Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879628
F. Nikolajeff
A brief overview of optics in biochemistry is presented, followed by an examination of published works on the integration of micro-optics and miniaturized biochemical systems. We will also give recent results from our own efforts.
{"title":"The use of micro-optics for miniaturized chemical and biomedical analysis systems","authors":"F. Nikolajeff","doi":"10.1109/OMEMS.2000.879628","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879628","url":null,"abstract":"A brief overview of optics in biochemistry is presented, followed by an examination of published works on the integration of micro-optics and miniaturized biochemical systems. We will also give recent results from our own efforts.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116227557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879611
E. Goldstein, L. Lin
The need for optical-layer networking is fuelling an era of invention in functional optical network elements that has probably not been seen since the inaugural years of optical-fiber communications. Most prominently and urgently they need optical-layer crossconnects. It is reasonably clear that lightwave micromachines in fact do not represent the preferred way of implementing the full catalogue of functions articulated. What is astonishing, however, is how many of these functions have a proven history of resisting conventional attack from the more-or-less-standard optoelectronic device arsenal and, correspondingly, how many of them offer serious opportunity for the emerging weaponry of lightwave micromachines. We survey these opportunities, focusing tightly on particularly challenging yet ripening opportunities in optical-layer crossconnects, and describe both the nature and time-scale of the emerging network need, and the dim, foggy outlines of the looming arsenal that is just beginning to take shape to address it.
{"title":"Optical-layer networking with lightwave micromachines: what do service-providers need and when do they need it?","authors":"E. Goldstein, L. Lin","doi":"10.1109/OMEMS.2000.879611","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879611","url":null,"abstract":"The need for optical-layer networking is fuelling an era of invention in functional optical network elements that has probably not been seen since the inaugural years of optical-fiber communications. Most prominently and urgently they need optical-layer crossconnects. It is reasonably clear that lightwave micromachines in fact do not represent the preferred way of implementing the full catalogue of functions articulated. What is astonishing, however, is how many of these functions have a proven history of resisting conventional attack from the more-or-less-standard optoelectronic device arsenal and, correspondingly, how many of them offer serious opportunity for the emerging weaponry of lightwave micromachines. We survey these opportunities, focusing tightly on particularly challenging yet ripening opportunities in optical-layer crossconnects, and describe both the nature and time-scale of the emerging network need, and the dim, foggy outlines of the looming arsenal that is just beginning to take shape to address it.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121119539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879632
C. Rembe, M. Hart, M. Helmbrecht, U. Srinivasan, R. Muller, K. Y. Lau, R. Howe
Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.
{"title":"Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror","authors":"C. Rembe, M. Hart, M. Helmbrecht, U. Srinivasan, R. Muller, K. Y. Lau, R. Howe","doi":"10.1109/OMEMS.2000.879632","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879632","url":null,"abstract":"Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125822940","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879670
Xingtao Wu, R. A. Brown, S. Mathews, K. Farmer
{"title":"Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes","authors":"Xingtao Wu, R. A. Brown, S. Mathews, K. Farmer","doi":"10.1109/OMEMS.2000.879670","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879670","url":null,"abstract":"","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"112 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129950973","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879641
Y. Yee, J. Bu, Il-Joo Cho, E. Yoon, S. Moon, Shinill Kang
Optical near-field techniques have shown some promise for high-density optical data storage of several tens Gb/in/sup 2/. The diffraction limit of the far-field optics can be greatly relaxed by solid immersion lens (SIL). Recent research on near-field optical recording is focusing on a commercial product: the high-density storage drive. It is attractive to minimize the size and the weight of the SIL to realize a near-field optical pickup head capable of fast tracking and of maintaining a stable gap in the optical near-field regime. A simple and reliable micromachining process is developed to make miniaturized SIL. Polymeric super-hemispherical SIL can be replicated by hot press molding using the micromachined silicon master. The design and fabrication issues of the micromachined silicon master and molding process of the SIL are reported. The magnification factor of the fabricated micro-SIL is 3.143.
{"title":"Micro solid immersion lens fabricated by micro-molding for near-field optical data storage","authors":"Y. Yee, J. Bu, Il-Joo Cho, E. Yoon, S. Moon, Shinill Kang","doi":"10.1109/OMEMS.2000.879641","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879641","url":null,"abstract":"Optical near-field techniques have shown some promise for high-density optical data storage of several tens Gb/in/sup 2/. The diffraction limit of the far-field optics can be greatly relaxed by solid immersion lens (SIL). Recent research on near-field optical recording is focusing on a commercial product: the high-density storage drive. It is attractive to minimize the size and the weight of the SIL to realize a near-field optical pickup head capable of fast tracking and of maintaining a stable gap in the optical near-field regime. A simple and reliable micromachining process is developed to make miniaturized SIL. Polymeric super-hemispherical SIL can be replicated by hot press molding using the micromachined silicon master. The design and fabrication issues of the micromachined silicon master and molding process of the SIL are reported. The magnification factor of the fabricated micro-SIL is 3.143.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122199033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879607
H. L. Kung, S. Bhalotra, J. Mansell, A. Miller
We demonstrate a Fourier-transform spectrometer based on a large-displacement MEMS mirror and sampling an optical standing wave with a thin photoconductor. The 1D design should permit integration of many spectrometers into an imaging array.
{"title":"Compact Fourier transform spectrometer based on sampling a standing wave","authors":"H. L. Kung, S. Bhalotra, J. Mansell, A. Miller","doi":"10.1109/OMEMS.2000.879607","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879607","url":null,"abstract":"We demonstrate a Fourier-transform spectrometer based on a large-displacement MEMS mirror and sampling an optical standing wave with a thin photoconductor. The 1D design should permit integration of many spectrometers into an imaging array.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"215 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121849595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879645
P. Lambkin, B. Lane, I. O'Heifearnan, J. Gillham, R. Eatton
A new, low-cost, CMOS compatible microbolometer process has been established. The sensitive resistive element is formed from titanium supported by silicon dioxide. An electrothermal characterisation has shown the governing parameters are in line with current, alternative technologies. Preliminary results also indicate the absorption in the 8-14 /spl mu/m waveband is /spl sim/40%.
{"title":"Characterisation of CMOS compatible uncooled microbolometers","authors":"P. Lambkin, B. Lane, I. O'Heifearnan, J. Gillham, R. Eatton","doi":"10.1109/OMEMS.2000.879645","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879645","url":null,"abstract":"A new, low-cost, CMOS compatible microbolometer process has been established. The sensitive resistive element is formed from titanium supported by silicon dioxide. An electrothermal characterisation has shown the governing parameters are in line with current, alternative technologies. Preliminary results also indicate the absorption in the 8-14 /spl mu/m waveband is /spl sim/40%.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121035510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879642
S. Bhalotra, J. Mansell, H. L. Kung, David A. B. Miller
We present an electrostatically actuated MEMS mirror with 65 /spl mu/m of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.
{"title":"Parallel-plate MEMS mirror design for large on-resonance displacement","authors":"S. Bhalotra, J. Mansell, H. L. Kung, David A. B. Miller","doi":"10.1109/OMEMS.2000.879642","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879642","url":null,"abstract":"We present an electrostatically actuated MEMS mirror with 65 /spl mu/m of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115406236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879660
K. Crozier, D. A. Fletcher, G. Kino, C. Quate
We present a method for fabricating silicon nitride solid immersion lenses (SIL) integrated with atomic force microscope cantilevers. We demonstrate that a 200 nm line/space transmission grating (400 nm period) may be resolved using the SIL with /spl lambda/=633 nm illumination. Based on the refractive index (/spl sim/1.9 for PECVD silicon nitride) and geometry of the SIL, the effective numerical aperture is calculated to be /spl sim/1.8.
{"title":"Micromachined silicon nitride solid immersion lenses","authors":"K. Crozier, D. A. Fletcher, G. Kino, C. Quate","doi":"10.1109/OMEMS.2000.879660","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879660","url":null,"abstract":"We present a method for fabricating silicon nitride solid immersion lenses (SIL) integrated with atomic force microscope cantilevers. We demonstrate that a 200 nm line/space transmission grating (400 nm period) may be resolved using the SIL with /spl lambda/=633 nm illumination. Based on the refractive index (/spl sim/1.9 for PECVD silicon nitride) and geometry of the SIL, the effective numerical aperture is calculated to be /spl sim/1.8.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125891627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879613
M. Makihara
Space-division optical switches are essential for realizing the optical cross-connects and protection switches needed in future fiber-optic communication networks. Optical switches fabricated with MEMS technology are strongly anticipated; their excellent optical characteristics are due to their use of micromirrors to redirect optical signals. MEMS optical switches are roughly divided into two types: free-space and waveguide. This paper describes an intersecting waveguide optical switch based on thermo-capillarity.
{"title":"Microelectromechanical intersecting waveguide optical switch based on thermo-capillarity","authors":"M. Makihara","doi":"10.1109/OMEMS.2000.879613","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879613","url":null,"abstract":"Space-division optical switches are essential for realizing the optical cross-connects and protection switches needed in future fiber-optic communication networks. Optical switches fabricated with MEMS technology are strongly anticipated; their excellent optical characteristics are due to their use of micromirrors to redirect optical signals. MEMS optical switches are roughly divided into two types: free-space and waveguide. This paper describes an intersecting waveguide optical switch based on thermo-capillarity.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125056680","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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