首页 > 最新文献

Hyomen Kagaku最新文献

英文 中文
Novel Two-Dimensional Electron Liquid States in Quantum Well Structures of Strongly Correlated Oxides 强相关氧化物量子阱结构中的新型二维电子液态
Pub Date : 2017-01-01 DOI: 10.1380/JSSSJ.38.596
H. Kumigashira
The quantum confinement of strongly correlated electrons in artificial structures has heralded the possibility of creating the novel quantum materials with extraordinary physical properties. By optimally combining sophisticated oxide growth techniques and advanced analysis techniques using synchrotron radiation, we have designed and controlled the novel quantum phenomena emerging in oxide artificial structures. The observed metallic quantum-well states in digitally controlled ultrathin films of strongly correlated oxide SrVO3 exhibit characteristic features reflecting their strongly correlated nature. Furthermore, the structural controllability of the quantum-well structures enables us to investigate how the electronic structure changes as a function of dimensionality. The present study demonstrates that the quantum-well structure of strongly correlated oxides will provide a new strategy for both investigating the behavior of correlated electrons under varying interactions among their spin, charge, and orbital degrees of freedom and for manipulating novel quantum phenomena in reduced dimensions.
人工结构中强相关电子的量子限制预示着创造具有非凡物理特性的新型量子材料的可能性。通过将复杂的氧化物生长技术和先进的同步辐射分析技术相结合,我们设计并控制了氧化物人工结构中出现的新型量子现象。在数字控制的强相关氧化物SrVO3超薄膜中观察到的金属量子阱态表现出反映其强相关性质的特征。此外,量子阱结构的结构可控性使我们能够研究电子结构如何随着维度的变化而变化。本研究表明,强相关氧化物的量子阱结构将为研究相关电子在其自旋、电荷和轨道自由度之间的不同相互作用下的行为以及在降维中操纵新的量子现象提供新的策略。
{"title":"Novel Two-Dimensional Electron Liquid States in Quantum Well Structures of Strongly Correlated Oxides","authors":"H. Kumigashira","doi":"10.1380/JSSSJ.38.596","DOIUrl":"https://doi.org/10.1380/JSSSJ.38.596","url":null,"abstract":"The quantum confinement of strongly correlated electrons in artificial structures has heralded the possibility of creating the novel quantum materials with extraordinary physical properties. By optimally combining sophisticated oxide growth techniques and advanced analysis techniques using synchrotron radiation, we have designed and controlled the novel quantum phenomena emerging in oxide artificial structures. The observed metallic quantum-well states in digitally controlled ultrathin films of strongly correlated oxide SrVO3 exhibit characteristic features reflecting their strongly correlated nature. Furthermore, the structural controllability of the quantum-well structures enables us to investigate how the electronic structure changes as a function of dimensionality. The present study demonstrates that the quantum-well structure of strongly correlated oxides will provide a new strategy for both investigating the behavior of correlated electrons under varying interactions among their spin, charge, and orbital degrees of freedom and for manipulating novel quantum phenomena in reduced dimensions.","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"30 1","pages":"596-601"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74245662","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Surface Structure of Ionic Liquids Using High-Resolution RBS 利用高分辨率RBS研究离子液体的表面结构
Pub Date : 2017-01-01 DOI: 10.1380/JSSSJ.38.170
K. Nakajima, Shunto Nakanishi, M. Lísal, K. Kimura
Elemental depth profiles of typical ionic liquids (ILs), 1-alkyl-3-methylimidazolium bis(trifluoromethane-sulfonyl) imide ([CnC1Im][Tf2N], n=2, 6, 10), were measured using high-resolution Rutherford backscattering spectroscopy (HRBS) and high-resolution elastic recoil detection analysis. The obtained depth profiles deviate from the uniform stoichiometric composition in the surface region, showing preferential orientations of ions at the surface. The results were well reproduced by molecular dynamics (MD) simulations, demonstrating that the state-of-the-art MD simulations are a reliable method to study surface structures of ILs. The surface structures of 11 equimolar mixtures were also studied using HRBS. A general tendency that larger IL is enriched at the surface was found.
采用高分辨率卢瑟福后向散射光谱(HRBS)和高分辨率弹性后坐力检测分析,测定了典型离子液体(ILs) 1-烷基-3-甲基咪唑双(三氟甲烷-磺酰)亚胺([CnC1Im][Tf2N], n= 2,6,10)的元素深度分布。得到的深度剖面偏离了表面区域均匀的化学计量组成,显示了表面离子的优先取向。分子动力学(MD)模拟的结果得到了很好的再现,表明最先进的分子动力学模拟是研究il表面结构的可靠方法。用HRBS研究了11种等摩尔混合物的表面结构。总的趋势是较大的IL在表面富集。
{"title":"Surface Structure of Ionic Liquids Using High-Resolution RBS","authors":"K. Nakajima, Shunto Nakanishi, M. Lísal, K. Kimura","doi":"10.1380/JSSSJ.38.170","DOIUrl":"https://doi.org/10.1380/JSSSJ.38.170","url":null,"abstract":"Elemental depth profiles of typical ionic liquids (ILs), 1-alkyl-3-methylimidazolium bis(trifluoromethane-sulfonyl) imide ([CnC1Im][Tf2N], n=2, 6, 10), were measured using high-resolution Rutherford backscattering spectroscopy (HRBS) and high-resolution elastic recoil detection analysis. The obtained depth profiles deviate from the uniform stoichiometric composition in the surface region, showing preferential orientations of ions at the surface. The results were well reproduced by molecular dynamics (MD) simulations, demonstrating that the state-of-the-art MD simulations are a reliable method to study surface structures of ILs. The surface structures of 11 equimolar mixtures were also studied using HRBS. A general tendency that larger IL is enriched at the surface was found.","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"86 1","pages":"170-175"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85580726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
In-situ Synchrotron XRD Observation System for Metal Friction Surface 金属摩擦表面原位同步加速器XRD观测系统
Pub Date : 2017-01-01 DOI: 10.1380/JSSSJ.38.129
K. Yagi
In friction areas, many complex phenomena occur which involve the formation of the hydrodynamic fluid film, direct contacts between sliding surfaces leading to wear and crack initiation, and adsorption and desorption and chemical reaction of additives contained in oil to the surfaces. In-situ observation has been conducted by using a transparent material as one side of the surfaces for a better understanding of complex phenomena occurring in the friction area. This paper introduces an in-situ synchrotron X-ray diffraction (XRD) observation system for the friction area that authors developed in recently. The developed XRD observation system succeeds in detecting simultaneously the XRD ring, visible image, and near infrared image of the friction area between a rotating sapphire ring and a steel pin at 30 times per second. Information obtained by the developed in-situ observation system appears to contribute to a better understanding of the dynamics of the surface occurring in the friction area.
在摩擦区域,会发生许多复杂的现象,包括流体动力流体膜的形成,滑动表面之间的直接接触导致磨损和裂纹的萌生,以及油中添加剂对表面的吸附和解吸以及化学反应。为了更好地了解摩擦区发生的复杂现象,采用透明材料作为表面的一面进行了现场观测。本文介绍了作者最近研制的摩擦区原位同步加速器x射线衍射(XRD)观测系统。所研制的XRD观测系统能够以每秒30次的速度同时探测旋转蓝宝石环与钢针摩擦区域的XRD环、可见光图像和近红外图像。发达的原位观测系统所获得的信息似乎有助于更好地了解发生在摩擦区域的表面动力学。
{"title":"In-situ Synchrotron XRD Observation System for Metal Friction Surface","authors":"K. Yagi","doi":"10.1380/JSSSJ.38.129","DOIUrl":"https://doi.org/10.1380/JSSSJ.38.129","url":null,"abstract":"In friction areas, many complex phenomena occur which involve the formation of the hydrodynamic fluid film, direct contacts between sliding surfaces leading to wear and crack initiation, and adsorption and desorption and chemical reaction of additives contained in oil to the surfaces. In-situ observation has been conducted by using a transparent material as one side of the surfaces for a better understanding of complex phenomena occurring in the friction area. This paper introduces an in-situ synchrotron X-ray diffraction (XRD) observation system for the friction area that authors developed in recently. The developed XRD observation system succeeds in detecting simultaneously the XRD ring, visible image, and near infrared image of the friction area between a rotating sapphire ring and a steel pin at 30 times per second. Information obtained by the developed in-situ observation system appears to contribute to a better understanding of the dynamics of the surface occurring in the friction area.","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"155 1","pages":"129-134"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77077543","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Structures and Electrochemical Properties at Electrode/Electrolyte Interfaces in Lithium Ion Batteries 锂离子电池电极/电解液界面结构与电化学性能
Pub Date : 2017-01-01 DOI: 10.1380/JSSSJ.38.626
M. Hirayama
{"title":"Structures and Electrochemical Properties at Electrode/Electrolyte Interfaces in Lithium Ion Batteries","authors":"M. Hirayama","doi":"10.1380/JSSSJ.38.626","DOIUrl":"https://doi.org/10.1380/JSSSJ.38.626","url":null,"abstract":"","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"81 1","pages":"626-631"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82307555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
You Should Go Abroad 你应该出国
Pub Date : 2017-01-01 DOI: 10.1380/JSSSJ.38.528
S. Kita
Harvard大は正式には Cambridge市にあります。アメ リカでも有数の美しい町並みをもつ街だと思います。冬 はマイナス 15°Cの日もありますが,夏は 8月を通して ほぼ 25°C前後です。ご飯は色々選べて,むしろ美味し いです(山頭火や次郎系ラーメンもあります)。娯楽は スポーツ観戦や美術館はもちろん,Charles川でのカヤ ックや郊外でのラフティング(Fig. 1)などの水遊びが 楽しめます。家賃はワンルームで$1,300/月が相場で す。したがってルームシェア先を Craigslistや SNSを使 って探すことになります。言うまでもなく誰がルームメ イトになるかで生活が大きく変わるので,これから行か れる方は慎重に選択してください(とはいえ,一緒に住 まないとわからないことがほとんどですが)。私の場合, 最初の 1年間はラボまで自転車で 25分くらいのところ にある一軒屋のサブレットでした。家の借り主はカメラ マンと家賃収入で生計を立てる 70歳のおじいさんで, ほかにドイツ人・アメリカ人・3匹の猫達が住んでいま した。その後の 2年間は,近所のアパートのワンフロア で生活リズムの異なるアジア系のラボ仲間 3人と過ごし ました(私のベッドルームは扉のないリビングルーム)。 後者はユーティリティ費込みで$650/月で,十分節約で きました。
Harvard大学正式位于Cambridge市。我认为这是美国屈指可数的拥有美丽街道的城市。冬天也有零下15°C的日子,但是夏天整个8月基本上都在25°C左右。米饭有各种选择,反而很好吃(山头火和次郎系拉面也有)。娱乐方面,观看体育比赛和美术馆自不必说,还可以在Charles河上划皮艇和在郊外泛舟(Fig. 1)等玩水。房租是单间$1,300/月。因此,需要通过Craigslist或SNS来寻找合租房源。不用说,谁成为loamme会对生活造成很大的影响,所以今后要去的人请慎重选择(话虽如此,如果不住在一起几乎是不知道的)。以我为例,在最初的一年里,我在距离实验室25分钟自行车路程的独栋小酒馆工作。房子的主人是一位摄影师和靠房租维持生计的七旬老爷爷,另外还住着德国人、美国人和三只猫。之后的2年,在附近公寓的一层,和生活节奏不同的亚洲系的3个实验室伙伴一起生活(我的卧室是没有门的起居室)。后者包括公用事业费用在内只需$650/月,已经十分节省了。
{"title":"You Should Go Abroad","authors":"S. Kita","doi":"10.1380/JSSSJ.38.528","DOIUrl":"https://doi.org/10.1380/JSSSJ.38.528","url":null,"abstract":"Harvard大は正式には Cambridge市にあります。アメ リカでも有数の美しい町並みをもつ街だと思います。冬 はマイナス 15°Cの日もありますが,夏は 8月を通して ほぼ 25°C前後です。ご飯は色々選べて,むしろ美味し いです(山頭火や次郎系ラーメンもあります)。娯楽は スポーツ観戦や美術館はもちろん,Charles川でのカヤ ックや郊外でのラフティング(Fig. 1)などの水遊びが 楽しめます。家賃はワンルームで$1,300/月が相場で す。したがってルームシェア先を Craigslistや SNSを使 って探すことになります。言うまでもなく誰がルームメ イトになるかで生活が大きく変わるので,これから行か れる方は慎重に選択してください(とはいえ,一緒に住 まないとわからないことがほとんどですが)。私の場合, 最初の 1年間はラボまで自転車で 25分くらいのところ にある一軒屋のサブレットでした。家の借り主はカメラ マンと家賃収入で生計を立てる 70歳のおじいさんで, ほかにドイツ人・アメリカ人・3匹の猫達が住んでいま した。その後の 2年間は,近所のアパートのワンフロア で生活リズムの異なるアジア系のラボ仲間 3人と過ごし ました(私のベッドルームは扉のないリビングルーム)。 後者はユーティリティ費込みで$650/月で,十分節約で きました。","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"387 1","pages":"528-529"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76530309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Report on the Joint Seminar of the Vacuum Society of Japan (VSJ) and the Surface Science Society of Japan (SSSJ) in Kansai Branch, 2017 日本真空学会(VSJ)与日本表面科学学会(SSSJ)关西分会联合研讨会报告,2017
Pub Date : 2017-01-01 DOI: 10.1380/JSSSJ.38.583
K. Moritani
{"title":"Report on the Joint Seminar of the Vacuum Society of Japan (VSJ) and the Surface Science Society of Japan (SSSJ) in Kansai Branch, 2017","authors":"K. Moritani","doi":"10.1380/JSSSJ.38.583","DOIUrl":"https://doi.org/10.1380/JSSSJ.38.583","url":null,"abstract":"","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"33 1","pages":"583-583"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86318020","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Room Temperature Wafer Bonding by Surface Activated Method 表面活化法室温晶圆键合
Pub Date : 2017-01-01 DOI: 10.1380/JSSSJ.38.72
J. Utsumi, K. Ide, Y. Ichiyanagi
The bonding of metal electrode and insulator hybrid interfaces is one of key techniques in 3D integration technology. As the surface activated bonding (SAB) is carried out at room temperature, the method is expected to be suitable for hybrid bonding. The metal materials such as Cu or Al are easy to directly bond using the SAB method, but insulator materials such as SiO2 or SiN are difficult. In this report, we propose a new bonding technique for SiO2/SiO2 bonding at room temperature using only Si ultra-thin films. We confirmed that the surface energy was about 1 J/m, which is almost the same value of Si/Si bonding prepared at room temperature by SAB. Moreover, we examined the bonding of Cu/Cu by the SAB method, and we confirmed that no micro-voids were observed at the bonding interface.
金属电极与绝缘体混合界面的键合是三维集成技术中的关键技术之一。由于表面活化键合(SAB)是在室温下进行的,因此该方法有望适用于杂化键合。金属材料如Cu或Al很容易使用SAB方法直接键合,但绝缘体材料如SiO2或SiN则比较困难。在本报告中,我们提出了一种在室温下仅使用Si超薄薄膜进行SiO2/SiO2键合的新技术。我们确认表面能约为1 J/m,这与室温下SAB制备的Si/Si键合值基本相同。此外,我们用SAB方法检测了Cu/Cu的键合,我们证实在键合界面上没有观察到微空洞。
{"title":"Room Temperature Wafer Bonding by Surface Activated Method","authors":"J. Utsumi, K. Ide, Y. Ichiyanagi","doi":"10.1380/JSSSJ.38.72","DOIUrl":"https://doi.org/10.1380/JSSSJ.38.72","url":null,"abstract":"The bonding of metal electrode and insulator hybrid interfaces is one of key techniques in 3D integration technology. As the surface activated bonding (SAB) is carried out at room temperature, the method is expected to be suitable for hybrid bonding. The metal materials such as Cu or Al are easy to directly bond using the SAB method, but insulator materials such as SiO2 or SiN are difficult. In this report, we propose a new bonding technique for SiO2/SiO2 bonding at room temperature using only Si ultra-thin films. We confirmed that the surface energy was about 1 J/m, which is almost the same value of Si/Si bonding prepared at room temperature by SAB. Moreover, we examined the bonding of Cu/Cu by the SAB method, and we confirmed that no micro-voids were observed at the bonding interface.","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"87 1","pages":"72-76"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78271519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Structural Control of Inorganic Nanoparticles for the Creation of Their Novel Functions 无机纳米颗粒的结构控制及其新功能的创造
Pub Date : 2017-01-01 DOI: 10.1380/JSSSJ.38.24
M. Yamauchi
Nanometer-sized alloys composed of more than one element, namely nanoalloys, exhibit unique properties, which depend on their compositions and elemental distributions. In this paper, the author focuses on a simultaneous reduction of metal ions in a liquid phase to produce well mixed solid-solution nanoalloys. For the efficient production of ordered type nanoalloys where constituting elements are regularly arranged in a lattice, a thermal treatment of nanoalloys in a hydrogen atmosphere (TTH) is introduced. An applicability range of the TTH is quantitatively discussed based on a structural transformation rate determined by time-dependent XRD measurements for nanoalloys using a synchrotron diffraction technique. Finally, the author shows novel applications of prepared nanoalloys to catalytic reactions which contribute to reduction of CO 2 emission in chemical processes.
由一种以上元素组成的纳米合金,即纳米合金,表现出独特的性能,这取决于它们的成分和元素分布。在本文中,作者着重于在液相中同时还原金属离子以制备混合良好的固溶纳米合金。为了有效地生产有序型纳米合金,其中组成元素有规则地排列在晶格中,介绍了在氢气氛(TTH)中对纳米合金进行热处理的方法。基于同步加速器衍射技术对纳米合金进行的随时间XRD测量所确定的结构转变速率,定量讨论了TTH的适用范围。最后,介绍了制备的纳米合金在催化反应中的新应用,有助于减少化学过程中二氧化碳的排放。
{"title":"Structural Control of Inorganic Nanoparticles for the Creation of Their Novel Functions","authors":"M. Yamauchi","doi":"10.1380/JSSSJ.38.24","DOIUrl":"https://doi.org/10.1380/JSSSJ.38.24","url":null,"abstract":"Nanometer-sized alloys composed of more than one element, namely nanoalloys, exhibit unique properties, which depend on their compositions and elemental distributions. In this paper, the author focuses on a simultaneous reduction of metal ions in a liquid phase to produce well mixed solid-solution nanoalloys. For the efficient production of ordered type nanoalloys where constituting elements are regularly arranged in a lattice, a thermal treatment of nanoalloys in a hydrogen atmosphere (TTH) is introduced. An applicability range of the TTH is quantitatively discussed based on a structural transformation rate determined by time-dependent XRD measurements for nanoalloys using a synchrotron diffraction technique. Finally, the author shows novel applications of prepared nanoalloys to catalytic reactions which contribute to reduction of CO 2 emission in chemical processes.","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"13 1","pages":"24-29"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84775727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
New Patterning Technology by Integrating Atomic Layer Deposition Process to the Etching Flow 将原子层沉积工艺与蚀刻工艺相结合的新型图像化技术
Pub Date : 2017-01-01 DOI: 10.1380/jsssj.38.210
T. Katsunuma, T. Hisamatsu, Y. Kihara, M. Honda
We introduce a state-of-the-art patterning process developed by new patterning technology using Atomic Layer Deposition (ALD) towards 5/7 nm generation. In the patterning process, critical dimension (CD) shrink technique without CD loading is one of the key requirements. However, in the conventional CD shrink technique, CD loading can’t be solved in principle. To overcome this issue, by integrating ALD process into the etching flow, we developed a new CD shrink technique without causing CD loading. Furthermore, CD shrink amount can be precisely controlled by the number of ALD cycles while keeping the excellent CD shrink uniformity across a wafer. This is obtained by utilizing a conformal layer with characteristics of ALD’s self-limiting reaction, which is independent of the pattern variety.
我们介绍了利用原子层沉积(ALD)的新图图化技术开发的最先进的图图化工艺,用于5/7纳米一代。在制模过程中,不加载临界尺寸的收缩技术是关键要求之一。然而,在传统的CD收缩技术中,CD加载不能从原则上解决。为了克服这一问题,通过将ALD工艺集成到蚀刻流程中,我们开发了一种新的不引起CD加载的CD收缩技术。此外,可以通过ALD循环次数精确控制CD收缩量,同时保持优异的CD收缩均匀性。这是通过利用具有ALD自限制反应特性的保形层获得的,该特性与图案变化无关。
{"title":"New Patterning Technology by Integrating Atomic Layer Deposition Process to the Etching Flow","authors":"T. Katsunuma, T. Hisamatsu, Y. Kihara, M. Honda","doi":"10.1380/jsssj.38.210","DOIUrl":"https://doi.org/10.1380/jsssj.38.210","url":null,"abstract":"We introduce a state-of-the-art patterning process developed by new patterning technology using Atomic Layer Deposition (ALD) towards 5/7 nm generation. In the patterning process, critical dimension (CD) shrink technique without CD loading is one of the key requirements. However, in the conventional CD shrink technique, CD loading can’t be solved in principle. To overcome this issue, by integrating ALD process into the etching flow, we developed a new CD shrink technique without causing CD loading. Furthermore, CD shrink amount can be precisely controlled by the number of ALD cycles while keeping the excellent CD shrink uniformity across a wafer. This is obtained by utilizing a conformal layer with characteristics of ALD’s self-limiting reaction, which is independent of the pattern variety.","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"31 1","pages":"210-215"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81396006","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Artificial Photosynthesis for Carbon Dioxide Reduction and Conversion 二氧化碳还原和转化的人工光合作用
Pub Date : 2017-01-01 DOI: 10.1380/jsssj.38.297
Y. Amao
In recent years, solar fuel or chemical production based on the photoreduction or fixation of CO2, the so-called “artificial photosynthesis” has received considerable attention. Thus, the development of an effective catalyst for the conversion of CO2 to useful organic molecules is desirable. Biocatalysts for CO2 reduction and conversion are useful catalyst for the artificial photosynthesis system. In this review, two types of artificial photosynthesis systems for CO2 reduction and conversion consisting of the visible-light sensitizer and biocatalyst are introduced. One is the artificial photosynthesis with visible-light sensitizer and biocatalyst for CO2 photoreduction to formic acid or methanol. The other one is the artificial photosynthesis with visible-light sensitizer, and novel electron carrier molecule and biocatalyst for the carbon-carbon bond formation from CO2 as a feedstock.
近年来,基于光还原或固定CO2的太阳能燃料或化工生产,所谓的“人工光合作用”受到了相当大的关注。因此,开发一种有效的催化剂将二氧化碳转化为有用的有机分子是可取的。二氧化碳还原和转化的生物催化剂是人工光合作用系统中有用的催化剂。本文介绍了可见光敏化剂和生物催化剂两种用于CO2还原和转化的人工光合系统。一种是利用可见光敏化剂和生物催化剂将CO2光还原为甲酸或甲醇的人工光合作用。另一种是以可见光敏化剂、新型电子载体分子和生物催化剂为原料,以CO2为原料形成碳-碳键的人工光合作用。
{"title":"Artificial Photosynthesis for Carbon Dioxide Reduction and Conversion","authors":"Y. Amao","doi":"10.1380/jsssj.38.297","DOIUrl":"https://doi.org/10.1380/jsssj.38.297","url":null,"abstract":"In recent years, solar fuel or chemical production based on the photoreduction or fixation of CO2, the so-called “artificial photosynthesis” has received considerable attention. Thus, the development of an effective catalyst for the conversion of CO2 to useful organic molecules is desirable. Biocatalysts for CO2 reduction and conversion are useful catalyst for the artificial photosynthesis system. In this review, two types of artificial photosynthesis systems for CO2 reduction and conversion consisting of the visible-light sensitizer and biocatalyst are introduced. One is the artificial photosynthesis with visible-light sensitizer and biocatalyst for CO2 photoreduction to formic acid or methanol. The other one is the artificial photosynthesis with visible-light sensitizer, and novel electron carrier molecule and biocatalyst for the carbon-carbon bond formation from CO2 as a feedstock.","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"81 1","pages":"297-302"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82446764","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Hyomen Kagaku
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1