Sirine Ben Khemis, Laurent Cormier, Ekaterina Burov, Hervé Montigaud, Benoit Baptiste, Sophie Nowak
We compared the impact of alumina doping on the structure of Al2O3–SiO2 amorphous thin films and bulk glasses using Raman spectroscopy and x-ray diffraction. In both thin films and bulk glasses, the addition of Al2O3 is accompanied by an increase in the mean Si–O–T angle and an evolution of the ring statistics with a decrease in the proportion of small rings. We evidenced structural differences between sputtered films and fused bulk glasses. Sputtered Al2O3–SiO2 thin films are about 6%–7% denser than their equivalent Al2O3–SiO2 bulk glasses. This difference is mainly due to a change in ring statistics with the formation of small rings within the sputtered thin films. These structural differences in atomic structural organization highlight the impact of the synthesis conditions and open the door to further investigation of the structure–functional property relationships in sputtered Al2O3–SiO2 thin films.
{"title":"Comparative structural study of Al2O3–SiO2 glasses and amorphous thin films","authors":"Sirine Ben Khemis, Laurent Cormier, Ekaterina Burov, Hervé Montigaud, Benoit Baptiste, Sophie Nowak","doi":"10.1111/ijag.16666","DOIUrl":"10.1111/ijag.16666","url":null,"abstract":"<p>We compared the impact of alumina doping on the structure of Al<sub>2</sub>O<sub>3</sub>–SiO<sub>2</sub> amorphous thin films and bulk glasses using Raman spectroscopy and x-ray diffraction. In both thin films and bulk glasses, the addition of Al<sub>2</sub>O<sub>3</sub> is accompanied by an increase in the mean Si–O–T angle and an evolution of the ring statistics with a decrease in the proportion of small rings. We evidenced structural differences between sputtered films and fused bulk glasses. Sputtered Al<sub>2</sub>O<sub>3</sub>–SiO<sub>2</sub> thin films are about 6%–7% denser than their equivalent Al<sub>2</sub>O<sub>3</sub>–SiO<sub>2</sub> bulk glasses. This difference is mainly due to a change in ring statistics with the formation of small rings within the sputtered thin films. These structural differences in atomic structural organization highlight the impact of the synthesis conditions and open the door to further investigation of the structure–functional property relationships in sputtered Al<sub>2</sub>O<sub>3</sub>–SiO<sub>2</sub> thin films.</p>","PeriodicalId":13850,"journal":{"name":"International Journal of Applied Glass Science","volume":"15 3","pages":"212-226"},"PeriodicalIF":2.5,"publicationDate":"2024-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140628044","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}