Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879629
M. Kruger, M.H. Guddal, R. Belikov, A. Bhatnagar, O. Solgaard, C. Spanos, K. Poolla
We demonstrate remote data acquisition from an autonomous sensor module over a low power wireless optical link. The communication link is based on a grating light modulator. The high data rate, low power consumption, compactness and ease of fabrication make this wireless optical link a promising candidate for a wide range of remote-sensing and sensor-network applications.
{"title":"Low power wireless readout of autonomous sensor wafer using MEMS grating light modulator","authors":"M. Kruger, M.H. Guddal, R. Belikov, A. Bhatnagar, O. Solgaard, C. Spanos, K. Poolla","doi":"10.1109/OMEMS.2000.879629","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879629","url":null,"abstract":"We demonstrate remote data acquisition from an autonomous sensor module over a low power wireless optical link. The communication link is based on a grating light modulator. The high data rate, low power consumption, compactness and ease of fabrication make this wireless optical link a promising candidate for a wide range of remote-sensing and sensor-network applications.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123207465","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879631
A. Tuantranont, L. Liew, V. Bright, Jianglong Zhang, Wenge Zhang, Y.C. Lee
The 2-dimensional phase-only micromirror array is a promising microsystem that leads to many applications such as optical beam steering, optical data interconnects, real-time image recognition, optical spectroscopy, and aberration correction. Large deflection of micromirror is required to be able to modulate light in infrared wavelength. In previous works on piston micromirrors, surface micromachining was used to fabricate parallel plate structures with a narrow gap between the mirror and underlying address electrode, that is not adequate to modulate light in longer wavelength than in visible spectrum. In this paper, a novel technique that combines the surface and bulk micromachining was used to implement the infrared micromirror array through a bulk-etched MUMPS surface micromachining.
{"title":"Bulk-etched surface micromachined and flip-chip integrated micromirror array for infrared applications","authors":"A. Tuantranont, L. Liew, V. Bright, Jianglong Zhang, Wenge Zhang, Y.C. Lee","doi":"10.1109/OMEMS.2000.879631","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879631","url":null,"abstract":"The 2-dimensional phase-only micromirror array is a promising microsystem that leads to many applications such as optical beam steering, optical data interconnects, real-time image recognition, optical spectroscopy, and aberration correction. Large deflection of micromirror is required to be able to modulate light in infrared wavelength. In previous works on piston micromirrors, surface micromachining was used to fabricate parallel plate structures with a narrow gap between the mirror and underlying address electrode, that is not adequate to modulate light in longer wavelength than in visible spectrum. In this paper, a novel technique that combines the surface and bulk micromachining was used to implement the infrared micromirror array through a bulk-etched MUMPS surface micromachining.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"86 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126164954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879601
K. Markus
This presentation addresses the main challenges facing the growth of optical MEMS volume manufacturing. The different process technologies and their interplay with the different classes of optical MEMS devices are presented. In addition, the challenges of establishing a manufacturing operation that can support the stringent requirements of Telecordia qualification are also discussed.
{"title":"Commercialization of optical MEMS-volume manufacturing approaches","authors":"K. Markus","doi":"10.1109/OMEMS.2000.879601","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879601","url":null,"abstract":"This presentation addresses the main challenges facing the growth of optical MEMS volume manufacturing. The different process technologies and their interplay with the different classes of optical MEMS devices are presented. In addition, the challenges of establishing a manufacturing operation that can support the stringent requirements of Telecordia qualification are also discussed.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121176035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879608
T. Amano, F. Koyama, N. Nishiyama, K. Iga
We propose a novel approach to wavelength stabilization and wavelength trimming in a multi-wavelength add/drop filter and VCSEL using a micromachined DBR mirror tuned by differential thermal expansion coefficients. We demonstrate a 2/spl times/2 multiple wavelength micromachined GaAlAs/GaAs filter array loaded with a GaAs wavelength control layer.
{"title":"Multiple wavelength micromachined GaAlAs/GaAs vertical cavity filter array","authors":"T. Amano, F. Koyama, N. Nishiyama, K. Iga","doi":"10.1109/OMEMS.2000.879608","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879608","url":null,"abstract":"We propose a novel approach to wavelength stabilization and wavelength trimming in a multi-wavelength add/drop filter and VCSEL using a micromachined DBR mirror tuned by differential thermal expansion coefficients. We demonstrate a 2/spl times/2 multiple wavelength micromachined GaAlAs/GaAs filter array loaded with a GaAs wavelength control layer.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127136921","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879610
Xuming Zhang, A. Q. Liu
Summary form only given. A new add/drop multiplexers MEMS device based on polysilicon pitch-tunable gratings is reported and used to in WDM environment in fibre-optic communication systems. The polysilicon pitchtunable gratings are very attractive for implementing WDM switches, as reflection grating is used to disperse incident light into angular directions determined by the incident light's wavelength and the structural parameters of the grating.
{"title":"A MEMS pitch-tunable grating add/drop multiplexers","authors":"Xuming Zhang, A. Q. Liu","doi":"10.1109/OMEMS.2000.879610","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879610","url":null,"abstract":"Summary form only given. A new add/drop multiplexers MEMS device based on polysilicon pitch-tunable gratings is reported and used to in WDM environment in fibre-optic communication systems. The polysilicon pitchtunable gratings are very attractive for implementing WDM switches, as reflection grating is used to disperse incident light into angular directions determined by the incident light's wavelength and the structural parameters of the grating.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124057513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879650
Junting Liu, J. Jeong, Minfan Pai, Clifford R. Pollock, N. Tien, D. Ast
Advanced research in miniaturizing components for fiber-optic communication systems is required to extend optical fiber from trunk line to the subscriber's end. WDM offers high capacity but requires the fabrication of selective add-drop filters. MEMS technology offers an effective way to fabricate these components at low cost. We present a micromachined tunable filter on chip, integrated with an optical fiber. We demonstrate that the reflected (drop-out) wavelength can be tuned by varying the coupling between the fiber grating and a movable silicon block.
{"title":"Micromachined wavelength tunable filter integrated with optical fiber","authors":"Junting Liu, J. Jeong, Minfan Pai, Clifford R. Pollock, N. Tien, D. Ast","doi":"10.1109/OMEMS.2000.879650","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879650","url":null,"abstract":"Advanced research in miniaturizing components for fiber-optic communication systems is required to extend optical fiber from trunk line to the subscriber's end. WDM offers high capacity but requires the fabrication of selective add-drop filters. MEMS technology offers an effective way to fabricate these components at low cost. We present a micromachined tunable filter on chip, integrated with an optical fiber. We demonstrate that the reflected (drop-out) wavelength can be tuned by varying the coupling between the fiber grating and a movable silicon block.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133617701","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879612
R. L. Bratter
In order to successfully commercialize their technology, MEMS based companies will have to meet the high expectations set by the marketplace. There are four areas that need to be addressed before wide-scale commercialization of MEMS based products can occur: (1) Reliability: basically, the inherent reliability and long-term functioning of MEMS have yet to be proven beyond certain passive devices. However, for many other applications there are not enough MEMS-based products in the field that we can point to in order to alleviate this concern. (2) Manufacturability: not enough world-class MEMS manufacturing facilities have been established, so there are concerns about the ability of the industry to ramp up volumes as in the IC industry. (3) Packaging: for each application area the packaging challenge is different. In addition, packaging costs are usually considerably more expensive than the MEMS device itself. Component customers want to be convinced that these issues are being addressed and viable solutions will be available. (4) New technology: many potential customers are sitting on the fence simply because the technology is new. This is not unique to MEMS but does affect introduction of the technology.
{"title":"Commercial success in the MEMS marketplace","authors":"R. L. Bratter","doi":"10.1109/OMEMS.2000.879612","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879612","url":null,"abstract":"In order to successfully commercialize their technology, MEMS based companies will have to meet the high expectations set by the marketplace. There are four areas that need to be addressed before wide-scale commercialization of MEMS based products can occur: (1) Reliability: basically, the inherent reliability and long-term functioning of MEMS have yet to be proven beyond certain passive devices. However, for many other applications there are not enough MEMS-based products in the field that we can point to in order to alleviate this concern. (2) Manufacturability: not enough world-class MEMS manufacturing facilities have been established, so there are concerns about the ability of the industry to ramp up volumes as in the IC industry. (3) Packaging: for each application area the packaging challenge is different. In addition, packaging costs are usually considerably more expensive than the MEMS device itself. Component customers want to be convinced that these issues are being addressed and viable solutions will be available. (4) New technology: many potential customers are sitting on the fence simply because the technology is new. This is not unique to MEMS but does affect introduction of the technology.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122203193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879603
N. Konno, M. Tsugai, E. Yoshikawa, T. Usami, R. Fujita
Previously, we reported a silicon torsional resonant mirror driven by a PZT plate through link beam leverage effects and confirmed the device operation. Our device is mechanically reliable and stable since there are no metal leads on the vibrating silicon torsional beams and the mirror is supported by 6 beams. We present an improved device having much higher performance through both design and process optimization based on detailed FEM simulations and refinement of the fabrication process.
{"title":"Design optimization and improved performance on the link beam driven, miniaturized scanning mirror device","authors":"N. Konno, M. Tsugai, E. Yoshikawa, T. Usami, R. Fujita","doi":"10.1109/OMEMS.2000.879603","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879603","url":null,"abstract":"Previously, we reported a silicon torsional resonant mirror driven by a PZT plate through link beam leverage effects and confirmed the device operation. Our device is mechanically reliable and stable since there are no metal leads on the vibrating silicon torsional beams and the mirror is supported by 6 beams. We present an improved device having much higher performance through both design and process optimization based on detailed FEM simulations and refinement of the fabrication process.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116783351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879647
B. Volckaerts, H. Ottevaere, A. Vilà, M. Muruzábal, C. Debaes, P. Vynck, P. Tuteleers, V. Baukens, A. Hermanne, I. Veretennicoff, H. Thienpont
We present the state-of-the-art of deep lithography with protons as a candidate technology dedicated to the fabrication of 21/2D and 3D micro-opto-mechanical systems. Its concept is very similar to that of LIGA, but uses ions rather than electromagnetic radiation to structure and shape PMMA plates. We adopted the concept, thoroughly upgraded its practical implementation, turned it into a high-quality day-to-day reproducible MOMS technology and are continuously improving its performance and extending its range of practical application.
{"title":"Deep lithography with protons: a generic technology for the fabrication of refractive micro-optical modules","authors":"B. Volckaerts, H. Ottevaere, A. Vilà, M. Muruzábal, C. Debaes, P. Vynck, P. Tuteleers, V. Baukens, A. Hermanne, I. Veretennicoff, H. Thienpont","doi":"10.1109/OMEMS.2000.879647","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879647","url":null,"abstract":"We present the state-of-the-art of deep lithography with protons as a candidate technology dedicated to the fabrication of 21/2D and 3D micro-opto-mechanical systems. Its concept is very similar to that of LIGA, but uses ions rather than electromagnetic radiation to structure and shape PMMA plates. We adopted the concept, thoroughly upgraded its practical implementation, turned it into a high-quality day-to-day reproducible MOMS technology and are continuously improving its performance and extending its range of practical application.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132993313","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879636
J. A. Lott, M. J. Noble, E.M. Ochon, L. Starman, W. Cowan
A tunable prototype red light-emitting n-p-n VCSEL with an n-doped micro-electromechanical (MEM) top distributed Bragg reflector is reported. The peak emission wavelength is tunable over a range of about 15 nm from 644 to 659 nm.
{"title":"Tunable red vertical cavity surface emitting lasers using flexible micro-electro-mechanical top mirrors","authors":"J. A. Lott, M. J. Noble, E.M. Ochon, L. Starman, W. Cowan","doi":"10.1109/OMEMS.2000.879636","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879636","url":null,"abstract":"A tunable prototype red light-emitting n-p-n VCSEL with an n-doped micro-electromechanical (MEM) top distributed Bragg reflector is reported. The peak emission wavelength is tunable over a range of about 15 nm from 644 to 659 nm.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132197366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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