Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879633
Y. Peter, F. Gonté, H. Herzig, R. Dandliker
The rapid expansion of fiber optic telecommunications networks requires complex optical switch matrix systems. We propose and demonstrate a switch concept with alignment and aberration corrections which has the potential of a 1/spl times/546 optical switch with 3 dB insertion loss and less than -30 dB crosstalk. Each switching configuration is optimized once. The parameters are memorized and each connection can then be addressed with its proper corrections.
{"title":"Optical fiber switch using a deformable mirror for a large number of interconnects","authors":"Y. Peter, F. Gonté, H. Herzig, R. Dandliker","doi":"10.1109/OMEMS.2000.879633","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879633","url":null,"abstract":"The rapid expansion of fiber optic telecommunications networks requires complex optical switch matrix systems. We propose and demonstrate a switch concept with alignment and aberration corrections which has the potential of a 1/spl times/546 optical switch with 3 dB insertion loss and less than -30 dB crosstalk. Each switching configuration is optimized once. The parameters are memorized and each connection can then be addressed with its proper corrections.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122414562","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879625
D. Pasquariello, M. Camacho, K. Hjort
Summary form only given. We evaluate hydrophilic and hydrophobic surface pre-treatments in InP-to-Si direct wafer bonding. Surface roughness and surface chemistry was examined using atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). After bonding, the bonded interfaces were evaluated using infrared transmission imaging, bond-strength and current-voltage (I-V) measurements.
{"title":"InP-to-Si wafer heterobonding for optical MEMs","authors":"D. Pasquariello, M. Camacho, K. Hjort","doi":"10.1109/OMEMS.2000.879625","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879625","url":null,"abstract":"Summary form only given. We evaluate hydrophilic and hydrophobic surface pre-treatments in InP-to-Si direct wafer bonding. Surface roughness and surface chemistry was examined using atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). After bonding, the bonded interfaces were evaluated using infrared transmission imaging, bond-strength and current-voltage (I-V) measurements.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134436511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879649
S. Pannu, C. Chang, R. Muller, A. P. Pisano
We have demonstrated a closed-loop feedback-control system that dramatically improves the dynamic response, settling time, and external disturbance rejection of a magnetic micromirror. Proportional, proportional-derivative and proportional-derivative-integral controllers (implemented on a digital signal processor) were used to increase positioning accuracy of the micromirror which can, for example, lead to increased optical-channel density in fiber-optic switches.
{"title":"Closed-loop feedback-control system for improved tracking in magnetically actuated micromirrors","authors":"S. Pannu, C. Chang, R. Muller, A. P. Pisano","doi":"10.1109/OMEMS.2000.879649","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879649","url":null,"abstract":"We have demonstrated a closed-loop feedback-control system that dramatically improves the dynamic response, settling time, and external disturbance rejection of a magnetic micromirror. Proportional, proportional-derivative and proportional-derivative-integral controllers (implemented on a digital signal processor) were used to increase positioning accuracy of the micromirror which can, for example, lead to increased optical-channel density in fiber-optic switches.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115336478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879640
S. Donati, M. Nogia, V. A. Lodi, S. Merlo
In testing MEMS and MOEMS, one can use the direct observation of the device under a microscope and the functionality test in the intended mode of operation. A new diagnostic tool, also useful since the initial design phases, is presented in this paper. It is based on injection interferometry and provides the actual amplitude of displacement and related parameters, e.g. the maximum frequency of operation and the mechanical quality-factor of the structure. We present the basic idea and the measurements (vibration amplitude, resonant frequency, Q and hysteresis effects) performed on a MEMS gyro structure with the aid of the injection interferometer.
{"title":"Measurement of MEMS mechanical parameters by injection interferometry","authors":"S. Donati, M. Nogia, V. A. Lodi, S. Merlo","doi":"10.1109/OMEMS.2000.879640","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879640","url":null,"abstract":"In testing MEMS and MOEMS, one can use the direct observation of the device under a microscope and the functionality test in the intended mode of operation. A new diagnostic tool, also useful since the initial design phases, is presented in this paper. It is based on injection interferometry and provides the actual amplitude of displacement and related parameters, e.g. the maximum frequency of operation and the mechanical quality-factor of the structure. We present the basic idea and the measurements (vibration amplitude, resonant frequency, Q and hysteresis effects) performed on a MEMS gyro structure with the aid of the injection interferometer.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124431540","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879646
C. Lin, W. Martin, J. Harris, E. Chan
The rapid growth of data communication requires more information to be sent through the existing fiber system. This demand can be met using WDM. However, such systems will require many different fixed wavelength devices or tunable devices. Surface micromachined tunable optoelectronic devices provide a potentially low-cost solution for WDM transmitting/receiving systems. To optimize optical performance and tunability of devices, a highly reflecting tunable mirror is needed. Among the materials which are commonly used, AlO/sub x//GaAs possesses the largest refractive index contrast. This huge contrast will achieve a higher reflectance and greater bandwidth with a smaller number of DBR pairs when compared to other material combinations. We previously reported a new type of top DBR mirror using AlO/sub x//GaAs which also has a lower tuning voltage. The design issues of this new mirror structure are discussed. Two different top membrane structures were fabricated and their performance compared.
{"title":"Modeling of MEMS tunable optoelectronic device mirror","authors":"C. Lin, W. Martin, J. Harris, E. Chan","doi":"10.1109/OMEMS.2000.879646","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879646","url":null,"abstract":"The rapid growth of data communication requires more information to be sent through the existing fiber system. This demand can be met using WDM. However, such systems will require many different fixed wavelength devices or tunable devices. Surface micromachined tunable optoelectronic devices provide a potentially low-cost solution for WDM transmitting/receiving systems. To optimize optical performance and tunability of devices, a highly reflecting tunable mirror is needed. Among the materials which are commonly used, AlO/sub x//GaAs possesses the largest refractive index contrast. This huge contrast will achieve a higher reflectance and greater bandwidth with a smaller number of DBR pairs when compared to other material combinations. We previously reported a new type of top DBR mirror using AlO/sub x//GaAs which also has a lower tuning voltage. The design issues of this new mirror structure are discussed. Two different top membrane structures were fabricated and their performance compared.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127862209","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879669
M. Sasaki, S. Nogawa, K. Hane
Photolithography is cost-effective and has been used for fabricating planar semiconductor devices. However, it cannot be applied to optical fiber for obtaining complicated microstructures. The first and biggest problem for realizing photolithography on an optical fiber is the resist coating on the non-planar surface. When spin coating is used, the resist becomes too uneven in thickness to use for the patterning. The concave and convex regions make the resist thickness vary due to the surface tension. A resist spraying system is developed for three-dimensional photolithography. The photoresist is sprayed as minute particles on the sample surface making a uniform resist film without suffering problems due to surface tension. New process techniques are developed and applied to direct photolithography on single mode optical fiber.
{"title":"Direct photolithography on optical fiber","authors":"M. Sasaki, S. Nogawa, K. Hane","doi":"10.1109/OMEMS.2000.879669","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879669","url":null,"abstract":"Photolithography is cost-effective and has been used for fabricating planar semiconductor devices. However, it cannot be applied to optical fiber for obtaining complicated microstructures. The first and biggest problem for realizing photolithography on an optical fiber is the resist coating on the non-planar surface. When spin coating is used, the resist becomes too uneven in thickness to use for the patterning. The concave and convex regions make the resist thickness vary due to the surface tension. A resist spraying system is developed for three-dimensional photolithography. The photoresist is sprayed as minute particles on the sample surface making a uniform resist film without suffering problems due to surface tension. New process techniques are developed and applied to direct photolithography on single mode optical fiber.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129422893","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879602
J. Nee, R. Conant, R. Muller, K. Lau
We have demonstrated flat, lightweight micromirrors with high resonant frequencies for fast beam steering. The low mass of these tensile-optical-surface (TOS) micromirrors, which consist of tensile polysilicon membranes stretched across stiff, single-crystal silicon-rib structures, enables the mirrors to have both high resonant frequencies and large DC deflection angles. The TOS mirrors can scan at frequencies up to 65.2 kHz while limiting dynamic deformation to be less than /spl sim/70 nm, (approximately /spl lambda//10 at the measurement wavelength of 655 nm). Dynamic deformation as low as 20 nm has been shown on a lower-frequency design having a wider support rib. The effect of adding a 50 nm-thick layer of gold to improve reflectivity is negligible on the deformation of the micromirror.
{"title":"Lightweight, optically flat micromirrors for fast beam steering","authors":"J. Nee, R. Conant, R. Muller, K. Lau","doi":"10.1109/OMEMS.2000.879602","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879602","url":null,"abstract":"We have demonstrated flat, lightweight micromirrors with high resonant frequencies for fast beam steering. The low mass of these tensile-optical-surface (TOS) micromirrors, which consist of tensile polysilicon membranes stretched across stiff, single-crystal silicon-rib structures, enables the mirrors to have both high resonant frequencies and large DC deflection angles. The TOS mirrors can scan at frequencies up to 65.2 kHz while limiting dynamic deformation to be less than /spl sim/70 nm, (approximately /spl lambda//10 at the measurement wavelength of 655 nm). Dynamic deformation as low as 20 nm has been shown on a lower-frequency design having a wider support rib. The effect of adding a 50 nm-thick layer of gold to improve reflectivity is negligible on the deformation of the micromirror.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129490252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-07-18DOI: 10.1109/OMEMS.2000.879664
H. Hara, N. Kishi, H. Iwaoka
We have developed silicon bolometers fabricated on an SOI wafer by bulk micromachining and a micro variable infrared filter, and have investigated CO/sub 2/ measurement using these elements as an NDIR system. The bolometer has a measured D* (1100 K, 10 Hz, 1 Hz) of 1.1/spl times/10/sup 8/ cmHz/sup 1/2//W. Two bolometers were combined with a micro variable infrared filter tuned to two different wavelengths: the CO/sub 2/ absorption band and the reference band. The two-wavelength NDIR system for combining these elements with the conventional infrared source was able to measure the concentration of CO/sub 2/ with the measurement reproducibility 3 /spl sigma/ of /spl plusmn/3.6% of the measured value or less between the concentrations of 0 ppm and 5000 ppm.
{"title":"Silicon bolometer and micro variable infrared filter for CO/sub 2/ measurement","authors":"H. Hara, N. Kishi, H. Iwaoka","doi":"10.1109/OMEMS.2000.879664","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879664","url":null,"abstract":"We have developed silicon bolometers fabricated on an SOI wafer by bulk micromachining and a micro variable infrared filter, and have investigated CO/sub 2/ measurement using these elements as an NDIR system. The bolometer has a measured D* (1100 K, 10 Hz, 1 Hz) of 1.1/spl times/10/sup 8/ cmHz/sup 1/2//W. Two bolometers were combined with a micro variable infrared filter tuned to two different wavelengths: the CO/sub 2/ absorption band and the reference band. The two-wavelength NDIR system for combining these elements with the conventional infrared source was able to measure the concentration of CO/sub 2/ with the measurement reproducibility 3 /spl sigma/ of /spl plusmn/3.6% of the measured value or less between the concentrations of 0 ppm and 5000 ppm.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131691789","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1109/OMEMS.2000.879604
Jin-Ho Lee, Young-Chul Ko, Do-Hyun Kong, Jong-Min Kim, K. Lee, D. Jeon
A new fabrication process of vertically driven electrostatic scanner for laser display is presented. This scanner is composed of two structures having vertical combs. The combs are etched by ICP RIE and assembled by eutectic bonding aligner.
{"title":"Fabrication of silicon optical scanner for laser display","authors":"Jin-Ho Lee, Young-Chul Ko, Do-Hyun Kong, Jong-Min Kim, K. Lee, D. Jeon","doi":"10.1109/OMEMS.2000.879604","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879604","url":null,"abstract":"A new fabrication process of vertically driven electrostatic scanner for laser display is presented. This scanner is composed of two structures having vertical combs. The combs are etched by ICP RIE and assembled by eutectic bonding aligner.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"409 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133632881","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1109/OMEMS.2000.879630
M. Last
Summary form only given. A laser transmitter for free-space laser communications has been built and tested. This system consists of an edge-emitting diode laser, a ball lens, and a micromachined mirror actuated using two 4-bit mechanical digital-to-analog converters. The mirror and actuators are fabricated in Crones Microsystem's MUMPS process. The ball lens is assembled using a set of micro-tweezers from MEMS Precision Instruments controlled with a Sutter Instruments MP285 robotic xyz positioner. The laser diode was donated by SDL inc. and emits red (650nm) light. This work includes the demonstration of the first two degree-of-freedom micromirror actuated with mechanical digital to analog converters and its use in a system consisting of a laser diode, ball lens and micromirror.
{"title":"An 8 mm/sup 3/ digitally steered laser beam transmitter","authors":"M. Last","doi":"10.1109/OMEMS.2000.879630","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879630","url":null,"abstract":"Summary form only given. A laser transmitter for free-space laser communications has been built and tested. This system consists of an edge-emitting diode laser, a ball lens, and a micromachined mirror actuated using two 4-bit mechanical digital-to-analog converters. The mirror and actuators are fabricated in Crones Microsystem's MUMPS process. The ball lens is assembled using a set of micro-tweezers from MEMS Precision Instruments controlled with a Sutter Instruments MP285 robotic xyz positioner. The laser diode was donated by SDL inc. and emits red (650nm) light. This work includes the demonstration of the first two degree-of-freedom micromirror actuated with mechanical digital to analog converters and its use in a system consisting of a laser diode, ball lens and micromirror.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128211654","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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