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2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)最新文献

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Comparison of encapsulant curing with convection and microwave systems 对流和微波固化封装胶的比较
T. Tilford, K. Sinclair, G. Goussetis, C. Bailey, M. Desmulliez, A. Parrott, A. Sangster
Comparison of the performance of a conventional convection oven system with a dual-section microwave system for curing thermosetting polymer encapsulant materials has been performed numerically. A numerical model capable of analysing both the convection and microwave cure processes has been developed and is briefly outlined. The model is used to analyse the curing of a commercially available encapsulant material using both systems. Results obtained from numerical solutions are presented, confirming that the VFM system enables the cure process to be carried out far more rapidly than with the convection oven system. This capability stems from the fundamental heating processes involved, namely that microwave processing enables the heating rate to be varied independently of the material temperature. Variations in cure times, curing rates, maximum temperatures and residual stresses between the processes are fully discussed.
对传统对流烘箱系统与双段微波系统固化热固性高分子封装材料的性能进行了数值比较。本文建立了一种既能分析对流过程又能分析微波固化过程的数值模型,并作了简要介绍。该模型用于分析使用两种系统的市售封装材料的固化。给出了数值解的结果,证实了VFM系统使固化过程比对流炉系统进行得快得多。这种能力源于所涉及的基本加热过程,即微波处理使加热速率能够独立于材料温度而变化。在固化时间,固化速率,最高温度和过程之间的残余应力的变化进行了充分的讨论。
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引用次数: 2
Nonlinear modeling of a capacitive MEMS accelerometer using neural network 电容式MEMS加速度计的神经网络非线性建模
A. Bahadorimehr, M. Hamidon, Y. Hezarjaribi
This paper presents a nonlinear model for a capacitive Microelectromechanical accelerometer (MEMA). System parameters of the accelerometer are developed using the effect of cubic term of the folded-flexure spring. To solving this equation we use FEA method. The neural network (NN) uses Levenberg-Marquardt (LM) method for training the system to have more accurate response. The designed NN can identify and predict the displacement of movable mass of accelerometer. The simulation results are very promising.
本文建立了电容式微机电加速度计的非线性模型。利用折叠柔性弹簧的三次项效应,推导了加速度计的系统参数。为了求解该方程,我们采用了有限元法。神经网络(NN)采用Levenberg-Marquardt (LM)方法对系统进行训练,以获得更准确的响应。所设计的神经网络能够识别和预测加速度计可动质量的位移。仿真结果很有希望。
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引用次数: 1
Optimization of ceramic packages including thermal via-hole for light emitting diode 发光二极管用含热过孔陶瓷封装的优化
Young-Woo Kim, Jae-Pil Kim, Jae-Bum Kim, Minsung Kim, Sung-Mo Park, Sang-Bin Song, Yeongseog Lim
Thermal via holes must be designed to emit the high heat flux generated from high power light emitting diodes (HP LEDs) that are 1000 times smaller than conventional electronics devices such as central processing unit (CPU). Therefore, it is important to layout via holes in accordance with the kinds of the devices. In this paper, we compare the performance of the packages with the three classes of via holes by verifying thermal resistance by using MicRed T3Ster and FLIR IR Camera. It is demonstrated that the large via hole beneath high power light emitting diode is superior to many scattered via holes under condition of the similar amount of silver paste for via filling. Detailed thermal performance is analyzed using CFD (computational fluid dynamics) technology and then verified with thermal resistance and heat distribution in printed circuit board (PCB) where light emitting diode (LED) packaging without the encapsulating material is implemented and then, the evaluation and the compensation of the errors for the process factor of the simulation are simultaneously accomplished. Thermal resistance of the packages with HEP (heat emission pole) is 5 ~ 13.8 times smaller than the others. The calculation formula of thermal conductivity is improved into a new equivalent formula with the device size, package size and the overlap area. The optimized via hole decreases the manufacturing cost while it increases the efficiency of the heat emission.
热通孔必须设计成能够发射高功率发光二极管(HP led)产生的高热流,这些发光二极管比传统电子设备(如中央处理器(CPU))小1000倍。因此,根据器件的种类进行过孔布局是很重要的。在本文中,我们通过MicRed T3Ster和FLIR红外相机验证热阻,比较了封装与三类通孔的性能。结果表明,在相同数量的银浆填充下,大功率发光二极管下的大通孔优于许多分散的通孔。采用CFD(计算流体动力学)技术对其进行了详细的热性能分析,并在实现无封装材料的发光二极管封装的印刷电路板(PCB)上进行了热阻和热分布验证,同时完成了对仿真过程因素误差的评估和补偿。采用HEP(热发射极)封装的热阻比其他封装小5 ~ 13.8倍。将导热系数的计算公式改进为与器件尺寸、封装尺寸和重叠面积有关的新的等效公式。优化后的通孔在降低制造成本的同时提高了散热效率。
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引用次数: 3
Process development, repair and reliability study with Anisotropic Conductive Film bonding as a replacement for surface mount connectors and hotbar soldering 用各向异性导电膜键合代替表面贴装连接器和热焊的工艺开发、维修和可靠性研究
Manickavasagar Minor, J. Sjoberg, Jenson Lee, D. Shangguan
Flexible Printed Circuit (FPC) boards are being widely used for a number of applications to enable products in a three dimensional format thereby utilizing the “dead” space within the product envelop. During the past few years, the usage and complexity of FPC made of polyimide, polyester or teflon have grown substantially and are expected to continue to grow even more in the next coming years. In the past these FPC's have been connected to other FPC's or to a PCB with help of mainly connectors but the interest of replacing these connectors with a lower cost and smaller footprint connections with help of Anisotropic Conductive Film (ACF) is being widely explored. This paper will report the development of fine pitch ACF bonding down to 0,2mm and the mechanical and thermo-mechanical reliability of the ACF interconnects. The influence of difference process parameters and ACF materials on the ACF process yield will be discussed as well.
柔性印刷电路(FPC)板被广泛用于许多应用中,以使产品具有三维格式,从而利用产品外壳内的“死”空间。在过去几年中,聚酰亚胺、聚酯或特氟龙制成的FPC的使用量和复杂性大幅增长,预计在未来几年将继续增长。在过去,这些FPC主要通过连接器连接到其他FPC或PCB,但在各向异性导电膜(ACF)的帮助下,以更低的成本和更小的占地面积连接取代这些连接器的兴趣正在被广泛探索。本文将报告小间距ACF键合的发展至0,2mm,以及ACF互连的机械和热机械可靠性。讨论了不同工艺参数和ACF材料对ACF工艺收率的影响。
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引用次数: 1
Comparison of the performances of micropump with active type diaphragm actuated by several approaches 主动隔膜微泵几种驱动方式的性能比较
Wong Wai Chi, I. Azid
In this study, the performances of the micropump with active type diaphragm actuated by thermoelectric and piezoelectric have been compared. Finite element analysis (FEA) by ANSYS®8.1 had used to simulate and analyze the deflection of the diaphragm. The FEA model actuated by thermoelectric and piezoelectric is validated by the available data. The success of the model in predicting the displacement of the diaphragm provides further encouragement in using the model to compare the diaphragm deflection actuated by difference actuated method but with same diaphragm size and actuated power. The optimized design by using thermoelectric actuator has then been shown.
本研究比较了热电驱动和压电驱动的主动膜片微泵的性能。采用ANSYS®8.1进行有限元分析(FEA),对膜片的挠度进行了模拟分析。利用已有的数据对热电和压电驱动的有限元模型进行了验证。该模型在预测膜片位移方面的成功,进一步鼓励了使用该模型对相同膜片尺寸和驱动功率下不同驱动方式下膜片挠度的比较。然后给出了采用热电致动器的优化设计。
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引用次数: 0
Pressure sensors based on MEMS, operating in harsh environments (touch-mode) 基于MEMS的压力传感器,在恶劣环境下工作(触摸模式)
Y. Hezarjaribi, M. Hamidon, A. Bahadorimehr
In this paper, Poly-crystalline silicon carbide (poly-sic) Micro-electromechanical systems (MEMS) capacitive pressure sensor operating in harsh environment in touch mode is proposed, The principle of the paper is to design, obtain analytical solution and compare the results with the simulation for a circular diaphragm deflection before and after touch point. The sensor demonstrated a high temperature sensing capability up to 400°C, the device achieves a linear characteristic response and consists of a circular clamped-edges poly-sic diaphragm suspended over sealed cavity on a silicon carbide substrate. The sensor is operating in touch mode capacitive pressure sensor, The advantages of a touch mode are the robust structure that make the sensor to withstand harsh environment, near linear output, and large over-range protection, operating in wide range of pressure, higher sensitivity than the near linear operation in normal mode, The material is considered to be used for harsh environment is SiC (Silicon Carbide), Because of SiC owing excellent electrical stability, mechanical robustness, and chemical inertness properties and the application of pressure sensors in harsh environments are, such as automotive industries, aerospace, oil/logging equipments, nuclear station, and power station. We are simulating MEMS capacitive pressure sensor to optimize the design, improve the performance and reduce the time of fabricating process of the device. The proposed touch mode MEMS capacitive pressure sensor demonstrated diaphragm ranging from 150 μm to 360 μm in diameter, with the gap depth from 0.5 μm to 7.5 μm and the sensor exhibit a linear response with pressure from 0.05 Mpa to 10 Mpa.
本文提出了一种工作在恶劣环境下的触摸模式下的多晶碳化硅微机电系统(MEMS)电容式压力传感器,其工作原理是对触摸点前后的圆膜片挠度进行设计,得到解析解,并与仿真结果进行比较。该传感器具有高达400°C的高温传感能力,该器件实现线性特性响应,由悬浮在碳化硅衬底上密封腔上的圆形夹边聚硅膜片组成。该传感器是工作在触摸模式的电容式压力传感器,触摸模式的优点是坚固的结构,使传感器能够承受恶劣的环境,近线性输出,并有较大的超量程保护,工作在宽的压力范围内,比正常模式下的近线性工作灵敏度更高,用于恶劣环境的材料被认为是SiC(碳化硅),由于SiC具有优异的电气稳定性,机械坚固性,以及化学惰性特性和压力传感器在恶劣环境中的应用,如汽车工业、航空航天、石油/测井设备、核电站和发电站。为了优化MEMS电容式压力传感器的设计,提高器件的性能,缩短器件的制造时间,我们正在对MEMS电容式压力传感器进行仿真。所设计的接触式MEMS电容式压力传感器膜片直径为150 μm ~ 360 μm,间隙深度为0.5 μm ~ 7.5 μm,在0.05 Mpa ~ 10 Mpa的压力范围内具有良好的线性响应。
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引用次数: 1
Characterization of Electro-chemical Deflash and High Pressure Water Jet through MPCpS MPCpS电化学除闪及高压水射流特性研究
M. Picardal, G. Coronel
Process window for Electro-chemical Deflash (ED) and High Pressure Water Jet (HPWJ) should be very well defined to ensure complete removal of organic materials on the surface of the frame prior to Metal Finishing (MF). This will help in ensuring complete coverage and good adhesion of metal finish. This will likewise avoid potential package defects like chipping, crack and delamination. In establishing the optimum window for ON Semiconductor Philippines Inc. (OSPI). ED and HPWJ . benchmarking study was performed and results were discussed to the selected Original Engineering Material (OEM) for the design of the machine. The benchmarking activity helped to determine potential failures of the process, the controls needed to monitor the process and the resources to set-up the machine. The resulting design was characterized using the Machine Process Capability Study (MPCpS). This involves five stages such as: 1) Process characterization where each machine and process parts and functions are defined. 2) Metrology characterization where response measuring equipment's precision and accuracy are tested and ensured capable prior to proceeding into the next stage. 3) Machine and Process Capability determination where sets of experiments are performed to determine the capability from the affected process up to the last process step. 4) Optimization if the process is found not capable or Machine and Process cliff if found capable. In this stage, window where the process will fail is determined, and finally 5) Control to ensure that defined capable window is maintained during production. OSPI's well characterized Deflash process has eliminated problems like Missing Lead Finish (MLF) and Resin Bleed (RB). It has also reduced Foreign Material problem by 90% and Tape and Reel final gate problem by 42%. It has helped increase Trim and Form's productivity by 25% by eliminating tin flakes on non-functional areas of the frame. Most of all, since the implementation of this project, there was no observed occurrence of package related problems.
电解去闪(ED)和高压水射流(HPWJ)的工艺窗口应该有很好的定义,以确保在金属精加工(MF)之前完全去除框架表面的有机材料。这将有助于确保金属表面的完全覆盖和良好的附着力。这同样可以避免潜在的封装缺陷,如碎裂、裂纹和分层。为安森美半导体菲律宾公司(OSPI)建立最佳窗口。ED和HPWJ。进行了基准研究,并讨论了选择原始工程材料(OEM)进行机器设计的结果。基准测试活动有助于确定流程的潜在故障、监控流程所需的控制以及设置机器所需的资源。使用机器加工能力研究(MPCpS)对最终设计进行了表征。这包括五个阶段,如:1)过程表征,其中定义每台机器和过程部件和功能。2)在进入下一阶段之前,对响应测量设备的精度和准确性进行测试并确保其具备能力的计量特性。3)确定机器和工艺的能力,进行一系列实验,以确定从受影响的工艺到最后一个工艺步骤的能力。4)如果发现工艺不具备能力,则进行优化;如果发现有能力,则进行机器和工艺悬崖。在这一阶段,确定过程将失败的窗口,最后控制以确保在生产过程中保持定义的能力窗口。OSPI的Deflash工艺消除了铅漆缺失(MLF)和树脂溢出(RB)等问题。它还减少了90%的外来材料问题和42%的磁带和卷轴最终闸门问题。它通过消除框架非功能区域的锡片,帮助提高了Trim和Form的生产力25%。最重要的是,自从这个项目实施以来,没有观察到出现与包相关的问题。
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引用次数: 2
Ultra low loop development 超低回路开发
Song HuaJun
This technical paper presents the ultra low loop height challenges faced in the development of miniaturized SOT-923 package. It is drawn from the package development experiences for Flat Lead packages of 0.8 mm × 0.6 mm × 0.4 mm (SOD-923) which was successfully developed and introduced commercially. This product is mainly used on hand-held applications where the size has become smaller. Therefore, loop height is needed to be controlled very low. In order to achieve such low loop height, several solutions have been considered: i) Bonding mode selection; ii) capillary selection for ultra low loop requirement; iii) development of special bonding parameters for ultra low loop control. iv) final product quality evaluation and reliability requirement which included wire pull test, ball shear test, wire peeling test and reliability test.
本文介绍了小型化SOT-923封装开发中面临的超低环高挑战。它借鉴了0.8 mm × 0.6 mm × 0.4 mm平板引线封装(SOD-923)的封装开发经验,并已成功开发并商业化。该产品主要用于尺寸变小的手持应用。因此,回路高度需要控制得很低。为了实现如此低的环路高度,考虑了几种解决方案:i) Bonding mode的选择;Ii)超低回路要求的毛细管选择;Iii)开发用于超低回路控制的特殊键合参数。最终产品质量评价和可靠性要求,包括拉丝试验、球剪试验、剥丝试验和可靠性试验。
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引用次数: 1
Characterization of silicon die strength with application to die crack analysis 硅模具强度表征及其在模具裂纹分析中的应用
Huang Guojun, Luan Jing-en, X. Baraton
After encapsulation, thermo-mechanical deformation builds up within the electronic packages due to temperature coefficient of expansion mismatch between the respective materials within the package as it cools to room temperature. As the trends in semiconductor packages continue toward a decrease in overall package size and an increase in functionality and performance requirements, they bring challenges of processing, handling, and understanding smaller components and, in particular, thinner dies. One of the reliability problems, die crack, becomes more serious due to the larger die area compared with package size, thinner thickness and thermal mismatch between the respective materials within the package. Die strength can be adversely affected during various manufacturing processes, such as grinding and chipping. A realistic understanding of the significance of processing on die strength is gained through the study of the actual, processed component. This work try to find the simple test method for determination of die strength to improve the scatter and try to differentiate the factors that affect the variability of die strength, in order to find out the causes of the weakness of the die strength. The surface conditions (roughness) of the specimens are determined by atomic force microscopy (AFM) and correlated to failure strength. A practical example is presented here that die cracking analysis has been done for a chip array thin core BGA (CTBGA) during thermal cycling. The die stress is calculated based on the finite element analysis (FEA) of CTBGA and the FEA-predicted die stress is used to predict the die failure rate compared with the experiment results.
封装后,由于封装内各自材料之间的温度膨胀系数不匹配,在冷却到室温时,电子封装内的热机械变形会增加。随着半导体封装的整体封装尺寸不断减小,功能和性能要求不断提高,它们带来了加工、处理和理解更小组件的挑战,特别是更薄的芯片。由于与封装尺寸相比,更大的模具面积、更薄的厚度以及封装内各自材料之间的热不匹配,模具裂纹这一可靠性问题变得更加严重。在各种制造过程中,如磨削和切屑,模具强度会受到不利影响。通过对实际加工零件的研究,对加工对模具强度的意义有了现实的认识。本工作试图寻找确定模具强度的简单测试方法,以改善模具强度的分散性,并试图区分影响模具强度变异性的因素,以找出模具强度薄弱的原因。试样的表面状况(粗糙度)由原子力显微镜(AFM)确定,并与破坏强度相关。本文给出了芯片阵列薄芯BGA (CTBGA)在热循环过程中的模具开裂分析实例。基于CTBGA的有限元分析(FEA)计算了模具应力,并利用有限元预测的模具应力与实验结果进行了对比,预测了模具的故障率。
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引用次数: 15
Thermal cycling fatigue model development for FBGA assembly with Sn-Ag-based lead-free solder sn - ag基无铅焊料FBGA组件热循环疲劳模型的开发
F. Che, J. Luan, D. Yap, K. Goh, X. Baraton
With the increasing requirement for lead-free solders, it is desired to know how different solder alloys affect on reliability of microelectronic assembly. Some fatigue life models for Sn-Ag-Cu (SAC) solder have been developed by researchers. The Ni-dopant lead free solder is increasingly used in electronic packages due to its good drop performance. Currently, it lacks the fatigue life model for Ni doped SAC solder. In this paper, thermal cycling test and finite element simulation were conducted for 5 FBGA (Fine pitch BGA) assemblies with Sn-Ag-Cu-Ni (SACN) lead free solder. The thermal fatigue life prediction model was developed for FBGA assemblies with SACN solder by combining experimental and simulation results. The good correlation between predicted and experimental lives was achieved. In addition, the effect of geometry and loading condition on solder joint predicted life was investigated based on the finite element simulation result and the developed life model.
随着对无铅焊料的要求不断提高,人们希望了解不同的焊料合金对微电子组件可靠性的影响。研究人员已经建立了一些Sn-Ag-Cu (SAC)焊料的疲劳寿命模型。镍掺杂无铅焊料由于其良好的跌落性能,在电子封装中得到越来越多的应用。目前,对于掺杂Ni的SAC焊料,缺乏疲劳寿命模型。本文对5种采用Sn-Ag-Cu-Ni (SACN)无铅焊料的FBGA (Fine pitch BGA)组件进行了热循环试验和有限元模拟。结合实验和仿真结果,建立了SACN焊料FBGA组件的热疲劳寿命预测模型。预测寿命与实验寿命具有良好的相关性。此外,基于有限元仿真结果和建立的寿命模型,研究了几何形状和加载条件对焊点预测寿命的影响。
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引用次数: 9
期刊
2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)
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