/rev, 7.5 µm/rev, and 10 µm/rev), and drill diameter (Ø 300 µm, Ø 400 µm, and Ø 500 µm) at three levels based on full factorial design. Thrust force and hole quality features such as exit burr height, radial overcut, and taper angle are measured as output responses. The mean effect plots are used to study the influence of machining parameters on output responses. The drill diameter had a significant effect on thrust force and radial overcut. Whereas feed and spindle speed had a major influence on exit burr height and taper angle, respectively. Finally, multi-response optimization is carried out using the grey fuzzy logic method, and an optimal machining parameter setting for multiple responses is ascertained.
镍基高温合金Inconel 625被认为是一种难以切削的材料,因为它具有高硬度、应变硬化行为和与刀具材料的亲和力等特点。在干燥条件下,使用机械微钻(MMD)工艺在Inconel 625上加工小于Ø 500µm的微孔并达到所需的质量是具有挑战性的。为了提高孔质量,避免钻头频繁破损,必须优化加工参数。在本研究中,使用固体硬质合金微钻在干燥条件下采用微钻策略,通过MMD工艺在Inconel 625上加工微孔。在全因子设计的基础上,通过改变加工参数,如主轴转速(8000rpm, 11000rpm和14000rpm),进给(5µm/rev, 7.5µm/rev和10µm/rev)和钻头直径(Ø 300µm, Ø 400µm和Ø 500µm)在三个水平上进行实验。推力和孔质量特征,如出口毛刺高度、径向过切和锥度角被测量为输出响应。利用平均效应图研究了加工参数对输出响应的影响。钻径对推力和径向过切均有显著影响。进给量和主轴转速分别对出口毛刺高度和锥度角有主要影响。最后,利用灰色模糊逻辑方法进行多响应优化,确定了多响应的最优加工参数设置。
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引用次数: 0
An experimental study on laser ablation of Ultra-thin SiN x layer of PERC solar cell PERC太阳能电池超薄sinx层激光烧蚀的实验研究
Pub Date : 2022-11-24 DOI: 10.1177/25165984221129958
Pinal Rana, D. P. Khatri, A. Kottantharayil, D. Marla
In this work, a nanosecond green laser (532 nm) is used to generate narrow openings by removing an ultra-thin (85 nm) SiN x layer that is coated on a silicon substrate for application in the fabrication of Passivated Emitter and Rear Contact (PERC) solar cells. An experimental analysis is presented to identify the optimal range of laser parameters for an efficient ablation with minimal damage to the silicon substrate. The ablated samples were characterized using a 3D profilometer to obtain the surface profiles and scanning electron microscope imaging to observe the surface quality. Further, energy-dispersive X-ray line analysis and atom probe tomography were performed to evaluate the nitrogen content on the surface and along the depth, respectively. The experimental results suggest that the SiN x layer starts to ablate only above a threshold laser fluence of 1.4 J/cm2, while the surface bulged out for laser fluence slightly below the ablation threshold. The central part of the ablated region was clean with a negligible nitrogen concentration at the surface, about ∼0.03% at a fluence of 2.4 J/cm2. Nitrogen concentration reduces continuously and almost becomes zero at 80 nm depth, suggesting complete ablation of the SiN x layer for establishing electrical contacts. The ablation width was close to the laser spot diameter only at lower values of the laser fluence. The lowest value of ablation depth was about 180 nm, suggesting that only about 95 nm layer of the silicon is ablated. The study demonstrates that nanosecond laser ablation is a potential technique for ablation of the SiN x layer of PERC solar cells but requires choosing the optimal parameters.
在这项工作中,使用纳秒绿色激光(532 nm)去除涂在硅衬底上的超薄(85 nm) SiN x层来产生狭窄的开口,该层用于制造钝化发射极和后接触(PERC)太阳能电池。通过实验分析,确定了在对硅衬底损伤最小的情况下进行有效烧蚀的最佳激光参数范围。利用三维轮廓仪对烧蚀后的样品进行了表征,获得了表面轮廓,并用扫描电镜成像观察了表面质量。此外,利用能量色散x射线线分析和原子探针层析成像分别评估了表面和深度上的氮含量。实验结果表明,当激光辐照强度为1.4 J/cm2时,sinx层才开始烧蚀,而当激光辐照强度略低于烧蚀阈值时,表面会凸出。烧蚀区域的中心部分是干净的,表面的氮浓度可以忽略不计,在2.4 J/cm2的影响下,约为0.03%。氮浓度持续下降,在80nm深度时几乎为零,表明为了建立电接触,sinx层已经完全烧蚀。只有在较低的激光通量下,烧蚀宽度才接近光斑直径。烧蚀深度最小值约为180 nm,表明仅烧蚀了约95 nm的硅层。研究表明,纳秒激光烧蚀是一种有潜力的烧蚀PERC太阳能电池sinx层的技术,但需要选择最佳参数。
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引用次数: 1
Multi-criteria optimization of micro-hole on glass using developed µ-abrasive jet machine set-up 利用开发的微磨料射流装置对玻璃微孔进行多准则优化
Pub Date : 2022-11-19 DOI: 10.1177/25165984221135047
V. V. Vanmore, U. Dabade
In non-traditional machining, micro-abrasive jet machining (MAJM) is a cost-effective machining process. MAJM has been used for fabricating electronic devices and microfluidic channels. This work has made an effort to utilize MAJM for glass. A new design and fabrication of the Laval type of nozzle have been proposed to improve machining accuracy. A nozzle is conceived to ensure specific characteristics of the mixture (compressed air and abrasive particles) pass through it. The abrasive particle force is converted to kinetic energy, increasing the mixture’s velocity. The cross-sectional area of the nozzle can be circular, rectangular, square, or oval. A circular cross-sectional nozzle has been developed for high velocity, precise etching, and patterning on difficult-to-machine materials such as steel alloys. A circular cross-sectional micro-nozzle with a large aspect ratio is proposed, and the flow characteristics and cutting performance are examined precisely by the experiment. Efforts are being made to make machining processes sustainable, productive, and efficient. Here, the Taguchi-grey relational analysis integration approach has been used to analyze the machining parameters such as air pressure, stand-off distance, and abrasive mesh size (AMS). The top hole diameter, bottom hole diameter, material removal rate, and radial overcut are the response variables in this investigation. Analysis of variance (ANOVA) results showed that the AMS was the most efficient parameter, which followed the processing condition on the total input of the multi-purpose function. The reported optimized process parameters are air pressure of 8 bar, stand-off distance of 2 mm, and AMS mix (50%+100%) micron, which significantly affects the top and bottom micro-hole diameters.
在非传统加工中,微磨料射流加工(MAJM)是一种经济高效的加工工艺。MAJM已被用于制造电子器件和微流体通道。这项工作为利用MAJM制造玻璃做出了努力。为了提高加工精度,提出了一种新的拉瓦尔型喷嘴的设计和制造方法。喷嘴的设计是为了确保混合物的特定特性(压缩空气和磨料颗粒)通过它。磨料颗粒的力转化为动能,增加了混合物的速度。喷嘴的横截面积可以是圆形、矩形、方形或椭圆形。一种用于高速、精确刻蚀和在难以加工的材料(如钢合金)上刻蚀的圆形截面喷嘴已经被开发出来。提出了一种大展弦比圆形截面微喷嘴,并通过实验对其流动特性和切削性能进行了精确检验。人们正在努力使机械加工过程可持续、高产和高效。在这里,田口灰关联分析集成方法已被用于分析加工参数,如空气压力,隔离距离,磨料孔径(AMS)。顶孔直径、底孔直径、材料去除率和径向过切量是本研究的响应变量。方差分析(ANOVA)结果表明,AMS是最有效的参数,它遵循了多用途函数总输入的处理条件。优化后的工艺参数为:气压为8 bar,隔离距离为2 mm, AMS掺量(50%+100%)微米,对顶、底微孔直径影响显著。
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引用次数: 0
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Journal of Micromanufacturing
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