Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879628
F. Nikolajeff
A brief overview of optics in biochemistry is presented, followed by an examination of published works on the integration of micro-optics and miniaturized biochemical systems. We will also give recent results from our own efforts.
{"title":"The use of micro-optics for miniaturized chemical and biomedical analysis systems","authors":"F. Nikolajeff","doi":"10.1109/OMEMS.2000.879628","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879628","url":null,"abstract":"A brief overview of optics in biochemistry is presented, followed by an examination of published works on the integration of micro-optics and miniaturized biochemical systems. We will also give recent results from our own efforts.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116227557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879611
E. Goldstein, L. Lin
The need for optical-layer networking is fuelling an era of invention in functional optical network elements that has probably not been seen since the inaugural years of optical-fiber communications. Most prominently and urgently they need optical-layer crossconnects. It is reasonably clear that lightwave micromachines in fact do not represent the preferred way of implementing the full catalogue of functions articulated. What is astonishing, however, is how many of these functions have a proven history of resisting conventional attack from the more-or-less-standard optoelectronic device arsenal and, correspondingly, how many of them offer serious opportunity for the emerging weaponry of lightwave micromachines. We survey these opportunities, focusing tightly on particularly challenging yet ripening opportunities in optical-layer crossconnects, and describe both the nature and time-scale of the emerging network need, and the dim, foggy outlines of the looming arsenal that is just beginning to take shape to address it.
{"title":"Optical-layer networking with lightwave micromachines: what do service-providers need and when do they need it?","authors":"E. Goldstein, L. Lin","doi":"10.1109/OMEMS.2000.879611","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879611","url":null,"abstract":"The need for optical-layer networking is fuelling an era of invention in functional optical network elements that has probably not been seen since the inaugural years of optical-fiber communications. Most prominently and urgently they need optical-layer crossconnects. It is reasonably clear that lightwave micromachines in fact do not represent the preferred way of implementing the full catalogue of functions articulated. What is astonishing, however, is how many of these functions have a proven history of resisting conventional attack from the more-or-less-standard optoelectronic device arsenal and, correspondingly, how many of them offer serious opportunity for the emerging weaponry of lightwave micromachines. We survey these opportunities, focusing tightly on particularly challenging yet ripening opportunities in optical-layer crossconnects, and describe both the nature and time-scale of the emerging network need, and the dim, foggy outlines of the looming arsenal that is just beginning to take shape to address it.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121119539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879632
C. Rembe, M. Hart, M. Helmbrecht, U. Srinivasan, R. Muller, K. Y. Lau, R. Howe
Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.
{"title":"Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror","authors":"C. Rembe, M. Hart, M. Helmbrecht, U. Srinivasan, R. Muller, K. Y. Lau, R. Howe","doi":"10.1109/OMEMS.2000.879632","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879632","url":null,"abstract":"Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125822940","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879668
J. Mohr
Due to its characteristics, LIGA technology is well suited to build up free space optical components with hybrid integration of optical elements by passive alignment. This is demonstrated by passive optical components and electro-opto-mechanical devices for telecommunication and sensor application.
{"title":"Free space optical components and systems based on LIGA technology","authors":"J. Mohr","doi":"10.1109/OMEMS.2000.879668","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879668","url":null,"abstract":"Due to its characteristics, LIGA technology is well suited to build up free space optical components with hybrid integration of optical elements by passive alignment. This is demonstrated by passive optical components and electro-opto-mechanical devices for telecommunication and sensor application.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"48 8","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114027684","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879670
Xingtao Wu, R. A. Brown, S. Mathews, K. Farmer
{"title":"Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes","authors":"Xingtao Wu, R. A. Brown, S. Mathews, K. Farmer","doi":"10.1109/OMEMS.2000.879670","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879670","url":null,"abstract":"","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"112 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129950973","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879599
M. Wu
Summary form only given. Surface-micromachining technology offers many advantages for implementing optical MEMS. It is versatile; many different types of optical MEMS devices can be fabricated by the same process. This enables monolithic integration of an entire free-space optical system onto a single chip. In the past several years, we have shown that refractive and diffractive microlenses, micropositioners with multiple degrees of freedom (e.g., rotary or XYZ stages), and precision microactuators can be fabricated by standard three-layer polysilicon surface-micromachining processes.
{"title":"Surface-micromachined photonic integrated circuits","authors":"M. Wu","doi":"10.1109/OMEMS.2000.879599","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879599","url":null,"abstract":"Summary form only given. Surface-micromachining technology offers many advantages for implementing optical MEMS. It is versatile; many different types of optical MEMS devices can be fabricated by the same process. This enables monolithic integration of an entire free-space optical system onto a single chip. In the past several years, we have shown that refractive and diffractive microlenses, micropositioners with multiple degrees of freedom (e.g., rotary or XYZ stages), and precision microactuators can be fabricated by standard three-layer polysilicon surface-micromachining processes.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124541681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879607
H. L. Kung, S. Bhalotra, J. Mansell, A. Miller
We demonstrate a Fourier-transform spectrometer based on a large-displacement MEMS mirror and sampling an optical standing wave with a thin photoconductor. The 1D design should permit integration of many spectrometers into an imaging array.
{"title":"Compact Fourier transform spectrometer based on sampling a standing wave","authors":"H. L. Kung, S. Bhalotra, J. Mansell, A. Miller","doi":"10.1109/OMEMS.2000.879607","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879607","url":null,"abstract":"We demonstrate a Fourier-transform spectrometer based on a large-displacement MEMS mirror and sampling an optical standing wave with a thin photoconductor. The 1D design should permit integration of many spectrometers into an imaging array.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"215 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121849595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879642
S. Bhalotra, J. Mansell, H. L. Kung, David A. B. Miller
We present an electrostatically actuated MEMS mirror with 65 /spl mu/m of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.
{"title":"Parallel-plate MEMS mirror design for large on-resonance displacement","authors":"S. Bhalotra, J. Mansell, H. L. Kung, David A. B. Miller","doi":"10.1109/OMEMS.2000.879642","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879642","url":null,"abstract":"We present an electrostatically actuated MEMS mirror with 65 /spl mu/m of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115406236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879645
P. Lambkin, B. Lane, I. O'Heifearnan, J. Gillham, R. Eatton
A new, low-cost, CMOS compatible microbolometer process has been established. The sensitive resistive element is formed from titanium supported by silicon dioxide. An electrothermal characterisation has shown the governing parameters are in line with current, alternative technologies. Preliminary results also indicate the absorption in the 8-14 /spl mu/m waveband is /spl sim/40%.
{"title":"Characterisation of CMOS compatible uncooled microbolometers","authors":"P. Lambkin, B. Lane, I. O'Heifearnan, J. Gillham, R. Eatton","doi":"10.1109/OMEMS.2000.879645","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879645","url":null,"abstract":"A new, low-cost, CMOS compatible microbolometer process has been established. The sensitive resistive element is formed from titanium supported by silicon dioxide. An electrothermal characterisation has shown the governing parameters are in line with current, alternative technologies. Preliminary results also indicate the absorption in the 8-14 /spl mu/m waveband is /spl sim/40%.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121035510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879615
A. Liu, X.M. Zhang, Y. Lam
This paper reports the design, fabrication, and testing of a monolithic integrated 4/spl times/4 optical crossconnection device using movable 3D-mirror to enable channel selection for optical communication applications. Optical switches are desirable for reconfiguring the fibre-optics networks because of the very low insertion loss and high isolation requirements. Most conventional fibre-optic switches are made in-waveguide, which results in high coupling loss. A free-space approach allows a low coupling loss and small crosstalk. Recently, there has been a growing interest in applying the MEMS technology to improve the performance and reduce the cost of optomechanical switches. The novel 4/spl times/4 free-space fiber-optic switch reported can be made compact and lightweight, and is potentially integrable with optical source/detector and controlling electronic devices.
{"title":"A high performance 4/spl times/4 free-space fiber-optic crossconnection","authors":"A. Liu, X.M. Zhang, Y. Lam","doi":"10.1109/OMEMS.2000.879615","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879615","url":null,"abstract":"This paper reports the design, fabrication, and testing of a monolithic integrated 4/spl times/4 optical crossconnection device using movable 3D-mirror to enable channel selection for optical communication applications. Optical switches are desirable for reconfiguring the fibre-optics networks because of the very low insertion loss and high isolation requirements. Most conventional fibre-optic switches are made in-waveguide, which results in high coupling loss. A free-space approach allows a low coupling loss and small crosstalk. Recently, there has been a growing interest in applying the MEMS technology to improve the performance and reduce the cost of optomechanical switches. The novel 4/spl times/4 free-space fiber-optic switch reported can be made compact and lightweight, and is potentially integrable with optical source/detector and controlling electronic devices.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134224219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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