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Fabrication of micro-hole using novel Maglev EDM 新型磁浮电火花加工技术制备微孔
Pub Date : 2022-11-14 DOI: 10.1177/25165984221129449
Rajesh Sahoo, Deepak Kumar, N. K. Singh, Vivek Bajpai
In the current scenario, micro-manufacturing through the electro-discharge machining (EDM) process is a prominent technique for achieving desired complex micro/nano-features of any product. The precision and accuracy of producing features are the prerequisites of micro-machining. The current work aims to check the feasibility of the novel Maglev EDM for fabricating micro-holes on a thin nickel sheet (thickness = 500 μm). The study presents the viability of the newly developed system by comparing it with the conventional EDM process. A pure direct current power supply is assembled with a magnetic levitation-based gap monitoring mechanism to overcome the setbacks of conventional EDM. The novel setup utilizes the combined effect of the permanent electromagnet to diminish arcing and short-circuiting. The control parameters for the operation were 12 V open-circuit voltage and 2 A peak current while maintaining a duty factor of 95.564 percent. The measured discharge voltage and discharge current were 6.64 V and 900 mA, respectively. Tungsten rod (ø 650 μm) and deionized water were used as a tool and a dielectric medium, respectively, for the experiment. Further, the machined micro-hole and micro-tool analysis have been carried out using high-resolution microscopy, scanning electron microscopy and energy dispersive spectroscopy reports. The newly developed Maglev EDM’s feasibility to produce micro-holes on conductive materials has been confirmed in the present work with an average material removal rate of 40 μg/min.
在目前的情况下,通过电火花加工(EDM)工艺进行微制造是实现任何产品所需的复杂微/纳米特征的重要技术。加工特征的精度和准确性是微细加工的前提。目前的工作旨在验证新型磁悬浮电火花加工在薄镍片(厚度= 500 μm)上制造微孔的可行性。通过与传统电火花加工工艺的比较,研究了新开发系统的可行性。为了克服传统电火花加工的缺点,将纯直流电源与基于磁悬浮的间隙监测机构组合在一起。这种新型装置利用永磁体的联合效应来减少电弧和短路。操作的控制参数为12v开路电压和2a峰值电流,同时保持占空因数为95.564%。测量的放电电压为6.64 V,放电电流为900 mA。实验以钨棒(ø 650 μm)为工具,以去离子水为介质。此外,利用高分辨率显微镜、扫描电镜和能量色散光谱报告对加工后的微孔和微刀具进行了分析。新开发的磁悬浮电火花加工在导电材料上产生微孔的可行性在本工作中得到了证实,平均材料去除率为40 μg/min。
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引用次数: 3
Modelling and validation of surface roughness in micro-turned nickel-based alloys (Nimonic 90) 微车削镍基合金(Nimonic 90)表面粗糙度的建模与验证
Pub Date : 2022-11-14 DOI: 10.1177/25165984221128519
Vineet Kumar, G. Samuel
Nickel-based alloys (Nimonic 90) are one of the most used materials for aircraft parts, gas turbine components and fasteners due to their inherent properties such as high strength at elevated temperature, good corrosion resistance, high stability, high wear resistance and low thermal conductivity. Because of the above-mentioned properties, Nimonic 90 alloy is difficult to machine, and the roughness obtained by machining of nimonic alloy is comparatively rough. The existing theoretically developed mathematical equations for roughness measurement do not consist of all the machining parameters. It lacks some of the effective roughness parameters such as depth of cut, spindle speed and cutting-edge angle. This article proposes a novel mathematical/geometrical model for the prediction of surface roughness using fundamental geometrical properties of tool and workpiece. For developing the mathematical model, the nose radius of the cutting tool insert is assumed as a straight line (arc length). The principal cutting-edge angle is introduced in the geometrically developed novel model. The developed mathematical/geometrical model comprises mainly depth of cut, principal cutting-edge angle, nose radius, spindle speed and feed. In micro turning, surface roughness increases with an increase in feed and depth of cut. A rough surface, compared to conventional turning, is produced while micro turning due to edge ploughing and rubbing when the chip thickness is lesser than the edge radius. This model is validated by conducting micro-turning experiments on nickel-based superalloy (Nimonic 90) using aluminium titanium nitride physical vapour deposition coated tungsten carbide micro inserts. The surface roughness is significantly affected when the cutting-edge comes in contact with the workpiece; it is because of the imperfect geometry of the nose of the cutting tool. A slight variation of surface roughness with the depth of cut has also been observed. A good correlation is observed between the predicted and experimentally measured roughness values.
镍基合金(Nimonic 90)具有高温强度高、耐腐蚀性能好、稳定性好、耐磨性好、导热系数低等固有特性,是飞机零部件、燃气轮机部件和紧固件中应用最多的材料之一。由于上述性能,Nimonic 90合金难以加工,加工得到的粗糙度比较粗糙。现有的理论推导的粗糙度测量数学方程不包括所有的加工参数。它缺乏一些有效的粗糙度参数,如切削深度、主轴转速和尖端角。本文提出了一种利用刀具和工件的基本几何特性来预测表面粗糙度的数学/几何模型。为了建立数学模型,假设刀具刀片的刀尖半径为一条直线(弧长)。在几何发展的新模型中引入了主尖端角。所建立的数学/几何模型主要包括切削深度、主尖端角、机头半径、主轴转速和进给。在微车削中,表面粗糙度随着进给量和切削深度的增加而增加。与传统车削相比,微车削在切屑厚度小于边缘半径的情况下,由于刃口犁耕和摩擦,产生了粗糙的表面。利用氮化铝钛物理气相沉积涂层碳化钨微刀片对镍基高温合金(Nimonic 90)进行了微车削实验,验证了该模型的有效性。当尖端与工件接触时,表面粗糙度受到显著影响;这是因为刀具刀头的几何形状不完美。还观察到表面粗糙度随切割深度的轻微变化。在预测值和实验测量值之间观察到良好的相关性。
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引用次数: 0
The effect of laser cutting on the Young’s modulus of Polydimethylsiloxane 激光切割对聚二甲基硅氧烷杨氏模量的影响
Pub Date : 2022-11-14 DOI: 10.1177/25165984221131400
R. Helgason, Jino Fathy, Yongjun Lai
Laser cutting is often used in the fabrication of Polydimethylsiloxane (PDMS) substrates for novel microdevices such as wearable sensors and microfluidic devices. PDMS is a thermosetting polymer whose material properties are affected by the thermal conditions during the curing process. Since laser cutting exposes the cutting material to high temperatures, this might affect the heat-sensitive material properties. In this work, we examine how laser cutting affects the stiffness of PDMS by measuring the Young’s modulus of PDMS and comparing that to the Young’s modulus of laser-cut PDMS. We find an increase in the Young’s modulus from 0.34 to 0.37 MPa (9%) for PDMS mixed at a ratio of 20:1 base to curing agent. For 10:1 ratio PDMS, we find the increase in Young’s modulus is 31%, from 1.02 to 1.34 MPa.
激光切割常用于制造新型微器件,如可穿戴传感器和微流体器件的聚二甲基硅氧烷(PDMS)衬底。PDMS是一种热固性聚合物,其材料性能受固化过程中热条件的影响。由于激光切割使切割材料暴露在高温下,这可能会影响热敏材料的性能。在这项工作中,我们通过测量PDMS的杨氏模量并将其与激光切割PDMS的杨氏模量进行比较,研究了激光切割如何影响PDMS的刚度。我们发现,当PDMS与固化剂的比例为20:1时,杨氏模量从0.34增加到0.37 MPa(9%)。对于10:1比例的PDMS,我们发现杨氏模量增加了31%,从1.02到1.34 MPa。
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引用次数: 0
Machinability and parametric optimization of aluminum silicon carbide metal matrix composite (Al-SiC MMC) machined through µ-EDM 微电火花加工铝碳化硅金属基复合材料(Al-SiC MMC)的可加工性及参数优化
Pub Date : 2022-11-14 DOI: 10.1177/25165984221123196
Aruna Kotlapati, S. Hiremath
Aluminum silicon carbide metal matrix composite (Al-SiC MMC) is widely used because of its exceptional mechanical and thermal properties. Some engineering applications include aerospace, automobile, electronics, and medical devices. In the present investigation, aluminum 7075 alloy (Al-7075) as a matrix material with reinforcement particles of 10% silicon carbide (SiC) is fabricated using stir casting. The developed Al-SiC MMC is machined using an in-house developed micro-electro discharge machine (µ-EDM) setup. Experiments are carried out with input parameters—voltage (V), capacitance (µF), and pulse-on time (µs)—to analyze the responses such as hole depth (HD), material removal rate (MRR), tool wear rate (TWR), surface roughness (SR), and circularity error (CE). Taguchi L16 orthogonal array is adopted to conduct 16 experiments with varying process parameters for 5 minutes’ duration with a copper tool electrode of Ø720 µm on the Al-SiC MMC workpiece of size 20 mm × 20 mm × 2.5 mm. The dielectric medium used for all experimentation is EDM oil. The resultant blind holes are characterized using scanning electron microscopy (SEM) images and a 3D profilometer. Later, the signal-to-noise ( S/N) ratio technique is used to optimize the process parameters to enhance individual output responses. The obtained results are discussed in the article. Further, analysis of variance (ANOVA) is performed to find out the contribution of each parameter to the output responses. Grey relational analysis (GRA) is also used for multiobjective optimization to get quality blind holes. The best parametric combination obtained through GRA are at 28 V, 100 µF, and 100 µs, resulting in 823 µm of HD, 0.38 mg/min of MRR, 0.10 mg/min of TWR, 8.98 µm of SR, and 48.37 µm of CE.
铝碳化硅金属基复合材料(Al-SiC MMC)因其优异的力学和热性能而得到广泛应用。一些工程应用包括航空航天、汽车、电子和医疗设备。以Al-7075为基体材料,以10%碳化硅(SiC)为增强颗粒,采用搅拌铸造法制备了Al-7075合金。开发的Al-SiC MMC使用内部开发的微电子放电机(µ-EDM)装置进行加工。实验采用输入参数——电压(V)、电容(µF)和脉冲导通时间(µs)——来分析孔深(HD)、材料去除率(MRR)、刀具磨损率(TWR)、表面粗糙度(SR)和圆度误差(CE)等响应。采用田口L16正交阵列,在尺寸为20 mm × 20 mm × 2.5 mm的Al-SiC MMC工件上,以Ø720µm铜工具电极进行了16次不同工艺参数的实验,实验时间为5 min。所有实验使用的介质为电火花加工油。利用扫描电子显微镜(SEM)图像和三维轮廓仪对所产生的盲孔进行了表征。随后,采用信噪比(S/N)技术对工艺参数进行优化,以增强单个输出响应。本文对所得结果进行了讨论。进一步,进行方差分析(ANOVA)以找出每个参数对输出响应的贡献。采用灰色关联分析(GRA)进行多目标优化,得到高质量的盲孔。通过GRA获得的最佳参数组合为28 V、100µF、100µs, HD为823µm, MRR为0.38 mg/min, TWR为0.10 mg/min, SR为8.98µm, CE为48.37µm。
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引用次数: 2
V. K. Jain (Ed.) (2014). Introduction to Micromachining (second edition). New Delhi, India: Narosa Publishing House. 624 pp. $43.12 (Paperback), ISBN: 978-81-8487-361-0. V. K. Jain(编辑)(2014)。介绍微加工(第二版)。新德里,印度:Narosa出版社,624页,$43.12(平装),ISBN: 978-81-8487-361-0。
Pub Date : 2022-11-01 DOI: 10.1177/25165984221086421
Mohan K. Pradhan, Ashok Kumar
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引用次数: 0
An integrated image processing approach for 3D scanning and micro-defect detection 一种三维扫描与微缺陷检测的集成图像处理方法
Pub Date : 2022-10-17 DOI: 10.1177/25165984221123205
Sandesh Birla, S. Alya, R. Singh
Restoration of high-value components via additive manufacturing requires autonomous surface scanning and defect identification. The 3D free-form surface can be reconstructed with a point cloud obtained from the scanning. Laser line triangulation-based surface scanning is a promising method for generating a 3D point cloud of the component surface. In this article, a robotic defect scanning system developed using py_openshowvar, an open-source cross-platform communication interface is presented. For effective scanning of micro-scale features with minimal noise, it is crucial to optimize the scanning parameters. The scanner parameters such as exposure time and stand-off distance have been optimized for accurate feature detection. After selecting optimal scanning parameters, a generic algorithm is presented for generating a scanning path for automatic scanning of the 3D parts. Surfaces with pre-fabricated micro-defects are automatically scanned using this algorithm, and an integrated image-processing-based defect identification technique is presented. The geometries obtained from the presented technique were validated using focus variation microscopy, and the results are in good agreement with actual defect geometry, and the measurement error is below 9%.
通过增材制造修复高价值部件需要自主表面扫描和缺陷识别。利用扫描得到的点云可以重建三维自由曲面。基于激光线三角的表面扫描是一种很有前途的生成部件表面三维点云的方法。本文介绍了一个使用开源跨平台通信接口py_openshowvar开发的机器人缺陷扫描系统。为了在最小噪声条件下对微尺度特征进行有效扫描,优化扫描参数至关重要。扫描仪参数,如曝光时间和距离已优化准确的特征检测。在选择最优扫描参数后,提出了一种生成三维零件自动扫描路径的通用算法。利用该算法对预制微缺陷表面进行自动扫描,提出了一种基于图像处理的综合缺陷识别技术。利用聚焦变分显微镜对所得到的几何形状进行了验证,结果与实际缺陷几何形状吻合较好,测量误差在9%以下。
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引用次数: 0
Study of PID controller gain for active vibration control using FEM based particle swarm optimization in COMSOL multiphysics 基于有限元粒子群优化的COMSOL多物理场振动主动控制PID控制器增益研究
Pub Date : 2022-04-21 DOI: 10.1177/25165984221086439
Sumit, R. Shukla, A. Sinha
Proportional integral derivative (PID) controllers are widely used to solve different control engineering problems. To know the dynamic behaviour of a working plant by mathematical modelling is quite challenging. Finite element method (FEM) is a well-known technique and broadly used for the modelling of engineering systems. This article presents the FEM-based heuristic approach to design and optimize the PID controllers. The ‘allowed area method’ has been used for the formulation of the objective function followed by the tuning of the PID controller. First, the proposed approach is tested on 2-degree of freedom (DOF) mass-spring-damper (MSD) system. FEM modelling of 2-DOF MSD system with PID controller has been carried out in COMSOL Multiphysics and coupling of particle swarm optimization (PSO) has been carried out with the FEM model of the MSD system, for the optimization of PID controller gain. The FEM results are in good agreement with the analytical one. Next, the established method is applied to design and optimize the PID controller gain to control the vibration of a cantilever beam using piezoelectric actuator. Similar to the MSD system, FEM modelling of PID controller for the smart beam has been carried out in COMSOL Multiphysics, and the coupling of PSO is carried out with the FEM model of the smart beam for the optimization of PID controller gain. Simulation of the uncontrolled and controlled responses of the smart beam is carried out at the optimum controller gain for free vibration and step excitation. The piezoelectric actuator of smart beam has successfully damped the vibration within approximately 2.5 s.
比例积分导数(PID)控制器被广泛用于解决各种控制工程问题。通过数学建模来了解工作装置的动态行为是很有挑战性的。有限元法(FEM)是一种众所周知的技术,广泛用于工程系统的建模。本文提出了一种基于有限元法的启发式PID控制器设计与优化方法。“允许面积法”用于目标函数的制定,然后对PID控制器进行整定。首先,在2自由度(DOF)质量-弹簧-阻尼器(MSD)系统上对该方法进行了测试。在COMSOL Multiphysics中对带PID控制器的2自由度MSD系统进行了有限元建模,并将粒子群优化(PSO)与MSD系统的有限元模型耦合,对PID控制器增益进行了优化。有限元计算结果与分析结果吻合较好。然后,将所建立的方法应用于PID控制器增益的设计和优化,以控制压电作动器悬臂梁的振动。与MSD系统类似,在COMSOL Multiphysics中对智能梁的PID控制器进行了有限元建模,并将PSO与智能梁的有限元模型进行了耦合,以优化PID控制器的增益。在自由振动和阶跃激励的最佳控制器增益下,对智能梁的非受控和受控响应进行了仿真。智能梁的压电驱动器成功地在约2.5 s内抑制了振动。
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引用次数: 3
A comprehensive investigation on machining of composites by EDM for microfeatures and surface integrity 电火花加工复合材料的微观特征和表面完整性的综合研究
Pub Date : 2021-12-07 DOI: 10.1177/25165984211063308
Suresh Gudipudi, Selvaraj Nagamuthu, Kanmani Subbu Subbian, Surya Prakasa Rao Chilakalapalli
In electro-discharge machining (EDM), the material removal takes place by precisely controlled sparks that occur between tool and workpiece separated with a spark gap in the presence of a dielectric. Generally, the non-contacting type and less material removal rates are attributed to attain a good surface finish and close dimensional tolerances during an EDM of monolithic metals and alloys. But the dimensional accuracy and surface integrity parameters would considerably affect during EDM of composites due to the existence of more than one material phase constituents. Therefore, the present work aims to study and optimize the performance characteristics under various EDM conditions employed in making rectangular channels on AA6061-B4C composite material. Initially, AA6061-4wt.%B4C composites were fabricated by ultrasonically assisted stir-casting, and the improved properties were obtained from various mechanical characterizations. The EDM experiments were conducted according to the full factorial experimental design. The three levels of input conditions such as discharge Current (I), discharge duration (T On), and discharge idle time (T Off) were considered. The considered output responses are material removal rate (MRR),taper (θ) of the machined channel, tool wear rate (TWR), average surface roughness (R) of the machined surface, and average recast layer thickness (ARLT) of the machined zone. These responses are co-related with multi-objective types in the sense that the MRR has to be maximized with all other responses minimized. Hence, principal component analysis (PCA) coupled with grey relation analysis (GRA) was used for optimization in which the results were normalized, and all the responses were converted into a single response named weighted grey relation grade (WGRG) for each trial. The experimental trial, which had the highest WGRG, was considered as a local optimum. The global optimum parameters were obtained by performing the Taguchi method (TM) (higher-the-better) for the maximization of WGRG. The analysis of variance (ANOVA) was performed to know the contribution of each EDM parameter toward the WGRG. The optimum levels of Current, T On, and T Off were identified as 8 A, 25 µs, and 36 µs, respectively. Results showed that all three input parameters significantly affected the WGRG, and a higher contribution of Current (52.11%) followed by the T On (26.72%) was observed. The interaction between the Current and T Off was found to be greater than other interactions. Taper values were observed to be reduced at the combination of 8 A discharge Current and 25 µs T On. None of the input parameters significantly affected the Ra, except for Current, which showed a slight effect. ARLT values showed an increasing trend of T On from 25 µs to 45 µs but decreased slightly at 65 µs for all Current levels. The moderate Current level 6 A was observed to be favorable in reducing ARLT when compared to low (4 A) and high (8 A) for all Ton values.
在电火花加工(EDM)中,材料的去除是通过精确控制的火花来实现的,这些火花发生在工具和工件之间,在存在电介质的情况下被火花间隙隔开。一般来说,非接触式和较少的材料去除率可在整体金属和合金的电火花加工中获得良好的表面光洁度和紧密的尺寸公差。但由于多种材料相成分的存在,会对复合材料电火花加工过程中的尺寸精度和表面完整性参数产生较大影响。因此,本工作旨在研究和优化AA6061-B4C复合材料在不同电火花加工条件下制作矩形通道的性能特征。最初,AA6061-4wt。采用超声辅助搅拌铸造法制备了%B4C复合材料,并通过各种力学表征获得了较好的性能。电火花加工试验按全因子试验设计进行。考虑了放电电流(I)、放电持续时间(T On)和放电空闲时间(T Off)三个层次的输入条件。考虑的输出响应是材料去除率(MRR)、加工通道的锥度(θ)、刀具磨损率(TWR)、加工表面的平均表面粗糙度(R)和加工区域的平均重铸层厚度(ARLT)。这些反应与多目标类型相关,因为MRR必须最大化,而所有其他反应必须最小化。因此,采用主成分分析(PCA)结合灰色关联分析(GRA)进行优化,将结果归一化,并将每个试验的所有响应转换为单个响应,命名为加权灰色关联等级(WGRG)。以WGRG最高的试验为局部最优。采用Taguchi法(越高越好)获得WGRG的全局最优参数。进行方差分析(ANOVA)以了解每个EDM参数对WGRG的贡献。电流、T On和T Off的最佳电平分别为8 A、25µs和36µs。结果表明,3个输入参数均对WGRG有显著影响,其中电流(52.11%)的贡献最大,其次是电流(26.72%)。发现电流和T Off之间的相互作用比其他相互作用更大。在8 A放电电流和25µs T On的组合下,观察到锥度值减小。除电流有轻微影响外,其他输入参数对Ra均无显著影响。从25µs到45µs, ARLT值呈增加趋势,但在65µs时,ARLT值略有下降。与所有Ton值的低(4 A)和高(8 A)电流相比,观察到中等电流水平6 A有利于降低ARLT。
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引用次数: 2
Pulsed-flow microchannel heat sink: Simulation and experimental validation 脉冲流微通道散热器:仿真与实验验证
Pub Date : 2021-11-30 DOI: 10.1177/25165984211058625
S. Singh, H. Mali, S. Suryawanshi, S. Singh
Microchannel heat dissipation devices were first conceptualized in 1981 and since then are at the forefront of cooling techniques for a variety of applications, extending from computer chips and turbine blades to lasers and optical systems. However, much of the research is concentrated on steady flow of a cooling fluid through the channels. In this article, transient two-dimensional (2D) simulation for heat transfer in microchannels under a pulsed-flow condition is carried out. For validation of simulation results, a novel heat sink device is designed and fabricated, using milling and micro-electric discharge machining (EDM) technique. The fabricated device is then tested to evaluate the effect of a variable flow rate on the heat transfer characteristics when the flow is pulsating. It is found that the numerical results underpredict slightly as compared to actual experimental results. Results indicate a higher temperature at the outlet of the heat sink device for lower pulse frequency, and as pulse frequency increases, the outlet temperature decreases.
微通道散热设备于1981年首次提出概念,从那时起,微通道散热设备就处于各种应用冷却技术的最前沿,从计算机芯片和涡轮叶片到激光和光学系统。然而,大部分研究都集中在冷却流体通过通道的稳定流动上。本文对脉冲流动条件下的微通道传热进行了二维瞬态模拟。为了验证仿真结果,采用铣削和微细电火花加工(EDM)技术,设计并制作了一种新型散热装置。然后对该装置进行测试,以评估在流动脉动时变流量对传热特性的影响。结果表明,数值计算结果与实际实验结果有一定的偏差。结果表明:脉冲频率越低,散热装置出口温度越高;脉冲频率越高,出口温度越低;
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引用次数: 1
Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA 侧驱静电微电机的UV-SLIGA设计分析与制造
Pub Date : 2021-10-12 DOI: 10.1177/25165984211045201
R. Shukla, Gowtham Beera, A. Dubey, Varun Sharma, P. R. Sankar, R. Dhawan, P. Tiwari, A. Sinha
In the present work, a micro-electro-mechanical system (MEMS)-based electrostatic micromotor is designed and fabricated. Finite element analysis is done and various parameters affecting the torque are studied. Maximum torque is achieved at 120° phase angle. The effect of change in voltage, micromotor height and frequency is analysed and discussed. UV-SLIGA, a microfabrication technique, is used for the fabrication of electrostatic micromotor of height 30µm and higher. UV lithography is conducted by both positive AZ P4620 and negative (SU-8 10 and SU-8 2150) photoresists. Copper (Cu) is used as a sacrificial layer to release the rotor (the movable part) of the electrostatic micromotor. Electroformed nickel (Ni) is used for making stator, rotor and axle, whereas chromium (Cr) is used as a seed layer. The micromotor is fabricated with a stator-rotor pole having configuration ratio of 3:2. The gap between the rotor and axle is 20 µm. Wet chemical etching is used to etch the deposited metal layers (Cr, Ni and Cu). Challenges such as the adhesion between the photoresist mould and substrate, cracks, seepage and misalignment are faced during the microfabrication. These challenges are overcome by optimizing the various parameters. The fabrication of electrostatic micromotor is done successfully and the results are discussed in the article.
本文设计并制作了一种基于微机电系统(MEMS)的静电微电机。进行了有限元分析,研究了各参数对转矩的影响。最大扭矩达到120°相位角。分析和讨论了电压、微电机高度和频率变化的影响。UV-SLIGA是一种微加工技术,用于制造高度为30µm及以上的静电微电机。UV光刻是由正极AZ P4620和负极(SU-8 10和SU-8 2150)光刻胶进行的。采用铜(Cu)作为牺牲层,释放静电微电机的转子(活动部分)。电铸镍(Ni)用于制造定子、转子和轴,而铬(Cr)用作种子层。所述微电机采用定子-转子极,定子-转子极的配置比为3:2。转子与轴之间的间隙为20µm。湿化学蚀刻是用来蚀刻沉积金属层(Cr, Ni和Cu)。在微加工过程中,光刻胶模具与基材之间的粘连、裂纹、渗漏和错位等问题都面临着挑战。通过优化各种参数来克服这些挑战。本文成功地制作了静电微电机,并对结果进行了讨论。
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引用次数: 3
期刊
Journal of Micromanufacturing
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