Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879621
R. Conant, J. Nee, K. Y. Lau, R. Muller
Summary form only given. MEMS mirrors are capable of scanning at frequencies greater than 34 kHz. Both diffraction and dynamic deformation are dependent on the mirror size; increasing the mirror length decreases diffraction, but increases dynamic deformation. This paper presents an analytical formulation of mirror dynamic deformation for sinusoidally scanning rectangular mirrors, and measured data that corroborates the derived model. With this equation for dynamic deformation, we determine the optimal mirror size for a given scanning frequency, and the maximum achievable frequency of operation for a desired optical resolution.
{"title":"Dynamic deformation of scanning mirrors","authors":"R. Conant, J. Nee, K. Y. Lau, R. Muller","doi":"10.1109/OMEMS.2000.879621","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879621","url":null,"abstract":"Summary form only given. MEMS mirrors are capable of scanning at frequencies greater than 34 kHz. Both diffraction and dynamic deformation are dependent on the mirror size; increasing the mirror length decreases diffraction, but increases dynamic deformation. This paper presents an analytical formulation of mirror dynamic deformation for sinusoidally scanning rectangular mirrors, and measured data that corroborates the derived model. With this equation for dynamic deformation, we determine the optimal mirror size for a given scanning frequency, and the maximum achievable frequency of operation for a desired optical resolution.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"91 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115995269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879667
R. Sawada, E. Higurashi, T. Itoh
Two types of small and highly sensitive accelerometers that can measure a wide range of acceleration have been tentatively developed. The accelerometer incorporates an optical linear-micro-laser encoder. The measurable range is unlimited because the encoder can measure relative displacement to a long linear grating scale attached to a parallel two-plate cantilever with a seismic mass.
{"title":"An accelerometer incorporating a micro-laser encoder for a wide measurable range [for earthquake detection]","authors":"R. Sawada, E. Higurashi, T. Itoh","doi":"10.1109/OMEMS.2000.879667","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879667","url":null,"abstract":"Two types of small and highly sensitive accelerometers that can measure a wide range of acceleration have been tentatively developed. The accelerometer incorporates an optical linear-micro-laser encoder. The measurable range is unlimited because the encoder can measure relative displacement to a long linear grating scale attached to a parallel two-plate cantilever with a seismic mass.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"12 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116832849","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879656
R. Wood, V. Dhuler, E. Hill
The need for smaller and more capable attenuators has motivated the application of MEMS technology to produce a compact variable optical attenuator suitable for optical telecommunications environments. In this paper we describe a silicon-MEMS device that employs a simple thermal actuator to variably move a gold/silicon attenuation vane into the optical path.
{"title":"A MEMS variable optical attenuator","authors":"R. Wood, V. Dhuler, E. Hill","doi":"10.1109/OMEMS.2000.879656","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879656","url":null,"abstract":"The need for smaller and more capable attenuators has motivated the application of MEMS technology to produce a compact variable optical attenuator suitable for optical telecommunications environments. In this paper we describe a silicon-MEMS device that employs a simple thermal actuator to variably move a gold/silicon attenuation vane into the optical path.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124874824","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879624
S. Quake
Summary form only given as follows: We have been using soft lithography to make microfluidic chips for ultrasensitive analysis of single DNA molecules and cells. There are numerous advantages to fabricating chips out of polymeric materials, and as a result we have been able to rapidly and inexpensively fabricate active devices with moving parts, such as pinch valves and peristaltic pumps. We have also developed a microfabricated flow cytometry chip as a replacement for analytical pulsed field gel electrophoresis. Assays with these chips are two orders of magnitude faster than pulsed field gels and use a million times less material. Because they are detecting single molecules, their sensitivity is comparable to PCR based techniques. We have also developed a microfabricated fluorescence activated cell sorter and demonstrated its use in screening bacterial cells. The novel valve and pump components for on-chip fluidic manipulation that we developed in the course of this research will be useful for fabricating more complex chip designs for a variety of biotechnological applications.
{"title":"Single molecule and cell manipulation in soft microfluidic devices","authors":"S. Quake","doi":"10.1109/OMEMS.2000.879624","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879624","url":null,"abstract":"Summary form only given as follows: We have been using soft lithography to make microfluidic chips for ultrasensitive analysis of single DNA molecules and cells. There are numerous advantages to fabricating chips out of polymeric materials, and as a result we have been able to rapidly and inexpensively fabricate active devices with moving parts, such as pinch valves and peristaltic pumps. We have also developed a microfabricated flow cytometry chip as a replacement for analytical pulsed field gel electrophoresis. Assays with these chips are two orders of magnitude faster than pulsed field gels and use a million times less material. Because they are detecting single molecules, their sensitivity is comparable to PCR based techniques. We have also developed a microfabricated fluorescence activated cell sorter and demonstrated its use in screening bacterial cells. The novel valve and pump components for on-chip fluidic manipulation that we developed in the course of this research will be useful for fabricating more complex chip designs for a variety of biotechnological applications.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123414413","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879618
Young-Hyun Jin, Kyoung-Sun Seo, Young‐Ho Cho, Sang‐Shin Lee, K. Song, J. Bu
We present an SOI optical microswitch for applications to an integrated optical transceiver module, connected with optical I/O ports, source (LD) and receiver (PD). The optical microswitch consists of the waveguides and the micromirror actuators, all fabricated by the silicon layer on an SOI wafer. In the normally off-state, the micromirrors bypass the input signal to the output port. In the on-state, however, the actuated micromirrors provide optical interconnections between I/O ports and PD/LD, respectively. The present waveguide switch uses actuated micromirrors, thus providing more reliable optical path change than the conventional electro-optic or thermo-optic waveguide switches. In addition, we simplify the structure and the process of the microswitch by using the silicon waveguides and the silicon mirror-actuators, all fabricated by the ICP etching of an identical SOI wafer.
{"title":"An SOI optical microswitch integrated with silicon waveguides and touch-down micromirror actuators","authors":"Young-Hyun Jin, Kyoung-Sun Seo, Young‐Ho Cho, Sang‐Shin Lee, K. Song, J. Bu","doi":"10.1109/OMEMS.2000.879618","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879618","url":null,"abstract":"We present an SOI optical microswitch for applications to an integrated optical transceiver module, connected with optical I/O ports, source (LD) and receiver (PD). The optical microswitch consists of the waveguides and the micromirror actuators, all fabricated by the silicon layer on an SOI wafer. In the normally off-state, the micromirrors bypass the input signal to the output port. In the on-state, however, the actuated micromirrors provide optical interconnections between I/O ports and PD/LD, respectively. The present waveguide switch uses actuated micromirrors, thus providing more reliable optical path change than the conventional electro-optic or thermo-optic waveguide switches. In addition, we simplify the structure and the process of the microswitch by using the silicon waveguides and the silicon mirror-actuators, all fabricated by the ICP etching of an identical SOI wafer.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123130603","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879663
R. W. Bernstein, A. Ferber, I. Johansen, S. Moe, H. Rogne, D.T. Wang
The NEXUS market analysis for microsystems 1996-2000 states that a large growth in the market for microsystems for environmental monitoring is expected. One important product is reliable low cost gas sensors. IR absorption systems are attractive for this application, because of their excellent reliability, selectivity, and sensitivity. However, high production costs have limited the widespread use of these systems. In this paper, we present key components for IR gas sensors based on optical microsystem technology. This includes a micromachined silicon infrared source and a highly specific photoacoustic gas detector.
{"title":"Optical MEMS for infrared gas sensors","authors":"R. W. Bernstein, A. Ferber, I. Johansen, S. Moe, H. Rogne, D.T. Wang","doi":"10.1109/OMEMS.2000.879663","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879663","url":null,"abstract":"The NEXUS market analysis for microsystems 1996-2000 states that a large growth in the market for microsystems for environmental monitoring is expected. One important product is reliable low cost gas sensors. IR absorption systems are attractive for this application, because of their excellent reliability, selectivity, and sensitivity. However, high production costs have limited the widespread use of these systems. In this paper, we present key components for IR gas sensors based on optical microsystem technology. This includes a micromachined silicon infrared source and a highly specific photoacoustic gas detector.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114738669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879609
O. Manzardo, B. Guldimann, C. Marxer, K.F. de Rooij, H. Herzig
We propose a variety of miniaturized microelectromechanical (MEMS) spectrometers. Emphasis is put on the development of a Fourier transform spectrometer based on a Michelson interferometer. A new design of the existing chip has been realized in order to integrate an input fiber, a collimating system as well as a beam splitting plate. This new design allows to carry out spectroscopy with white light. In fact, since white light has a smaller length of coherence, the phase difference zero is extremely important to be well set, i.e. the optical path in each branch of the interferometer has to be equal. Finally, we present two other designs of spectrometers: a lamellar grating spectrometer and a Hadamard transform spectrometer.
{"title":"Optics and actuators for miniaturized spectrometers","authors":"O. Manzardo, B. Guldimann, C. Marxer, K.F. de Rooij, H. Herzig","doi":"10.1109/OMEMS.2000.879609","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879609","url":null,"abstract":"We propose a variety of miniaturized microelectromechanical (MEMS) spectrometers. Emphasis is put on the development of a Fourier transform spectrometer based on a Michelson interferometer. A new design of the existing chip has been realized in order to integrate an input fiber, a collimating system as well as a beam splitting plate. This new design allows to carry out spectroscopy with white light. In fact, since white light has a smaller length of coherence, the phase difference zero is extremely important to be well set, i.e. the optical path in each branch of the interferometer has to be equal. Finally, we present two other designs of spectrometers: a lamellar grating spectrometer and a Hadamard transform spectrometer.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133444743","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879652
Hung-Yi Lin, W. Fang
This report proposes a novel torsional mirror. The optical performance of the torsional mirror is improved through the refining of the mechanical design. SEM shows the design of the torsional mirror containing a mirror plate and its driving mechanism-the electrostatic torque generator. Hence, the scanning angle of the mirror is magnified by torque generators. In addition, the scanning frequency of the mirror can reach 17.7 kHz, and the stiffness of the mirror plate is remarkably increased by the folded frame.
{"title":"Torsional mirror with an electrostatically driven lever-mechanism","authors":"Hung-Yi Lin, W. Fang","doi":"10.1109/OMEMS.2000.879652","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879652","url":null,"abstract":"This report proposes a novel torsional mirror. The optical performance of the torsional mirror is improved through the refining of the mechanical design. SEM shows the design of the torsional mirror containing a mirror plate and its driving mechanism-the electrostatic torque generator. Hence, the scanning angle of the mirror is magnified by torque generators. In addition, the scanning frequency of the mirror can reach 17.7 kHz, and the stiffness of the mirror plate is remarkably increased by the folded frame.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116627055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879627
B. Cole, R. Higashi, R. Wood
Large arrays of small micromachined structures with low thermal mass and low thermal-conductance above silicon CMOS substrates and operate as (1) sensitive uncooled IR cameras or (2) high-temperature IR projectors. Arrays of small thin micromachined structures with high thermal masses, are suspended above the underlying silicon substrate by supports that are extremely well thermally isolated from the substrate with a high thermal conductance. This high thermal isolation allows for efficient heating of the microstructure with small currents (the case for microemitters), or small amounts of infrared (IR) incident flux (for microbolometers). The low mass ensures that despite the low conductance, the thermal time constants are in the millisecond range. We show the basic microstructure design common to both microbolometers and microemitters.
{"title":"Micromachined pixel arrays integrated with CMOS for infrared applications","authors":"B. Cole, R. Higashi, R. Wood","doi":"10.1109/OMEMS.2000.879627","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879627","url":null,"abstract":"Large arrays of small micromachined structures with low thermal mass and low thermal-conductance above silicon CMOS substrates and operate as (1) sensitive uncooled IR cameras or (2) high-temperature IR projectors. Arrays of small thin micromachined structures with high thermal masses, are suspended above the underlying silicon substrate by supports that are extremely well thermally isolated from the substrate with a high thermal conductance. This high thermal isolation allows for efficient heating of the microstructure with small currents (the case for microemitters), or small amounts of infrared (IR) incident flux (for microbolometers). The low mass ensures that despite the low conductance, the thermal time constants are in the millisecond range. We show the basic microstructure design common to both microbolometers and microemitters.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125239341","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879661
D. A. Fletcher, D. Simanovskii, D. Palanker, K. Crozier, C. Quate, G. Kino, K. Goodson
We demonstrate spatial resolution better than /spl lambda//10 in the infrared with a transmittance of 10/sup -3/ using a microfabricated solid immersion lens and metal aperture.
{"title":"Microfabricated solid immersion lens with metal aperture","authors":"D. A. Fletcher, D. Simanovskii, D. Palanker, K. Crozier, C. Quate, G. Kino, K. Goodson","doi":"10.1109/OMEMS.2000.879661","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879661","url":null,"abstract":"We demonstrate spatial resolution better than /spl lambda//10 in the infrared with a transmittance of 10/sup -3/ using a microfabricated solid immersion lens and metal aperture.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125539042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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