Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879599
M. Wu
Summary form only given. Surface-micromachining technology offers many advantages for implementing optical MEMS. It is versatile; many different types of optical MEMS devices can be fabricated by the same process. This enables monolithic integration of an entire free-space optical system onto a single chip. In the past several years, we have shown that refractive and diffractive microlenses, micropositioners with multiple degrees of freedom (e.g., rotary or XYZ stages), and precision microactuators can be fabricated by standard three-layer polysilicon surface-micromachining processes.
{"title":"Surface-micromachined photonic integrated circuits","authors":"M. Wu","doi":"10.1109/OMEMS.2000.879599","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879599","url":null,"abstract":"Summary form only given. Surface-micromachining technology offers many advantages for implementing optical MEMS. It is versatile; many different types of optical MEMS devices can be fabricated by the same process. This enables monolithic integration of an entire free-space optical system onto a single chip. In the past several years, we have shown that refractive and diffractive microlenses, micropositioners with multiple degrees of freedom (e.g., rotary or XYZ stages), and precision microactuators can be fabricated by standard three-layer polysilicon surface-micromachining processes.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124541681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879615
A. Liu, X.M. Zhang, Y. Lam
This paper reports the design, fabrication, and testing of a monolithic integrated 4/spl times/4 optical crossconnection device using movable 3D-mirror to enable channel selection for optical communication applications. Optical switches are desirable for reconfiguring the fibre-optics networks because of the very low insertion loss and high isolation requirements. Most conventional fibre-optic switches are made in-waveguide, which results in high coupling loss. A free-space approach allows a low coupling loss and small crosstalk. Recently, there has been a growing interest in applying the MEMS technology to improve the performance and reduce the cost of optomechanical switches. The novel 4/spl times/4 free-space fiber-optic switch reported can be made compact and lightweight, and is potentially integrable with optical source/detector and controlling electronic devices.
{"title":"A high performance 4/spl times/4 free-space fiber-optic crossconnection","authors":"A. Liu, X.M. Zhang, Y. Lam","doi":"10.1109/OMEMS.2000.879615","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879615","url":null,"abstract":"This paper reports the design, fabrication, and testing of a monolithic integrated 4/spl times/4 optical crossconnection device using movable 3D-mirror to enable channel selection for optical communication applications. Optical switches are desirable for reconfiguring the fibre-optics networks because of the very low insertion loss and high isolation requirements. Most conventional fibre-optic switches are made in-waveguide, which results in high coupling loss. A free-space approach allows a low coupling loss and small crosstalk. Recently, there has been a growing interest in applying the MEMS technology to improve the performance and reduce the cost of optomechanical switches. The novel 4/spl times/4 free-space fiber-optic switch reported can be made compact and lightweight, and is potentially integrable with optical source/detector and controlling electronic devices.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134224219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879637
G. Blau, M. T. Gale, J. Sochtig, Ch. Zscholle, R. Hovel, K. Gulden
A compact solution for tuning and monitoring the emission waveguide of a single mode VCSEL (/spl lambda/=760 nm) at constant output power is presented. The key element within the micro system is a chirped grating waveguide coupler combined with a diffractive collimating lens and a two-segment detector. The resulting wavelength measurement resolution of the chip is in the range of 0.06 nm.
{"title":"Tunable VCSEL with integrated heater and planar waveguide wavelength monitor","authors":"G. Blau, M. T. Gale, J. Sochtig, Ch. Zscholle, R. Hovel, K. Gulden","doi":"10.1109/OMEMS.2000.879637","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879637","url":null,"abstract":"A compact solution for tuning and monitoring the emission waveguide of a single mode VCSEL (/spl lambda/=760 nm) at constant output power is presented. The key element within the micro system is a chirped grating waveguide coupler combined with a diffractive collimating lens and a two-segment detector. The resulting wavelength measurement resolution of the chip is in the range of 0.06 nm.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"56 5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124336738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879655
P. Hélin, T. Bourouina, M. Mita, G. Reyne, H. Fujita
An improved self-aligned micromachining process for large-scale free-space optical cross-connect is presented. It satisfies the high accuracy optical alignment required for such application. This self-aligned batch process allows the simultaneous fabrication of vertical mirrors and fiber guides. It is performed in one level of mask lithography and combines deep RIE and KOH silicon etching.
{"title":"New self-aligned micromachining process for large free-space optical cross-connects","authors":"P. Hélin, T. Bourouina, M. Mita, G. Reyne, H. Fujita","doi":"10.1109/OMEMS.2000.879655","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879655","url":null,"abstract":"An improved self-aligned micromachining process for large-scale free-space optical cross-connect is presented. It satisfies the high accuracy optical alignment required for such application. This self-aligned batch process allows the simultaneous fabrication of vertical mirrors and fiber guides. It is performed in one level of mask lithography and combines deep RIE and KOH silicon etching.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116903033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879623
E. Yablonovitch
Summary form only given. We present a pictorial portfolio of various 2 and 3 dimensional crystal structures which have been conceived, and indicate the applications, such as opto-electronic devices. In photonic crystals there can be localized electromagnetic modes that result from "donor" defects, and "acceptor" defects in the periodic structure. The frequencies of these localized modes is sensitively controlled by the exact position of a very tiny dielectric "impurity". Thus photonic crystals can be exquisitely sensitive to very small motions or movements of a very tiny amount of dielectric material. This may translate to a very high speed of MEM's modulation speed of the photonic crystal switching properties. In addition, due to the inherent miniaturization of photonic crystals, a high level of complexity can be accommodated, allowing for example, large, high speed switchable arrays.
{"title":"MEM's modulated photonic crystals","authors":"E. Yablonovitch","doi":"10.1109/OMEMS.2000.879623","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879623","url":null,"abstract":"Summary form only given. We present a pictorial portfolio of various 2 and 3 dimensional crystal structures which have been conceived, and indicate the applications, such as opto-electronic devices. In photonic crystals there can be localized electromagnetic modes that result from \"donor\" defects, and \"acceptor\" defects in the periodic structure. The frequencies of these localized modes is sensitively controlled by the exact position of a very tiny dielectric \"impurity\". Thus photonic crystals can be exquisitely sensitive to very small motions or movements of a very tiny amount of dielectric material. This may translate to a very high speed of MEM's modulation speed of the photonic crystal switching properties. In addition, due to the inherent miniaturization of photonic crystals, a high level of complexity can be accommodated, allowing for example, large, high speed switchable arrays.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115979456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879600
H. Fujita
The key concept of micromachining technologies is to extend the VLSI fabrication capability to realize three-dimensional microsystems which are composed of electrical, mechanical, chemical and optical elements. Using VLSI fabrication processes such as photolithography, film deposition and etching, it is possible to obtain sub-micrometer-precision structures in a large quantity with excellent alignment between each other. In addition, movable structures such as micro gears and motors can be made by surface micromachining processes. Precise V-grooves and moles going through the substrate can be etched bp dry and wet etching. Such micromachining technologies have the following implications for optical systems: integration of devices; accurate pre/passive alignment; feature size comparable to wavelength; arrayed and repetitive structures; wavelength independence; free-space optics with short propagation path; high sensitivity and fast response; local servo feedback; hermetic/vacuum packaging. Examples of these implications are given for a pigtailed silicon platform for integrating optical fibres and micromachined devices, and a 2D micro-optical scanner.
{"title":"Magnetostrictive 2-D scanners and pig-tailed tunable MEMS filters-studies on vacuum packaging and interconnection of optical MEMS","authors":"H. Fujita","doi":"10.1109/OMEMS.2000.879600","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879600","url":null,"abstract":"The key concept of micromachining technologies is to extend the VLSI fabrication capability to realize three-dimensional microsystems which are composed of electrical, mechanical, chemical and optical elements. Using VLSI fabrication processes such as photolithography, film deposition and etching, it is possible to obtain sub-micrometer-precision structures in a large quantity with excellent alignment between each other. In addition, movable structures such as micro gears and motors can be made by surface micromachining processes. Precise V-grooves and moles going through the substrate can be etched bp dry and wet etching. Such micromachining technologies have the following implications for optical systems: integration of devices; accurate pre/passive alignment; feature size comparable to wavelength; arrayed and repetitive structures; wavelength independence; free-space optics with short propagation path; high sensitivity and fast response; local servo feedback; hermetic/vacuum packaging. Examples of these implications are given for a pigtailed silicon platform for integrating optical fibres and micromachined devices, and a 2D micro-optical scanner.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129523988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879622
O. Spahn, C. Tigges, R. Shul, S. Rodgers, M. Polosky
Summary form only given. Several applications of microelectromechanical systems (MEMS) require handling of large optical powers. One specific example includes steering or switching of an optical beam onto a photovoltaic device. In this way MEMS can be remotely powered with an incident high power optical beam. Photovoltaic cells integrated with MEMS can then convert the optical energy into electrical energy necessary to power the MEMS. In this paper we describe the optical damage mechanisms, as well as means of extending the optical damage threshold in order to handle 1 W of continuous wave incident power in the near infrared regime.
{"title":"High optical power handling of pop-up microelectromechanical mirrors","authors":"O. Spahn, C. Tigges, R. Shul, S. Rodgers, M. Polosky","doi":"10.1109/OMEMS.2000.879622","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879622","url":null,"abstract":"Summary form only given. Several applications of microelectromechanical systems (MEMS) require handling of large optical powers. One specific example includes steering or switching of an optical beam onto a photovoltaic device. In this way MEMS can be remotely powered with an incident high power optical beam. Photovoltaic cells integrated with MEMS can then convert the optical energy into electrical energy necessary to power the MEMS. In this paper we describe the optical damage mechanisms, as well as means of extending the optical damage threshold in order to handle 1 W of continuous wave incident power in the near infrared regime.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"15 10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126200830","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879638
Moo-Jin Choi, Kyoung-Sun Seo, Young-Hyun Jin, Young‐Ho Cho
MEMS-based micro-optical devices have received increasing attention in the areas of information and optical communication. Among them, monolithically integrated optical devices show strong potential for small-size, high-density applications. The integrated optical devices require optical interconnections between movable (e.g. pickup) and stationary optical components (e.g. light source and detector). Conventional optical interconnection has been made by fiber-optic cables or waveguide channels on a flexible ribbon. In this paper, we propose a free-standing (or suspended) waveguide as a new optomechanical interconnection, that can act not only as an optical path but also as a mechanical suspension for an integrated optical device. This has motivated the study on the mechanical behavior and the optical characteristics of the free-standing waveguide. We experimentally characterize the micromechanical behavior and the optical loss of a mechanically deflected free-standing polymer waveguide. We especially focus on the evaluation of the waveguide bending loss, generated by mechanical deflection.
{"title":"MicroOptoMechanical characterization of a mechanically deflected free-standing polymer waveguides","authors":"Moo-Jin Choi, Kyoung-Sun Seo, Young-Hyun Jin, Young‐Ho Cho","doi":"10.1109/OMEMS.2000.879638","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879638","url":null,"abstract":"MEMS-based micro-optical devices have received increasing attention in the areas of information and optical communication. Among them, monolithically integrated optical devices show strong potential for small-size, high-density applications. The integrated optical devices require optical interconnections between movable (e.g. pickup) and stationary optical components (e.g. light source and detector). Conventional optical interconnection has been made by fiber-optic cables or waveguide channels on a flexible ribbon. In this paper, we propose a free-standing (or suspended) waveguide as a new optomechanical interconnection, that can act not only as an optical path but also as a mechanical suspension for an integrated optical device. This has motivated the study on the mechanical behavior and the optical characteristics of the free-standing waveguide. We experimentally characterize the micromechanical behavior and the optical loss of a mechanically deflected free-standing polymer waveguide. We especially focus on the evaluation of the waveguide bending loss, generated by mechanical deflection.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128670722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879643
Y. Kato, K. Mori, T. Mase, A. Takahashi, O. Imaki, R. Kaku
We present a design and experimental results of a 4/spl times/4 matrix optical switch that is suitable for passive alignment process, in which thick photoresist technology is utilized for the fabrication of tall vertical mirrors.
{"title":"Development of 4/spl times/4 MEMS optical switch","authors":"Y. Kato, K. Mori, T. Mase, A. Takahashi, O. Imaki, R. Kaku","doi":"10.1109/OMEMS.2000.879643","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879643","url":null,"abstract":"We present a design and experimental results of a 4/spl times/4 matrix optical switch that is suitable for passive alignment process, in which thick photoresist technology is utilized for the fabrication of tall vertical mirrors.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114969480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879666
E. Higurashi, R. Sawada
A new type of high-accuracy optical encoder based on higher-order diffracted light interference is proposed. For a relative movement between the scale grating and the encoder head, the encoder provides sinusoidal signals whose period (0.53 /spl mu/m) is one-sixth of that (3.2 /spl mu/m) of the scale grating, from which the displacement or revolution angle can be accurately determined. The proposed micro-encoder structure includes a laser diode, two-segment photodiodes, polyimide waveguides, and a micro-grating that makes /spl plusmn/3 order beams diffracted by the scale grating interfere coaxially, all on the same silicon substrate (3/spl times/2 mm/sup 2/).
{"title":"High-accuracy micro-encoder based on the higher-order diffracted light interference","authors":"E. Higurashi, R. Sawada","doi":"10.1109/OMEMS.2000.879666","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879666","url":null,"abstract":"A new type of high-accuracy optical encoder based on higher-order diffracted light interference is proposed. For a relative movement between the scale grating and the encoder head, the encoder provides sinusoidal signals whose period (0.53 /spl mu/m) is one-sixth of that (3.2 /spl mu/m) of the scale grating, from which the displacement or revolution angle can be accurately determined. The proposed micro-encoder structure includes a laser diode, two-segment photodiodes, polyimide waveguides, and a micro-grating that makes /spl plusmn/3 order beams diffracted by the scale grating interfere coaxially, all on the same silicon substrate (3/spl times/2 mm/sup 2/).","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128219941","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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